CN221762515U - Vibration reduction mechanism for vacuum exhaust table pump machine - Google Patents
Vibration reduction mechanism for vacuum exhaust table pump machine Download PDFInfo
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- 230000035939 shock Effects 0.000 claims description 5
- 230000003139 buffering effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 10
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- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 1
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- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
技术领域Technical Field
本实用新型涉及真空排气台技术的领域,尤其是涉及一种真空排气台泵机用减振机构。The utility model relates to the field of vacuum exhaust table technology, in particular to a vibration reduction mechanism for a vacuum exhaust table pump.
背景技术Background Art
真空排气台是专门对密封容器进行抽真空的设备(管式真空炉,真空箱,霓虹灯),利用泵体可在短时间内使真空容器内部真空度达到10-2帕到10-5帕之间,广泛应用于航空航天、镀膜、太阳能等领域。The vacuum exhaust table is a device specially used to evacuate sealed containers (tubular vacuum furnaces, vacuum boxes, neon lamps). The pump body can make the vacuum degree inside the vacuum container reach between 10-2 Pa and 10-5 Pa in a short time. It is widely used in aerospace, coating, solar energy and other fields.
但是泵体在工作时会产生较大的振动,这个振动会传递给真空排气台上的其它设备,导致整个真空排气台均处于振动的影响下,大大增加了故障的风险。However, the pump body will generate large vibrations when working, and this vibration will be transmitted to other equipment on the vacuum exhaust table, causing the entire vacuum exhaust table to be affected by vibration, greatly increasing the risk of failure.
实用新型内容Utility Model Content
为了改善因泵体振动影响整个真空排气台振动的问题,降低设备的故障风险,本申请提供一种真空排气台泵机用减振机构。In order to improve the problem that the vibration of the entire vacuum exhaust table is affected by the vibration of the pump body and reduce the risk of equipment failure, the present application provides a vibration reduction mechanism for a vacuum exhaust table pump.
本申请提供的一种真空排气台泵机用减振机构采用如下的技术方案:The present application provides a vibration reduction mechanism for a vacuum exhaust table pump machine using the following technical solution:
一种真空排气台泵机用减振机构,设置于泵机底部,包括减振机构,所述减振机构包括基座、配重座、导向杆、直线轴承和滚轮,所述基座放置于真空排气台台面上,所述基座呈“凵”型设置,所述配重座连接于泵机底部,所述导向杆连接于基座上,所述导向杆沿基座的长度方向设置,所述导向杆在基座长度方向轴线的两侧分别对称设有一个,所述配重座上开设有供导向杆穿过的安装孔,所述直线轴承连接于安装孔内,所述导向杆穿设于直线轴承内,所述滚轮连接于配重座上,所述滚轮在配重座底部的四个拐角处分别设有一个,所述滚轮滚动于基座上,所述基座和配重座之间还设有缓冲振动的缓震组件。A vibration reduction mechanism for a vacuum exhaust table pump is arranged at the bottom of the pump, including a vibration reduction mechanism, the vibration reduction mechanism including a base, a counterweight seat, a guide rod, a linear bearing and a roller. The base is placed on the surface of the vacuum exhaust table, and the base is arranged in a "凵" shape. The counterweight seat is connected to the bottom of the pump, and the guide rod is connected to the base. The guide rod is arranged along the length direction of the base, and the guide rod is symmetrically provided on both sides of the axis of the length direction of the base. The counterweight seat is provided with a mounting hole for the guide rod to pass through, the linear bearing is connected to the mounting hole, and the guide rod is passed through the linear bearing. The roller is connected to the counterweight seat, and the roller is respectively provided at the four corners of the bottom of the counterweight seat. The roller rolls on the base, and a shock-absorbing component for buffering vibration is also provided between the base and the counterweight seat.
优选的,所述缓震组件在配重座相对的两侧分别设有一个,所述缓震组件包括安装筒、密封盖、活塞杆、滑块和缓冲弹簧,所述安装筒位于两个导向杆之间且沿平行于导向杆的方向设置,所述密封盖连接于安装筒的筒口处,所述活塞杆穿过密封盖设置于安装筒内,所述活塞杆的轴线与安装筒的轴线共线设置,所述滑块固定连接于活塞杆位于安装筒内的端部,所述滑块的侧壁滑动贴合于安装筒的内壁,所述安装筒内充设有阻尼油,所述滑块上开设有供阻尼油通过的通孔,所述通孔沿活塞杆的周向在滑块上均匀排布有若干,所述安装筒和活塞杆相背的两端分别连接有第一弹簧座和第二弹簧座,所述缓冲弹簧套设于安装筒和活塞杆的外部,所述缓冲弹簧的两端分别连接于第一弹簧座和第二弹簧座上,所述安装筒和活塞杆相背的两端分别连接有第一连接法兰和第二连接法兰,所述第一弹簧座和第二弹簧座位于第一连接法兰和第二连接法兰之间,所述第一连接法兰连接于基座上,所述第二连接法兰连接于配重座上。Preferably, the shock absorbing assembly is respectively provided with one on two opposite sides of the counterweight seat, and the shock absorbing assembly includes a mounting tube, a sealing cover, a piston rod, a slider and a buffer spring. The mounting tube is located between the two guide rods and is arranged in a direction parallel to the guide rod. The sealing cover is connected to the tube mouth of the mounting tube, the piston rod passes through the sealing cover and is arranged in the mounting tube. The axis of the piston rod is arranged in a colinear manner with the axis of the mounting tube. The slider is fixedly connected to the end of the piston rod located in the mounting tube. The side wall of the slider is slidably fitted to the inner wall of the mounting tube. The mounting tube is filled with damping oil, and a damping oil supply is provided on the slider. The through holes pass through the slider, and a plurality of through holes are evenly arranged along the circumference of the piston rod. The two ends of the mounting cylinder and the piston rod opposite to each other are respectively connected with the first spring seat and the second spring seat. The buffer spring is sleeved on the outside of the mounting cylinder and the piston rod, and the two ends of the buffer spring are respectively connected to the first spring seat and the second spring seat. The two ends of the mounting cylinder and the piston rod opposite to each other are respectively connected with the first connecting flange and the second connecting flange. The first spring seat and the second spring seat are located between the first connecting flange and the second connecting flange. The first connecting flange is connected to the base, and the second connecting flange is connected to the counterweight seat.
优选的,所述第一连接法兰和第二连接法兰之间连接有限位伸缩杆,所述限位伸缩杆沿平行于活塞杆的方向设置,所述限位伸缩杆贴合于缓冲弹簧的外部,所述限位伸缩杆沿活塞杆的周向均匀排布有若干。Preferably, a limiting telescopic rod is connected between the first connecting flange and the second connecting flange, the limiting telescopic rod is arranged in a direction parallel to the piston rod, the limiting telescopic rod is attached to the outside of the buffer spring, and a plurality of limiting telescopic rods are evenly arranged along the circumference of the piston rod.
优选的,所述基座底部设置有减震垫,所述减震垫铺设于基座底面上。Preferably, a shock-absorbing pad is provided at the bottom of the base, and the shock-absorbing pad is laid on the bottom surface of the base.
优选的,所述基座与滚轮的接触面为光滑平面。Preferably, the contact surface between the base and the roller is a smooth plane.
优选的,所述滚轮为减震滚轮。Preferably, the roller is a shock-absorbing roller.
综上所述,本申请包括以下有益技术效果:In summary, this application includes the following beneficial technical effects:
本实用新型提供的一种真空排气台泵机用减振机构,通过设置基座、配重座、导向杆、直线轴承、滚轮以及缓震组件,一方面通过配重座提高泵机整体的质量,使泵机振动时需要更大的能量,提高了泵机自身的减振性,另一方面,通过导向杆使泵机产生的振动转化为配重座横向的移动,减小泵机的振动幅度,当配重座发生横向位移时,缓震组件能够对其进行缓冲,并且在直线轴承和滚轮的配合下,减小了配重座在移动过程中与导向杆和基座两者整体之间的摩擦,以此减小泵机的振动对基座的传导效果,进而减小泵机的振动对真空排气台台面的传导效果,从而达到了改善因泵体振动影响整个真空排气台振动的问题,降低设备的故障风险的效果。The utility model provides a vibration reduction mechanism for a vacuum exhaust table pump. By setting a base, a counterweight seat, a guide rod, a linear bearing, a roller and a shock-absorbing assembly, on the one hand, the counterweight seat is used to improve the overall quality of the pump, so that the pump requires more energy when vibrating, thereby improving the vibration reduction of the pump itself. On the other hand, the guide rod is used to convert the vibration generated by the pump into lateral movement of the counterweight seat, thereby reducing the vibration amplitude of the pump. When the counterweight seat undergoes lateral displacement, the shock-absorbing assembly can buffer it, and with the cooperation of the linear bearing and the roller, the friction between the counterweight seat and the guide rod and the base as a whole during the movement is reduced, thereby reducing the transmission effect of the vibration of the pump on the base, and further reducing the transmission effect of the vibration of the pump on the surface of the vacuum exhaust table, thereby achieving the effect of improving the problem of the vibration of the entire vacuum exhaust table affected by the vibration of the pump body and reducing the risk of equipment failure.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是本申请实施例中真空排气台泵机用减振机构的结构示意图;FIG1 is a schematic structural diagram of a vibration reduction mechanism for a vacuum exhaust station pump in an embodiment of the present application;
图2是本申请实施例中真空排气台泵机用减振机构的主视图;FIG2 is a front view of a vibration reduction mechanism for a vacuum exhaust table pump machine in an embodiment of the present application;
图3是本申请实施例中用于体现缓震组件的示意图;FIG3 is a schematic diagram of a shock absorbing component in an embodiment of the present application;
图4是本申请实施例中用于体现安装筒内部结构的示意图。FIG. 4 is a schematic diagram for illustrating the internal structure of the installation tube in an embodiment of the present application.
附图标记说明:1、泵机;2、减振机构;21、基座;22、配重座;23、导向杆;24、直线轴承;25、滚轮;3、缓震组件;31、安装筒;311、第一弹簧座;312、第一连接法兰;32、密封盖;33、活塞杆;331、第二弹簧座;332、第二连接法兰;34、滑块;341、通孔;35、缓冲弹簧;4、限位伸缩杆;5、减震垫。Explanation of the reference numerals in the accompanying drawings: 1. Pump; 2. Vibration reduction mechanism; 21. Base; 22. Counterweight seat; 23. Guide rod; 24. Linear bearing; 25. Roller; 3. Shock-absorbing assembly; 31. Mounting cylinder; 311. First spring seat; 312. First connecting flange; 32. Sealing cover; 33. Piston rod; 331. Second spring seat; 332. Second connecting flange; 34. Slider; 341. Through hole; 35. Buffer spring; 4. Limiting telescopic rod; 5. Shock-absorbing pad.
具体实施方式DETAILED DESCRIPTION
为了使本领域的人员更好地理解本实用新型方案,下面将结合附图对本实用新型实施例中的方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本实用新型一部分的实施例,而不是全部的实施例,基于本实用新型中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的的所有其他实施例,都应当属于本实用新型保护的范围。In order to enable those skilled in the art to better understand the scheme of the utility model, the scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiment is only an embodiment of a part of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work should fall within the scope of protection of the utility model.
在本实用新型的描述中,需要说明的是,术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本实用新型和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本实用新型的限制;术语“第一”、“第二”、“第三”仅用于描述目的,而不能理解为指示或暗示相对重要性,此外,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个原件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本实用新型中的具体含义。In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention; the terms "first", "second", and "third" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance. In addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two original components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
本申请实施例公开一种真空排气台泵机用减振机构。参照图1、图2、图3和图4,真空排气台泵机用减振机构设置于泵机1底部,包括减振机构2,减振机构2包括基座21、配重座22、导向杆23、直线轴承24和滚轮25,基座21放置于真空排气台台面上,基座21呈“凵”型设置,配重座22连接于泵机1底部,导向杆23连接于基座21上,导向杆23沿基座21的长度方向设置,导向杆23在基座21长度方向轴线的两侧分别对称设有一个,配重座22上开设有供导向杆23穿过的安装孔,直线轴承24连接于安装孔内,导向杆23穿设于直线轴承24内,滚轮25连接于配重座22上,滚轮25在配重座22底部的四个拐角处分别设有一个,滚轮25滚动于基座21上,基座21和配重座22之间还设有缓冲振动的缓震组件3,操作时,一方面通过配重座22提高了泵机1整体的质量,使泵机1振动时需要更大的能量,提高了泵机1自身的减振性,另一方面,通过导向杆23使泵机1产生的振动转化为配重座22横向的移动,减小泵机1的振动幅度,当配重座22发生横向位移时,缓震组件3能够对其进行缓冲,并且在直线轴承24和滚轮25的配合下,减小了配重座22在移动过程中与导向杆23和基座21两者整体之间的摩擦,以此减小泵机1的振动对基座21的传导效果,进而减小泵机1的振动对真空排气台台面的传导效果。The embodiment of the present application discloses a vibration reduction mechanism for a vacuum exhaust table pump. Referring to Figures 1, 2, 3 and 4, the vibration reduction mechanism for the vacuum exhaust table pump is arranged at the bottom of the pump 1, including a vibration reduction mechanism 2, the vibration reduction mechanism 2 includes a base 21, a counterweight seat 22, a guide rod 23, a linear bearing 24 and a roller 25, the base 21 is placed on the table top of the vacuum exhaust table, the base 21 is arranged in a "凵" shape, the counterweight seat 22 is connected to the bottom of the pump 1, the guide rod 23 is connected to the base 21, the guide rod 23 is arranged along the length direction of the base 21, the guide rod 23 is symmetrically provided on both sides of the axis of the length direction of the base 21, the counterweight seat 22 is provided with a mounting hole for the guide rod 23 to pass through, the linear bearing 24 is connected to the mounting hole, the guide rod 23 is penetrated in the linear bearing 24, the roller 25 is connected to the counterweight seat 22, and the roller 25 is respectively provided at the four corners of the bottom of the counterweight seat 22. One, the roller 25 rolls on the base 21, and a shock-absorbing component 3 for buffering vibration is also provided between the base 21 and the counterweight seat 22. During operation, on the one hand, the overall mass of the pump 1 is improved by the counterweight seat 22, so that the pump 1 requires more energy when vibrating, thereby improving the vibration reduction of the pump 1 itself. On the other hand, the vibration generated by the pump 1 is converted into lateral movement of the counterweight seat 22 through the guide rod 23, thereby reducing the vibration amplitude of the pump 1. When the counterweight seat 22 undergoes lateral displacement, the shock-absorbing component 3 can buffer it, and with the cooperation of the linear bearing 24 and the roller 25, the friction between the counterweight seat 22 and the guide rod 23 and the base 21 as a whole during the movement is reduced, thereby reducing the transmission effect of the vibration of the pump 1 on the base 21, and further reducing the transmission effect of the vibration of the pump 1 on the surface of the vacuum exhaust table.
其中,基座21与滚轮25的接触面为光滑平面,保证滚轮25与基座21之间的摩擦力较小,有利于减小泵机1对真空排气台台面的传导效果,并且滚轮25为减震滚轮25,有利于进一步减小泵机1带来的振动。Among them, the contact surface between the base 21 and the roller 25 is a smooth plane, which ensures that the friction between the roller 25 and the base 21 is small, which is beneficial to reducing the conduction effect of the pump 1 on the vacuum exhaust table surface, and the roller 25 is a shock-absorbing roller 25, which is beneficial to further reduce the vibration caused by the pump 1.
缓震组件3在配重座22相对的两侧分别设有一个,缓震组件3包括安装筒31、密封盖32、活塞杆33、滑块34和缓冲弹簧35,安装筒31位于两个导向杆23之间且沿平行于导向杆23的方向设置,密封盖32连接于安装筒31的筒口处,活塞杆33穿过密封盖32设置于安装筒31内,活塞杆33的轴线与安装筒31的轴线共线设置,滑块34固定连接于活塞杆33位于安装筒31内的端部,滑块34的侧壁滑动贴合于安装筒31的内壁,安装筒31内充设有阻尼油,滑块34上开设有供阻尼油通过的通孔341,通孔341沿活塞杆33的周向在滑块34上均匀排布有若干,安装筒31和活塞杆33相背的两端分别连接有第一弹簧座311和第二弹簧座331,缓冲弹簧35套设于安装筒31和活塞杆33的外部,缓冲弹簧35的两端分别连接于第一弹簧座311和第二弹簧座331上,安装筒31和活塞杆33相背的两端分别连接有第一连接法兰312和第二连接法兰332,第一弹簧座311和第二弹簧座331位于第一连接法兰312和第二连接法兰332之间,第一连接法兰312连接于基座21上,第二连接法兰332连接于配重座22上,当配重座22左右移动时,一方面,缓冲弹簧35会发生弹性形变,产生的弹力能够对振动进行缓冲,另一方面,活塞杆33在振动的作用下会在安装筒31内做活塞运动,此过程中阻尼油经过滑块34上的通孔341,从滑块34的一侧移动至另一侧,产生的阻力对振动起到了减震作用。The damping assembly 3 is respectively provided with one on the two opposite sides of the counterweight seat 22, and the damping assembly 3 includes a mounting tube 31, a sealing cover 32, a piston rod 33, a slider 34 and a buffer spring 35. The mounting tube 31 is located between the two guide rods 23 and is arranged in a direction parallel to the guide rod 23. The sealing cover 32 is connected to the tube mouth of the mounting tube 31, and the piston rod 33 passes through the sealing cover 32 and is arranged in the mounting tube 31. The axis of the piston rod 33 is arranged in a colinear manner with the axis of the mounting tube 31. The slider 34 is fixedly connected to the end of the piston rod 33 located in the mounting tube 31, and the side wall of the slider 34 slides and fits the inner wall of the mounting tube 31. The mounting tube 31 is filled with damping oil. The slider 34 is provided with a through hole 341 for the damping oil to pass through. A plurality of through holes 341 are evenly arranged on the slider 34 along the circumference of the piston rod 33. The mounting tube 31 and the piston rod 33 are respectively connected at opposite ends with a first spring seat 311 and a second spring seat 331. The impact spring 35 is sleeved on the outside of the mounting cylinder 31 and the piston rod 33, and the two ends of the buffer spring 35 are respectively connected to the first spring seat 311 and the second spring seat 331, and the two opposite ends of the mounting cylinder 31 and the piston rod 33 are respectively connected with the first connecting flange 312 and the second connecting flange 332, and the first spring seat 311 and the second spring seat 331 are located between the first connecting flange 312 and the second connecting flange 332, and the first connecting flange 312 is connected to the base 21, and the second connecting flange 332 is connected to the counterweight seat 22. When the counterweight seat 22 moves left and right, on the one hand, the buffer spring 35 will undergo elastic deformation, and the generated elastic force can buffer the vibration. On the other hand, the piston rod 33 will perform piston motion in the mounting cylinder 31 under the action of vibration. In this process, the damping oil passes through the through hole 341 on the slider 34 and moves from one side of the slider 34 to the other side, and the generated resistance has a shock-absorbing effect on the vibration.
第一连接法兰312和第二连接法兰332之间连接有限位伸缩杆4,限位伸缩杆4沿平行于活塞杆33的方向设置,限位伸缩杆4贴合于缓冲弹簧35的外部,限位伸缩杆4沿活塞杆33的周向均匀排布有若干,如此设置减小了缓冲弹簧35在形变过程中的振动,进一步有利于提高装置的稳定性。A limiting telescopic rod 4 is connected between the first connecting flange 312 and the second connecting flange 332. The limiting telescopic rod 4 is arranged in a direction parallel to the piston rod 33. The limiting telescopic rod 4 is attached to the outside of the buffer spring 35. Several limiting telescopic rods 4 are evenly arranged along the circumference of the piston rod 33. Such an arrangement reduces the vibration of the buffer spring 35 during the deformation process, which is further beneficial to improving the stability of the device.
基座21底部设置有减震垫5,减震垫5铺设于基座21底面上,通过减震垫5进一步减小泵机1的振动对真空排气台台面的传导效果,起到减震作用。A shock-absorbing pad 5 is provided at the bottom of the base 21 and laid on the bottom surface of the base 21. The shock-absorbing pad 5 further reduces the transmission effect of the vibration of the pump machine 1 on the vacuum exhaust table surface, thereby playing a shock-absorbing role.
最后应当说明的是:以上所述仅是本实用新型的优选实施方式,本实用新型的保护范围并不仅局限于上述实施例,凡属于本实用新型思路下的技术方案均属于本实用新型的保护范围。应当指出,对于本技术领域的普通技术人员来说,在不脱离本实用新型原理前提下的若干改进和润饰,这些改进和润饰也应视为本实用新型的保护范围。Finally, it should be noted that the above is only the preferred implementation of the utility model, and the protection scope of the utility model is not limited to the above embodiments. All technical solutions under the idea of the utility model belong to the protection scope of the utility model. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the utility model should also be regarded as the protection scope of the utility model.
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