CN222913011U - Air tightness detection device - Google Patents
Air tightness detection device Download PDFInfo
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- CN222913011U CN222913011U CN202421695772.7U CN202421695772U CN222913011U CN 222913011 U CN222913011 U CN 222913011U CN 202421695772 U CN202421695772 U CN 202421695772U CN 222913011 U CN222913011 U CN 222913011U
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Abstract
本实用新型涉及气体密封检测技术领域，具体是一种气密性检测装置，包括工件压板、密封垫和底板，工件放置在所述底板上，在所述工件和底板之间固定设置有密封垫，所述工件压板可直线升降地设置在所述工件的正上方，在所述工件上设置有进气孔，在所述底板上设置有用于与氦检专用仪器相连接的法兰。该气密性检测装置可以实现快速拆装并满足多种工件的氦测工作，另外本发明可以实现多个工件同时进行测试，且密封工装拆装简易，可以有效提升测试效率。
The utility model relates to the technical field of gas sealing detection, specifically an airtightness detection device, including a workpiece pressure plate, a sealing gasket and a bottom plate, the workpiece is placed on the bottom plate, a sealing gasket is fixedly arranged between the workpiece and the bottom plate, the workpiece pressure plate can be linearly raised and lowered and arranged directly above the workpiece, an air inlet hole is arranged on the workpiece, and a flange for connecting with a special helium detection instrument is arranged on the bottom plate. The airtightness detection device can be quickly disassembled and assembled and meet the helium measurement work of various workpieces. In addition, the present invention can realize the testing of multiple workpieces at the same time, and the sealing tooling is easy to disassemble and assemble, which can effectively improve the testing efficiency.
Description
Technical Field
The utility model relates to the technical field of gas seal detection, in particular to an air tightness detection device.
Background
Along with the gradual application of domestic semiconductors in the gas holder field and the wide range, the demand of standard component products used in the gas holder is also increasing, a lot of semiconductor companies are participated in the production of standard components at present in China, and the standard component has high production demand consistency, high efficiency, stable quality and other requirements as the name implies, the rapid air tightness detection work of the standard component products is an important work in the current product test and verification requirements, the air tightness detection of the conventional standard component is more traditional, the products are tested independently, and because the yield of the standard component is relatively large, the standard component needs to be frequently disassembled and assembled by staff for detection, and different sealing tools are needed for different workpieces, the time for replacing the sealing tools is more, and the test efficiency is low.
Disclosure of utility model
In order to solve the problems, the utility model provides the air tightness detection device which can realize quick disassembly and assembly and meet helium testing work of various workpieces.
The technical scheme of the utility model is as follows:
The utility model provides a gas tightness detection device, includes work piece clamp plate, sealed pad and bottom plate, and the work piece is placed on the bottom plate fixedly be provided with sealed pad between work piece and the bottom plate, work piece clamp plate can go up and down to set up directly over the work piece be provided with the inlet port on the work piece be provided with on the bottom plate be used for with helium examine the flange that special instrument is connected.
The bottom plate is fixedly connected with supporting legs.
And a vertical plate is fixedly connected to the side surface of the bottom plate.
Transverse plates are fixedly connected to two sides of the vertical plate respectively
The three supporting legs are fixedly arranged on the bottom plate and the two transverse plates respectively.
The top of bottom plate fixedly is provided with the slide rail seat the top of slide rail seat fixedly is provided with the cylinder support the cylinder is fixedly installed on the cylinder support, the piston rod of cylinder with work piece clamp plate fixed connection.
The piston rod of cylinder pass through the cylinder connecting seat with work piece clamp plate fixed connection, cylinder connecting seat fixed connection is in on the piston rod of cylinder, work piece clamp plate fixed connection is in on the cylinder connecting seat.
The workpiece pressing plate is fixedly connected to the cylinder connecting seat through the plug pin.
And the slide rail seat is provided with an air cylinder connecting seat sliding guide assembly.
The cylinder connecting seat sliding guide assembly comprises a guide rail sliding block and a slide rail connecting piece, wherein the guide rail part of the guide rail sliding block is fixedly connected to the slide rail seat, one end of the slide rail connecting piece is fixedly connected with the sliding block part of the guide rail sliding block, and the other end of the slide rail connecting piece is fixedly connected with the cylinder connecting seat.
The utility model has the beneficial effects that:
The air tightness detection device disclosed by the utility model has the advantages that the inner cores of the armored heating wires are added to enable the two inner cores to be respectively positioned in different sections of the heating wires, the heating power of the two inner cores is respectively controlled to realize the partition temperature control of one heating wire, the space is saved, the assembly is simple and the like.
Drawings
The aspects and advantages of the present utility model will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the utility model.
In the drawings:
fig. 1 is a schematic view of a three-dimensional exploded structure of an air tightness detecting device according to an embodiment of the present utility model;
Fig. 2 is a front view of an air tightness detecting device according to an embodiment of the present utility model;
the components represented by the reference numerals in the figures are:
The utility model comprises the following steps: 1, a cylinder bracket, 2, a sliding rail connecting piece, 3, a sliding rail seat, 4, a cylinder connecting seat, 5, a workpiece pressing plate, 6, a sealing gasket pressing plate, 7, a sealing gasket, 8, a vertical plate, 9, a bottom plate, 10, a transverse plate, 11, a flange, 12, a supporting leg, 13, a sliding rail, 14, a plug pin, 15, a cylinder, 16, an air inlet hole, 17 and a workpiece.
Detailed Description
As shown in fig. 1 and 2, the air tightness detection device comprises a workpiece pressing plate 5, a sealing gasket 7 and a bottom plate 9, wherein the bottom plate 9 is fixedly arranged, a workpiece 17 is placed on the bottom plate 9, the sealing gasket 7 is fixedly arranged between the workpiece 17 and the bottom plate 9, the workpiece pressing plate 5 is arranged right above the workpiece 17 in a straight line lifting manner, an air inlet hole 16 is formed in the workpiece 17, a flange 11 used for being connected with a helium detection special instrument is arranged on the bottom plate 9, supporting legs 12 are fixedly connected onto the bottom plate 9, a vertical plate 8 is fixedly connected onto the side face of the bottom plate 9, transverse plates 10 are fixedly connected onto two sides of the vertical plate 8, and three supporting legs 12 are fixedly installed on the bottom plate 9 and the two transverse plates 10 respectively.
The top of the bottom plate 9 is fixedly provided with a slide rail seat 3, the top of the slide rail seat 3 is fixedly provided with a cylinder support 1, a cylinder 15 is fixedly installed on the cylinder support 1, a piston rod of the cylinder 15 is fixedly connected with the workpiece pressing plate 5 through a cylinder connecting seat 4, the cylinder connecting seat 4 is fixedly connected to the piston rod of the cylinder 15, the workpiece pressing plate 5 is fixedly connected to the cylinder connecting seat 4, and the workpiece pressing plate 5 is fixedly connected to the cylinder connecting seat 4 through a plug pin 14.
The cylinder connecting seat sliding guide assembly is arranged on the slide rail seat 3 and comprises a guide rail sliding block 13 and a slide rail connecting piece 2, the guide rail part of the guide rail sliding block 13 is fixedly connected to the slide rail seat 3, one end of the slide rail connecting piece 2 is fixedly connected with the sliding block part of the guide rail sliding block 13, and the other end of the slide rail connecting piece is fixedly connected with the cylinder connecting seat 4.
In one particular embodiment:
the air tightness detection device comprises an air cylinder bracket 1, a sliding rail connecting piece 2, a sliding rail seat 3, an air cylinder connecting seat 4, a workpiece pressing plate 5, a sealing gasket pressing plate 6, a sealing gasket 7, a vertical plate 8, a bottom plate 9, a transverse plate 10, a flange 11, supporting legs 12, a guide rail sliding block 13, a plug pin 14, an air cylinder 15, an air inlet hole 16 and a workpiece 17.
The cylinder 15 is arranged on the cylinder support 1, a piston rod in the cylinder is connected to the cylinder connecting seat 4, the cylinder support 1 is fixedly connected with the sliding rail seat 3, the sliding rail sliding block 13 is arranged on the sliding rail seat 3, the sliding rail connecting piece 2 is arranged on the sliding rail sliding block 13, the other side of the sliding rail connecting piece is arranged on the cylinder connecting seat 1, the plug pin 14 is arranged on the cylinder connecting seat 4, the workpiece pressing plate 5 is connected with the cylinder connecting seat 4 through the plug pin 14, at least 5 workpiece pressing plates 5 can be arranged on the cylinder connecting seat 4 at the same time, namely, at least 5 workpieces can be detected at the same time, the sealing gasket pressing plate 6 is arranged on the bottom plate 9, the sealing gasket 7 is clamped between the sealing gasket pressing plate 6 and the bottom plate 9, the vertical plate 8 is arranged on the side surface of the bottom plate 9, the transverse plate 10 is arranged on the side surface of the vertical plate 8, the flange 11 is welded at the bottom of the bottom plate 9, and the supporting legs 12 are respectively arranged on the bottom plate 9 and the transverse plate 10.
The cylinder 15 can drive the relevant connecting pieces such as the cylinder connecting seat 4 to move up and down.
The guide rail slider 13 can realize vertical movement in the vertical direction.
The air inlet hole 16 can be connected with a helium gas source to spray helium to the tested workpiece 17.
The gasket 7 can meet the static sealing requirement of the workpiece 17, and is made of nitrile rubber.
The flange 11 can be connected with a helium detection special instrument to realize the air tightness detection work.
The working principle of the air tightness detection device is that a workpiece 17 product is manually placed on a bottom plate 9, hole positions to be sealed are aligned and placed, the air cylinder 15 is controlled by an electric control system to descend to drive a workpiece pressing plate 5 to press the workpiece 17 to enable the workpiece 17 to reach a static sealing state, meanwhile, the workpiece pressing plate 5 covers the workpiece 17, helium is sprayed to the workpiece 17 through an air inlet hole 16 to carry out helium detection test, the result of a special helium detection instrument is observed for 10 seconds, the electric control system controls the air cylinder to ascend after the result is qualified, and the tested workpiece is manually taken away to complete the test.
The air tightness detection device can realize quick assembly and disassembly and meet helium testing work of various workpieces, in addition, 5 workpieces can be tested simultaneously, and the sealing tool is easy to assemble and disassemble, so that the testing efficiency can be effectively improved.
Claims (10)
1. The utility model provides a gas tightness detection device, its characterized in that includes work piece clamp plate (5), sealed pad (7) and bottom plate (9), and work piece (17) are placed on bottom plate (9) fixedly be provided with sealed pad (7) between work piece (17) and bottom plate (9), work piece clamp plate (5) can go up and down the ground setting in straight line just over work piece (17) be provided with inlet port (16) on work piece (17) be provided with on bottom plate (9) be used for with helium examine flange (11) that special instrument is connected.
2. An air tightness testing device according to claim 1, characterized in that the base plate (9) is fixedly connected with legs (12).
3. An air tightness testing device according to claim 2, characterized in that a riser (8) is fixedly connected to the side of the bottom plate (9).
4. A gas tightness detection device according to claim 3, characterized in that a transverse plate (10) is fixedly connected to each side of the upright plate (8).
5. An air tightness testing device according to claim 4, wherein three of said legs (12) are fixedly mounted on said bottom plate (9) and on two of said cross plates (10), respectively.
6. The air tightness detection device according to claim 1, wherein a slide rail seat (3) is fixedly arranged at the top of the bottom plate (9), an air cylinder support (1) is fixedly arranged at the top of the slide rail seat (3), an air cylinder (15) is fixedly arranged on the air cylinder support (1), and a piston rod of the air cylinder (15) is fixedly connected with the workpiece pressing plate (5).
7. The air tightness detection device according to claim 6, wherein a piston rod of the air cylinder (15) is fixedly connected with the workpiece pressing plate (5) through an air cylinder connecting seat (4), the air cylinder connecting seat (4) is fixedly connected to the piston rod of the air cylinder (15), and the workpiece pressing plate (5) is fixedly connected to the air cylinder connecting seat (4).
8. The air tightness detection device according to claim 7, wherein the workpiece pressing plate (5) is fixedly connected to the cylinder connecting seat (4) through a plug pin (14).
9. An air tightness detection device according to claim 6, characterized in that a cylinder connection seat sliding guide assembly is provided on the slide rail seat (3).
10. The air tightness detection device according to claim 9, wherein the cylinder connecting seat sliding guide assembly comprises a guide rail sliding block (13) and a sliding rail connecting piece (2), a guide rail part of the guide rail sliding block (13) is fixedly connected to the sliding rail seat (3), one end of the sliding rail connecting piece (2) is fixedly connected with a sliding block part of the guide rail sliding block (13), and the other end of the sliding rail connecting piece is fixedly connected with the cylinder connecting seat (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202421695772.7U CN222913011U (en) | 2024-07-17 | 2024-07-17 | Air tightness detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202421695772.7U CN222913011U (en) | 2024-07-17 | 2024-07-17 | Air tightness detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN222913011U true CN222913011U (en) | 2025-05-27 |
Family
ID=95775962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202421695772.7U Active CN222913011U (en) | 2024-07-17 | 2024-07-17 | Air tightness detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN222913011U (en) |
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2024
- 2024-07-17 CN CN202421695772.7U patent/CN222913011U/en active Active
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