CN222011664U - Vacuum treatment system for electronic grade polysilicon reduction system - Google Patents

Abstract

The utility model discloses a vacuum treatment system for an electronic grade polysilicon reduction system, which comprises vacuum pumps, wherein the two vacuum pumps are respectively connected with a vacuum buffer tank, an inlet of one vacuum buffer tank is communicated with a start-stop displacement pipeline, a plurality of displacement branch pipes are communicated with the start-stop displacement pipeline, and any one of the displacement branch pipes is connected with a reduction furnace tail gas pipe; the other vacuum buffer tank is connected with the gas outlet of dust removal filter, and dust removal filter's air inlet passes through check valve and dust removal pipeline intercommunication, and the intercommunication has a plurality of dust removal branch pipes on the dust removal pipeline, and the dust removal branch pipe is connected with the reducing furnace chassis dust outlet, is equipped with the manual valve on the dust removal branch pipe, advantage: and the shutdown of a plurality of vacuum pumps is regulated, so that one vacuum pump is shared when the replacement operation is started and the cleaning operation of the bottom plate of the reduction furnace is performed, and the waste of production cost is avoided. The bottom plate of the reduction furnace is cleaned, a dust removal filter and a movable dust removal box are introduced, large particles are collected and utilized, and high-efficiency dust removal is realized.

Description

Vacuum treatment system for electronic grade polysilicon reduction system

Technical Field

The utility model relates to the technical field of polysilicon vacuum treatment, in particular to a vacuum treatment system for an electronic grade polysilicon reduction system.

Background

The current technology for producing polysilicon by using the improved Siemens method is still a main technology for preparing electronic grade polysilicon materials in China, and the production flow of an electronic grade polysilicon reduction system by using the improved Siemens method is approximately as follows: cleaning a reducing furnace chassis, loading a silicon core into the furnace, starting the reducing furnace for replacement, running the reducing furnace, stopping the reducing furnace for replacement and removing a silicon rod.

In the production process of the electronic grade polysilicon reduction system, the vacuum treatment device is required to be used for vacuumizing operation in the furnace starting replacement operation and the furnace stopping replacement operation of the reduction furnace, wherein the furnace starting replacement refers to replacing air in the reduction furnace with hydrogen environment by using nitrogen and hydrogen in sequence; the furnace shutdown replacement refers to replacing the hydrogen atmosphere in the reduction furnace with a nitrogen atmosphere using nitrogen. Meanwhile, a vacuum dust removing device is also required to carry out chassis cleaning operation in the process of charging operation of the reduction furnace.

At present, a set of independent vacuum treatment devices are required to be arranged for the furnace start-up and furnace shut-down replacement operation of the reduction furnace respectively, and another set of vacuum treatment devices are required to be arranged for the chassis cleaning, namely, two sets of vacuum treatment devices are required to be arranged to meet the production operation of the reduction system, so that certain production cost is wasted; meanwhile, the dust removal effect of the chassis cleaning is poor, and a small amount of dust enters the vacuum system along with the airflow.

Disclosure of utility model

The utility model aims to provide a vacuum processing system for an electronic grade polysilicon reduction system.

The utility model is implemented by the following technical scheme:

The vacuum treatment system comprises two vacuum pumps, a vacuum buffer tank, a dust removal filter, a start-stop replacement pipeline, a replacement branch pipe, a dust removal pipeline and a dust removal branch pipe, wherein the inlet of each vacuum pump is connected with one end of a connecting pipe through a manual valve, the other end of the connecting pipe is connected with the outlet of the vacuum buffer tank, one inlet of the vacuum buffer tank is communicated with the start-stop replacement pipeline through a check valve, and a plurality of replacement branch pipes are communicated with the start-stop replacement pipeline;

The inlet of the other vacuum buffer tank is connected with the air outlet of the dust removal filter through a check valve, the air inlet of the dust removal filter is communicated with the dust removal pipeline through a check valve, a plurality of dust removal branch pipes are communicated with the dust removal pipeline, the dust removal branch pipes are connected with the dust outlet of the chassis of the reduction furnace, and a manual valve is arranged on each dust removal branch pipe;

A communicating pipe is communicated between the two connecting pipes, and a manual valve is arranged on the communicating pipe;

And the connecting pipe and the replacement branch pipe are respectively provided with a manual valve, a cut-off valve and a check valve.

Preferably, the dust removal filter comprises a tank body, a back-blowing port is arranged at the top of the tank body, a drain outlet is arranged at the bottom of the tank body, an air outlet and an air inlet are respectively arranged at the staggered positions of the two sides of the tank body, an inlet screen plate, a filter element and an outlet screen plate are sequentially arranged in the tank body from bottom to top, the inlet screen plate is arranged between the filter element and the air inlet and is fixed on the inner wall of the tank body, the outlet screen plate is arranged above the filter element, the outlet screen plate corresponds to the air outlet, and the outlet screen plate is fixed on the periphery of a pipe orifice of the air outlet on the inner wall of the tank body.

Preferably, the nitrogen backflushing device further comprises a nitrogen backflushing pipeline, wherein the nitrogen backflushing pipeline is connected with the backflushing port through a manual valve and a cut-off valve.

Preferably, the portable dust removing box comprises a box body, a cover is arranged at the top of the box body, universal wheels are arranged at the bottom of the box body, an air outlet and an air inlet are respectively arranged at the upper and lower staggered positions of the two sides of the box body, the air outlet positioned above is communicated with any dust removing branch pipe through a metal hose and a quick connector, and the air inlet positioned below is connected with a dust outlet of a chassis of the reduction furnace;

The inside dust collection barrel, dust board, the filter screen that is equipped with in proper order from bottom to top of box, the dust board sets up downwards to one side, and corresponds the air intake, the top of dust board is fixed on the box inner wall, the filter screen corresponds the air outlet, and fix around the mouth of pipe of air outlet on the box inner wall.

The utility model has the advantages that:

1. The manual valve at the inlet of any vacuum pump is closed, and then the manual valve on the communicating pipe is opened, so that the other vacuum pump can be communicated with the two sets of vacuum systems of the start-stop replacing vacuum system and the reducing furnace bottom plate cleaning vacuum system, and the vacuum pump is shared when the start-stop replacing operation and the reducing furnace bottom plate cleaning operation are carried out, thereby avoiding the waste of production cost.

2. The bottom plate of the reduction furnace is cleaned, a dust removal filter and a movable dust removal box are introduced, large particles are collected and utilized, and high-efficiency dust removal is realized.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic view of the overall structure of the present utility model.

Fig. 2 is a schematic view of the dust filter structure of the present utility model.

Fig. 3 is a schematic view of the structure of the mobile dust box of the present utility model.

In the figure: the vacuum pump 1, the vacuum buffer tank 2, the dust removal filter 3, the tank body 3.1, the blowback port 3.2, the drain port 3.3, the gas outlet 3.4, the gas inlet 3.5, the inlet screen plate 3.6, the filter element 3.7, the outlet screen plate 3.8, the start-stop replacement pipeline 4, the replacement branch pipe 5, the dust removal pipeline 6, the dust removal branch pipe 7, the connecting pipe 8, the communicating pipe 9, the nitrogen backflushing pipeline 10, the movable dust removal tank 11, the tank body 11.1, the cover 11.2, the universal wheel 11.3, the gas outlet 11.4, the gas inlet 11.5, the dust collection barrel 11.6, the dust baffle 11.7 and the filter screen 11.8.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in fig. 1, a vacuum treatment system for an electronic grade polysilicon reduction system comprises a vacuum pump 1, a vacuum buffer tank 2, a dust removal filter 3, a start-stop exchange pipeline 4, a replacement branch pipe 5, a dust removal pipeline 6 and a dust removal branch pipe 7, wherein the number of the vacuum pump 1 is two, the inlet of each vacuum pump 1 is connected with one end of a connecting pipe 8 through a manual valve, the other end of the connecting pipe 8 is connected with the outlet of the vacuum buffer tank 2, the inlet of one vacuum buffer tank 2 is communicated with the start-stop exchange pipeline 4 through a check valve, a plurality of replacement branch pipes 5 are communicated with the start-stop exchange pipeline 4, and any replacement branch pipe 5 is connected with a tail gas pipe of a reduction furnace;

When the start-stop replacement operation is carried out, the start-stop replacement vacuum system adopts one of the vacuum pumps 1 to suck air at negative pressure, and the negative pressure air pumps out the air to be replaced in the reduction furnace along the replacement branch pipe 5, the start-stop replacement pipeline 4 and the corresponding vacuum buffer tank 2, so that the vacuum degree required by the start-stop replacement of the reduction furnace is achieved.

The inlet of the other vacuum buffer tank 2 is connected with the air outlet 3.4 of the dust removal filter 3 through a check valve, the air inlet 3.5 of the dust removal filter 3 is communicated with the dust removal pipeline 6 through a check valve, a plurality of dust removal branch pipes 7 are communicated with the dust removal pipeline 6, the dust removal branch pipes 7 are connected with the dust outlet of the chassis of the reduction furnace, and a manual valve is arranged on each dust removal branch pipe 7;

When the cleaning operation of the bottom plate of the reduction furnace is carried out, the vacuum system for starting the cleaning of the bottom plate of the reduction furnace is characterized in that a manual valve is arranged on a dust removing branch pipe 7, the negative pressure of another vacuum pump 1 is used for sucking air, dust on the bottom plate of the reduction furnace is pumped out along the dust removing branch pipe 7, a dust removing pipeline 6, a dust removing filter 3 and a corresponding vacuum buffer tank 2 by the negative pressure air, and the dust is removed and purified when passing through the dust removing filter 3, so that the effect of cleaning the bottom plate of the reduction furnace is achieved.

A communicating pipe 9 is communicated between the two connecting pipes 8, and a manual valve is arranged on the communicating pipe 9;

The manual valve at the inlet of any vacuum pump 1 is turned off, and then the manual valve on the communicating pipe 9 is turned on, so that the other vacuum pump 1 can be communicated with the start-stop replacing vacuum system and the reducing furnace hearth cleaning vacuum system, and one vacuum pump 1 is shared when the start-stop replacing operation and the reducing furnace hearth cleaning operation are carried out, and the waste of production cost is avoided.

The connecting pipe 8 and the replacement branch pipe 5 are respectively provided with a manual valve, a cut-off valve and a check valve.

When the start-stop replacement operation is carried out, firstly, the manual valve and the cut-off valve on the replacement branch pipe 5 are opened, and after the vacuum degree required by the start-stop replacement of the reduction furnace is reached, the manual valve and the cut-off valve on the replacement branch pipe 5 are closed; the connecting pipe 8 is provided with a manual valve, a cut-off valve and a check valve to control the normal operation of the system, and meanwhile, the phenomenon of pressure cross is avoided.

As shown in fig. 2 and 3, the dust removal filter 3 comprises a tank body 3.1, a back-blowing port 3.2 is arranged at the top of the tank body 3.1, a drain outlet 3.3 is arranged at the bottom, an air outlet 3.4 and an air inlet 3.5 are respectively arranged at the staggered positions of the two sides of the tank body 3.1, an inlet screen plate 3.6, a filter element 3.7 and an outlet screen plate 3.8 are sequentially arranged in the tank body 3.1 from bottom to top, the inlet screen plate 3.6 is arranged between the filter element 3.7 and the air inlet 3.5 and is fixed on the inner wall of the tank body 3.1, the outlet screen plate 3.8 is arranged above the filter element 3.7, the outlet screen plate 3.8 corresponds to the air outlet 3.4 and is fixed on the inner wall of the tank body 3.1 around the pipe orifice of the air outlet 3.4.

When the dust is sucked into the tank body 3.1 of the dust removal filter 3, the dust firstly enters from the air inlet 3.5 and then moves upwards along the air flow, and is screened by the inlet screen plate 3.6, the aperture of the inlet screen plate 3.6 is selected to be 10-50 mu m, and large-particle dust can be filtered, so that the filter element 3.7 is prevented from being blocked, and the service life of the filter element is prevented from being influenced. Then the filter element 3.7 is filtered, 4-8 layers of filter elements 3.7 are arranged in the middle, and the pore size of the filter elements 3.7 is selected to be 0.3-1.0 mu m. Finally, before being discharged from the air outlet 3.4, the dust is filtered by the outlet screen plate 3.8, the aperture of the outlet screen plate 3.8 is selected to be 10-50 mu m, and large particle dust can be prevented from entering the vacuum buffer tank 2.

The nitrogen backflushing pipeline 10 is connected with the backflushing port 3.2 through a manual valve and a cut-off valve.

The manual valve and the cut-off valve are opened, nitrogen coming out of the nitrogen backflushing pipeline 10 is blown downwards into the tank body 3.1 from the backflushing port 3.2, deposited dust of the inlet screen plate 3.6, the filter element 3.7 and the outlet screen plate 3.8 is blown out from the sewage outlet 3.3, the purpose of automatically cleaning ash can be achieved, and the filter is prevented from being blocked. After the nitrogen is back-blown, the dust particles can be discharged and collected through a drain outlet 3.3.

The dust removing device comprises a box body 11, and is characterized by further comprising a movable dust removing box 11, wherein the movable dust removing box 11 comprises a box body 11.1, a cover 11.2 is arranged at the top of the box body 11.1, universal wheels 11.3 are arranged at the bottom of the box body 11.1, an air outlet 11.4 and an air inlet 11.5 are respectively arranged at the upper and lower staggered positions of the two sides of the box body 11.1, the air outlet 11.4 positioned above is communicated with any dust removing branch pipe 7 through a metal hose and a quick connector, and the air inlet 11.5 positioned below is connected with a dust outlet of a chassis of the reduction furnace;

The inside of the box 11.1 is sequentially provided with a dust collection barrel 11.6, a dust baffle 11.7 and a filter screen 11.8 from bottom to top, wherein the dust baffle 11.7 is obliquely downwards arranged and corresponds to the air inlet 11.5, the top end of the dust baffle 11.7 is fixed on the inner wall of the box 11.1, and the filter screen 11.8 corresponds to the air outlet 11.4 and is fixed on the inner wall of the box 11.1 around the pipe orifice of the air outlet 11.4.

When the cleaning operation of the bottom plate of the reduction furnace is carried out, the movable dust removing box 11 can be connected, the dust removing effect is enhanced, dust air flow of the bottom plate of the reduction furnace firstly enters the movable dust removing box 11 and then enters the dust removing branch pipe 7 along, when the dust air flow passes through the movable dust removing box 11, the dust air flow firstly enters the box body 11.1 from the air inlet 11.5, firstly, the dust air flow is downwards guided through the dust baffle 11.7, the dust baffle 11.7 prevents large particle dust from impacting the filter screen 11.8 at the position of the air outlet 11.4, then upwards flows, the dust flows through the filter screen 11.8, the pore space of the filter screen 11.8 is 50-100 mu m, the large particle dust can be filtered and collected, and finally, the dust air flow is discharged from the air outlet 11.4.

The dust collection barrel 11.6 collects falling dust, the cover 11.2 is opened for cleaning, and the universal wheel 11.3 is convenient for moving and replacing the position for use.

Working principle: when the utility model is used, the manual valve at the inlet of any vacuum pump 1 is turned off, and then the manual valve on the communicating pipe 9 is turned on, so that two sets of vacuum systems (a start-stop vacuum system and a reducing furnace bottom disc cleaning vacuum system) use one vacuum pump 1.

When the start-stop replacement operation is carried out, the start-stop replacement vacuum system adopts a vacuum pump 1 to suck air at negative pressure, and the air to be replaced in the reduction furnace is pumped out by the negative pressure air along a replacement branch pipe 5, a start-stop replacement pipeline 4 and a corresponding vacuum buffer tank 2, so that the vacuum degree required by the start-stop replacement of the reduction furnace is achieved.

When the cleaning operation of the bottom plate of the reduction furnace is carried out, the vacuum system for cleaning the bottom plate of the reduction furnace is started, a manual valve is arranged on the dust removing branch pipe 7, the negative pressure of the vacuum pump 1 is used for sucking air, and the negative pressure air pumps dust on the bottom plate of the reduction furnace along the movable dust removing box 11, the dust removing branch pipe 7, the dust removing pipeline 6, the dust removing filter 3 and the corresponding vacuum buffer tank 2, so that the dust is removed and purified when the dust removing filter 3 is used for cleaning the bottom plate of the reduction furnace.

The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.

Claims (4)

1. The vacuum treatment system for the electronic grade polysilicon reduction system is characterized by comprising two vacuum pumps, a vacuum buffer tank, a dust removal filter, a start-stop replacement pipeline, a replacement branch pipe, a dust removal pipeline and a dust removal branch pipe, wherein the inlet of each vacuum pump is connected with one end of a connecting pipe through a manual valve, the other end of the connecting pipe is connected with the outlet of the vacuum buffer tank, one inlet of the vacuum buffer tank is communicated with the start-stop replacement pipeline through a check valve, a plurality of replacement branch pipes are communicated with the start-stop replacement pipeline, and any replacement branch pipe is connected with a reduction furnace tail gas pipe;

The inlet of the other vacuum buffer tank is connected with the air outlet of the dust removal filter through a check valve, the air inlet of the dust removal filter is communicated with the dust removal pipeline through a check valve, a plurality of dust removal branch pipes are communicated with the dust removal pipeline, the dust removal branch pipes are connected with the dust outlet of the chassis of the reduction furnace, and a manual valve is arranged on each dust removal branch pipe;

A communicating pipe is communicated between the two connecting pipes, and a manual valve is arranged on the communicating pipe;

And the connecting pipe and the replacement branch pipe are respectively provided with a manual valve, a cut-off valve and a check valve.

2. A vacuum processing system for an electronic grade polysilicon reduction system as set forth in claim 1, wherein: the dust removal filter comprises a tank body, wherein a back-blowing opening is formed in the top of the tank body, a sewage outlet is formed in the bottom of the tank body, an air outlet and an air inlet are respectively formed in the staggered positions of the two sides of the tank body, an inlet screen plate, a filter core and an outlet screen plate are sequentially arranged in the tank body from bottom to top, the inlet screen plate is arranged between the filter core and the air inlet and is fixed on the inner wall of the tank body, the outlet screen plate is arranged above the filter core, the outlet screen plate corresponds to the air outlet, and the periphery of a pipe orifice of the air outlet is fixed on the inner wall of the tank body.

3. A vacuum processing system for an electronic grade polysilicon reduction system as set forth in claim 2, wherein: the nitrogen backflushing pipeline is connected with the backflushing port through a manual valve and a cut-off valve.

4. A vacuum processing system for an electronic grade polysilicon reduction system as set forth in claim 3, wherein: the movable dust removing box comprises a box body, a cover is arranged at the top of the box body, universal wheels are arranged at the bottom of the box body, an air outlet and an air inlet are respectively arranged at the upper and lower staggered positions of the two sides of the box body, the air outlet positioned above is communicated with any dust removing branch pipe through a metal hose and a quick connector, and the air inlet positioned below is connected with a dust outlet of a chassis of the reduction furnace;

The inside dust collection barrel, dust board, the filter screen that is equipped with in proper order from bottom to top of box, the dust board sets up downwards to one side, and corresponds the air intake, the top of dust board is fixed on the box inner wall, the filter screen corresponds the air outlet, and fix around the mouth of pipe of air outlet on the box inner wall.