CN222491205U - Slide glass platform positioning mechanism of cleaning machine - Google Patents

Slide glass platform positioning mechanism of cleaning machine Download PDF

Info

Publication number
CN222491205U
CN222491205U CN202421090166.2U CN202421090166U CN222491205U CN 222491205 U CN222491205 U CN 222491205U CN 202421090166 U CN202421090166 U CN 202421090166U CN 222491205 U CN222491205 U CN 222491205U
Authority
CN
China
Prior art keywords
centering
threaded rod
positioning mechanism
cleaning machine
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202421090166.2U
Other languages
Chinese (zh)
Inventor
张大林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xiamen Lucky Microelectronics Co ltd
Original Assignee
Xiamen Lucky Microelectronics Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xiamen Lucky Microelectronics Co ltd filed Critical Xiamen Lucky Microelectronics Co ltd
Priority to CN202421090166.2U priority Critical patent/CN222491205U/en
Application granted granted Critical
Publication of CN222491205U publication Critical patent/CN222491205U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)

Abstract

The utility model relates to the technical field of cleaning machines, in particular to a slide holder positioning mechanism of a cleaning machine, which comprises a workbench, a positioning assembly and a cleaning assembly, wherein the cleaning assembly comprises a supporting frame, a motor, a threaded rod, a first sliding block, an output head and a water supply assembly, the supporting frame which is in an inverted L shape is arranged on the workbench, a chute is arranged in the center below the top wall of the supporting frame, the threaded rod and the first sliding block are arranged in the chute, the first sliding block is in threaded connection with the threaded rod, the output end of the motor penetrates through the chute of the supporting frame and is connected with the threaded rod, the slide holder positioning mechanism of the cleaning machine drives a positive and negative tooth threaded rod to rotate through a handle, two groups of second sliding blocks drive a centering frame to move in opposite directions so as to stably clamp materials, the equipment can clamp the materials with different specifications, the water supply assembly and the first motor are started, and the first sliding block drives the output head to move and flush the materials, and the slide holder is convenient to use.

Description

Slide glass platform positioning mechanism of cleaning machine
Technical Field
The utility model relates to the technical field of cleaning machines, in particular to a slide table positioning mechanism of a cleaning machine.
Background
As is well known, a cleaning machine is needed in the semiconductor processing process of the chip industry, the existing cleaning machine is inconvenient to bear semiconductors of different specifications, the clamp or the bearing device of the corresponding specification is inconvenient to replace, and after the cleaning is finished, the corresponding bearing device is inconvenient to dry quickly so that subsequent materials can be processed continuously, so that the processing efficiency is low.
Disclosure of utility model
(One) solving the technical problems
Aiming at the defects of the prior art, the utility model provides a slide table positioning mechanism of a cleaning machine.
(II) technical scheme
The slide glass table positioning mechanism comprises a workbench, a positioning component and a cleaning component, wherein the cleaning component comprises a support frame, a motor, a threaded rod, a first sliding block, an output head and a water supply component, the support frame which is in an inverted L shape is arranged on the workbench, a sliding groove is formed in the center below the top wall of the support frame, the threaded rod and the first sliding block are arranged in the sliding groove, the first sliding block is in threaded connection with the threaded rod, the output end of the motor penetrates through the sliding groove of the support frame and is connected with the threaded rod, the output head is arranged below the first sliding block, the water supply component which is connected with the output head is further arranged on the workbench, the positioning component comprises a cross beam, a positive and negative screw rod, a handle, a second sliding block and a centering frame, the cross beam is connected with the side wall of the support frame, two groups of second sliding blocks and positive and negative screw rods are symmetrically arranged in the centering groove, the second sliding blocks and the positive and negative screw rods are in threaded connection with the second side wall of the support frame, and the centering frame is in a threaded connection with the positive and negative screw rod, and the positive screw rods are in the threaded connection with the side wall of the centering frame, and the centering screw rod is in the L shape.
In order to facilitate centering and clamping stability, the utility model is improved in that the side wall of the centering frame is provided with a friction pad.
In order to provide stable support for materials conveniently, the utility model is improved in that a support block is arranged above the bottom wall of the centering frame.
The utility model provides stable support for materials and simultaneously ensures that the contact part of a supporting block and the materials is quickly dried.
Preferably, the cross beam is provided with a draining hole penetrating through the centering groove.
Preferably, a waste liquid frame is arranged on the workbench below the cross beam.
(III) beneficial effects
Compared with the prior art, the utility model provides a slide holder positioning mechanism of a cleaning machine, which has the following beneficial effects:
This slide glass platform positioning mechanism of cleaning machine drives positive and negative tooth screw rod rotation through the handle, and two sets of second sliders drive centering frame opposite movement and stabilize the centre gripping to the material, and equipment can the different specification of centre gripping material, starts water supply assembly and first motor, and first motor drives the threaded rod rotation, and first slider drives the output head and removes and wash the material, convenient to use.
Drawings
FIG. 1 is a schematic diagram of the front view of the structure of the present utility model;
FIG. 2 shows the present utility model a structural bottom view schematic;
FIG. 3 is a schematic top view of a portion of the structure of the present utility model;
Fig. 4 is a partial bottom view of the structure of the present utility model.
In the figure, 1, a workbench; 2, a supporting frame, 3, a motor, 4, a threaded rod, 5, a first sliding block, 6, an output head, 7, a water supply assembly, 8, a cross beam, 9, a positive and negative tooth screw rod, 10, a handle, 11, a second sliding block, 12, a centering frame, 13, a friction pad, 14, a supporting block, 15 and a waste liquid frame.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-4, a slide holder positioning mechanism of a cleaning machine comprises a workbench 1, a positioning component and a cleaning component, wherein the cleaning component comprises a support frame 2, a motor 3, a threaded rod 4, a first sliding block 5, an output head 6 and a water supply component 7, the support frame 2 which is in an inverted-L shape is arranged on the workbench 1, a sliding groove is formed in the center of the lower top wall of the support frame 2, the threaded rod 4 and the first sliding block 5 are arranged in the sliding groove, the first sliding block 5 is in threaded connection with the threaded rod 4, the output end of the motor 3 penetrates through the sliding groove of the support frame 2 and is connected with the threaded rod 4, the water supply component 7 which is connected with the output head 6 is arranged below the first sliding block 5, the positioning component is further arranged below the output head 6, the positioning component comprises a cross beam 8, a positive and negative threaded rod 9, a handle 10, a second sliding block 11 and a centering frame 12, the cross beam 8 is connected with the side wall of the support frame 2, the centering groove is arranged on the cross beam 8, the positive and negative threaded rod 9 is in a symmetrical manner, the two centering threaded rods 11 are arranged in the two groups of the centering grooves are connected with the two side walls 11 and the two centering frames 11 are in a threaded rod 11.
In the actual use process, the gap between the two groups of centering frames 12 is larger initially, the positive and negative screw rods 9 are driven to rotate through the handles 10, the positive and negative screw rods 9 drive the two groups of second sliding blocks 11 to move in opposite directions in the centering grooves of the cross beam 8, the support frame 2 provides stable support for the cross beam 8 on the workbench 1, the two groups of centering frames 12 are placed on the centering frames 12 to continuously rotate the handles 10 after being adjusted to the proper positions, until the side walls of the two groups of centering frames 12 clamp and fix the materials, the water supply assembly 7 and the motor 3 are started, the motor 3 drives the threaded rod 4 on the top wall of the support frame 2 to rotate, the first sliding blocks 5 drive the output head 6 to move under the driving of the threaded rod 4, the water supply assembly 7 comprises a water tank, a water pump and equipment which can be purchased in the market with a connecting pipe, and the output head 6 outputs liquid to clean the surface of the materials.
In the actual use process, stable clamping of the materials needs to be ensured, and for this purpose, the side wall of the centering frame 12 is provided with a friction pad 13.
If the material is directly placed above the bottom wall of the centering frame 12, water is easy to remain above the bottom wall of the centering frame 12 after flushing, in order to solve the problem, a supporting block 14 is arranged above the bottom wall of the centering frame 12, the supporting block 14 is hemispherical, the supporting blocks 14 are arranged into a plurality of groups, the supporting blocks 14 for supporting the hemispherical form provide stable support for the material, meanwhile, the contact area with the material is reduced, and the water remained on the top wall of the supporting block 14 is more easy to blow-dry under the action of gravity and an arc surface.
In actual use, the centering groove is easy to be in existence, in order to solve the problem, the cross beam 8 is provided with a draining hole penetrating through the centering groove, and the workbench 1 below the cross beam 8 is provided with a waste liquid frame 15, so that waste liquid is conveniently collected.
In order to describe the possible application scenarios, technical principles, practical embodiments, and the like of the present application in detail, the following description is made with reference to the specific embodiments and the accompanying drawings. The embodiments described herein are only for more clearly illustrating the technical aspects of the present application, and thus are only exemplary and not intended to limit the scope of the present application.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearances of the phrase "in various places in the specification are not necessarily all referring to the same embodiment, nor are they particularly limited to independence or relevance from other embodiments. In principle, in the present application, as long as there is no technical contradiction or conflict, the technical features mentioned in each embodiment may be combined in any manner to form a corresponding implementable technical solution.
Unless defined otherwise, technical terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application pertains, and the use of related terms herein is intended only to describe specific embodiments, not to limit the present application.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1.一种清洗机的载片台定位机构,包括工作台(1)、定位组件和清洗组件,其特征在于:所述清洗组件包括支撑架(2)、电机(3)、螺纹杆(4)、第一滑块(5)、输出头(6)和供水组件(7),所述工作台(1)上设置有呈倒L形的支撑架(2),所述支撑架(2)顶壁下方中心设置有滑槽,所述滑槽内设置有所述螺纹杆(4)和第一滑块(5),所述第一滑块(5)与所述螺纹杆(4)螺纹连接,所述电机(3)输出端贯通所述支撑架(2)的滑槽并与所述螺纹杆(4)连接,所述第一滑块(5)下方设置有所述输出头(6),所述工作台(1)上还设置有与所述输出头(6)连接的供水组件(7),所述输出头(6)下方还设置有所述定位组件,所述定位组件包括横梁(8)、正反牙螺杆(9)、把手(10)、第二滑块(11)和对中架(12),所述横梁(8)与所述支撑架(2)侧壁连接,所述横梁(8)上设置有对中槽,所述对中槽内设置有两组对称布置第二滑块(11)和正反牙螺杆(9),所述第二滑块(11)与所述正反牙螺杆(9)螺纹连接,所述正反牙螺杆(9)一端贯通所述对中槽侧壁并与所述把手(10)连接,所述第二滑块(11)上设置有所述对中架(12),所述对中架(12)呈L形。1. A wafer stage positioning mechanism for a cleaning machine, comprising a workbench (1), a positioning assembly and a cleaning assembly, characterized in that: the cleaning assembly comprises a support frame (2), a motor (3), a threaded rod (4), a first slider (5), an output head (6) and a water supply assembly (7); the workbench (1) is provided with an inverted L-shaped support frame (2); a slide groove is provided at the center below the top wall of the support frame (2); the threaded rod (4) and the first slider (5) are provided in the slide groove; the first slider (5) is threadedly connected to the threaded rod (4); the output end of the motor (3) passes through the slide groove of the support frame (2) and is connected to the threaded rod (4); the output head (6) is provided below the first slider (5); the workbench (1) is also provided with A water supply assembly (7) is provided which is connected to the output head (6); the positioning assembly is also provided below the output head (6); the positioning assembly comprises a crossbeam (8), a positive and negative threaded screw (9), a handle (10), a second slider (11) and a centering frame (12); the crossbeam (8) is connected to the side wall of the support frame (2); a centering groove is provided on the crossbeam (8); two groups of symmetrically arranged second sliders (11) and positive and negative threaded screws (9) are provided in the centering groove; the second slider (11) is threadedly connected to the positive and negative threaded screw (9); one end of the positive and negative threaded screw (9) passes through the side wall of the centering groove and is connected to the handle (10); the centering frame (12) is provided on the second slider (11); the centering frame (12) is L-shaped. 2.根据权利要求1所述的一种清洗机的载片台定位机构,其特征在于:所述对中架(12)侧壁设置有摩擦垫(13)。2. A wafer stage positioning mechanism for a cleaning machine according to claim 1, characterized in that a friction pad (13) is provided on the side wall of the centering frame (12). 3.根据权利要求2所述的一种清洗机的载片台定位机构,其特征在于:所述对中架(12)底壁上方设置有支撑块(14)。3. A wafer stage positioning mechanism for a cleaning machine according to claim 2, characterized in that a support block (14) is provided above the bottom wall of the centering frame (12). 4.根据权利要求3所述的一种清洗机的载片台定位机构,其特征在于:所述支撑块(14)呈半球状,所述支撑块(14)设置为若干组。4. A wafer stage positioning mechanism for a cleaning machine according to claim 3, characterized in that: the support block (14) is hemispherical and the support blocks (14) are arranged in a plurality of groups. 5.根据权利要求4所述的一种清洗机的载片台定位机构,其特征在于:所述横梁(8)上设置有贯通对中槽的沥水孔。5. A wafer stage positioning mechanism for a cleaning machine according to claim 4, characterized in that: a drainage hole penetrating the centering groove is provided on the crossbeam (8). 6.根据权利要求5所述的一种清洗机的载片台定位机构,其特征在于:所述横梁(8)下方的工作台(1)上设置有废液框(15)。6. A wafer stage positioning mechanism for a cleaning machine according to claim 5, characterized in that a waste liquid frame (15) is provided on the workbench (1) below the crossbeam (8).
CN202421090166.2U 2024-05-20 2024-05-20 Slide glass platform positioning mechanism of cleaning machine Active CN222491205U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202421090166.2U CN222491205U (en) 2024-05-20 2024-05-20 Slide glass platform positioning mechanism of cleaning machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202421090166.2U CN222491205U (en) 2024-05-20 2024-05-20 Slide glass platform positioning mechanism of cleaning machine

Publications (1)

Publication Number Publication Date
CN222491205U true CN222491205U (en) 2025-02-18

Family

ID=94554680

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202421090166.2U Active CN222491205U (en) 2024-05-20 2024-05-20 Slide glass platform positioning mechanism of cleaning machine

Country Status (1)

Country Link
CN (1) CN222491205U (en)

Similar Documents

Publication Publication Date Title
US20250010412A1 (en) Worktable for cutting monocrystalline silicon wafer
CN222491205U (en) Slide glass platform positioning mechanism of cleaning machine
CN114770272A (en) Deburring device for cable bridge production and processing
CN111318533A (en) Test tube cleaning equipment for biotechnology of two-sided centre gripping and automatic change test tube
CN211999912U (en) A suspension device for coating parts that can expand the contact surface
CN221934923U (en) Cleaning equipment for integrated circuit material box
CN209793215U (en) An electric automation fixture with replaceable chuck
CN217192714U (en) Automatic punching device for bearing production
CN211540350U (en) Positioning fixture for machining
CN208005336U (en) A kind of double main shaft deburring machines
CN217596710U (en) A mobile limit device for aluminum processing
CN221436108U (en) Lathe cutter burnishing device
CN221755735U (en) A support foot that is easy to remove quickly
CN207013417U (en) A kind of efficient test tube cleaner
CN207758468U (en) A kind of fine arts paintbrush cleaning device
CN222198354U (en) Cleaning equipment for aluminum profile extrusion die
CN221834067U (en) A polishing device for battery cell production
CN221847974U (en) Toughened glass processing platform
CN222816877U (en) A chemical laboratory bench
CN221708670U (en) Etching device for processing semiconductor chip
CN221951959U (en) Marine water quality survey device
CN221911566U (en) Subassembly is used in dismantlement of steam turbine baffle
CN222561568U (en) A magnetic particle flaw detection device for large bearing rollers
CN216938774U (en) A multifunctional engraving machine
CN220408302U (en) Furniture processing burnishing device

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant