CN221983230U - Silicon raw material cleaning device for silicon smelting - Google Patents

Silicon raw material cleaning device for silicon smelting Download PDF

Info

Publication number
CN221983230U
CN221983230U CN202420400518.3U CN202420400518U CN221983230U CN 221983230 U CN221983230 U CN 221983230U CN 202420400518 U CN202420400518 U CN 202420400518U CN 221983230 U CN221983230 U CN 221983230U
Authority
CN
China
Prior art keywords
rack
cleaning
water
cleaning frame
gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202420400518.3U
Other languages
Chinese (zh)
Inventor
郭瑞
郭占荣
郭龙飞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inner Mongolia Ruiheng New Materials Co ltd
Original Assignee
Inner Mongolia Ruiheng New Materials Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inner Mongolia Ruiheng New Materials Co ltd filed Critical Inner Mongolia Ruiheng New Materials Co ltd
Priority to CN202420400518.3U priority Critical patent/CN221983230U/en
Application granted granted Critical
Publication of CN221983230U publication Critical patent/CN221983230U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Silicon Compounds (AREA)

Abstract

The utility model is applicable to the technical field of cleaning devices, and provides a silicon raw material cleaning device for silicon smelting, which comprises a cleaning frame; a plurality of universal wheels are uniformly fixed on the bottom surface of the cleaning frame; the side surface of the cleaning frame is rotatably provided with a first gear; the side surface of the cleaning frame is positioned at two sides of the first gear and is respectively provided with a first rack and a second rack which are engaged and matched with the first gear in a sliding way; a plurality of water pipes and a plurality of mounting pipes are slidably arranged on the two opposite sides of the cleaning frame; a plurality of hairbrushes are uniformly arranged on the peripheral side surface of the mounting tube; one end of the water pipe is fixedly connected with the side surface of the first rack; one end of the mounting pipe is rotationally connected with the side surface of the second rack; a plurality of cleaning spray heads uniformly penetrate and are fixed on the peripheral side surface of the water pipe; the problem that the translation of brush and the swing of pipe can increase the washing cost is solved through cylinder and driving motor drive alone respectively to the slip of being provided with the storage frame between the two opposite inner walls of wash rack, has reached the effect that drives simultaneously through single driving force.

Description

Silicon raw material cleaning device for silicon smelting
Technical Field
The utility model relates to the technical field of cleaning devices, in particular to a silicon raw material cleaning device for silicon smelting.
Background
In the process of manufacturing an integrated circuit chip, a silicon wafer generally undergoes a plurality of process steps such as film deposition, etching, polishing and the like, and the implementation of the process steps inevitably causes surface pollution of the silicon wafer, so that the performance of an ultra-micro circuit on the chip is affected, and therefore, in order to ensure the cleaning of the surface of the silicon wafer, the silicon wafer needs to be cleaned by cleaning equipment.
Through retrieving, the patent of publication number CN219899224U discloses a belt cleaning device for metal silicon smelting, including wasing the case, the surface mounting who washs the case has the cylinder, the side fixedly connected with brush of cylinder, be provided with the pipe in wasing the case, the bottom of pipe is provided with the sprinkler bead, through setting up driving motor, first gear, the second gear, the pipe, the sprinkler bead, connecting spring, the water tank, the cooperation of suction pump and hose is used, can enter into the pipe with the water in the water tank in the hose, and spout through the sprinkler bead, simultaneously through the circulation intermittent type meshing of first gear and second gear, make pipe and sprinkler bead cycle swing, and then can carry out comprehensive moist to the surface of metal silicon, improve the cleaning quality to metal silicon.
However, the translation of the hairbrush and the swinging of the circular tube in the cleaning device for smelting metal silicon are driven by the air cylinder and the driving motor respectively and independently, so that the cleaning cost is increased, and the cleaning device for silicon raw materials for smelting silicon is provided, wherein the circular tube and the hairbrush are driven to move simultaneously only by a single driving force.
Disclosure of utility model
Aiming at the defects of the prior art, the utility model aims to provide the silicon raw material cleaning device for silicon smelting, which has the advantages that the servo motor drives the first gear to rotate so as to drive the first rack and the second rack to slide, the first rack slides to drive the water pipe to move left and right so as to realize the omnibearing silicon cleaning of the cleaning nozzle, and meanwhile, the second rack slides to drive the mounting pipe to slide left and right so as to realize the back and forth movement of the brush in the cleaning frame so as to clean the silicon, and the flushing and the brushing are realized simultaneously only through one driving force, so that the cost is saved, and the practicability of the device is improved.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
A silicon raw material cleaning device for silicon smelting comprises a cleaning frame; a plurality of universal wheels are uniformly fixed on the bottom surface of the cleaning frame; the side surface of the cleaning frame is rotatably provided with a first gear; the side surfaces of the cleaning frame are positioned on two sides of the first gear, and a first rack and a second rack which are engaged and matched with the first gear are respectively arranged in a sliding manner; a plurality of water pipes and a plurality of mounting pipes are slidably arranged on two opposite sides of the cleaning frame; a plurality of hairbrushes are uniformly arranged on the peripheral side surface of the mounting pipe; one end of the water pipe is fixedly connected with the side surface of the first rack; one end of the mounting pipe is rotationally connected with the side face of the second rack; a plurality of cleaning spray heads uniformly penetrate through and are fixed on the peripheral side surface of the water pipe; a storage frame is slidably arranged between the two opposite inner walls of the cleaning frame.
The utility model is further provided with: a supporting plate is fixed on the side surface of the cleaning frame; a servo motor is fixed on the surface of the supporting plate; the output end of the servo motor is fixedly connected with the first gear.
The utility model is further provided with: sliding grooves symmetrically penetrate through two opposite sides of the cleaning frame; the mounting pipe is arranged between the two sliding grooves in a sliding manner; the side face of the cleaning frame is symmetrically hinged with a waterproof door.
The utility model is further provided with: a second gear is fixed at the other end of the mounting tube; a plurality of third racks are uniformly fixed on the side surface of the cleaning frame above the sliding groove; the third rack is meshed with the second gear.
The utility model is further provided with: a water storage tank is fixed on the side surface of the cleaning frame; the surface of the water storage tank is provided with a water suction pump; a water suction pipe is connected between the water suction end of the water suction pump and the water storage tank, and a water delivery pipe is connected between the water outlet end of the water suction pump and the water delivery pipe.
The utility model is further provided with: t-shaped sliding grooves are symmetrically formed in two opposite inner walls of the cleaning frame; t-shaped sliding rails which are in sliding fit with the T-shaped sliding grooves are symmetrically fixed on two opposite sides of the storage frame; the inner bottom surface of the storage frame is provided with a plurality of drain holes in a penetrating way.
The utility model has the advantages that:
1. According to the utility model, the first gear is driven to rotate by the servo motor, so that the first rack and the second rack are driven to slide, the first rack slides to drive the water pipe to move left and right to wash the silicon in all directions, meanwhile, the second rack slides to drive the mounting pipe to slide left and right to enable the brush to move back and forth in the cleaning frame to wash the silicon, and the flushing and the brushing are simultaneously realized by only one driving force, so that the cost is saved, and the practicability of the device is improved.
2. The second gear and the third rack arranged in the utility model can realize the swinging of the hairbrush, the second rack drives the mounting pipe to slide along the sliding groove, when the second gear is in contact with the third rack, the third rack drives the second gear to rotate, and then drives the mounting pipe to rotate on the side surface of the second rack, and further drives the hairbrush to rotate along with the mounting pipe, the second rack continuously slides to drive the second gear to be separated from the third rack, and then the mounting pipe rotates to a state that the hairbrush is vertical to the ground due to the gravity of the hairbrush, so that the hairbrush reciprocates, further the swinging of the hairbrush is realized, and the cleaning effect is improved.
Drawings
Fig. 1 is a schematic structural view of a silicon raw material cleaning device for silicon smelting according to the present utility model.
FIG. 2 is a view showing a cross section of a silicon raw material cleaning apparatus for silicon smelting according to the present utility model.
FIG. 3 is another view in cross section of a silicon raw material cleaning apparatus for silicon smelting according to the present utility model.
Fig. 4 is a rear view of a silicon raw material cleaning apparatus for silicon smelting according to the present utility model.
Fig. 5 is a schematic structural diagram of a storage frame according to the present utility model.
In the figure: 1. a cleaning frame; 2. a universal wheel; 3. a first gear; 4. a first rack; 5. a second rack; 6. a water pipe; 7. installing a pipe; 8. a brush; 9. cleaning the spray head; 10. a storage frame; 11. a support plate; 12. a servo motor; 13. a chute; 14. a waterproof door; 15. a second gear; 16. a third rack; 17. a water storage tank; 18. a water pump; 19. a water pumping pipe; 20. a water supply pipe; 21. t-shaped sliding grooves; 22. a T-shaped slide rail; 23. and a drain hole.
Detailed Description
It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other. The utility model will be described in detail below with reference to the drawings in connection with embodiments.
It is noted that all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs unless otherwise indicated.
In the present utility model, unless otherwise indicated, the terms "upper" and "lower" are used generally with respect to the directions shown in the drawings, or with respect to the vertical, vertical or gravitational directions; also, for ease of understanding and description, "left, right" is generally directed to the left, right as shown in the drawings; "inner and outer" refer to inner and outer relative to the outline of the components themselves, but the above-described orientation terms are not intended to limit the present utility model.
Example 1
Referring to fig. 1-5, the present utility model provides the following technical solutions:
In particular to a silicon raw material cleaning device for silicon smelting, which comprises a cleaning frame 1; a plurality of universal wheels 2 are uniformly fixed on the bottom surface of the cleaning frame 1; the side surface of the cleaning frame 1 is rotatably provided with a first gear 3; the side surface of the cleaning frame 1 is positioned at two sides of the first gear 3 and is respectively provided with a first rack 4 and a second rack 5 which are in meshed fit with the first gear 3 in a sliding manner; a plurality of water pipes 6 and a plurality of mounting pipes 7 are slidably arranged on the two opposite sides of the cleaning frame 1; a plurality of hairbrushes 8 are uniformly arranged on the side surfaces of the periphery of the installation tube 7; one end of the water pipe 6 is fixedly connected with the side surface of the first rack 4; one end of the mounting tube 7 is rotationally connected with the side surface of the second rack 5; a plurality of cleaning spray heads 9 are uniformly and fixedly penetrated on the side surface of the periphery of the water pipe 6; a storage frame 10 is arranged between the two opposite inner walls of the cleaning frame 1 in a sliding way.
The specific application of this embodiment is: firstly, silicon is placed in a storage frame 10, then the whole device is pushed to a place capable of draining, water is conveyed to a water pipe 6, a first gear 3 is driven to rotate, a first rack 4 and a second rack 5 are driven to slide, the first rack 4 slides left and right to drive the water pipe 6 to move left and right, the second rack 5 slides left and right to drive a mounting pipe 7 to move left and right together with a hairbrush 8, the water pipe 6 moves left and right to realize omnibearing silicon flushing, the hairbrush 8 moves left and right to realize back silicon cleaning in a cleaning frame 1, and cleaning efficiency is improved.
Example two
Referring to fig. 1 to 5, the second embodiment is modified from the first embodiment in that a support plate 11 is fixed to a side surface of the cleaning frame 1; a servo motor 12 is fixed on the surface of the supporting plate 11; the output end of the servo motor 12 is fixedly connected with the first gear 3; the two opposite side surfaces of the cleaning frame 1 are symmetrically provided with sliding grooves 13 in a penetrating way; the mounting tube 7 is arranged between the two sliding grooves 13 in a sliding way; the side surface of the cleaning frame 1 is symmetrically hinged with a waterproof door 14; the other end of the mounting tube 7 is fixed with a second gear 15; a plurality of third racks 16 are uniformly fixed on the side surface of the cleaning frame 1 above the sliding groove 13; the third rack 16 is meshed with the second gear 15; a water storage tank 17 is fixed on the side surface of the cleaning frame 1; the surface of the water storage tank 17 is provided with a water pump 18; a water suction pipe 19 is connected between the water suction end of the water suction pump 18 and the water storage tank 17, and a water delivery pipe 20 is connected between the water outlet end of the water suction pump and the water delivery pipe 6; t-shaped sliding grooves 21 are symmetrically formed in two opposite inner walls of the cleaning frame 1; t-shaped sliding rails 22 which are in sliding fit with the T-shaped sliding grooves 21 are symmetrically fixed on two opposite sides of the storage frame 10; a plurality of drain holes 23 are formed through the inner bottom surface of the storage frame 10.
One specific application of this embodiment is: firstly, the storage frame 10 is pulled out of the cleaning frame 1, the T-shaped sliding rail 22 slides along the T-shaped sliding groove 21, then silicon is placed into the storage frame 10, then the water pump 18 pumps water from the water storage tank 17 through the water pumping pipe 19, water is sent to the water pipe 6 through the water sending pipe 20 and finally sprayed out from the cleaning nozzle 9, then the first gear 3 is driven to rotate through the servo motor 12, the first rack 4 and the second rack 5 are driven to slide, the mounting pipe 7 is driven to slide along the sliding groove 13 in the sliding process of the second rack 5, the second gear 15 is driven to slide in the sliding process of the mounting pipe 7, the second gear 15 is driven to rotate when the second gear 15 is contacted with the third rack 16, the second gear 15 drives the mounting pipe 7 to rotate, and then the brush 8 is driven to rotate, and when the second gear 15 is separated from the third rack 16 in the sliding process of the mounting pipe 7, the mounting pipe 7 returns to the state that the brush 8 is perpendicular to the ground due to the dead weight of the brush 8, the back and forth swinging of the brush 8 is realized, the efficiency of the brush 8 is further improved, the cleaning silicon is driven to slide along the sliding groove 13 in the sliding process of the second rack 5, the second gear 15 is driven to slide along the second gear 15, the second gear 15 is driven to rotate when the second gear 7 is driven to rotate along the second gear 7, and the second gear is driven to rotate along the third gear 8.
It will be apparent that the embodiments described above are merely some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present utility model without making any inventive effort, shall fall within the scope of the present utility model.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the application described herein may be implemented in sequences other than those illustrated or otherwise described herein.
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
The above description is only a preferred embodiment of the present utility model, and the protection scope of the present utility model is not limited to the above examples, and all technical solutions belonging to the concept of the present utility model belong to the protection scope of the present utility model. It should be noted that modifications and adaptations to the present utility model may occur to one skilled in the art without departing from the principles of the present utility model and are intended to be within the scope of the present utility model.

Claims (6)

1. A silicon raw material cleaning device for silicon smelting comprises a cleaning frame (1); a plurality of universal wheels (2) are uniformly fixed on the bottom surface of the cleaning frame (1); the method is characterized in that:
A first gear (3) is rotatably arranged on the side surface of the cleaning frame (1); a first rack (4) and a second rack (5) which are engaged and matched with the first gear (3) are respectively arranged on the two sides of the first gear (3) on the side face of the cleaning frame (1) in a sliding manner;
a plurality of water pipes (6) and a plurality of mounting pipes (7) are slidably arranged on two opposite sides of the cleaning frame (1); a plurality of hairbrushes (8) are uniformly arranged on the peripheral side surface of the mounting pipe (7);
One end of the water pipe (6) is fixedly connected with the side surface of the first rack (4); one end of the mounting pipe (7) is rotationally connected with the side surface of the second rack (5);
A plurality of cleaning spray heads (9) are uniformly and fixedly penetrated on the peripheral side surface of the water pipe (6); a storage frame (10) is arranged between the two opposite inner walls of the cleaning frame (1) in a sliding way.
2. A silicon raw material cleaning apparatus for silicon smelting according to claim 1, wherein: a supporting plate (11) is fixed on the side surface of the cleaning frame (1); a servo motor (12) is fixed on the surface of the supporting plate (11); the output end of the servo motor (12) is fixedly connected with the first gear (3).
3. A silicon raw material cleaning apparatus for silicon smelting according to claim 2, wherein: the two opposite sides of the cleaning frame (1) symmetrically penetrate through a sliding groove (13); the mounting pipe (7) is arranged between the two sliding grooves (13) in a sliding manner; waterproof doors (14) are symmetrically hinged to the side faces of the cleaning frame (1).
4. A silicon raw material cleaning apparatus for silicon smelting according to claim 3, wherein: a second gear (15) is fixed at the other end of the mounting tube (7); a plurality of third racks (16) are uniformly fixed above the sliding groove (13) on the side surface of the cleaning frame (1); the third rack (16) is meshed with the second gear (15).
5. A silicon raw material cleaning apparatus for silicon smelting as defined in claim 4, wherein: a water storage tank (17) is fixed on the side surface of the cleaning frame (1); a water pump (18) is arranged on the surface of the water storage tank (17); a water suction pipe (19) is connected between the water suction end of the water suction pump (18) and the water storage tank (17), and a water delivery pipe (20) is connected between the water outlet end of the water suction pump and the water delivery pipe (6).
6. A silicon raw material cleaning apparatus for silicon smelting as defined in claim 5, wherein: t-shaped sliding grooves (21) are symmetrically formed in the two opposite inner walls of the cleaning frame (1); t-shaped sliding rails (22) which are in sliding fit with the T-shaped sliding grooves (21) are symmetrically fixed on two opposite sides of the storage frame (10); the inner bottom surface of the storage frame (10) is provided with a plurality of drain holes (23) in a penetrating way.
CN202420400518.3U 2024-03-02 2024-03-02 Silicon raw material cleaning device for silicon smelting Active CN221983230U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202420400518.3U CN221983230U (en) 2024-03-02 2024-03-02 Silicon raw material cleaning device for silicon smelting

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202420400518.3U CN221983230U (en) 2024-03-02 2024-03-02 Silicon raw material cleaning device for silicon smelting

Publications (1)

Publication Number Publication Date
CN221983230U true CN221983230U (en) 2024-11-12

Family

ID=93342159

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202420400518.3U Active CN221983230U (en) 2024-03-02 2024-03-02 Silicon raw material cleaning device for silicon smelting

Country Status (1)

Country Link
CN (1) CN221983230U (en)

Similar Documents

Publication Publication Date Title
CN209901796U (en) Cleaning device is used in new material board production
CN117176056B (en) Photovoltaic panel cleaning equipment and photovoltaic panel cleaning method
CN220077651U (en) Cosmetic production conveyer
CN209476881U (en) The cleaning device of glass substrate in a kind of capacitance touch screen
CN113857125A (en) A fully automatic silicon wafer surface efficient brush cleaning device and operation method
CN118007967A (en) Curtain wall transferring device for building construction and application method thereof
CN112517457A (en) Hardware and plastic product cleaning device
CN115971157B (en) Optical glass surface scrubbing device and working method thereof
CN115213133B (en) A mechatronic motor equipment dust removal device
CN115502119B (en) Gantry crane track cleaning device
CN222077354U (en) A device for cleaning powder on the surface of electronic components
CN219052297U (en) Energy-saving self-cleaning air shower
CN114826138B (en) Dust washing structure for cleaning photovoltaic module
CN112914409B (en) Be used for high-rise building surface glass cleaning equipment
CN222081689U (en) A conveying device for manufacturing reinforced concrete prefabricated frame
CN222265172U (en) Ground cleaning device for machine room construction
CN223113629U (en) Automatic spray cleaning equipment for plastic plates
CN221537402U (en) Environment-friendly cleaning equipment for tire production
CN222058182U (en) Surface treatment device for semiconductor equipment parts
CN220559899U (en) Mobile device for cleaning equipment
CN216323525U (en) Spray drying device is used in production of chicken blood cell albumen powder
CN223640106U (en) A cleaning component and a cleaning machine for the initial processing of Poria cocos.
CN220497051U (en) Intelligent cleaning device is used in electronic equipment production
CN117261376B (en) A high-transparency low-E glass with a multi-layer composite structure and its production apparatus
CN223626888U (en) A batch cleaning device for dried bamboo shoots

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant