CN222995366U - A film conveying device for a semiconductor conveying cavity - Google Patents
A film conveying device for a semiconductor conveying cavity Download PDFInfo
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- CN222995366U CN222995366U CN202421659384.3U CN202421659384U CN222995366U CN 222995366 U CN222995366 U CN 222995366U CN 202421659384 U CN202421659384 U CN 202421659384U CN 222995366 U CN222995366 U CN 222995366U
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Abstract
The utility model discloses a wafer conveying device of a semiconductor conveying cavity, which comprises a conveying platform and a conveying cavity arranged in the conveying platform, wherein a turntable is arranged on one side of the conveying platform, a first motor is connected to the bottom of the turntable, a hydraulic cylinder is connected to the bottom of the first motor, three supporting plates are symmetrically connected to the top of the turntable at equal intervals, the supporting plates can move to the interior of the conveying cavity under the matching action of the first motor and the hydraulic cylinder, two supporting rods are symmetrically and movably connected to the interior of the conveying cavity, the supporting plates are positioned between the two supporting rods, the two supporting rods are used for supporting wafers together, and a control component is further arranged in the conveying platform and used for controlling the two supporting rods to move away from each other and separate from the wafers. Through the structure, the control assembly is arranged to enable the supporting rods to move to the two sides of the wafer, the wafer can be conveyed to the outer side of the conveying platform to finish the wafer conveying work under the matching action of the hydraulic cylinder and the first motor, and the wafer conveying machine is simple in structure, flexible and efficient in wafer conveying work.
Description
Technical Field
The utility model relates to the technical field of semiconductor production devices, in particular to a wafer conveying device of a semiconductor conveying cavity.
Background
In semiconductor manufacturing processes, transfer chambers are critical devices for accomplishing wafer (or other piece of semiconductor material) transfer between different process steps.
In order to improve production efficiency, the existing semiconductor processing industry mostly adopts a mechanical arm to perform automatic sheet conveying. However, since the large tray for carrying a plurality of small-sized wafers is heavy, when the manipulator stretches into the reaction cavity to carry out the sheet taking and feeding operation, the cantilever of the manipulator is longer, the rigidity is poor, the carrying capacity is insufficient, the requirement of carrying a large-capacity tray for sheet conveying cannot be met, the sheet conveying precision of the manipulator can be seriously influenced even if the manipulator can be carried by barely, and the service life of the manipulator is greatly reduced. Therefore, a person skilled in the art provides a wafer transfer device of a semiconductor transfer chamber to solve the above-mentioned problems in the background art.
Disclosure of utility model
The utility model aims to provide a wafer conveying device of a semiconductor conveying cavity, a turntable can move the inside of the conveying cavity under the cooperation of a first motor and a hydraulic cylinder and then upwards support a wafer, a control assembly is arranged to enable a supporting rod to move to two sides of the wafer, the wafer can be conveyed to the outer side of a conveying platform to finish wafer conveying work under the cooperation of the hydraulic cylinder and the first motor, the structure is simple, and the wafer conveying work is flexible and efficient.
In order to achieve the above-mentioned purpose, provide a conveying device of semiconductor conveying cavity, including conveying platform and locate the inside conveying cavity of conveying platform, one side of conveying platform is equipped with the carousel, the bottom of carousel is connected with first motor, the bottom of first motor is connected with the pneumatic cylinder, the top equidistance symmetry of carousel is connected with three layer board, the layer board can remove to the inside of conveying cavity under the cooperation effect of first motor and pneumatic cylinder, the inside symmetry swing joint of conveying cavity has two bracing pieces, the layer board is located between two bracing pieces, two the bracing pieces are used for supporting the wafer jointly, just conveying platform's inside still is provided with control assembly and is used for controlling that two bracing pieces are separated to remove with the wafer separation.
According to the sheet conveying device of the semiconductor conveying cavity, the control assembly comprises a mounting cavity arranged in the conveying platform, a bidirectional screw rod and a guide rod which are symmetrically arranged in the mounting cavity, and a second motor fixedly connected in the conveying platform, one end of the bidirectional screw rod is rotationally connected with the inner wall of the mounting cavity, the other end of the bidirectional screw rod is fixedly connected with an output shaft of the second motor, two ends of the guide rod are fixedly connected with the inner wall of the mounting cavity, one end symmetrical threads of two support rods are arranged on the outer side of the bidirectional screw rod, and the other end of the support rods are slidably connected with the guide rod.
According to the sheet conveying device of the semiconductor conveying cavity, the tops of the supporting plates are fixedly connected with the anti-slip pads.
According to the wafer conveying device of the semiconductor conveying cavity, the bottom of the hydraulic cylinder is fixedly connected with the fixing seat.
According to the wafer conveying device of the semiconductor conveying cavity, the top of each supporting rod is fixedly connected with a protective pad.
According to the sheet conveying device of the semiconductor conveying cavity, the first motor, the second motor and the hydraulic cylinder are electrically connected with external control equipment.
The utility model has the following beneficial effects:
Compared with the prior art, the wafer conveying device of the semiconductor conveying cavity has the advantages that the wafer is supported upwards after the turntable is moved to the inside of the conveying cavity under the matching action of the first motor and the hydraulic cylinder, the supporting rods are enabled to move to the two sides of the wafer by the aid of the control assembly, the wafer can be conveyed to the outer side of the conveying platform to finish the wafer conveying work under the matching action of the hydraulic cylinder and the first motor, the structure is simple, and the wafer conveying work is flexible and efficient.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
The utility model is further described below with reference to the drawings and examples;
FIG. 1 is a schematic view of a first overall structure of a wafer transfer device of a semiconductor transfer chamber according to the present utility model;
FIG. 2 is a schematic diagram showing a second overall structure of a wafer transfer device of a semiconductor transfer chamber according to the present utility model;
FIG. 3 is a schematic view of a first internal cross-sectional structure of a transfer platform of a wafer transfer apparatus of a semiconductor transfer chamber according to the present utility model;
FIG. 4 is a schematic diagram showing a second internal structure of a transfer platform of a wafer transfer device of a semiconductor transfer chamber according to the present utility model;
Fig. 5 is an enlarged schematic view of a structure of a transfer device of a semiconductor transfer chamber of fig. 3.
Legend description:
1. a transfer platform; 2, a conveying cavity, 3, a turntable, 4, a first motor, 5, a hydraulic cylinder, 6, a fixed seat, 7, a supporting plate, 8, an anti-slip pad, 9, a mounting cavity, 10, a bidirectional screw rod, 11, a guide rod, 12, a protection pad, 13, a second motor, 14 and a supporting rod.
Detailed Description
Reference will now be made in detail to the present embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present utility model, but not to limit the scope of the present utility model.
Referring to fig. 1, 2 and 3, the semiconductor conveying cavity sheet conveying device according to the embodiment of the utility model comprises a conveying platform 1 and a conveying cavity 2 arranged in the conveying platform 1, wherein a turntable 3 is arranged on one side of the conveying platform 1, a first motor 4 is connected to the bottom of the turntable 3, and a hydraulic cylinder 5 is further connected to the bottom of the first motor 4, so that stable rotation and up-and-down movement of the turntable 3 are ensured. The top of carousel 3 evenly distributed is connected with three layer board 7, and layer board 7 can accurately remove to the inside of conveying chamber 2 under the synergism of first motor 4 and pneumatic cylinder 5. The inside of the conveying cavity 2 is symmetrically provided with two supporting rods 14, the supporting plate 7 is positioned between the two supporting rods 14 when moving into the conveying cavity 2, the two supporting rods 14 support the wafer together, the inside of the conveying platform 1 is also provided with a control component, and the control component controls the two supporting rods 14 to move away from each other so that the supporting rods can be separated from the wafer;
Specifically, the first motor 4 operates to drive the turntable 3 to rotate, the rotating turntable 3 drives the supporting plate 7 to move to the lower side of the conveying cavity 2, the hydraulic cylinder 5 operates to push the turntable 3 on the first motor 4 to move upwards, the turntable 3 moving upwards can better drive the supporting plate 7 to move upwards to contact with the bottom of the wafer on the supporting rod 14, the wafer is separated from the supporting rod 14, the supporting rod 14 is made to move to two sides of the wafer by the control component, the wafer can be conveyed to the outer side of the conveying platform 1 under the cooperation of the hydraulic cylinder 5 and the first motor 4 to complete the wafer conveying work, the structure is simple, and the wafer conveying work is flexible and efficient.
Referring to fig. 4 and 5, the control assembly comprises a mounting cavity 9, a bidirectional screw rod 10, a guide rod 11, a second motor 13 and a support rod 14, wherein the mounting cavity 9 is arranged inside the conveying platform 1, the bidirectional screw rod 10 and the guide rod 11 are symmetrically arranged in the mounting cavity 9, and the second motor 13 is fixedly connected inside the conveying platform 1. One end of the bidirectional screw rod 10 is rotationally connected with the inner wall of the installation cavity 9, and the other end is fixedly connected with the output shaft of the second motor 13. Two ends of the guide rod 11 are fixedly connected with the inner wall of the mounting cavity 9, one ends of the two support rods 14 are symmetrically connected with the outer side of the bidirectional screw rod 10 in a threaded manner, and the other ends of the two support rods are connected with the guide rod 11 in a sliding manner;
Specifically, after the supporting plate 7 lifts up the wafer, the second motor 13 operates to drive the bidirectional screw rod 10 to rotate, the bidirectional screw rod 10 can realize the separation movement of the supporting rods 14, and when the supporting rods 14 move to the two sides of the conveying cavity 2, the supporting plate 7 is convenient to move downwards to drive the wafer to move to the lower part of the conveying cavity 2.
Referring to fig. 1, 2 and 4, the top of the supporting plate 7 is fixedly connected with an anti-slip pad 8 to increase friction force and prevent the wafer on the supporting plate 7 from sliding.
Referring to fig. 1 and 2, a fixing base 6 is fixedly connected to the bottom of the hydraulic cylinder 5, and the fixing base 6 can be fixedly installed on the installation surface to ensure the stability of the movement of the turntable 3.
Referring to fig. 5, the top of the support rods 14 are fixedly connected with a protection pad 12 to protect the wafer from the damage of the support rods 14.
The first motor 4, the second motor 13 and the hydraulic cylinder 5 are electrically connected with external control equipment, so that the operation of the first motor 4, the second motor 13 and the hydraulic cylinder 5 is conveniently controlled, and the automatic operation is realized.
The wafer conveying device comprises a first motor 4, a rotary table 3, a hydraulic cylinder 5, a supporting plate 7, a supporting rod 14, a wafer conveying platform 1, a wafer conveying work, a simple structure and high efficiency, wherein the rotary table 3 is driven by the operation of the first motor 4, the rotary table 3 drives the supporting plate 7 to move to the lower part of the conveying cavity 2, the hydraulic cylinder 5 drives the rotary table 3 on the first motor 4 to move upwards, the upward movement of the supporting plate 7 can be better driven by the upward movement of the rotary table 3 to be contacted with the bottom of the wafer on the supporting rod 14, the wafer is separated from the supporting rod 14, the supporting plate 7 upwards supports the wafer, the two-way screw 10 is driven by the operation of the second motor 13 to rotate, the two-way screw 10 can realize the separation movement of the supporting rod 14, the supporting rod 14 moves to the two sides of the wafer, and the wafer can be conveyed to the outer side of the conveying platform 1 under the cooperation of the hydraulic cylinder 5 and the first motor 4.
The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.
Claims (6)
1. The utility model provides a semiconductor conveying cavity's biography piece device, its characterized in that, including conveying platform (1) and locate conveying platform (1) inside conveying chamber (2), one side of conveying platform (1) is equipped with carousel (3), the bottom of carousel (3) is connected with first motor (4), the bottom of first motor (4) is connected with pneumatic cylinder (5), the top equidistance symmetry of carousel (3) is connected with three layer board (7), layer board (7) can remove to the inside of conveying chamber (2) under the cooperation effect of first motor (4) and pneumatic cylinder (5), the inside symmetry swing joint of conveying chamber (2) has two bracing pieces (14), layer board (7) are located between two bracing pieces (14), two bracing pieces (14) are used for supporting the wafer jointly, just the inside of conveying platform (1) still is provided with control assembly and is used for controlling two bracing pieces (14) and separates from removing with the wafer separation mutually.
2. The sheet conveying device of the semiconductor conveying cavity according to claim 1, wherein the control assembly comprises a mounting cavity (9) arranged in the conveying platform (1), a bidirectional screw rod (10) and a guide rod (11) which are symmetrically arranged in the mounting cavity (9) and a second motor (13) fixedly connected in the conveying platform (1), one end of the bidirectional screw rod (10) is rotatably connected with the inner wall of the mounting cavity (9), the other end of the bidirectional screw rod is fixedly connected with an output shaft of the second motor (13), two ends of the guide rod (11) are fixedly connected with the inner wall of the mounting cavity (9), one ends of two support rods (14) are symmetrically connected with the outer side of the bidirectional screw rod (10) in a threaded mode, and the other ends of the two support rods are slidably connected with the guide rod (11).
3. The wafer conveying device of the semiconductor conveying cavity according to claim 2, wherein the tops of the supporting plates (7) are fixedly connected with anti-slip pads (8).
4. A wafer transfer device for a semiconductor transfer cavity according to claim 3, wherein the bottom of the hydraulic cylinder (5) is fixedly connected with a fixing seat (6).
5. The wafer transfer device of a semiconductor transfer chamber of claim 4, wherein the top of the support rods (14) are fixedly connected with protective pads (12).
6. The wafer conveying device of the semiconductor conveying cavity according to claim 1, wherein the first motor (4), the second motor (13) and the hydraulic cylinder (5) are electrically connected with external control equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202421659384.3U CN222995366U (en) | 2024-07-15 | 2024-07-15 | A film conveying device for a semiconductor conveying cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202421659384.3U CN222995366U (en) | 2024-07-15 | 2024-07-15 | A film conveying device for a semiconductor conveying cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN222995366U true CN222995366U (en) | 2025-06-17 |
Family
ID=95991634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202421659384.3U Active CN222995366U (en) | 2024-07-15 | 2024-07-15 | A film conveying device for a semiconductor conveying cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN222995366U (en) |
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2024
- 2024-07-15 CN CN202421659384.3U patent/CN222995366U/en active Active
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