CN221944770U - Electroplating water blowing device for semiconductor part - Google Patents

Electroplating water blowing device for semiconductor part Download PDF

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CN221944770U
CN221944770U CN202420530929.4U CN202420530929U CN221944770U CN 221944770 U CN221944770 U CN 221944770U CN 202420530929 U CN202420530929 U CN 202420530929U CN 221944770 U CN221944770 U CN 221944770U
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outer box
box body
driving
gear
semiconductor
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吴苹苹
王小虎
吴坤辉
王小云
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Zhangzhou Meixiang Electronic Technology Co ltd
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Zhangzhou Meixiang Electronic Technology Co ltd
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Abstract

本实用新型公开了一种半导体件电镀吹水装置,包括呈空心结构的外箱体,所述外箱体通过其上表面固定安装的安装柱固定安装在厂房屋顶,所述外箱体上表面固定安装有两个鼓风机,且所述外箱体正下方设置有活动横板,并且所述活动横板下表面转动安装有安装挂钩,同时所述安装挂钩下方悬挂有悬挂架,所述悬挂架中悬挂有需要吹水的半导体,且所述活动横板上方设置有带动安装挂钩转动的传动机构。该半导体件电镀吹水装置,采用新型的结构设计,活动横板上方设置传动机构,装置工作的过程中外箱体下方的主动齿轮转动,使得与主动齿轮啮合连接的从动齿轮带动安装挂钩转动,从而使得整体悬挂架转动,实现对半导体材料全面吹水操作。

The utility model discloses a semiconductor electroplating water blowing device, comprising an outer box body with a hollow structure, the outer box body is fixedly installed on the roof of a factory building through a mounting column fixedly installed on its upper surface, two blowers are fixedly installed on the upper surface of the outer box body, and a movable horizontal plate is arranged directly below the outer box body, and a mounting hook is rotatably installed on the lower surface of the movable horizontal plate, and a hanging frame is hung below the mounting hook, a semiconductor to be blown with water is hung in the hanging frame, and a transmission mechanism for driving the mounting hook to rotate is arranged above the movable horizontal plate. The semiconductor electroplating water blowing device adopts a new structural design, and a transmission mechanism is arranged above the movable horizontal plate. During the operation of the device, the driving gear below the outer box body rotates, so that the driven gear meshing with the driving gear drives the mounting hook to rotate, thereby rotating the entire hanging frame, and realizing a comprehensive water blowing operation on the semiconductor material.

Description

一种半导体件电镀吹水装置A water blowing device for electroplating semiconductor parts

技术领域Technical Field

本实用新型涉及电镀吹水技术领域,具体为一种半导体件电镀吹水装置。The utility model relates to the technical field of electroplating water blowing, in particular to a semiconductor part electroplating water blowing device.

背景技术Background Art

半导体材料是精密电子设备的常用材料,在半导体材料生产的过程中需要通过电镀的方式在其表面镀上其他材料,从而达到防腐的目的,但是在电镀之前需要使用气流吹落半导体材料经过清洗时表面的水渍,避免影响电镀效果。Semiconductor materials are commonly used materials for precision electronic equipment. During the production process of semiconductor materials, other materials need to be plated on their surface by electroplating to achieve the purpose of corrosion protection. However, before electroplating, air flow is needed to blow off water stains on the surface of the semiconductor material after cleaning to avoid affecting the electroplating effect.

现有技术中,公开号为CN211142213U的中国专利公开了一种电镀挂件的往复吹水设备,包括机箱、滑轨、滑块、吹气组件、气源设备和驱动机构。滑轨竖直固定在机箱的侧边,滑块滑动安装在滑轨上,驱动机构固设在机箱内部并用于驱动滑块上下滑动。吹气组件包括竖杆、若干横杆和若干吹气单元,竖杆的上部与滑块固定连接,若干横杆沿着竖杆的高度方向等间距均匀布设,每一根横杆沿长度方向均匀设置有若干个吹气单元,吹气单元通过气管与气源设备相连,气源设备设在机箱的内部,气源设备为吹气单元持续供气,驱动机构驱动吹气组件上下往复运动,能够将经过的电镀挂件进行快速吹干,不留死角,本实用新型结构简单,吹干效率高。In the prior art, a Chinese patent with publication number CN211142213U discloses a reciprocating water blowing device for electroplating hangers, including a chassis, a slide rail, a slider, an air blowing assembly, an air source device and a driving mechanism. The slide rail is vertically fixed to the side of the chassis, the slider is slidably installed on the slide rail, and the driving mechanism is fixed inside the chassis and used to drive the slider to slide up and down. The air blowing assembly includes a vertical rod, a plurality of cross rods and a plurality of air blowing units. The upper part of the vertical rod is fixedly connected to the slider, and the plurality of cross rods are evenly arranged at equal intervals along the height direction of the vertical rod. Each cross rod is evenly provided with a plurality of air blowing units along the length direction. The air blowing unit is connected to the air source device through an air pipe. The air source device is arranged inside the chassis. The air source device continuously supplies air to the air blowing unit. The driving mechanism drives the air blowing assembly to reciprocate up and down, and can quickly blow dry the electroplating hangers passing by without leaving dead corners. The utility model has a simple structure and high drying efficiency.

上述的装置在使用的过程中利用吹气单元吹出气流达到去除工件表面水分的目的,但是在实际的使用过程中吹气单元只能上下活动并不能转动,所以只能进行单方向的吹气,工件在吹完一面后需要翻面,增加工作人员的工作量。During use, the above-mentioned device uses a blowing unit to blow out airflow to remove moisture from the workpiece surface. However, during actual use, the blowing unit can only move up and down and cannot rotate, so it can only blow in one direction. The workpiece needs to be turned over after blowing one side, which increases the workload of the staff.

实用新型内容Utility Model Content

本实用新型的目的在于提供一种半导体件电镀吹水装置,以解决上述背景技术中提出工件需要翻面而增加人员工作量的问题。The utility model aims to provide a semiconductor electroplating water blowing device to solve the problem in the background technology that the workpiece needs to be turned over, which increases the workload of personnel.

为实现上述目的,本实用新型提供如下技术方案:一种半导体件电镀吹水装置,包括呈空心结构的外箱体,所述外箱体通过其上表面固定安装的安装柱固定安装在厂房屋顶,还包括:To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a semiconductor electroplating water blowing device, comprising an outer box body with a hollow structure, the outer box body is fixedly mounted on the roof of a factory building through a mounting column fixedly mounted on its upper surface, and also includes:

所述外箱体上表面固定安装有两个鼓风机,且所述外箱体正下方设置有活动横板,并且所述活动横板下表面转动安装有安装挂钩,同时所述安装挂钩下方悬挂有悬挂架,所述悬挂架中悬挂有需要吹水的半导体,且所述活动横板上方设置有带动安装挂钩转动的传动机构;Two blowers are fixedly installed on the upper surface of the outer box body, and a movable horizontal plate is arranged directly below the outer box body, and a mounting hook is rotatably installed on the lower surface of the movable horizontal plate, and a hanging frame is hung below the mounting hook, and a semiconductor that needs to be blown with water is hung in the hanging frame, and a transmission mechanism for driving the mounting hook to rotate is arranged above the movable horizontal plate;

所述外箱体下表面左右两侧固定安装有吹水喷头,且所述吹水喷头通过外表面固定安装的输送管道与外箱体之间组成连通结构The left and right sides of the lower surface of the outer box body are fixedly installed with water blowing nozzles, and the water blowing nozzles are connected to the outer box body through the delivery pipes fixedly installed on the outer surface.

所述外箱体中安装有用于吸附水滴的干燥机构,所述干燥机构包括呈空心套筒状结构的干燥套筒,且所述干燥套筒整体为干燥剂材料。A drying mechanism for absorbing water droplets is installed in the outer box body. The drying mechanism includes a drying sleeve in a hollow sleeve-shaped structure, and the drying sleeve is made of desiccant material as a whole.

优选的,所述传动机构包括同轴固定安装在安装挂钩上端外部的从动齿轮,且所述安装挂钩通过从动齿轮与活动横板之间组成转动结构。Preferably, the transmission mechanism includes a driven gear coaxially fixedly mounted on the outside of the upper end of the mounting hook, and the mounting hook forms a rotating structure through the driven gear and the movable transverse plate.

优选的,所述活动横板上表面与外箱体外表面之间固定安装有伸缩气缸,且所述从动齿轮与主动齿轮之间组成啮合结构,并且所述从动齿轮转动安装在外箱体下方。Preferably, a telescopic cylinder is fixedly installed between the upper surface of the movable horizontal plate and the outer surface of the outer box body, and a meshing structure is formed between the driven gear and the driving gear, and the driven gear is rotatably installed below the outer box body.

优选的,所述外箱体内部固定安装有滤尘板,且所述滤尘板整体呈左低右高的倾斜状结构。Preferably, a dust filter plate is fixedly installed inside the outer box body, and the dust filter plate as a whole is in an inclined structure with the left side lower and the right side higher.

优选的,所述干燥套筒固定安装在主动齿轮下表面,且所述主动齿轮的转轴为空心结构。Preferably, the drying sleeve is fixedly mounted on the lower surface of the driving gear, and the rotating shaft of the driving gear is a hollow structure.

优选的,所述主动齿轮的转轴上端转动安装有呈空心结构的连接管道,且所述连接管道的顶端与鼓风机的进风口之间相互对接。Preferably, a connecting pipe with a hollow structure is rotatably mounted on the upper end of the rotating shaft of the driving gear, and the top end of the connecting pipe is butted against the air inlet of the blower.

优选的,所述主动齿轮上端同轴固定安装有带动其转动的从动锥齿轮,且所述从动锥齿轮侧面啮合连接有主动锥齿轮,并且所述主动锥齿轮由固定安装在外箱体内部的驱动电机驱动转动,同时所述驱动电机的输出轴外部固定安装有对滤尘板进行敲击的敲击凸轮。Preferably, a driven bevel gear is coaxially fixedly installed on the upper end of the driving gear to drive it to rotate, and the side of the driven bevel gear is meshingly connected with the driving bevel gear, and the driving bevel gear is driven to rotate by a driving motor fixedly installed inside the outer box body, and at the same time, a knocking cam for knocking the dust filter plate is fixedly installed outside the output shaft of the driving motor.

与现有技术相比,本实用新型的有益效果是:该半导体件电镀吹水装置,采用新型的结构设计,其具体内容如下:Compared with the prior art, the beneficial effects of the utility model are: the semiconductor component electroplating water blowing device adopts a new structural design, and its specific contents are as follows:

1、将需要吹水的半导体材料悬挂在悬挂架上,之后将悬挂架通过安装挂钩悬挂在活动横板下方,之后外箱体中的气流通过输送管道进入吹水喷头并加压喷出(吹水喷头按照一定频率间歇吹水),最终利用加压的气流将半导体材料表面的水吹落;1. Hang the semiconductor material that needs to be blown with water on the hanging rack, and then hang the hanging rack under the movable horizontal plate through the installation hook. Then the airflow in the outer box enters the water blowing nozzle through the conveying pipe and is pressurized and sprayed out (the water blowing nozzle blows water intermittently at a certain frequency), and finally the water on the surface of the semiconductor material is blown off by the pressurized airflow;

进一步的,活动横板上方设置传动机构,装置工作的过程中外箱体下方的主动齿轮转动,使得与主动齿轮啮合连接的从动齿轮带动安装挂钩转动,从而使得整体悬挂架转动(主动齿轮为正反向周期交替转动,所以悬挂架在齿轮的驱动作用下同样正反向周期交替转动),实现对半导体材料全面吹水操作;Furthermore, a transmission mechanism is arranged above the movable horizontal plate. During the operation of the device, the driving gear below the outer box body rotates, so that the driven gear meshing with the driving gear drives the installation hook to rotate, thereby rotating the entire suspension frame (the driving gear rotates alternately in a forward and reverse cycle, so the suspension frame also rotates alternately in a forward and reverse cycle under the driving action of the gear), thereby realizing a comprehensive water blowing operation on the semiconductor material;

更进一步的,外箱体的内部安装有滤尘板,从而通过鼓风机进入外箱体的气流经过滤尘板,在滤尘板的过滤板作用下过滤出其中的灰尘杂质。Furthermore, a dust filter plate is installed inside the outer box body, so that the airflow entering the outer box body through the blower passes through the dust filter plate, and the dust impurities therein are filtered out under the action of the filter plate of the dust filter plate.

2、驱动电机带动主动锥齿轮转动,从而使得与主动锥齿轮啮合连接的从动锥齿轮带动主动齿轮转动,同时鼓风机使得连接管道内部稀产生负压,将吹落的水分吸入干燥套筒中进行干燥,避免重新滴落到半导体材料表面;2. The driving motor drives the active bevel gear to rotate, so that the driven bevel gear meshing with the active bevel gear drives the active gear to rotate. At the same time, the blower creates negative pressure inside the connecting pipe, sucking the blown water into the drying sleeve for drying to prevent it from dripping onto the surface of the semiconductor material again.

进一步的,驱动电机在转动的过程中带动敲击凸轮同步转动,使得敲击凸轮对滤尘板进行敲击,使得滤尘板震动,利用滤尘板的倾斜状结构将过滤出来的灰尘杂质集中在一边。Furthermore, the driving motor drives the knocking cam to rotate synchronously during the rotation process, so that the knocking cam knocks the dust filter plate, causing the dust filter plate to vibrate, and the filtered dust and impurities are concentrated on one side by utilizing the inclined structure of the dust filter plate.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为本实用新型整体结构示意图;Figure 1 is a schematic diagram of the overall structure of the utility model;

图2为本实用新型外箱体底面结构示意图;Figure 2 is a schematic diagram of the bottom structure of the outer box body of the utility model;

图3为本实用新型活动横板结构示意图;Figure 3 is a schematic diagram of the structure of the movable horizontal plate of the utility model;

图4为本实用新型悬挂架与安装挂钩连接关系结构示意图;FIG4 is a schematic structural diagram of the connection relationship between the suspension bracket and the mounting hook of the utility model;

图5为本实用新型外箱体剖面结构示意图;Figure 5 is a schematic diagram of the cross-sectional structure of the outer box body of the utility model;

图6为本实用新型主动齿轮与连接管道连接关系结构示意图;FIG6 is a schematic structural diagram of the connection relationship between the driving gear and the connecting pipe of the utility model;

图7为本实用新型驱动电机结构示意图。FIG. 7 is a schematic diagram of the structure of the drive motor of the utility model.

图中:1、外箱体;2、安装柱;3、鼓风机;4、活动横板;5、伸缩气缸;6、安装挂钩;7、从动齿轮;8、悬挂架;9、吹水喷头;10、输送管道;11、主动齿轮;12、干燥套筒;13、滤尘板;14、连接管道;15、从动锥齿轮;16、主动锥齿轮;17、驱动电机;18、敲击凸轮。In the figure: 1. outer box; 2. mounting column; 3. blower; 4. movable horizontal plate; 5. telescopic cylinder; 6. mounting hook; 7. driven gear; 8. hanging frame; 9. water blowing nozzle; 10. conveying pipeline; 11. driving gear; 12. drying sleeve; 13. dust filter plate; 14. connecting pipeline; 15. driven bevel gear; 16. driving bevel gear; 17. driving motor; 18. knocking cam.

具体实施方式DETAILED DESCRIPTION

下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本实用新型一部分实施例,而不是全部的实施例。基于本实用新型中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本实用新型保护的范围。The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

实施例一Embodiment 1

请参阅图1-图5,本实施例为了解决空气中的灰尘杂质吹到半导体材料表面造成污染的问题,提供如下技术方案,具体公开了:呈空心结构的外箱体1,外箱体1通过其上表面固定安装的安装柱2固定安装在厂房屋顶,外箱体1上表面固定安装有两个鼓风机3,且外箱体1正下方设置有活动横板4,并且活动横板4下表面转动安装有安装挂钩6,同时安装挂钩6下方悬挂有悬挂架8,悬挂架8中悬挂有需要吹水的半导体,活动横板4上表面与外箱体1外表面之间固定安装有伸缩气缸5,外箱体1内部固定安装有滤尘板13,且滤尘板13整体呈左低右高的倾斜状结构,外箱体1下表面左右两侧固定安装有吹水喷头9,且吹水喷头9通过外表面固定安装的输送管道10与外箱体1之间组成连通结构。Please refer to Figures 1 to 5. In order to solve the problem of dust impurities in the air being blown onto the surface of semiconductor materials and causing pollution, the present embodiment provides the following technical solutions, which specifically disclose: an outer box body 1 with a hollow structure, the outer box body 1 is fixedly installed on the roof of a factory building through a mounting column 2 fixedly installed on its upper surface, two blowers 3 are fixedly installed on the upper surface of the outer box body 1, and a movable horizontal plate 4 is arranged directly below the outer box body 1, and a mounting hook 6 is rotatably installed on the lower surface of the movable horizontal plate 4, and a hanging frame 8 is hung below the mounting hook 6, and a semiconductor that needs to be blown with water is hung in the hanging frame 8, a telescopic cylinder 5 is fixedly installed between the upper surface of the movable horizontal plate 4 and the outer surface of the outer box body 1, a dust filter plate 13 is fixedly installed inside the outer box body 1, and the dust filter plate 13 is an inclined structure with the left side lower and the right side higher as a whole, water blowing nozzles 9 are fixedly installed on the left and right sides of the lower surface of the outer box body 1, and the water blowing nozzles 9 form a communication structure with the outer box body 1 through a conveying pipe 10 fixedly installed on the outer surface.

在使用装置时,首先伸缩气缸5工作推动活动横板4向下移动,将需要进行吹水的半导体材料均匀悬挂在悬挂架8中,之后将悬挂架8悬挂在安装挂钩6下方,之后开启外箱体1上方的鼓风机3,利用鼓风机3将外部空气鼓入外箱体1内部(利用滤尘板13对进入的空气进行过滤,去除其中的灰尘杂质),之后空气通过输送管道10进入吹水喷头9中,利用吹水喷头9将空气加压喷出(吹水喷头9按照一定频率间歇吹水),达到对半导体材料表面吹水的目的。When using the device, first, the telescopic cylinder 5 works to push the movable horizontal plate 4 downward, and the semiconductor material that needs to be blown with water is evenly suspended in the suspension frame 8, and then the suspension frame 8 is suspended under the installation hook 6, and then the blower 3 above the outer box body 1 is turned on, and the blower 3 is used to blow external air into the outer box body 1 (the dust filter plate 13 is used to filter the incoming air to remove dust and impurities therein), and then the air enters the water blowing nozzle 9 through the conveying pipe 10, and the water blowing nozzle 9 is used to pressurize the air and spray it out (the water blowing nozzle 9 intermittently blows water at a certain frequency), so as to achieve the purpose of blowing water on the surface of the semiconductor material.

实施例二Embodiment 2

请参阅图2-图4,本实施例为了无法对半导体材料全面吹水的问题,提供如下技术方案,设置传动机构,利用传动机构带动悬挂架8转动,实现对半导体材料的全面吹水,具体公开了:活动横板4上方设置有带动安装挂钩6转动的传动机构,传动机构包括同轴固定安装在安装挂钩6上端外部的从动齿轮7,且安装挂钩6通过从动齿轮7与活动横板4之间组成转动结构,从动齿轮7与主动齿轮11之间组成啮合结构,并且从动齿轮7转动安装在外箱体1下方,主动齿轮11上端同轴固定安装有带动其转动的从动锥齿轮15,且从动锥齿轮15侧面啮合连接有主动锥齿轮16,并且主动锥齿轮16由固定安装在外箱体1内部的驱动电机17驱动转动,同时驱动电机17的输出轴外部固定安装有对滤尘板13进行敲击的敲击凸轮18。Please refer to Figures 2 to 4. In order to solve the problem that the semiconductor material cannot be fully blown, the present embodiment provides the following technical solutions, a transmission mechanism is set, and the transmission mechanism is used to drive the suspension frame 8 to rotate, so as to achieve full water blowing of the semiconductor material. Specifically disclosed is: a transmission mechanism for driving the mounting hook 6 to rotate is set above the movable horizontal plate 4, the transmission mechanism includes a driven gear 7 coaxially fixedly mounted on the outside of the upper end of the mounting hook 6, and the mounting hook 6 forms a rotating structure through the driven gear 7 and the movable horizontal plate 4, and the driven gear 7 and the driving gear 11 form a meshing structure, and the driven gear 7 is rotatably mounted below the outer box body 1, and a driven bevel gear 15 is coaxially fixedly mounted on the upper end of the driving gear 11 to drive it to rotate, and the side of the driven bevel gear 15 is meshedly connected with the driving bevel gear 16, and the driving bevel gear 16 is driven to rotate by a driving motor 17 fixedly mounted inside the outer box body 1, and at the same time, a knocking cam 18 for knocking the dust filter plate 13 is fixedly mounted on the outside of the output shaft of the driving motor 17.

悬挂架8安装完成后,伸缩气缸5收缩带动活动横板4向上移动,最终将从动齿轮7移动到与主动齿轮11啮合连接的位置,之后开启外箱体1内部的驱动电机17,驱动电机17带动主动锥齿轮16转动,此时与主动锥齿轮16啮合连接的从动锥齿轮15带动主动齿轮11转动,使得与主动齿轮11啮合连接的从动齿轮7带动安装挂钩6转动(主动齿轮11为正反向周期交替转动,所以悬挂架8在齿轮的驱动作用下同样正反向周期交替转动),实现对整体半导体材料的转动,使其可以全面的接受吹水操作,同时驱动电机17在转动的过程中带动敲击凸轮18转动,使得敲击凸轮18敲击滤尘板13产生震动,将滤尘板13过滤出的灰尘杂质集中在一边儿避免堵塞。After the installation of the suspension frame 8 is completed, the telescopic cylinder 5 contracts and drives the movable cross plate 4 to move upward, and finally moves the driven gear 7 to a position meshed with the driving gear 11, and then the driving motor 17 inside the outer box body 1 is turned on. The driving motor 17 drives the driving bevel gear 16 to rotate. At this time, the driven bevel gear 15 meshed with the driving bevel gear 16 drives the driving gear 11 to rotate, so that the driven gear 7 meshed with the driving gear 11 drives the installation hook 6 to rotate (the driving gear 11 rotates alternately in a positive and reverse cycle, so the suspension frame 8 also rotates alternately in a positive and reverse cycle under the driving action of the gear), realizing the rotation of the entire semiconductor material so that it can fully accept the water blowing operation. At the same time, the driving motor 17 drives the knocking cam 18 to rotate during the rotation process, so that the knocking cam 18 knocks on the dust filter plate 13 to generate vibration, and the dust impurities filtered out of the dust filter plate 13 are concentrated on one side to avoid blockage.

实施例三Embodiment 3

请参阅图2、图6和图7,本实施例为了解决吹落的水滴重新附着到半导体材料表面的问题,提供如下技术方案,设置干燥机构,将吹落的水滴吸附到干燥机构内部进行干燥,具体公开了:外箱体1中安装有用于吸附水滴的干燥机构,干燥机构包括呈空心套筒状结构的干燥套筒12,且干燥套筒12整体为干燥剂材料,干燥套筒12固定安装在主动齿轮11下表面,且主动齿轮11的转轴为空心结构,主动齿轮11的转轴上端转动安装有呈空心结构的连接管道14,且连接管道14的顶端与鼓风机3的进风口之间相互对接。Please refer to Figures 2, 6 and 7. In order to solve the problem of blown-off water droplets re-attaching to the surface of the semiconductor material, this embodiment provides the following technical solutions, wherein a drying mechanism is provided to adsorb the blown-off water droplets into the drying mechanism for drying. Specifically disclosed is: a drying mechanism for adsorbing water droplets is installed in the outer box body 1, the drying mechanism includes a drying sleeve 12 with a hollow sleeve-shaped structure, and the drying sleeve 12 is made of a desiccant material as a whole, the drying sleeve 12 is fixedly installed on the lower surface of the driving gear 11, and the rotating shaft of the driving gear 11 is a hollow structure, and a connecting pipe 14 with a hollow structure is rotatably installed on the upper end of the rotating shaft of the driving gear 11, and the top end of the connecting pipe 14 is butted against the air inlet of the blower 3.

在吹水的过程中鼓风机3开启,使得连接管道14内部产生负压,从而将从半导体材料表面吹落的水滴吸入干燥套筒12中进行干燥,避免水滴再次滴落到半导体材料表面。During the water blowing process, the blower 3 is turned on to generate negative pressure inside the connecting pipe 14, so that the water droplets blown off the surface of the semiconductor material are sucked into the drying sleeve 12 for drying, thereby preventing the water droplets from dripping onto the surface of the semiconductor material again.

尽管已经示出和描述了本实用新型的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本实用新型的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本实用新型的范围由所附权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims (7)

1. The utility model provides a semiconductor electroplating blow water device, is including outer box (1) that is hollow structure, outer box (1) is through its upper surface fixed mounting's erection column (2) fixed mounting at the factory building roof, its characterized in that still includes:
Two air blowers (3) are fixedly arranged on the upper surface of the outer box body (1), a movable transverse plate (4) is arranged right below the outer box body (1), an installation hook (6) is rotatably arranged on the lower surface of the movable transverse plate (4), a hanging frame (8) is hung below the installation hook (6), a semiconductor needing to blow water is hung in the hanging frame (8), and a transmission mechanism for driving the installation hook (6) to rotate is arranged above the movable transverse plate (4);
the left side and the right side of the lower surface of the outer box body (1) are fixedly provided with water blowing spray heads (9), and the water blowing spray heads (9) form a communication structure with the outer box body (1) through a conveying pipeline (10) fixedly arranged on the outer surface
The drying mechanism for adsorbing water drops is arranged in the outer box body (1), the drying mechanism comprises a drying sleeve (12) with a hollow sleeve-shaped structure, and the whole drying sleeve (12) is made of a drying agent material.
2. A semiconductor electroplating bath according to claim 1, wherein: the transmission mechanism comprises a driven gear (7) coaxially and fixedly arranged outside the upper end of the installation hook (6), and the installation hook (6) forms a rotating structure with the movable transverse plate (4) through the driven gear (7).
3. A semiconductor electroplating bath according to claim 2, wherein: a telescopic cylinder (5) is fixedly arranged between the upper surface of the movable transverse plate (4) and the outer surface of the outer box body (1), a meshing structure is formed between the driven gear (7) and the driving gear (11), and the driven gear (7) is rotatably arranged below the outer box body (1).
4. A semiconductor electroplating bath according to claim 3, wherein: the dust filtering plate (13) is fixedly arranged in the outer box body (1), and the dust filtering plate (13) is of an inclined structure with a low left side and a high right side.
5. The semiconductor electroplating bath apparatus of claim 4, wherein: the drying sleeve (12) is fixedly arranged on the lower surface of the driving gear (11), and the rotating shaft of the driving gear (11) is of a hollow structure.
6. A semiconductor electroplating bath according to claim 5, wherein: the upper end of the rotating shaft of the driving gear (11) is rotatably provided with a connecting pipeline (14) with a hollow structure, and the top end of the connecting pipeline (14) is in butt joint with the air inlet of the air blower (3).
7. The semiconductor electroplating bath apparatus of claim 6, wherein: the novel dust filter is characterized in that a driven bevel gear (15) for driving the driven bevel gear (11) to rotate is coaxially and fixedly arranged at the upper end of the driving gear, a driving bevel gear (16) is connected to the side face of the driven bevel gear (15) in a meshed mode, the driving bevel gear (16) is driven to rotate by a driving motor (17) fixedly arranged in the outer box body (1), and a knocking cam (18) for knocking the dust filter plate (13) is fixedly arranged outside an output shaft of the driving motor (17).
CN202420530929.4U 2024-03-19 2024-03-19 Electroplating water blowing device for semiconductor part Active CN221944770U (en)

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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202420530929.4U CN221944770U (en) 2024-03-19 2024-03-19 Electroplating water blowing device for semiconductor part

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