CN221882953U - Leak detection tool for UB ceramic airtight packaging - Google Patents
Leak detection tool for UB ceramic airtight packaging Download PDFInfo
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- CN221882953U CN221882953U CN202420582568.8U CN202420582568U CN221882953U CN 221882953 U CN221882953 U CN 221882953U CN 202420582568 U CN202420582568 U CN 202420582568U CN 221882953 U CN221882953 U CN 221882953U
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Abstract
本实用新型公开了一种用于UB陶瓷气密封装的检漏工装,包括安装底座和滑轨支架,所述安装底座上端面安装有检漏工装,所述检漏工装的内部开设有封装空腔,所述封装空腔的内壁安装有滑轨支架,该实用通过连接齿轮带动对螺纹杆的转动,实现夹板沿着滑轨支架内部进行滑动,然后当夹板向右进行滑动工装,将进行检漏的UB陶瓷气密封装件放置在封装空腔的内部,然后通过夹板的滑动,将UB陶瓷气密封装件通过橡胶材料的防护板进行挤压的固定,保证在进行工作时UB陶瓷气密封装件稳定性,且相互之间没有摩擦和磕碰,避免了表面划伤,确保检漏过程中UB器件有序排列,提高工作效率。
The utility model discloses a leak detection tool for UB ceramic airtight packaging, comprising a mounting base and a slide rail bracket, wherein the leak detection tool is mounted on the upper end surface of the mounting base, a packaging cavity is provided inside the leak detection tool, and the inner wall of the packaging cavity is mounted on the slide rail bracket. The utility model drives the rotation of a threaded rod by a connecting gear to realize sliding of a clamping plate along the inside of the slide rail bracket, and then when the clamping plate slides rightward, a UB ceramic airtight packaging component to be leak-detected is placed inside the packaging cavity, and then the UB ceramic airtight packaging component is squeezed and fixed through a protective plate of a rubber material through the sliding of the clamping plate, thereby ensuring the stability of the UB ceramic airtight packaging component during work, without friction and collision between each other, avoiding surface scratches, ensuring that UB devices are arranged in an orderly manner during the leak detection process, and improving work efficiency.
Description
技术领域Technical Field
本实用新型涉及UB陶瓷气密封装的检漏技术领域,具体为一种用于UB陶瓷气密封装的检漏工装。The utility model relates to the technical field of leakage detection of UB ceramic airtight packages, in particular to a leakage detection tool used for UB ceramic airtight packages.
背景技术Background Art
UB封装是小功率半导体分立器件的一种气密性封装,由于体积小、重量轻、可靠性高,深受用户青睐,为保证器件的封装质量,生产过程需要对器件的密封性进行检测,密封性检测分为氦质谱细检漏和双氟油粗检漏,氦质谱检漏是将器件放在高压罐中充氦气加压,再放入氦质谱分析仪中测定器件的漏率。双氟油粗检漏是先将器件浸泡在低沸点氟油中加压,再放在高沸点氟油中进行检漏。UB package is a kind of airtight package for low-power semiconductor discrete devices. It is popular among users due to its small size, light weight and high reliability. In order to ensure the packaging quality of the device, the sealing of the device needs to be tested during the production process. The sealing test is divided into helium mass spectrometry fine leak detection and double fluorine oil coarse leak detection. Helium mass spectrometry leak detection is to place the device in a high-pressure tank filled with helium to pressurize it, and then put it into a helium mass spectrometer to measure the leakage rate of the device. Double fluorine oil coarse leak detection is to first immerse the device in low-boiling point fluorine oil and pressurize it, and then place it in high-boiling point fluorine oil for leak detection.
然而现有的用于UB陶瓷气密封装的检漏工装在进行工作时内部的UB陶瓷气密封装器件受到压力,互相挤压造成磨损,且器件不能有序排列,使检漏工作完成后,对器件逐一排序,影响工作效率,为此本案设计一种用于UB陶瓷气密封装的检漏工装。However, when the existing leak detection tool for UB ceramic airtight packaging is working, the internal UB ceramic airtight packaging components are subjected to pressure, squeezed against each other and caused wear, and the components cannot be arranged in order. After the leak detection work is completed, the components need to be sorted one by one, which affects the work efficiency. Therefore, this case designs a leak detection tool for UB ceramic airtight packaging.
实用新型内容Utility Model Content
本实用新型的目的在于提供一种用于UB陶瓷气密封装的检漏工装,以解决用于UB陶瓷气密封装的检漏工装在进行工作时内部的UB陶瓷气密封装件受到压力容易产生偏移,造成检测误差以及之间相互的碰撞造成磨损的问题。The utility model aims to provide a leak detection tool for UB ceramic airtight packaging, so as to solve the problem that the internal UB ceramic airtight packaging parts are easily deflected by pressure when the leak detection tool for UB ceramic airtight packaging is working, resulting in detection errors and wear caused by mutual collision.
为实现上述目的,本实用新型提供如下技术方案:一种用于UB陶瓷气密封装的检漏工装,包括安装底座和滑轨支架,所述安装底座上端面安装有检漏工装,所述检漏工装的内部开设有封装空腔,所述封装空腔的内壁安装有滑轨支架,所述滑轨支架的内部安装有驱动齿轮,所述驱动齿轮的内部啮合有连接齿轮,所述连接齿轮的内部安装有螺纹杆,所述螺纹杆的外表面安装有夹板,所述封装空腔的右侧设置有挡块,所述挡块的内壁安装有防护板,所述检漏工装的上端面开设有密封槽,所述检漏工装的上端安装有盖板,所述盖板的内壁安装有密封栓,所述盖板的四端安装有螺纹栓,所述安装底座的上端面左侧安装有定位杆,所述检漏工装的一端安装有检漏管。To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a leak detection tool for UB ceramic airtight packaging, comprising a mounting base and a slide rail bracket, the upper end surface of the mounting base is installed with the leak detection tool, a packaging cavity is opened inside the leak detection tool, the inner wall of the packaging cavity is installed with the slide rail bracket, a driving gear is installed inside the slide rail bracket, a connecting gear is meshed inside the driving gear, a threaded rod is installed inside the connecting gear, a clamp is installed on the outer surface of the threaded rod, a stopper is arranged on the right side of the packaging cavity, a protective plate is installed on the inner wall of the stopper, a sealing groove is opened on the upper end surface of the leak detection tool, a cover plate is installed on the upper end of the leak detection tool, a sealing bolt is installed on the inner wall of the cover plate, threaded bolts are installed on the four ends of the cover plate, a positioning rod is installed on the left side of the upper end surface of the mounting base, and a leak detection tube is installed at one end of the leak detection tool.
优选的,所述螺纹杆通过连接齿轮与驱动齿轮构成转动结构,所述夹板通过螺纹杆与滑轨支架构成滑动结构。Preferably, the threaded rod forms a rotating structure through a connecting gear and a driving gear, and the clamping plate forms a sliding structure through the threaded rod and a slide rail bracket.
优选的,所述防护板与挡块呈固定连接,所述防护板采用橡胶材料。Preferably, the protective plate is fixedly connected to the stopper, and the protective plate is made of rubber material.
优选的,所述检漏工装设置为两组,两组所述检漏工装关于安装底座呈对称分布,所述封装空腔设置为三十组。Preferably, the leak detection tools are arranged in two groups, the two groups of leak detection tools are symmetrically distributed about the mounting base, and the packaging cavities are arranged in thirty groups.
优选的,所述盖板通过密封栓和密封槽与检漏工装之间紧密贴合,所述盖板与定位杆呈卡合连接。Preferably, the cover plate is tightly fitted with the leak detection tooling via a sealing bolt and a sealing groove, and the cover plate is snap-fittedly connected to the positioning rod.
优选的,所述盖板通过螺纹栓与检漏工装构成可拆卸结构,所述螺纹栓设置为四组。Preferably, the cover plate forms a detachable structure with the leak detection tooling through threaded bolts, and the threaded bolts are arranged in four groups.
与现有技术相比,本实用新型的有益效果是;Compared with the prior art, the beneficial effects of the utility model are:
1、本实用通过连接齿轮带动对螺纹杆的转动,实现夹板沿着滑轨支架内部进行滑动,然后当夹板向右进行滑动工装,将进行检漏的UB陶瓷气密封装件放置在封装空腔的内部,然后通过夹板的滑动,将UB陶瓷气密封装件通过橡胶材料的防护板进行挤压的固定,保证在进行工作时UB陶瓷气密封装件稳定性,且相互之间没有摩擦和磕碰,避免了表面划伤,确保检漏过程中陶瓷气密封装件不会移动或晃动,有助于保证检漏结果的准确性和可靠性,避免因为位置变化而导致的误判,同时也可将待检器件按序号依次放入工装中,每个工装放30只产品,检漏前后均能保证UB封装器件有序排列。1. The utility model drives the threaded rod to rotate by connecting the gear, so that the clamp plate slides along the inside of the slide rail bracket, and then when the clamp plate slides to the right, the UB ceramic airtight seal to be leak tested is placed inside the packaging cavity, and then the UB ceramic airtight seal is squeezed and fixed through the protective plate of the rubber material through the sliding of the clamp plate, so as to ensure the stability of the UB ceramic airtight seal during work, and there is no friction and bump between each other, thus avoiding surface scratches and ensuring that the ceramic airtight seal will not move or shake during the leak detection process, which helps to ensure the accuracy and reliability of the leak detection results and avoid misjudgment due to position changes. At the same time, the devices to be tested can also be placed in the tooling in sequence according to the serial number, with 30 products placed in each tooling, so that the UB packaged devices can be arranged in order before and after the leak detection.
2、本实用设置的盖板通过密封栓和密封槽与检漏工装之间进行紧密贴合,保证封装空腔的密封性,然后在进行盖板的安装时,通过与定位杆进行卡合连接,保证在进行盖板安装时的稳定性。2. The cover plate of the utility model is tightly fitted with the leak detection tooling through the sealing bolt and the sealing groove to ensure the sealing of the packaging cavity. Then, when the cover plate is installed, it is connected with the positioning rod by snapping to ensure the stability of the cover plate during installation.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本实用新型正视剖面结构示意图;Fig. 1 is a schematic diagram of the front cross-sectional structure of the utility model;
图2为本实用新型盖板开合结构示意图;Figure 2 is a schematic diagram of the opening and closing structure of the cover plate of the utility model;
图3为本实用新型封装空腔内部结构示意图。FIG. 3 is a schematic diagram of the internal structure of the packaging cavity of the utility model.
图中:1、安装底座;2、检漏工装;3、封装空腔;4、滑轨支架;5、驱动齿轮;6、连接齿轮;7、螺纹杆;8、夹板;9、挡块;10、防护板;11、密封槽;12、盖板;13、密封栓;14、螺纹栓;15、定位杆;16、检漏管。In the figure: 1. Mounting base; 2. Leak detection tool; 3. Packaging cavity; 4. Slide rail bracket; 5. Driving gear; 6. Connecting gear; 7. Threaded rod; 8. Clamp; 9. Block; 10. Protective plate; 11. Sealing groove; 12. Cover plate; 13. Sealing plug; 14. Threaded plug; 15. Positioning rod; 16. Leak detection tube.
具体实施方式DETAILED DESCRIPTION
下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本实用新型一部分实施例,而不是全部的实施例。基于本实用新型中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本实用新型保护的范围。The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
请参阅图1-3,本实用新型提供一种技术方案:一种用于UB陶瓷气密封装的检漏工装,包括安装底座1和滑轨支架4,安装底座1上端面安装有检漏工装2,检漏工装2的内部开设有封装空腔3,封装空腔3的内壁安装有滑轨支架4,滑轨支架4的内部安装有驱动齿轮5,驱动齿轮5的内部啮合有连接齿轮6,连接齿轮6的内部安装有螺纹杆7,螺纹杆7的外表面安装有夹板8,封装空腔3的右侧设置有挡块9,挡块9的内壁安装有防护板10,检漏工装2的上端面开设有密封槽11,检漏工装2的上端安装有盖板12,盖板12的内壁安装有密封栓13,盖板12的四端安装有螺纹栓14,安装底座1的上端面左侧安装有定位杆15,检漏工装2的一端安装有检漏管16。Please refer to Figures 1-3. The utility model provides a technical solution: a leak detection tool for UB ceramic airtight packaging, including a mounting base 1 and a slide rail bracket 4, a leak detection tool 2 is installed on the upper end surface of the mounting base 1, a packaging cavity 3 is opened inside the leak detection tool 2, a slide rail bracket 4 is installed on the inner wall of the packaging cavity 3, a driving gear 5 is installed inside the slide rail bracket 4, a connecting gear 6 is meshed inside the driving gear 5, a threaded rod 7 is installed inside the connecting gear 6, a clamping plate 8 is installed on the outer surface of the threaded rod 7, a stopper 9 is arranged on the right side of the packaging cavity 3, a protective plate 10 is installed on the inner wall of the stopper 9, a sealing groove 11 is opened on the upper end surface of the leak detection tool 2, a cover plate 12 is installed on the upper end of the leak detection tool 2, a sealing bolt 13 is installed on the inner wall of the cover plate 12, and threaded bolts 14 are installed on the four ends of the cover plate 12, a positioning rod 15 is installed on the left side of the upper end surface of the mounting base 1, and a leak detection tube 16 is installed at one end of the leak detection tool 2.
进一步的,螺纹杆7通过连接齿轮6与驱动齿轮5构成转动结构,夹板8通过螺纹杆7与滑轨支架4构成滑动结构,通过首手轮对驱动齿轮5进行转动,通过连接齿轮6带动对螺纹杆7的转动,实现夹板8沿着滑轨支架4内部进行滑动。Furthermore, the threaded rod 7 forms a rotating structure with the driving gear 5 through the connecting gear 6, and the clamping plate 8 forms a sliding structure with the slide rail bracket 4 through the threaded rod 7. The driving gear 5 is rotated by the first hand wheel, and the threaded rod 7 is driven to rotate by the connecting gear 6, so that the clamping plate 8 can slide along the inside of the slide rail bracket 4.
进一步的,防护板10与挡块9呈固定连接,防护板10采用橡胶材料,然后当夹板8向右进行滑动工装,将进行检漏的UB陶瓷气密封装件放置在封装空腔3的内部,然后通过夹板8的滑动,将UB陶瓷气密封装件通过橡胶材料的防护板10进行挤压的固定,保证在进行工作时UB陶瓷气密封装件稳定性,且相互之间没有摩擦和磕碰,避免了表面划伤,确保检漏过程中陶瓷气密封装件不会移动或晃动,有助于保证检漏结果的准确性和可靠性,避免因为位置变化而导致的误判。Furthermore, the protective plate 10 is fixedly connected to the block 9, and the protective plate 10 is made of rubber material. Then, when the clamp 8 slides to the right, the UB ceramic airtight sealing assembly to be leak tested is placed inside the packaging cavity 3, and then the clamp 8 slides to squeeze and fix the UB ceramic airtight sealing assembly through the protective plate 10 made of rubber material, thereby ensuring the stability of the UB ceramic airtight sealing assembly during operation, and without friction or collision between each other, avoiding surface scratches, and ensuring that the ceramic airtight sealing assembly will not move or shake during the leak detection process, which helps to ensure the accuracy and reliability of the leak detection results and avoid misjudgment due to position changes.
进一步的,检漏工装2设置为两组,两组检漏工装2关于安装底座1呈对称分布,封装空腔3设置为三十组,将每个UB陶瓷气密封装件均匀的安装在封装空腔3的内部,避免之间相互的摩擦损伤。Furthermore, the leak detection tools 2 are arranged into two groups, the two groups of leak detection tools 2 are symmetrically distributed about the mounting base 1, the packaging cavities 3 are arranged into thirty groups, and each UB ceramic airtight packaging component is evenly installed inside the packaging cavity 3 to avoid friction damage between them.
进一步的,盖板12通过密封栓13和密封槽11与检漏工装2之间紧密贴合,盖板12与定位杆15呈卡合连接,设置的盖板12通过密封栓13和密封槽11与检漏工装2之间进行紧密贴合,保证封装空腔3的密封性,然后在进行盖板12的安装时,通过与定位杆15进行卡合连接,保证在进行盖板12安装时的稳定性,然后在进行检漏工作时,将检漏管16与检漏仪器进行安装连接,充入一定压力的气体后,如果压力持续下降,说明有气体泄漏,从而可以判断陶瓷气密封装件存在密封不良的问题。Furthermore, the cover plate 12 is tightly fitted with the leak detection tool 2 through the sealing bolt 13 and the sealing groove 11, and the cover plate 12 is snap-fitted with the positioning rod 15. The set cover plate 12 is tightly fitted with the leak detection tool 2 through the sealing bolt 13 and the sealing groove 11 to ensure the sealing of the packaging cavity 3, and then when the cover plate 12 is installed, it is snap-fitted with the positioning rod 15 to ensure the stability of the cover plate 12 during installation, and then when the leak detection work is performed, the leak detection tube 16 is installed and connected with the leak detection instrument, and after a certain pressure of gas is filled in, if the pressure continues to drop, it means that there is a gas leakage, so that it can be judged that the ceramic airtight sealing assembly has a poor sealing problem.
进一步的,盖板12通过螺纹栓14与检漏工装2构成可拆卸结构,螺纹栓14设置为四组,通过螺纹栓14用于盖板12的拆卸和安装。Furthermore, the cover plate 12 and the leak detection tool 2 form a detachable structure through the threaded bolts 14 , and the threaded bolts 14 are arranged in four groups, and the threaded bolts 14 are used for disassembly and installation of the cover plate 12 .
工作原理:通过连接齿轮6带动对螺纹杆7的转动,实现夹板8沿着滑轨支架4内部进行滑动,然后当夹板8向右进行滑动工装,将进行检漏的UB陶瓷气密封装件放置在封装空腔3的内部,然后通过夹板8的滑动,将UB陶瓷气密封装件通过橡胶材料的防护板10进行挤压的固定,保证在进行工作时UB陶瓷气密封装件稳定性,且相互之间没有摩擦和磕碰,然后,设置的盖板12通过密封栓13和密封槽11与检漏工装2之间进行紧密贴合,保证封装空腔3的密封性,然后在进行盖板12的安装时,通过与定位杆15进行卡合连接,保证在进行盖板12安装时的稳定性,然后在进行检漏工作时,将检漏管16与检漏仪器进行安装连接,充入一定压力的气体后,如果压力持续下降,说明有气体泄漏,从而可以判断陶瓷气密封装件存在密封不良的问题,操作简单方便。Working principle: by connecting the gear 6 to drive the rotation of the threaded rod 7, the clamping plate 8 is realized to slide along the inside of the slide rail bracket 4, and then when the clamping plate 8 slides to the right, the UB ceramic airtight seal to be leak tested is placed inside the packaging cavity 3, and then the UB ceramic airtight seal is squeezed and fixed through the protective plate 10 of the rubber material through the sliding of the clamping plate 8, so as to ensure the stability of the UB ceramic airtight seal during operation, and there is no friction and bump between each other, and then, the set cover plate 12 is tightly fitted with the leak detection tool 2 through the sealing bolt 13 and the sealing groove 11 to ensure the sealing of the packaging cavity 3, and then when installing the cover plate 12, it is connected by snapping with the positioning rod 15 to ensure the stability of the cover plate 12 during installation, and then when leak detection is performed, the leak detection tube 16 is installed and connected with the leak detection instrument, and after a certain pressure of gas is filled, if the pressure continues to drop, it means that there is a gas leak, so that it can be judged that the ceramic airtight seal has a poor sealing problem, and the operation is simple and convenient.
尽管已经示出和描述了本实用新型的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本实用新型的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本实用新型的范围由所附权利要求及其等同物限定。Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
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