CN223012734U - A crystal chamfering device - Google Patents
A crystal chamfering device Download PDFInfo
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- CN223012734U CN223012734U CN202422157715.XU CN202422157715U CN223012734U CN 223012734 U CN223012734 U CN 223012734U CN 202422157715 U CN202422157715 U CN 202422157715U CN 223012734 U CN223012734 U CN 223012734U
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Abstract
本实用新型公开了一种晶体片倒角装置，包括：基台和顶板；用于升降顶板的升降机构；用于固定晶体片的固定机构；以及用于对晶体片进行倒角的倒角机构；其中，所述固定机构包括设置在基台底部的两组摆臂，两组所述摆臂的上端设置有夹块，两组夹块对应设置，所述基台上开设有供摆臂活动的缺口；所述倒角机构包括转动安装在顶板底部的倒角砂轮和固定安装在顶板底部的电机，所述倒角砂轮由电机驱动，所述倒角砂轮位于两组夹块的中间正上方。通过气缸驱动带有驱动齿的移动板依次传动大小齿轮，从而带动摆臂使两个夹块对晶体片进行夹持和固定之后再进行倒角作业，具有强大的夹持和固定能力，从而提高晶体片倒角加工的精准度和稳定性。
The utility model discloses a crystal plate chamfering device, including: a base and a top plate; a lifting mechanism for lifting the top plate; a fixing mechanism for fixing the crystal plate; and a chamfering mechanism for chamfering the crystal plate; wherein the fixing mechanism includes two groups of swing arms arranged at the bottom of the base, the upper ends of the two groups of swing arms are provided with clamping blocks, the two groups of clamping blocks are arranged correspondingly, and a notch for the swing arms to move is opened on the base; the chamfering mechanism includes a chamfering grinding wheel rotatably installed at the bottom of the top plate and a motor fixedly installed at the bottom of the top plate, the chamfering grinding wheel is driven by the motor, and the chamfering grinding wheel is located directly above the middle of the two groups of clamping blocks. The movable plate with driving teeth is driven by a cylinder to sequentially transmit large and small gears, thereby driving the swing arm to make the two clamping blocks clamp and fix the crystal plate before chamfering, which has a strong clamping and fixing ability, thereby improving the accuracy and stability of the crystal plate chamfering process.
Description
Technical Field
The utility model relates to the technical field of crystal wafer processing equipment, in particular to a crystal wafer chamfering device.
Background
Crystal slices, particularly silicon crystal slices, are key raw materials in semiconductor fabrication. Silicon crystal wafers are thin slices of high purity crystalline silicon, also known as substrates or wafers. Silicon crystal wafers are particularly useful as substrates for microelectronic devices in the construction of electronic circuits due to their conductivity and economy.
The wafer chamfering device is mainly used for chamfering the edges of the wafer to remove sharp edges, which helps to improve the reliability and safety of the device. According to the search, the Chinese patent application number is CN201510064241.7, which discloses a crystal wafer chamfering device, comprising a workbench, a wafer fixing assembly and a grinding assembly, wherein the workbench is of an L-shaped supporting structure and is formed by connecting a transverse supporting block and a vertical supporting block, the wafer fixing assembly is arranged on the transverse supporting block, a wafer to be processed is placed on the wafer fixing assembly and is pushed to move transversely to the vertical supporting block, the grinding assembly is arranged on the vertical supporting block, and a grinding wheel is driven by the grinding assembly to move vertically along the vertical supporting block so as to push the grinding wheel to the wafer to be processed, and the wafer is subjected to grinding chamfering. The invention has the advantages of simple structure, convenient and quick operation, high processing precision and high production efficiency.
In the above technical scheme, the sucker is used as a fixing component for fixing the crystal plate, but in practical application, the sucker cannot provide enough adsorption force, when the crystal plate contacts with the grinding wheel rotating at a high speed, the crystal plate is easy to deflect and displace, and even directly throws out of a processing area, so that the crystal plate is not stable and convenient to process, and therefore, the crystal plate chamfering device is required to be provided.
Disclosure of utility model
The utility model aims to provide a crystal piece chamfering device which is simple in structure and convenient to use, and a moving plate with driving teeth is driven by an air cylinder to sequentially drive a large gear and a small gear, so that a swing arm is driven to enable two clamping blocks to clamp and fix a crystal piece and then chamfering operation is carried out, and the crystal piece chamfering device has strong clamping and fixing capabilities, so that the accuracy and stability of crystal piece chamfering processing are improved, the quality of crystal piece chamfering processing is ensured, and the problems in the background art are solved.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
a wafer chamfering device comprising:
A base and a top plate;
a lifting mechanism for lifting the top plate;
A fixing mechanism for fixing the crystal plate;
A chamfering mechanism for chamfering the crystal plate;
The fixing mechanism comprises two groups of swing arms arranged at the bottom of the base, clamping blocks are arranged at the upper ends of the two groups of swing arms, the two groups of clamping blocks are correspondingly arranged, and a notch for the swing arms to move is formed in the base;
The chamfering mechanism comprises a chamfering grinding wheel rotatably mounted at the bottom of the top plate and a motor fixedly mounted at the bottom of the top plate, the chamfering grinding wheel is driven by the motor, and the chamfering grinding wheel is located right above the middle of the two groups of clamping blocks.
Preferably, the lifting mechanism comprises four groups of electric push rods, the electric push rods are symmetrically arranged at the bottom of the base station, and the four groups of electric push rods are synchronously arranged.
Preferably, the top plate is provided with a grinding wheel seat through a fixing screw, the grinding wheel is rotatably arranged on the grinding wheel seat, and an output shaft of the motor is fixedly connected with a rotating shaft on one side of the grinding wheel through a coupler.
Preferably, the bottom of base station is provided with the backup pad, install first axostylus axostyle and second axostylus axostyle respectively in the backup pad, first axostylus axostyle and second axostylus axostyle all rotate through the bearing and install in backup pad same one side.
Preferably, the two groups of swing arms are respectively fixedly welded on the first shaft rod and the second shaft rod, the end part of the first shaft rod is provided with a large gear, the end part of the second shaft rod is provided with a small gear, and the large gear and the small gear are in meshed arrangement.
Preferably, one side of backup pad fixed mounting has the cylinder, the telescopic rod end of cylinder is connected with the movable plate, the top middle section is provided with the driving tooth on the movable plate, driving tooth and gear wheel are the meshing setting.
Preferably, the other side of the supporting plate is connected with a guide sleeve, and the moving plate is inserted into the guide sleeve in a sliding manner.
Compared with the prior art, the utility model has the beneficial effects that:
According to the crystal wafer chamfering device, the base table and the top plate are arranged, the fixing mechanism comprising the swing arms and the clamping blocks is arranged on the base table and used for fixing the crystal wafer, the chamfering mechanism comprising the chamfering grinding wheel and the motor is arranged on the top plate, and the top plate is lifted by the electric push rod.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic structural view of the chamfering mechanism of the present utility model;
FIG. 3 is a schematic view of the structure of the support plate of the present utility model;
fig. 4 is a schematic structural view of the fixing mechanism of the present utility model.
The device comprises a base, a top plate, an electric push rod, a grinding wheel seat, a chamfering grinding wheel, a motor, a supporting plate, a cylinder, a moving plate, a driving gear, a first shaft rod, a second shaft rod, a large gear, a small gear, a swing arm, a clamping block, a notch, a guide sleeve and a guide sleeve, wherein the base is 1, the top plate, the electric push rod, the grinding wheel seat, the chamfering grinding wheel, the motor, the supporting plate, the cylinder, the moving plate, the driving gear, the first shaft rod, the second shaft rod, the large gear, the clamping block, the small gear, the swing arm, the clamping block, the guide sleeve and the guide sleeve.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-4, the present utility model provides a technical solution:
a wafer chamfering device comprising:
A base 1 and a top plate 2;
The fixing mechanism for fixing the crystal plate comprises two groups of swing arms 15 arranged at the bottom of the base 1, clamping blocks 16 are arranged at the upper ends of the two groups of swing arms 15, the two groups of clamping blocks 16 are correspondingly arranged, a notch 17 for the swing arms 15 to move is formed in the base 1, a supporting plate 7 is arranged at the bottom of the base 1, a first shaft rod 11 and a second shaft rod 12 are respectively arranged on the supporting plate 7, and the first shaft rod 11 and the second shaft rod 12 are rotatably arranged on the same side of the supporting plate 7 through bearings. The two groups of swing arms 15 are fixedly welded on the first shaft rod 11 and the second shaft rod 12 respectively, a large gear 13 is arranged at the end part of the first shaft rod 11, a small gear 14 is arranged at the end part of the second shaft rod 12, and the large gear 13 and the small gear 14 are in meshed arrangement. One side of the supporting plate 7 is fixedly provided with an air cylinder 8, the end part of a telescopic rod of the air cylinder 8 is connected with a moving plate 9, the middle section of the top of the moving plate 9 is provided with driving teeth 10, and the driving teeth 10 and a large gear 13 are meshed.
During actual use, the movable plate 9 is driven to move through the starting cylinder 8, and the driving teeth 10 on the movable plate 9 are meshed with the large gear 13, and the large gear 13 is meshed with the small gear 14, so that the large gear 14 can be driven to rotate, at the moment, the swing arms 15 on the first shaft rod 11 and the second shaft rod 12 can be close to or far away from each other to rotate, so that the clamping block 16 is driven to clamp or unclamp a crystal plate, a good fixing effect is achieved, and after chamfering of one side of the crystal plate is completed, the crystal plate is unclamped, edge replacement is carried out, and clamping and chamfering are carried out again.
Please refer to fig. 3-4:
A chamfering mechanism for chamfering the crystal plate;
The chamfering mechanism comprises a chamfering grinding wheel 5 rotatably mounted at the bottom of the top plate 2 and a motor 6 fixedly mounted at the bottom of the top plate 2, the chamfering grinding wheel 5 is driven by the motor 6, and the chamfering grinding wheel 5 is located right above the middle of two groups of clamping blocks 16. The top plate 2 is provided with a grinding wheel seat 4 through a fixing screw, the grinding wheel is rotatably arranged on the grinding wheel seat 4, and an output shaft of the motor 6 is fixedly connected with a rotating shaft on one side of the grinding wheel through a coupler.
The lifting mechanism is used for lifting the top plate 2 and comprises four groups of electric push rods 3, wherein the electric push rods 3 are symmetrically arranged at the bottom of the base station 1, and the four groups of electric push rods 3 are synchronously arranged.
When in actual use, after the crystal piece is fixed through the fixing mechanism, the motor 6 is started to drive the chamfering grinding wheel 5 to rotate, the electric push rod 3 is started to reduce the height of the top plate 2 until the chamfering grinding wheel 5 contacts the edge of the crystal piece, so that chamfering operation is carried out, and the chamfering depth can be adjusted through the lifting mechanism.
Simple structure, convenient to use drives the movable plate 9 that has driving tooth 10 through cylinder 8 and transmits big pinion 14 in proper order to drive swing arm 15 makes two clamp splice 16 carry out the chamfer operation again after carrying out centre gripping and fixed to the crystal piece, has powerful centre gripping and fixed ability, thereby improves the precision and the stability of crystal piece chamfer processing, has guaranteed the quality of crystal piece chamfer processing.
The four groups of electric push rods 3 are synchronously arranged, the model used is LX600, and the corresponding parameters are rated power less than or equal to 55W, voltage 24V, stroke 30-500mm, speed 5-30mm/s, maximum load force 6000N and built-in limit switch;
The model of the motor 6 is GM15BYS, the corresponding parameters are voltage 5V, line number resistance 300 omega + -10%, step angle 18 DEG, start response frequency 900PPSmin, and induced moment 6gf-cm min;
The cylinder 8 is of the model SC32, and has the parameters of a piston rod diameter of 12mm, a piston rod external thread of M10 x 1.25, an air inlet thread of 1/81 min, a thrust of 28KG, a pressure range of 1-9Kgf/cm < 2 >, a speed range of 50-800mm/s and a stroke of 400mm.
Furthermore, please refer to fig. 4:
The other side of the supporting plate 7 is connected with a guide sleeve 18, and the moving plate 9 is inserted into the guide sleeve 18 in a sliding way.
The guide sleeve 18 is arranged on the supporting plate 7 and can guide and limit the moving plate 9, so that the moving plate 9 is always kept on the same straight line in the displacement process, and the stability of the equipment in the use process is improved.
In order to ensure the convenience of the use of the present application, a control panel may be installed on the top plate 2 for controlling and coordinating the operation of each component, wherein the control mode is that the control panel is controlled by a PLC controller, and a control circuit of the PLC controller is implemented by simple programming of a person skilled in the art, which belongs to the common general knowledge in the art, and the present application file is mainly used for protecting a mechanical device, so the present application file does not explain the control mode and circuit connection in detail.
While embodiments of the present utility model have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the utility model, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the utility model.
Claims (8)
1. A wafer chamfering device, comprising:
A base (1) and a top plate (2);
a lifting mechanism for lifting the top plate (2);
A fixing mechanism for fixing the crystal plate;
A chamfering mechanism for chamfering the crystal plate;
The fixing mechanism comprises two groups of swing arms (15) arranged at the bottom of the base station (1), clamping blocks (16) are arranged at the upper ends of the two groups of swing arms (15), the two groups of clamping blocks (16) are correspondingly arranged, and a notch (17) for the swing arms (15) to move is formed in the base station (1);
The chamfering mechanism comprises a chamfering grinding wheel (5) rotatably mounted at the bottom of the top plate (2) and a motor (6) fixedly mounted at the bottom of the top plate (2), the chamfering grinding wheel (5) is driven by the motor (6), and the chamfering grinding wheel (5) is located right above the middle of two groups of clamping blocks (16).
2. The crystal wafer chamfering device according to claim 1, wherein the lifting mechanism comprises four groups of electric push rods (3), the electric push rods (3) are symmetrically arranged at the bottom of the base station (1), and the four groups of electric push rods (3) are synchronously arranged.
3. A crystal piece chamfering device as set forth in claim 1, wherein the top plate (2) is provided with a grinding wheel seat (4) through a fixing screw, and the grinding wheel is rotatably mounted on the grinding wheel seat (4).
4. A crystal piece chamfering device as set forth in claim 3, characterized in that the output shaft of the motor (6) is fixedly connected to a side rotating shaft of the grinding wheel through a coupling.
5. The crystal wafer chamfering device according to claim 1, wherein a supporting plate (7) is arranged at the bottom of the base (1), a first shaft lever (11) and a second shaft lever (12) are respectively arranged on the supporting plate (7), and the first shaft lever (11) and the second shaft lever (12) are rotatably arranged on the same side of the supporting plate (7) through bearings.
6. The crystal wafer chamfering device according to claim 5, wherein two groups of swing arms (15) are fixedly welded on a first shaft lever (11) and a second shaft lever (12) respectively, a large gear (13) is arranged at the end part of the first shaft lever (11), a small gear (14) is arranged at the end part of the second shaft lever (12), and the large gear (13) and the small gear (14) are arranged in a meshed mode.
7. The crystal wafer chamfering device according to claim 6, wherein an air cylinder (8) is fixedly arranged on one side of the supporting plate (7), a moving plate (9) is connected to the end portion of a telescopic rod of the air cylinder (8), driving teeth (10) are arranged in the middle of the upper top portion of the moving plate (9), and the driving teeth (10) and the large gear (13) are arranged in a meshed mode.
8. The crystal piece chamfering device according to claim 7, wherein a guide sleeve (18) is connected to the other side of the supporting plate (7), and the moving plate (9) is slidably inserted into the guide sleeve (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202422157715.XU CN223012734U (en) | 2024-09-03 | 2024-09-03 | A crystal chamfering device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202422157715.XU CN223012734U (en) | 2024-09-03 | 2024-09-03 | A crystal chamfering device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN223012734U true CN223012734U (en) | 2025-06-24 |
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ID=96089083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202422157715.XU Active CN223012734U (en) | 2024-09-03 | 2024-09-03 | A crystal chamfering device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN223012734U (en) |
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2024
- 2024-09-03 CN CN202422157715.XU patent/CN223012734U/en active Active
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