CN222993689U - Device for detecting profile of dicing blade - Google Patents

Device for detecting profile of dicing blade Download PDF

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Publication number
CN222993689U
CN222993689U CN202420741501.4U CN202420741501U CN222993689U CN 222993689 U CN222993689 U CN 222993689U CN 202420741501 U CN202420741501 U CN 202420741501U CN 222993689 U CN222993689 U CN 222993689U
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China
Prior art keywords
dicing blade
measuring
detecting
dicing
contour
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CN202420741501.4U
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Chinese (zh)
Inventor
范明杰
谈广森
王宣宣
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Jinsi Semiconductor Shanghai Co ltd
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Jinsi Semiconductor Shanghai Co ltd
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Priority to CN202420741501.4U priority Critical patent/CN222993689U/en
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Abstract

本实用新型公开了一种检测划片刀轮廓装置,包括底座,所述底座上设有:视觉机构,用于对划刀片进行定位并检测划片刀表面;测量机构,所述测量机构包括一测量针,通过所述测量针在划片刀表面滑动用以检测出划片刀的轮廓;移动机构,带动所述测量机构靠近或远离所述视觉机构。本实用新型的有益效果是:本实用新型通过设置视觉机构、测量机构对划片刀进行轮廓检测,视觉机构在检测时对划片刀进行定位,并且在测量机构内设置刀片支撑柱与压块,检测时能够防止划片刀翘起,提高了检测效果,并且将刀片支撑朱与压块之间设置磁性连接,能够防止划片刀在检测时移动,而且磁性连接便于取放,提高了检测效率。

The utility model discloses a device for detecting the contour of a dicing knife, including a base, on which are provided: a visual mechanism for positioning a dicing blade and detecting the surface of the dicing blade; a measuring mechanism, the measuring mechanism including a measuring needle, by which the measuring needle slides on the surface of the dicing knife to detect the contour of the dicing knife; and a moving mechanism, which drives the measuring mechanism to move closer to or away from the visual mechanism. The beneficial effects of the utility model are as follows: the utility model detects the contour of the dicing knife by arranging a visual mechanism and a measuring mechanism, the visual mechanism positions the dicing knife during detection, and a blade support column and a pressure block are arranged in the measuring mechanism, which can prevent the dicing knife from tilting during detection, thereby improving the detection effect, and a magnetic connection is arranged between the blade support column and the pressure block, which can prevent the dicing knife from moving during detection, and the magnetic connection is convenient for taking and placing, thereby improving the detection efficiency.

Description

Device for detecting profile of dicing blade
Technical Field
The utility model relates to the technical field of dicing blade detection, in particular to a device for detecting the outline of a dicing blade.
Background
With the continuous development of the domestic semiconductor industry and the continuous rise of product demands, the continuous expansion of the domestic chip manufacturing capability and the continuous improvement of packaging and testing capabilities also bring about more demands on dicing knives. Dicing tools therefore have a huge global and domestic market capacity, a fast growth and a huge market potential.
The profilometer can be used for describing the wave degree and roughness of the surface of a workpiece and giving out the numerical value of the wave degree and roughness, and a precise air-float guide rail is adopted as a straight line reference. The contour meter is a two-coordinate measuring instrument, the sensor of the instrument slides at a constant speed relative to the surface of the measured workpiece, the measuring needle of the sensor senses the geometric change of the measured surface, samples in the X and Z directions respectively and converts the geometric change into electric signals, the electric signals are amplified and processed and then converted into digital signals to be stored in a memory of a computer system, and the measured result is an actual contour curve and is output through a display.
At present, the existing scribing cutter profile detection device directly places a blade on a workbench, and enables a measuring needle to contact a workpiece by moving an operating rod so as to do uniform sliding on the surface of the scribing cutter to be detected. During operation, the surface of the workpiece is raised as the thickness of the saw blade plating blade increases. In the sliding process of the measuring needle, the blade is easy to drive, so that the blade slides, the profile of the scribing cutter is inaccurate to measure, and the damage reporting rate is high. To this end, a new solution needs to be devised to give improvements.
Disclosure of utility model
The present utility model is directed to a device for detecting a profile of a dicing blade, so as to solve the above-mentioned problems in the prior art.
In order to achieve the above purpose, the utility model provides the following technical scheme that the device for detecting the profile of the dicing blade comprises a base, wherein the base is provided with:
The visual mechanism is used for positioning the scribing bit and detecting the surface of the scribing bit;
The measuring mechanism comprises a measuring needle which slides on the surface of the dicing blade to detect the outline of the dicing blade;
and the moving mechanism drives the measuring mechanism to be close to or far away from the vision mechanism.
Preferably, the vision mechanism comprises a camera support, a camera and a light source, wherein the support is vertically arranged on the base, the camera lens is downwards arranged at the top end of the support, and the light source is arranged at the lower side of the camera.
Preferably, the moving mechanism comprises an installation table, a sliding rail is arranged on the installation table, and a sliding block is arranged on the sliding rail in a sliding manner.
Preferably, a limiting plate is arranged on one side of the mounting table.
Preferably, the sliding block is provided with a bearing table, and two sides of the bearing table are provided with side plates.
Preferably, the measuring mechanism further comprises a measuring plate, a blade supporting column and a pressing block are arranged on the measuring plate, the dicing blade is connected with the blade supporting column, and the pressing block is arranged on the dicing blade.
Preferably, the support column comprises a lower cylinder and an upper cylinder, and the upper cylinder is connected with the central hole of the dicing blade.
Preferably, the blade support column is magnetically connected with the pressing block.
Compared with the prior art, the utility model has the beneficial effects that the contour detection is carried out on the scribing cutter by arranging the visual mechanism and the measuring mechanism, the visual mechanism positions the scribing cutter during detection, the blade supporting column and the pressing block are arranged in the measuring mechanism, the tilting of the scribing cutter can be prevented during detection, the detection effect is improved, the magnetic connection is arranged between the blade supporting cinnabar and the pressing block, the movement of the scribing cutter during detection can be prevented, the magnetic connection is convenient for taking and placing, and the detection efficiency is improved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic diagram of a moving mechanism according to the present utility model;
FIG. 3 is a schematic diagram of the structure of the measuring mechanism of the present utility model.
1, A base, 2, a vision mechanism, 21, a bracket, 22, a camera, 23, a light source, 3, a measuring mechanism, 31, a measuring needle, 32, a measuring plate, 33, a blade support column, 331, a lower column, 332, an upper column, 34, a pressing block, 4, a dicing blade, 5, a moving mechanism, 51, a mounting table, 52, a sliding rail, 53, a sliding block, 54, a limiting plate, 55, a bearing table, 56 and a side plate.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1, the utility model provides a device for detecting the profile of a dicing blade, which comprises a base 1, a measuring mechanism 3, a moving mechanism 5 and a detecting mechanism 3, wherein the base 1 is provided with a visual mechanism 2 for positioning the dicing blade 4 and detecting the surface of the dicing blade, the measuring mechanism 3 comprises a measuring needle 31, the measuring needle 31 slides on the surface of the dicing blade 4 to detect the profile of the dicing blade 4, and the moving mechanism 5 drives the measuring mechanism 3 to be close to or far away from the visual mechanism 1.
In one embodiment of the present utility model, the vision mechanism 2 includes a camera support 21, a camera 22 and a light source 23, the camera 22 is a CCD camera, the support 21 is vertically set on the base 1, the lens of the camera 22 is downwardly mounted on the top end of the support 21, and the light source 23 is mounted on the lower side of the camera 22.
In one embodiment of the present utility model, the moving mechanism 5 includes a mounting table 51, a sliding rail 52 is disposed on the mounting table 51, and a sliding block 53 is slidably disposed on the sliding rail 52. Further, a limiting plate 54 is disposed on one side of the mounting table 51, and the limiting plate 54 is in an inverted L shape. Further, a carrying table 55 is mounted on the slider 52, and side plates 56 are disposed on two sides of the carrying table 55.
In an embodiment of the present invention, the measuring mechanism 3 further includes a measuring plate 32, a blade support column 33 is disposed on the measuring plate 32, and the dicing blade 4 is connected to the blade support column 33. The measuring mechanism 3 is mounted on the moving mechanism 5, specifically, the measuring plate 32 is disposed on the carrying table 55, two side plates 56 are reinforced on two sides of the measuring plate 32, and the measuring needle 31 is disposed on the limiting plate 54 through a multi-axis rotating arm.
In one embodiment of the present utility model, the blade support column 33 includes a lower cylinder 331 and an upper cylinder 332, the dicing blade 4 is sleeved on the upper cylinder 332, and the pressing block 34 is disposed on the dicing blade 4, so that when the measuring needle 31 measures the dicing blade 4, the dicing blade 4 is not tilted or moved due to downward pressure, and the measurement result is not affected. Magnets are arranged in the upper cylinder 332 and the pressing block 34, and are magnetically connected.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (8)

1. The utility model provides a detect scribing bit profile device, includes the base, its characterized in that, be equipped with on the base:
The visual mechanism is used for positioning the scribing bit and detecting the surface of the scribing bit;
The measuring mechanism comprises a measuring needle which slides on the surface of the dicing blade to detect the outline of the dicing blade;
and the moving mechanism drives the measuring mechanism to be close to or far away from the vision mechanism.
2. The device for detecting the contour of a dicing blade according to claim 1, wherein the vision mechanism comprises a camera support, a camera and a light source, the support is vertically arranged on the base, the camera lens is downwardly mounted on the top end of the support, and the light source is mounted on the lower side of the camera.
3. The device for detecting the contour of the dicing blade according to claim 2, wherein the moving mechanism comprises a mounting table, a slide rail is arranged on the mounting table, and a slide block is arranged on the slide rail in a sliding manner.
4. The device for detecting the contour of the dicing blade according to claim 3, wherein a limit plate is arranged on one side of the mounting table.
5. The device for detecting the contour of a dicing blade according to claim 4, wherein the slider is provided with a carrying table, and both sides of the carrying table are provided with side plates.
6. The device for detecting the contour of the dicing blade according to claim 5, wherein the measuring mechanism further comprises a measuring plate, a blade supporting column and a pressing block are arranged on the measuring plate, the dicing blade is connected with the blade supporting column, and the pressing block is arranged on the dicing blade.
7. The apparatus of claim 6, wherein the support column comprises a lower cylinder and an upper cylinder, the upper cylinder being connected to the central hole of the dicing blade.
8. The apparatus of claim 7, wherein the blade support post is magnetically coupled to the compact.
CN202420741501.4U 2024-04-11 2024-04-11 Device for detecting profile of dicing blade Active CN222993689U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202420741501.4U CN222993689U (en) 2024-04-11 2024-04-11 Device for detecting profile of dicing blade

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202420741501.4U CN222993689U (en) 2024-04-11 2024-04-11 Device for detecting profile of dicing blade

Publications (1)

Publication Number Publication Date
CN222993689U true CN222993689U (en) 2025-06-17

Family

ID=95984904

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202420741501.4U Active CN222993689U (en) 2024-04-11 2024-04-11 Device for detecting profile of dicing blade

Country Status (1)

Country Link
CN (1) CN222993689U (en)

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