CN221933203U - Silicon wafer grinding waste liquid filtering equipment - Google Patents
Silicon wafer grinding waste liquid filtering equipment Download PDFInfo
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- CN221933203U CN221933203U CN202420356278.1U CN202420356278U CN221933203U CN 221933203 U CN221933203 U CN 221933203U CN 202420356278 U CN202420356278 U CN 202420356278U CN 221933203 U CN221933203 U CN 221933203U
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- waste liquid
- tank body
- silicon wafer
- filter cylinder
- filter
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Abstract
本申请提供了一种硅片研磨废液过滤设备，属于硅片加工废液处理技术领域。该硅片研磨废液过滤设备包括过滤组件和清理组件，废液倒入到罐体内部通过过滤筒可以对废液直接进行过滤，通过升降架使得电机和刮板向下移动直至刮板与过滤筒内部相接触，通过电机使得刮板转动，刮板转动可以避免杂质将过滤筒的滤孔堵住，保证研磨液正常流通，液体通过过滤筒流入到罐体的底部，而杂质留在过滤筒的表面，由于过滤筒通过弹性卡件与罐体滑动连接，采用卡接的连接方式方便将过滤筒从罐体内部抽出，可以将过滤筒内部的杂质进行清理，进而提高了过滤效果，防止废液中的杂质容易堵塞过滤筒的滤孔，提高了过滤效率，从而增加了实用性。
The present application provides a silicon wafer grinding waste liquid filtering device, which belongs to the technical field of silicon wafer processing waste liquid treatment. The silicon wafer grinding waste liquid filtering device includes a filtering component and a cleaning component. The waste liquid is poured into the tank body and can be directly filtered through the filter cylinder. The motor and the scraper are moved downward by the lifting frame until the scraper contacts the inside of the filter cylinder. The scraper is rotated by the motor. The rotation of the scraper can prevent impurities from blocking the filter holes of the filter cylinder, ensuring the normal circulation of the grinding liquid. The liquid flows into the bottom of the tank body through the filter cylinder, while the impurities remain on the surface of the filter cylinder. Since the filter cylinder is slidably connected to the tank body through an elastic clamp, the clamping connection method is used to facilitate the extraction of the filter cylinder from the inside of the tank body, and the impurities inside the filter cylinder can be cleaned, thereby improving the filtering effect, preventing the impurities in the waste liquid from easily blocking the filter holes of the filter cylinder, and improving the filtering efficiency, thereby increasing the practicality.
Description
Technical Field
The application relates to the field of silicon wafer processing waste liquid treatment, in particular to silicon wafer grinding waste liquid filtering equipment.
Background
In the process of grinding the silicon wafer by using a grinder, a lot of waste liquid can be generated, the waste liquid contains impurities ground from the silicon wafer, if the waste liquid is directly discharged into a drainage ditch, the impurities are precipitated in the drainage ditch and easily cause the blockage of the drainage ditch, and the impurities are discharged along with the drainage ditch, so that the influence on the environment is also easily caused, for example, a silicon wafer grinding waste liquid filtering device with the Chinese patent application number of CN202122814376.4 comprises a waste bucket, a supporting bucket is fixed in the waste bucket, the bottoms of the waste bucket and the supporting bucket are respectively provided with a liquid leakage hole, and the inner side of the bottom of the waste bucket or the outer side of the bottom of the supporting bucket is provided with supporting legs, so that a gap is reserved between the bottom of the supporting bucket and the bottom of the waste bucket; the waste bag is detachably nested in the supporting barrel, the waste bag is made of woven bags, waste liquid is injected into the waste bag, impurities in the waste bag are filtered and remain in the waste bag, and the rest of waste water is discharged through the liquid leakage hole. Compared with the prior art, the utility model has the following advantages: according to the utility model, the waste barrel and the waste bag are fully utilized, the waste bag is sleeved on the supporting barrel, the supporting barrel is fixed in the waste barrel, the waste liquid is discharged into the waste bag, the waste liquid is filtered, impurities in the waste liquid are prevented from blocking the drainage ditch, and meanwhile, the waste recycling is realized.
The above solution still has certain drawbacks: firstly, waste liquid is filtered through the waste bag, the filtering effect is poor, secondly, impurities in the waste liquid easily block the filtering holes of the waste bag, liquid circulation is affected, the filtering efficiency is reduced, and therefore the practicability is reduced.
Disclosure of utility model
In order to make up for the defects, the application provides silicon wafer grinding waste liquid filtering equipment, which aims to solve the problems that waste liquid is filtered through a waste bag in the related art, the filtering effect is poor, impurities in the waste liquid easily block the filtering holes of the waste bag, the liquid circulation is influenced, the filtering efficiency is reduced, and the practicability is reduced.
The embodiment of the application provides silicon wafer grinding waste liquid filtering equipment which comprises a filtering component and a cleaning component.
The filter component comprises a tank body, an elastic clamping piece and a filter cartridge, wherein the elastic clamping piece is arranged on one side of the tank body, the filter cartridge is connected with the tank body in a sliding mode through the elastic clamping piece, the cleaning component comprises a lifting frame, a motor and a scraping plate, the lifting frame is arranged on one end of the tank body, the motor is arranged on one side of the lifting frame, and the scraping plate is fixedly connected with the output end of the motor.
In a specific embodiment, one end of the tank is provided with a leg.
In the implementation process, one end of the tank body is provided with the supporting leg, and the supporting leg can play a role in supporting the tank body.
In a specific embodiment, one end of the tank body is provided with a weeping hole.
In the implementation process, one end of the tank body is provided with a liquid leakage hole, and the liquid leakage Kong Fangbian is arranged for discharging the filtered waste liquid.
In a specific embodiment, a chute is arranged in the tank body, the filter cartridge is slidably connected with the chute, and a limit groove is arranged on one side of the tank body.
In the implementation process, the tank body is internally provided with the sliding groove, and the sliding groove and the limiting groove can play a limiting role.
In a specific embodiment, the elastic clamping piece comprises a fixed block, an inserting rod and a spring, wherein the inserting rod is connected to one side of the fixed block in a penetrating mode, one end of the spring is fixedly connected with the fixed block, and the other end of the spring is fixedly connected with the inserting rod.
In the implementation process, the plug rod and the spring can play a role in clamping.
In a specific embodiment, an arc plate is arranged on one side of the filter cartridge, the arc plate is in sliding connection with the limit groove, a connecting block is arranged on one side of the arc plate, and the inserted bar is in sliding connection with the connecting block.
In the realization process, the cartridge filter one side is provided with the arc, when needs clear up the impurity of cartridge filter inside, and the user can stimulate the inserted bar and make inserted bar and connecting block separation, can pull the arc afterwards and take out the cartridge filter from jar internal portion, can clear up the impurity of cartridge filter inside afterwards, and the operation can install the cartridge filter on the contrary.
In a specific embodiment, the lifting frame comprises a bracket, an electric push rod and a moving plate, wherein the electric push rod is correspondingly arranged on one side of the bracket, and the moving plate is fixedly connected with the output end of the electric push rod.
In the implementation process, a user can start the electric push rod, and the electric push rod can enable the motor and the scraping plate to conduct height adjustment.
In a specific embodiment, the motor output end is provided with a rotating rod, and the scraping plate is fixedly connected with the rotating rod.
In the implementation process, the motor output end is provided with the rotating rod, and the rotating rod can play a role in connection.
Compared with the prior art, the application has the beneficial effects that: firstly, waste liquid is poured into the tank body and can be directly filtered through the filter cartridge, simultaneously, the motor and the scraping plate are downwards moved until the scraping plate is in contact with the inside of the filter cartridge through the lifting frame, the scraping plate is rotated through the motor, impurities can be prevented from blocking the filter hole of the filter cartridge by the rotation of the scraping plate, normal circulation of grinding fluid can be ensured, then the liquid flows into the bottom of the tank body through the filter cartridge, impurities are left on the surface of the filter cartridge, the filter cartridge is conveniently pulled out of the filter cartridge from the tank body through the elastic clamping piece in a sliding connection mode, impurities in the filter cartridge can be cleaned, the filtering effect is improved, the filter hole of the filter cartridge is prevented from being easily blocked by the impurities in the waste liquid, the filtering efficiency is improved, and the practicability is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some examples of the present application and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic structural diagram of a silicon wafer grinding waste liquid filtering device according to an embodiment of the present application;
fig. 2 is a schematic view of a lifting frame according to an embodiment of the present application;
FIG. 3 is a schematic view of an elastic clip according to an embodiment of the present application;
fig. 4 is a schematic structural diagram of a filter cartridge according to an embodiment of the present application.
In the figure: a 100-filtration assembly; 110-a tank; 111-supporting legs; 112-liquid leakage holes; 113-a chute; 114-a limit groove; 120-elastic clamping piece; 121-a fixed block; 122-inserting a rod; 123-springs; 130-a filter cartridge; 131-arc plates; 132-connecting blocks; 200-cleaning the assembly; 210-lifting frame; 211-a bracket; 212-an electric push rod; 213-a moving plate; 220-motor; 221-rotating a rod; 230-scraper.
Detailed Description
The technical solutions in the embodiments of the present application will be described below with reference to the accompanying drawings in the embodiments of the present application.
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, based on the embodiments of the application, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the application.
Referring to fig. 1-4, the present application provides a silicon wafer polishing waste liquid filtering apparatus, which includes a filtering assembly 100 and a cleaning assembly 200, wherein the filtering assembly 100 can filter silicon wafer polishing waste liquid, and the cleaning assembly 200 can improve filtering efficiency.
Referring to fig. 1-4, the filter assembly 100 includes a tank body 110, an elastic clamping member 120 and a filter cartridge 130, the elastic clamping member 120 is disposed on one side of the tank body 110, the filter cartridge 130 is slidably connected with the tank body 110 through the elastic clamping member 120, a supporting leg 111 is disposed at one end of the tank body 110, the supporting leg 111 can play a role of supporting the tank body 110, a liquid leakage hole 112 is disposed at one end of the tank body 110, the liquid leakage hole 112 is disposed to facilitate drainage of filtered waste liquid, a chute 113 is disposed in the tank body 110, the filter cartridge 130 is slidably connected with the chute 113, a limit groove 114 is disposed on one side of the tank body 110, and the chute 113 and the limit groove 114 can play a limit role.
In some specific embodiments, the elastic clamping piece 120 comprises a fixed block 121, an inserting rod 122 and a spring 123, the inserting rod 122 is connected to one side of the fixed block 121 in a penetrating manner, one end of the spring 123 is fixedly connected with the fixed block 121, the other end of the spring 123 is fixedly connected with the inserting rod 122, the clamping effect can be achieved through the inserting rod 122 and the spring 123, an arc plate 131 is arranged on one side of the filter cartridge 130, the arc plate 131 is slidably connected with the limiting groove 114, a connecting block 132 is arranged on one side of the arc plate 131, the inserting rod 122 is slidably connected with the connecting block 132, when impurities in the filter cartridge 130 need to be cleaned, a user can pull the inserting rod 122 to separate the inserting rod 122 from the connecting block 132, then the arc plate 131 can be pulled to draw the filter cartridge 130 out of the interior of the tank 110, then the impurities in the filter cartridge 130 can be cleaned, and otherwise the filter cartridge 130 can be installed.
Referring to fig. 1 and 2, the cleaning assembly 200 includes a lifting frame 210, a motor 220 and a scraper 230, the lifting frame 210 is disposed at one end of the tank 110, the motor 220 is disposed at one side of the lifting frame 210, the scraper 230 is fixedly connected with an output end of the motor 220, the lifting frame 210 includes a support 211, an electric push rod 212 and a moving plate 213, the electric push rod 212 is correspondingly disposed at one side of the support 211, the moving plate 213 is fixedly connected with an output end of the electric push rod 212, a user can start the electric push rod 212, the electric push rod 212 can enable the motor 220 and the scraper 230 to perform height adjustment, a rotating rod 221 is disposed at an output end of the motor 220, the scraper 230 is fixedly connected with the rotating rod 221, and the rotating rod 221 is provided to perform a connection function.
The working principle of the silicon wafer grinding waste liquid filtering device is as follows: firstly, waste liquid is poured into the tank 110, can directly filter the waste liquid through the cartridge filter 130, the user can start the electric putter 212, the electric putter 212 can make motor 220 and scraper blade 230 carry out high regulation, make motor 220 and scraper blade 230 move down until scraper blade 230 contacts with cartridge filter 130 is inside, make scraper blade 230 rotate through motor 220, scraper blade 230 rotates and can avoid impurity to block up the filtration pore of cartridge filter 130, can guarantee the normal circulation of lapping liquid, then the liquid flows into the bottom of tank 110 through cartridge filter 130, and the surface of cartridge filter 130 is left to impurity, when needs clear up the impurity of cartridge filter 130 inside, the user can stimulate inserted bar 122 and connecting block 132 separation, can pull arc 131 and take out cartridge filter 130 from tank 110 inside afterwards, can clear up the impurity of cartridge filter 130 inside, otherwise the operation can be installed cartridge filter 130, adopt the connected mode of joint to conveniently take out cartridge filter 130 from tank 110 inside, can clear up the impurity of cartridge filter 130 inside, and then the filter effect is improved, the impurity in preventing to block up is easy, the filter hole has been improved, thereby the practicality of filtering in the cartridge filter 130 has been increased.
It should be noted that, specific model specifications of the electric push rod 212 and the motor 220 need to be determined by selecting a model according to actual specifications of the device, and a specific model selection calculation method adopts the prior art in the art, so detailed descriptions are omitted.
The power supply of the electric push rod 212 and the motor 220 and the principle thereof will be apparent to those skilled in the art and will not be described in detail herein.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and various modifications and variations will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
The foregoing is merely illustrative of the present application, and the present application is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202420356278.1U CN221933203U (en) | 2024-02-27 | 2024-02-27 | Silicon wafer grinding waste liquid filtering equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202420356278.1U CN221933203U (en) | 2024-02-27 | 2024-02-27 | Silicon wafer grinding waste liquid filtering equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221933203U true CN221933203U (en) | 2024-11-01 |
Family
ID=93247981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202420356278.1U Expired - Fee Related CN221933203U (en) | 2024-02-27 | 2024-02-27 | Silicon wafer grinding waste liquid filtering equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221933203U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN120349005A (en) * | 2025-06-23 | 2025-07-22 | 陕西金翼通风科技有限公司 | A soft water treatment device |
-
2024
- 2024-02-27 CN CN202420356278.1U patent/CN221933203U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN120349005A (en) * | 2025-06-23 | 2025-07-22 | 陕西金翼通风科技有限公司 | A soft water treatment device |
| CN120349005B (en) * | 2025-06-23 | 2025-10-28 | 陕西金翼通风科技有限公司 | Soft water treatment device |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20241101 |