CN222806897U - Flexible clamping tool structure based on semiconductor cavity machining - Google Patents
Flexible clamping tool structure based on semiconductor cavity machining Download PDFInfo
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- CN222806897U CN222806897U CN202422140479.0U CN202422140479U CN222806897U CN 222806897 U CN222806897 U CN 222806897U CN 202422140479 U CN202422140479 U CN 202422140479U CN 222806897 U CN222806897 U CN 222806897U
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Abstract
本实用新型公开了基于半导体腔室加工的柔性夹持工装结构，本实用新型涉及夹持工装技术领域，包括安装架，所述安装架的顶部设有夹持组件用于对零件进行夹持，所述安装架的底部设有旋转组件和驱动组件，所述驱动组件通过旋转组件与夹持组件连接。该基于半导体腔室加工的柔性夹持工装结构，通过气缸推动直齿条带动齿轮和转台旋转实现零件定心夹持，当夹板接触零件产生阻力时，弹簧不完全收缩起到缓冲作用，达到柔性夹持效果，避免了刚性夹持可能对零件造成的损伤，同时，当卡块在特定情况下卡在棘齿条上时，能有效避免因气缸推力过大或伸缩动作超程而导致零件损坏，对半导体零件起到良好的保护作用。
The utility model discloses a flexible clamping tooling structure based on semiconductor chamber processing. The utility model relates to the field of clamping tooling technology, including a mounting frame, a clamping assembly is provided on the top of the mounting frame for clamping parts, a rotating assembly and a driving assembly are provided on the bottom of the mounting frame, and the driving assembly is connected to the clamping assembly through the rotating assembly. The flexible clamping tooling structure based on semiconductor chamber processing realizes the centering clamping of parts by driving the spur rack by the cylinder to drive the gear and the turntable to rotate. When the clamping plate contacts the parts to generate resistance, the incomplete contraction of the spring plays a buffering role, achieving a flexible clamping effect, avoiding the damage that may be caused to the parts by rigid clamping. At the same time, when the clamping block is stuck on the ratchet bar under certain circumstances, it can effectively avoid the damage to the parts caused by excessive cylinder thrust or overtravel of the telescopic action, and play a good protective role for semiconductor parts.
Description
Technical Field
The utility model relates to the technical field of clamping tools, in particular to a flexible clamping tool structure based on semiconductor cavity processing.
Background
In the highly precise and complex field of semiconductor chamber processing, precise clamping and stable positioning of a workpiece are key links to ensuring processing quality and efficiency.
In the prior art, as in China patent No. CN218533614U, a clamp for semiconductor processing is disclosed, which comprises a clamp bottom plate, a supporting shaft is fixedly arranged at the center of the upper end face of the clamp bottom plate, push-pull devices are fixedly arranged on two sides of the supporting shaft on the upper end face of the clamp bottom plate, connecting pieces are fixedly connected to the end parts of output shafts extending upwards of the push-pull devices, a clamp movable middle plate is fixedly arranged at the upper ends of the connecting pieces, a middle plate sliding groove is formed in the clamp movable middle plate, a toothed cross rod part of an L-shaped toothed sliding rod is slidably arranged in the middle plate sliding groove, and a rotating gear is fixedly arranged under the toothed cross rod part of the L-shaped toothed sliding rod. Therefore, the fixed semiconductor wafers with different sizes and shapes can be well fixed, and the requirement that the fixed semiconductor wafers move in four directions of a working plane can be met.
In the above patent, although the semiconductor can be clamped, the prior art lacks elastic buffering, and physical damages such as scratches, indentations and the like are easily generated on the surface of a workpiece due to overlarge clamping force, so that the utility model provides a flexible clamping tool structure based on semiconductor chamber processing.
Disclosure of utility model
Aiming at the defects of the prior art, the utility model provides a flexible clamping tool structure based on semiconductor cavity processing, which solves the problems that the prior art lacks elastic buffering and is easy to cause physical damages such as scratches, indentations and the like on the surface of a workpiece due to overlarge clamping force.
The flexible clamping tool structure based on the semiconductor cavity processing comprises a mounting frame, wherein a clamping assembly is arranged at the top of the mounting frame and used for clamping parts, a rotating assembly and a driving assembly are arranged at the bottom of the mounting frame and connected with the clamping assembly through the rotating assembly, the driving assembly comprises a mounting plate, a ratchet bar and an air cylinder, a first connecting plate is arranged at the telescopic end of the air cylinder, a limiting telescopic rod is arranged at one side of the first connecting plate, a second connecting plate is arranged at one end of the limiting telescopic rod, a spring is sleeved outside the limiting telescopic rod, a rotating seat is arranged at the bottom of the first connecting plate, a rotating block is rotatably arranged on the outer surface of the rotating seat, a guide groove is formed in the outer surface of the rotating block in a penetrating mode, a clamping block is connected to the bottom of the rotating block, two supports are arranged at the bottom of the second connecting plate, and a circular rod is connected between the opposite side surfaces of the two supports.
Preferably, four sliding grooves are formed in the top of the mounting frame, a plurality of stand columns are mounted at positions, close to the edges, of the top of the mounting frame, a placing table is mounted between the tops of the stand columns, and four penetrating grooves are formed in the top of the placing table in a penetrating mode.
Preferably, the clamping assembly quantity is set to four, every clamping assembly all includes the slider, the slider slides and sets up in the inside of spout, the top fixed mounting of slider has the support column, the support column passes through the groove and upwards extends, the position rotation cover that the support column outer wall is close to the bottom is equipped with the rod wheel, the top fixed mounting of support column has splint, splint one side surface inwards is equipped with the rubber pad.
Preferably, the rotating assembly comprises a rotary table, the rotary table is arranged in an interlayer of the mounting frame and the placing table, four arc grooves are formed in the end portion of the rotary table in a penetrating mode, the arc grooves are matched with the roller wheels, a rotating shaft is fixedly arranged at the bottom of the rotary table, the rotating shaft movably penetrates through the top of the mounting frame and extends downwards, and a gear is arranged at the bottom end of the rotating shaft.
Preferably, the mounting plate is mounted at the bottom of the mounting frame, the ratchet bar is mounted at the bottom of the inner side of the mounting plate and located below the clamping block, the cylinder is mounted on the inner wall of one side of the mounting plate, the cylindrical rod is movably arranged at the inner side of the guide groove, and two ends of the spring are fixedly connected with the surface of one side opposite to the first connecting plate and the second connecting plate respectively.
Preferably, a straight rack is arranged on one side of the second connecting plate, the straight rack is connected with the gear in a meshed mode, a limiting block is arranged on the outer surface of the straight rack in a sliding mode, and the limiting block is arranged on the inner wall of one side of the mounting plate.
Advantageous effects
The utility model provides a flexible clamping tool structure based on semiconductor chamber processing. Compared with the prior art, the method has the following beneficial effects:
(1) This flexible centre gripping frock structure based on semiconductor cavity processing promotes straight tooth strip and moves gear and revolving stage rotation through the cylinder and realize part centering centre gripping, and when splint contact part produced resistance, the spring incompletely contracts and plays the cushioning effect, reaches flexible centre gripping effect, has avoided the damage that rigidity centre gripping probably caused the part, simultaneously, when the fixture block card was on the ratchet bar under the specific circumstances, can effectively avoid leading to the part damage because of cylinder thrust is too big or flexible action overtravel, plays good guard action to the semiconductor part.
(2) This flexible centre gripping frock structure based on semiconductor cavity processing through the support column at removal in-process, rod wheel and arc groove mutually support and rod wheel take place to roll, has reduced the frictional resistance of support column and arc groove by a wide margin, has avoided the support column to take place to block the phenomenon in the arc groove, has ensured the stability and the reliability of clamping device in the course of the work.
Drawings
FIG. 1 is a schematic perspective view of the present utility model;
FIG. 2 is a partial cross-sectional view of the structure of the present utility model;
FIG. 3 is a schematic perspective view of a turntable according to the present utility model;
FIG. 4 is a schematic perspective view of a driving assembly according to the present utility model;
Fig. 5 is an enlarged view of the utility model at a in fig. 4.
The device comprises a mounting frame, 11, a sliding chute, 12, a column, 13, a placing table, 14, a through groove, 2, a clamping assembly, 21, a sliding block, 22, a supporting column, 23, a roller, 24, a clamping plate, 25, a rubber pad, 3, a rotating assembly, 31, a turntable, 32, an arc groove, 33, a rotating shaft, 34, a gear, 4, a driving assembly, 41, a mounting plate, 42, a ratchet bar, 43, a cylinder, 44, a first connecting plate, 45, a limiting telescopic rod, 46, a second connecting plate, 47, a spring, 48, a straight rack, 49, a rotating seat, 410, a rotating block, 411, a clamping block, 412, a guiding groove, 413, a bracket, 414, a cylindrical rod, 415 and a limiting block.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The utility model provides two technical schemes:
Fig. 1-5 show a first embodiment of a flexible clamping tool structure based on semiconductor chamber processing, which comprises a mounting frame 1, wherein a clamping component 2 is arranged at the top of the mounting frame 1 and used for clamping parts, a rotating component 3 and a driving component 4 are arranged at the bottom of the mounting frame 1, the driving component 4 is connected with the clamping component 2 through the rotating component 3, the driving component 4 comprises a mounting plate 41, a ratchet bar 42 and a cylinder 43, a first connecting plate 44 is arranged at the telescopic end of the cylinder 43, a limiting telescopic rod 45 is arranged at one side of the first connecting plate 44, a second connecting plate 46 is arranged at one end of the limiting telescopic rod 45, a spring 47 is sleeved outside the limiting telescopic rod 45, a rotating seat 49 is arranged at the bottom of the first connecting plate 44, a rotating block 410 is rotatably arranged on the outer surface of the rotating seat 49, a guide groove 412 is arranged on the outer surface of the rotating block 410 in a penetrating mode, a clamping block 411 is connected to the bottom of the rotating block 410, two brackets 413 are arranged at the bottom of the second connecting plate 46, and cylindrical rods 414 are connected between opposite side surfaces of the two brackets 413.
Four spouts 11 have been seted up at the top of mounting bracket 1, a plurality of stands 12 are installed at the position that the top of mounting bracket 1 is close to the edge, install between the top of a plurality of stands 12 and place platform 13, place the top of platform 13 and run through and have seted up four and run through groove 14, four spouts 11 can provide direction and spacing effect for the removal of slider 21, ensure the steady motion of part in specific direction, promote the running accuracy of whole device, a plurality of stands 12 play the effect of supporting and placing platform 13, guarantee stability and the fastness of placing platform 13, make it bear the semiconductor parts safely and carry out the processing operation, place four running through groove 14 at platform 13 top can provide the activity space for support column 22.
The clamping assembly 2 quantity is established to four, every clamping assembly 2 all includes slider 21, slider 21 slides and sets up in the inside of spout 11, the top fixed mounting of slider 21 has support column 22, support column 22 passes through run-through groove 14 and upwards extend, the position rotation cover that the support column 22 outer wall is close to the bottom is equipped with rod wheel 23, the top fixed mounting of support column 22 has splint 24, splint 24 inwards one side surface is equipped with rubber pad 25, slider 21 slides in spout 11, provide the direction for the removal of clamping assembly 2, ensure the accuracy of centre gripping action, can play the cushioning effect through rubber pad 25, prevent to cause the damage to the part, increase frictional force simultaneously, improve the stability of centre gripping.
Fig. 1-5 show a second embodiment, which is mainly different from the first embodiment in that the rotating assembly 3 comprises a turntable 31, the turntable 31 is arranged in an interlayer between the mounting frame 1 and the placing table 13, four arc-shaped grooves 32 are formed in a penetrating manner at the end part of the turntable 31, the arc-shaped grooves 32 are matched with the roller wheels 23, a rotating shaft 33 is fixedly arranged at the bottom of the turntable 31, the rotating shaft 33 movably penetrates through the top of the mounting frame 1 and extends downwards, a gear 34 is arranged at the bottom end of the rotating shaft 33, the four arc-shaped grooves 32 on the turntable 31 are matched with the roller wheels 23, synchronous control of four clamping assemblies 2 can be achieved, clamping coordination is improved, and the rotating shaft 33 and the gear 34 can transmit power of an air cylinder 43 to the turntable 31 to achieve rotating motion, so that the clamping assembly 2 is driven to carry out clamping operation.
The mounting panel 41 is installed in the bottom of mounting bracket 1, ratchet bar 42 is installed in the inboard bottom of mounting panel 41, and be located fixture block 411 below, cylinder 43 is installed on mounting panel 41 one side inner wall, cylinder pole 414 activity sets up in the guide way 412 inboard, the both ends of spring 47 respectively with first connecting plate 44 and the opposite side fixed surface of second connecting plate 46 are connected, ratchet bar 42 cooperates with fixture block 411, can prevent that cylinder 43 thrust is too big to lead to the part damage in the centre gripping in-process, play the safety protection effect, cylinder 43 provides power for the centre gripping operation, realize automatic centre gripping, cylinder pole 414 cooperates with guide way 412, the action of steerable fixture block 411, spring 47 connects first connecting plate 44 and second connecting plate 46, play buffering and reset action.
A straight rack 48 is arranged on one side of the second connecting plate 46, the straight rack 48 is meshed with the gear 34, a limiting block 415 is slidably arranged on the outer surface of the straight rack 48, the limiting block 415 is arranged on the inner wall of one side of the mounting plate 41, and the straight rack 48 is meshed with the gear 34 to realize power transmission. The limiting block 415 can limit the movement range of the straight rack 48, so as to ensure the stability of the movement of the straight rack.
And all that is not described in detail in this specification is well known to those skilled in the art.
When in use, a semiconductor part is placed on the placing table 13, the straight rack 48 is pushed by the air cylinder 43 to move, so that the gear 34 is driven to rotate anticlockwise, the rotary table 31 is synchronously rotated by being matched with the rotary shaft 33, the support column 22 is gathered towards the inner side under the guidance of the arc-shaped groove 32, and the part can be centered and clamped by being matched with the clamping plate 24, when the air cylinder 43 pushes the straight rack 48 to move, if the clamping plate 24 does not contact the part yet, the straight rack 48 normally moves, if the clamping plate 24 contacts the part, the straight rack 48 generates resistance and cannot move, and the first connecting plate 44 continuously extrudes towards the direction of the straight rack 48 under the action of the pushing force of the air cylinder 43, at the moment, the buffer effect is achieved by incomplete shrinkage of the spring 47, meanwhile, the rotary block 410 at the bottom of the first connecting plate 44 moves towards the direction of the straight rack 48, and the position of the circular column 414 is fixed, under the limiting action of the cylindrical rod 414, the rotating block 410 rotates according to the track of the guide groove 412, when the inclined surface on the guide groove 412 gradually contacts with the cylindrical rod 414, the rotating block 410 and the clamping block 411 rotate downwards, so that the clamping block 411 is clamped on the ratchet bar 42, when the clamping block 411 is clamped, the first connecting plate 44 cannot move continuously, the thrust generated by the air cylinder 43 cannot act on the straight rack 48, so that damage to parts caused by overlarge thrust of the air cylinder 43 or over-travel of telescopic action can be effectively avoided, when the parts are required to be loosened, the air cylinder 43 drives the first connecting plate 44 to retract, the first connecting plate 44 and the second connecting plate 46 are far away from each other under the action of the thrust of the spring 47, the cylindrical rod 414 also reaches a plane from the inclined surface of the guide groove 412, the clamping block 411 is pulled up, and convenience is brought about, when the support column 22 is moving, the roller wheel 23 and the arc-shaped groove 32 are matched with each other, and the roller wheel 23 rolls, so that the friction resistance between the support column 22 and the arc-shaped groove 32 can be greatly reduced, and the support column 22 is prevented from being blocked in the arc-shaped groove 32.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The flexible clamping tool structure based on the semiconductor cavity machining comprises a mounting frame (1) and is characterized in that a clamping assembly (2) is arranged at the top of the mounting frame (1) and used for clamping a part, a rotating assembly (3) and a driving assembly (4) are arranged at the bottom of the mounting frame (1), and the driving assembly (4) is connected with the clamping assembly (2) through the rotating assembly (3);
The driving assembly (4) comprises a mounting plate (41), a ratchet bar (42) and a cylinder (43), a first connecting plate (44) is mounted at the telescopic end of the cylinder (43), a limiting telescopic rod (45) is mounted at one side of the first connecting plate (44), a second connecting plate (46) is mounted at one end of the limiting telescopic rod (45), a spring (47) is sleeved outside the limiting telescopic rod (45), a rotating seat (49) is mounted at the bottom of the first connecting plate (44), a rotating block (410) is mounted on the outer surface of the rotating seat (49) in a rotating mode, a guide groove (412) is formed in the outer surface of the rotating block (410) in a penetrating mode, a clamping block (411) is connected at the bottom of the rotating block (410), two supports (413) are mounted at the bottom of the second connecting plate (46), and a cylindrical rod (414) is connected between the opposite side surfaces of the supports (413).
2. The flexible clamping tool structure based on semiconductor chamber processing according to claim 1, wherein four sliding grooves (11) are formed in the top of the mounting frame (1), a plurality of stand columns (12) are arranged at positions, close to the edges, of the top of the mounting frame (1), a placing table (13) is arranged between the tops of the stand columns (12), and four through grooves (14) are formed in the top of the placing table (13) in a penetrating mode.
3. The flexible clamping tool structure based on semiconductor chamber processing according to claim 2, wherein the number of the clamping assemblies (2) is four, each clamping assembly (2) comprises a sliding block (21), the sliding blocks (21) are slidably arranged in the sliding grooves (11), support columns (22) are fixedly arranged at the tops of the sliding blocks (21), the support columns (22) penetrate through the through grooves (14) and extend upwards, roller wheels (23) are rotatably sleeved at positions, close to the bottoms, of the outer walls of the support columns (22), clamping plates (24) are fixedly arranged at the top ends of the support columns (22), and rubber pads (25) are arranged on the surface of one inward side of each clamping plate (24).
4. The flexible clamping tool structure based on semiconductor chamber processing according to claim 3, wherein the rotating assembly (3) comprises a rotary table (31), the rotary table (31) is arranged in an interlayer between the mounting frame (1) and the placing table (13), four arc-shaped grooves (32) are formed in the end portion of the rotary table (31) in a penetrating mode, the arc-shaped grooves (32) are matched with the roller wheels (23), a rotating shaft (33) is fixedly arranged at the bottom of the rotary table (31), the rotating shaft (33) penetrates through the top of the mounting frame (1) in a movable mode and extends downwards, and a gear (34) is arranged at the bottom end of the rotating shaft (33).
5. The flexible clamping tool structure based on semiconductor chamber processing according to claim 1, wherein the mounting plate (41) is mounted at the bottom of the mounting frame (1), the ratchet bar (42) is mounted at the bottom of the inner side of the mounting plate (41) and located below the clamping block (411), the air cylinder (43) is mounted on the inner wall of one side of the mounting plate (41), the cylindrical rod (414) is movably arranged at the inner side of the guide groove (412), and two ends of the spring (47) are fixedly connected with the surfaces of the opposite sides of the first connecting plate (44) and the second connecting plate (46) respectively.
6. The flexible clamping tool structure based on semiconductor chamber processing according to claim 4, wherein a straight rack (48) is installed on one side of the second connecting plate (46), the straight rack (48) is in meshed connection with the gear (34), a limiting block (415) is slidably arranged on the outer surface of the straight rack (48), and the limiting block (415) is installed on the inner wall of one side of the mounting plate (41).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202422140479.0U CN222806897U (en) | 2024-09-02 | 2024-09-02 | Flexible clamping tool structure based on semiconductor cavity machining |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202422140479.0U CN222806897U (en) | 2024-09-02 | 2024-09-02 | Flexible clamping tool structure based on semiconductor cavity machining |
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| CN222806897U true CN222806897U (en) | 2025-04-29 |
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| CN202422140479.0U Active CN222806897U (en) | 2024-09-02 | 2024-09-02 | Flexible clamping tool structure based on semiconductor cavity machining |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN120891596A (en) * | 2025-09-28 | 2025-11-04 | 海门裕隆光电科技有限公司 | An automatic coupling device for a reflective optoelectronic device |
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2024
- 2024-09-02 CN CN202422140479.0U patent/CN222806897U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN120891596A (en) * | 2025-09-28 | 2025-11-04 | 海门裕隆光电科技有限公司 | An automatic coupling device for a reflective optoelectronic device |
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