CN223033508U - Pipeline for charging and opening auxiliary chamber of single crystal furnace - Google Patents

Abstract

The utility model relates to the technical field of single crystal furnaces, and provides a pipeline for filling and opening a secondary chamber of a single crystal furnace, which comprises an automatic switching valve, a gas filter, a control module and an automatic switching valve, wherein one end of the gas filter is connected with air, the other end of the gas filter is connected with the automatic switching valve, the control module is electrically connected with the automatic switching valve, the automatic switching valve is in a normally closed state, the secondary chamber is filled with air to replace argon, the waste problem when the argon is filled is fundamentally solved, the cost is reduced, the automatic switching valve is controlled by the control module to automatically open when a charging barrel is lifted to be filled, a crystal bar is taken to be filled, a shoulder is taken to be filled, crystal is taken to be filled, and seeds are replaced to be filled, so that air enters the secondary chamber through the gas filter, the automatic switching valve and the like, and after the pressure of the secondary chamber gradually reaches the atmospheric pressure and keeps stable, the automatic switching valve is controlled to automatically close, the secondary chamber is filled and automatic, misoperation is effectively avoided, and the pipeline is simple in structure, convenient to operate and suitable for popularization and use.

Description

Pipeline for charging and opening auxiliary chamber of single crystal furnace

Technical Field

The utility model relates to the technical field of single crystal furnaces, in particular to a pipeline for filling and opening a secondary chamber of a single crystal furnace.

Background

Solar energy is ideal clean energy, and development of photovoltaic industry has important significance for adjusting energy structure, promoting energy production and consumption mode change and promoting ecological civilization construction. With the continuous decrease of the photovoltaic power generation cost in recent years, the photovoltaic industry has wider market space, and low-cost and high-quality monocrystalline silicon wafers are the core competitiveness of monocrystalline silicon manufacturing enterprises, so that various cost reduction measures are adopted in the industry to further reduce the cost.

The monocrystalline silicon uses argon as production gas to play roles in protecting, cooling and taking away impurities, however, the amount of the argon used in the production process of the monocrystalline silicon is very large, the argon belongs to a scarce resource, and the price of the argon is more expensive than that of other industrial gases, so that how to improve the recovery rate of the argon is an important cost reduction link of the production of the monocrystalline silicon. At present, large-scale argon recovery devices are adopted in the monocrystalline silicon industry, the argon recovery rate reaches more than 95%, but for large-scale monocrystalline enterprises, 5% of argon loss is considerable data each year, the 5% of argon loss comprises unrecovered auxiliary chamber gas, auxiliary chamber argon filling loss and recovery processing technology loss, wherein the auxiliary chamber argon filling loss can reach about 2-3%, and no special processing method for the partial loss exists at present.

Therefore, the utility model provides a pipeline for filling the auxiliary chamber of the single crystal furnace to solve the problems.

Disclosure of utility model

The utility model aims to provide a pipeline for filling and opening an auxiliary chamber of a single crystal furnace, which aims to solve the problem that a large part of argon is still lost for a large-scale single crystal enterprise by the existing argon recovery device in the background technology, wherein the loss of the argon filling and opening part of the auxiliary chamber is not specially solved at present.

In order to achieve the above purpose, the present utility model provides the following technical solutions:

A single crystal furnace auxiliary chamber filling pipeline, comprising:

Automatically opening and closing a valve;

One end of the gas filter is connected with air, and the other end of the gas filter is connected with the automatic switch valve;

the control module is electrically connected with the automatic switching valve;

wherein, the automatic switch valve is in a normally closed state.

Preferably, the automatic switching device further comprises a manual switching valve, and the manual switching valve is connected with the automatic switching valve.

Preferably, the manual switch valve is a vacuum switch valve and is in a normally open state.

Preferably, one end of the manual switch valve is connected with a third interface, and the third interface is used for connecting the auxiliary chamber and the auxiliary chamber filling pipeline of the single crystal furnace.

Preferably, the automatic switching valve, the gas filter, the manual switching valve and the third interface are connected through a flange and a straight-through pipe.

Preferably, the automatic switching valve is a sealing ball valve.

Preferably, the control module comprises a PLC controller, and the PLC controller comprises a charging barrel which is provided with a charging barrel, a crystal bar taking rod charging barrel, a crystal taking shoulder charging barrel, a crystal taking charging barrel and a seed crystal replacing charging barrel, and 5 command logics for judging that the automatic switching valve executes a switching action.

Preferably, the control module is further provided with a pressure sensor, and the pressure sensor is electrically connected with the control module and is used for monitoring the pressure in the auxiliary chamber.

The utility model has the advantages that the auxiliary chamber is filled with air to replace argon, the waste problem when the argon is filled is fundamentally solved, the cost is reduced, the air can be filtered through the air filter, the strong noise caused by rapid air suction can be avoided, the negative air pressure condition is reduced, the silencing effect is achieved, the automatic switching valve is controlled by the control module to be automatically opened when the charging barrel is filled, the crystal bar is taken out for filling, the shoulder is taken out for filling, the crystal is taken out for filling and the seed crystal is replaced for filling, the air enters the auxiliary chamber through the air filter, the automatic switching valve and the like, the auxiliary chamber pressure gradually reaches the atmospheric pressure and is kept stable, the automatic switching valve is controlled to be automatically closed, the auxiliary chamber filling automation is realized, the misoperation is effectively avoided, the pipeline has simple structure, the operation is convenient, and the utility model is suitable for popularization and use.

Drawings

In order to more clearly illustrate the embodiments of the application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a connection according to an embodiment of the present utility model;

fig. 2 is a schematic structural diagram of an embodiment of the present utility model.

Reference numeral 1, an automatic switch valve, 2, a gas filter, 3, a control module, 4, a manual switch valve and 5, a pressure sensor.

Detailed Description

Hereinafter, only certain exemplary embodiments are briefly described. As will be recognized by those of skill in the pertinent art, the described embodiments may be modified in various different ways without departing from the spirit or scope of the present utility model. Accordingly, the drawings and description are to be regarded as illustrative in nature and not as restrictive.

In the description of the present utility model, it should be understood that the azimuth or positional relationship indicated by the terms "upper", "lower", "inner", etc. are based on the azimuth or positional relationship shown in the drawings, or the azimuth or positional relationship conventionally put in use of the product of the present utility model, or the azimuth or positional relationship conventionally understood by those skilled in the art, are merely for convenience of describing the present utility model and for simplicity of description, and do not indicate or imply that the device or element to be referred to must have a specific azimuth, be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present utility model.

In the present utility model, unless explicitly specified and limited otherwise, the terms "connected," "coupled," and the like are to be construed broadly, and may be fixedly connected, detachably connected, or integrally formed, directly connected, indirectly connected via an intermediate medium, or may be in communication with each other within two elements or in an interaction relationship between the two elements, for example. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

The following disclosure provides many different embodiments, or examples, for implementing different features of the utility model. In order to simplify the present disclosure, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the utility model. Furthermore, the present utility model may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed. In addition, the present utility model provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.

Embodiments of the present utility model will be described in detail below with reference to the accompanying drawings.

As shown in fig. 1-2, an embodiment of the present utility model provides a pipeline for filling and opening a secondary chamber of a single crystal furnace, including:

An automatic switching valve 1;

The gas filter 2, one end of the said gas filter 2 is connected with air, another end is connected with said automatic on-off valve 1, the gas filter 2 can not merely filter the air, can avoid causing the strong noise because of pumping rapidly, reduce the air negative pressure condition, achieve the silencing effect;

The control module 3 is electrically connected with the automatic switching valve 1;

Wherein, the automatic switch valve 1 is in a normally closed state.

Specifically, the control module 3 includes a PLC controller, where the PLC controller includes 5 command logics for judging that the automatic switching valve 1 performs a switching action when the charging barrel is opened, the crystal bar is taken out and filled, the shoulder is taken out and filled, the crystal is taken out and filled, and the seed crystal is replaced and filled, and the automatic switching valve 1 is not automatically switched when the rest is opened or in an emergency, and the PLC controller flexibly controls the automatic switching valve 1, so that the reliability is high and the anti-interference capability is strong.

The rest of the charging includes the charging after the furnace is shut down and the charging before the pressure maintaining of the auxiliary chamber, the emergency includes the cooling protection, etc., the automatic switching operation of the automatic switching valve 1 is not performed, and the air connected with the gas filter 2 may be, but not limited to, compressed air.

When the automatic switching valve 1 is used, the PLC controller controls the automatic switching valve 1 to be automatically opened when the charging barrel is filled, the crystal bar is taken out and filled, the shoulder is taken out and filled, the crystal is taken out and filled, the seed crystal is replaced and filled, air enters the auxiliary chamber through the gas filter 2, the automatic switching valve 1 and the like, and after the pressure of the auxiliary chamber gradually reaches the atmospheric pressure and is kept stable, the automatic switching valve 1 is controlled to be automatically closed, so that the automatic filling of the auxiliary chamber is realized, and misoperation is effectively avoided.

The auxiliary chamber of the single crystal furnace is filled with the pipeline to replace argon by filling the auxiliary chamber with air, so that the waste problem of argon filling is fundamentally solved, the cost is reduced, and the pipeline is simple in structure, convenient to operate and suitable for popularization and use.

In order to facilitate the maintenance of the pipeline, the automatic valve opening and closing device further comprises a manual valve opening and closing 4, wherein the manual valve opening and closing 4 is connected with the automatic valve opening and closing 1, and the automatic valve opening and closing 1 and the gas filter 2 can be maintained in a production state.

Specifically, the manual switch valve 4 is a vacuum switch valve and is in a normally open state, so that no air leakage through the manual switch valve 4 is ensured under normal conditions.

More specifically, one end of the manual switch valve 4 is connected with a third interface, and the third interface is used for connecting a secondary chamber and a secondary chamber filling pipeline of the single crystal furnace.

Further, the automatic switching valve 1, the gas filter 2, the manual switching valve 4 and the third connector are connected through a flange and a straight-through pipe, so that the tightness of the pipeline is ensured.

In use, air passes through the gas filter 2, the automatic switching valve 1, the manual switching valve 4, the third port and related pipes in sequence to reach the auxiliary chamber.

Further, the automatic switching valve 1 is a sealing ball valve, so as to ensure the sealing environment of a pipeline and prevent pressure leakage.

In order to monitor the pressure in the auxiliary chamber, the automatic switching valve 1 further comprises a pressure sensor 5, wherein the pressure sensor 5 is electrically connected with the control module 3, the pressure sensor 5 is arranged on the auxiliary chamber and transmits the pressure information in the auxiliary chamber to a PLC controller, and the PLC judges whether to control the automatic switching valve 1 to be closed or not according to the pressure value.

It should be noted that the above-mentioned embodiments are merely preferred embodiments of the present utility model, and the present utility model is not limited thereto, but may be modified or substituted for some of the technical features thereof by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims (8)

1. The utility model provides a monocrystalline furnace auxiliary chamber fills and uses pipeline which characterized in that includes:

an automatic switching valve (1);

one end of the gas filter (2) is connected with air, and the other end of the gas filter (2) is connected with the automatic switch valve (1);

the control module (3) is electrically connected with the automatic switching valve (1);

Wherein the automatic switching valve (1) is in a normally closed state.

2. The auxiliary chamber charging pipeline according to claim 1, further comprising a manual switching valve (4), wherein the manual switching valve (4) is connected with the automatic switching valve (1).

3. The auxiliary chamber filling pipeline of the single crystal furnace according to claim 2, wherein the manual switch valve (4) is a vacuum switch valve and is in a normally open state.

4. The auxiliary chamber filling pipeline of the single crystal furnace according to claim 2, wherein one end of the manual switch valve (4) is connected with a third interface, and the third interface is used for connecting the auxiliary chamber and the auxiliary chamber filling pipeline of the single crystal furnace.

5. The auxiliary chamber filling pipeline of the single crystal furnace according to claim 4, wherein the automatic switching valve (1), the gas filter (2), the manual switching valve (4) and the third interface are connected through a flange and a straight-through pipe.

6. The auxiliary chamber filling pipeline of the single crystal furnace according to claim 1, wherein the automatic switching valve (1) is a sealing ball valve.

7. The auxiliary chamber filling pipeline of the single crystal furnace according to claim 1, wherein the control module (3) comprises a PLC controller, and the PLC controller comprises 5 command logics for judging the automatic switching valve (1) to execute switching actions of charging barrel lifting charging, crystal bar taking charging, shoulder taking charging, crystal taking charging and seed crystal changing charging.

8. The auxiliary chamber filling pipeline according to claim 1, further comprising a pressure sensor (5), wherein the pressure sensor (5) is electrically connected with the control module (3), and the pressure sensor (5) is used for monitoring the pressure in the auxiliary chamber.