CN221753820U - A coating platform bottom plate device for lifting a flat plate with high precision - Google Patents
A coating platform bottom plate device for lifting a flat plate with high precision Download PDFInfo
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- 238000000576 coating method Methods 0.000 title claims abstract description 76
- 239000011248 coating agent Substances 0.000 title claims abstract description 75
- 238000001179 sorption measurement Methods 0.000 claims abstract description 33
- 239000004579 marble Substances 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 239000013307 optical fiber Substances 0.000 claims description 4
- 229920001296 polysiloxane Polymers 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000007764 slot die coating Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
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- 102100026388 L-amino-acid oxidase Human genes 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007607 die coating method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
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- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
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- 230000008569 process Effects 0.000 description 1
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Abstract
本实用新型涉及的一种高精密托举平板的涂布平台底板装置，它包括上下平行设置的导柱板和涂布平台底板，所述导柱板上设有阵列布置的支柱管，所述涂布平台底板和导柱板之间均匀布置有至少两个千分尺精密调整平台，所述千分尺精密调整平台上设有基准球，所述基准球设置在导柱板22的上方，基准球用于托举支撑吸附台，千分尺精密调整平台用于调整基准球，达到吸附台的高度平稳；支柱管阵列的上方放置待涂布平板。本实用新型最大程度消除平板升降产生的误差，实现高精度高效率平板涂布，大大提高了整机运行的稳定性和一致性，有利于本实用新型的涂布系统的高效自动化以及量产化。
The utility model relates to a coating platform bottom plate device for lifting a flat plate with high precision, which includes a guide column plate and a coating platform bottom plate arranged in parallel up and down, the guide column plate is provided with support tubes arranged in an array, at least two micrometer precision adjustment platforms are evenly arranged between the coating platform bottom plate and the guide column plate, the micrometer precision adjustment platform is provided with a reference ball, the reference ball is arranged above the guide column plate 22, the reference ball is used to lift and support the adsorption platform, the micrometer precision adjustment platform is used to adjust the reference ball to achieve a stable height of the adsorption platform; the flat plate to be coated is placed above the support tube array. The utility model eliminates the error caused by the lifting of the flat plate to the greatest extent, realizes high-precision and high-efficiency flat plate coating, greatly improves the stability and consistency of the whole machine operation, and is conducive to the efficient automation and mass production of the coating system of the utility model.
Description
技术领域Technical Field
本实用新型涉及平板涂布机技术领域，尤其涉及一种高精密托举平板的涂布平台底板装置。The utility model relates to the technical field of flat plate coating machines, in particular to a coating platform bottom plate device for lifting a flat plate with high precision.
背景技术Background Art
狭缝式涂布（Slot Die Coating，简称SDC）是一种在一定压力下，将涂液沿着模具缝隙压出并转移到移动基材上的一种涂布技术，它以其涂布速度快、涂膜均匀性好、涂布窗口宽等特点，代表了湿法涂布未来发展方向。狭缝式涂布的工作原理为：涂布液体在一定压力下，并保持一定流量，沿着涂布模具的缝隙唇口，挤压喷出而涂覆到基材表面上。相比其它涂布方式，具有很多优点，如涂布速度快、精度高、湿厚均匀、系统封闭、浆料利用率高、可同时进行多层涂布等。狭缝式涂布（SDC）的应用领域已从传统胶卷和造纸等向新能源领域转移，特别是太阳能电池和锂离子电池极片涂布，不仅用于光学膜（增亮膜、hardcoat、偏光膜、扩散膜等）、OLED涂布等，还可以用于有机太阳能电池OPV和钙钛矿太阳能电池PVK等成卷基材的涂布，也应用于非连续基材如LCD玻璃基板光阻涂布。尽管SDC技术在日益成熟的发展中，但对于工业化生产来讲，微小的技术改进，都可能对成本降低发挥重大作用，产生巨大经济效益。Slot Die Coating (SDC) is a coating technology that presses the coating liquid out along the gap of the die under a certain pressure and transfers it to the moving substrate. It represents the future development direction of wet coating with its characteristics of fast coating speed, good coating uniformity, and wide coating window. The working principle of slot coating is: the coating liquid is squeezed and sprayed along the gap lip of the coating die under a certain pressure and maintains a certain flow rate to be coated on the surface of the substrate. Compared with other coating methods, it has many advantages, such as fast coating speed, high precision, uniform wet thickness, closed system, high slurry utilization, and simultaneous multi-layer coating. The application field of Slit Die Coating (SDC) has shifted from traditional film and papermaking to new energy fields, especially solar cell and lithium-ion battery pole piece coating. It is not only used for optical films (brightness enhancement films, hardcoat, polarizing films, diffusion films, etc.), OLED coating, etc., but also for coating roll substrates such as organic solar cells OPV and perovskite solar cells PVK, and also for non-continuous substrates such as LCD glass substrate photoresist coating. Although SDC technology is developing increasingly maturely, for industrial production, small technical improvements may play a significant role in reducing costs and generate huge economic benefits.
现有技术中的涂布机在应用过程中，大多没有考虑涂布平台底板的托举稳定性，实际在运行过程中，若涂布平台底板的稳定性和均一性差，会导致涂布厚度不均以及效果不可控的问题，使得良品率下降，降低了生产效率，同时也对涂布精度造成影响。In the application process of coating machines in the prior art, most of them do not take into account the lifting stability of the bottom plate of the coating platform. In actual operation, if the stability and uniformity of the bottom plate of the coating platform are poor, it will lead to uneven coating thickness and uncontrollable effect, resulting in a decrease in yield rate and production efficiency, while also affecting the coating accuracy.
发明内容Summary of the invention
本实用新型的目的在于克服上述不足，提供一种高精密托举平板的涂布平台底板装置，提高了整机运行的稳定性和一致性。The purpose of the utility model is to overcome the above-mentioned shortcomings and provide a coating platform bottom plate device for lifting a flat plate with high precision, thereby improving the stability and consistency of the operation of the whole machine.
本实用新型的目的是这样实现的：The purpose of the utility model is achieved in this way:
一种高精密托举平板的涂布平台底板装置，它包括上下平行设置的导柱板和涂布平台底板，所述导柱板上设有阵列布置的支柱管，所述涂布平台底板的底面中心设有托举气缸，所述托举气缸的输出端连接导柱板的中心处，并通过气缸限位板连接，所述气缸限位板设置在导柱板的上表面中心处，所述气缸限位板通过限位板支柱连接涂布平台底板；所述涂布平台底板上设有多个均布的导柱，所述导柱上设有直线轴承，所述直线轴承与导柱板连接，通过托举电机驱动直线轴承沿导柱带动导柱板上下移动；A coating platform bottom plate device for lifting a high-precision flat plate, comprising a guide column plate and a coating platform bottom plate arranged in parallel up and down, the guide column plate is provided with support tubes arranged in an array, a lifting cylinder is provided at the bottom center of the coating platform bottom plate, the output end of the lifting cylinder is connected to the center of the guide column plate and connected through a cylinder limit plate, the cylinder limit plate is arranged at the center of the upper surface of the guide column plate, and the cylinder limit plate is connected to the coating platform bottom plate through the limit plate support; a plurality of evenly distributed guide columns are provided on the coating platform bottom plate, the guide columns are provided with linear bearings, the linear bearings are connected to the guide column plate, and the linear bearings are driven by a lifting motor to drive the guide column plate to move up and down along the guide columns;
所述涂布平台底板和导柱板之间均匀布置有至少两个千分尺精密调整平台，所述千分尺精密调整平台上设有基准球，所述基准球设置在导柱板22的上方，基准球用于托举支撑吸附台，千分尺精密调整平台用于调整基准球，达到吸附台的高度平稳；支柱管阵列的上方放置待涂布平板。At least two micrometer precision adjustment platforms are evenly arranged between the bottom plate of the coating platform and the guide column plate. A reference ball is provided on the micrometer precision adjustment platform. The reference ball is arranged above the guide column plate 22. The reference ball is used to lift and support the adsorption platform. The micrometer precision adjustment platform is used to adjust the reference ball to achieve a stable height of the adsorption platform. The flat plate to be coated is placed above the support tube array.
进一步地，所述支柱管的顶面设有硅胶垫，防止损伤待涂布平板。Furthermore, a silicone pad is provided on the top surface of the support tube to prevent damage to the plate to be coated.
进一步地，所述支柱管的中心设有光纤传感器，用于检测待涂布平板有无放置在支柱管上。Furthermore, an optical fiber sensor is provided at the center of the support tube for detecting whether the plate to be coated is placed on the support tube.
进一步地，所述导柱板上还设有传感器检测板，所述吸附台的底面设有一个位移转感器，所述位移转感器的位置与传感器检测板对应，使得传感器检测板可感应大理石吸附台的位置；Furthermore, a sensor detection plate is also provided on the guide column plate, and a displacement transducer is provided on the bottom surface of the adsorption platform, and the position of the displacement transducer corresponds to the sensor detection plate, so that the sensor detection plate can sense the position of the marble adsorption platform;
进一步地，所述涂布平台底板上还设有接近开关支架，接近开关支架上设置接近开关。Furthermore, a proximity switch bracket is provided on the bottom plate of the coating platform, and a proximity switch is provided on the proximity switch bracket.
进一步地，所述支柱管的底端通过加长螺母与导柱板固定。Furthermore, the bottom end of the support tube is fixed to the guide column plate through an extended nut.
与现有技术相比，本实用新型的有益效果是：Compared with the prior art, the beneficial effects of the utility model are:
本实用新型提供了一种高精密托举平板的涂布平台底板装置，包括平行的导柱板和涂布平台底板，采用3点位千分尺Y轴升降平台手动调节的水平微调机构，保证涂布平台底板组件的平稳性，调平升降平板后的微小震动造成的微小位移量；平板升降采用伺服电机驱动，三个精密导柱导向，9点位同步顶升，最大程度消除平板升降产生的误差，有利于实现纳米级高精度高效率平板涂布，大大提高了整机运行的稳定性和一致性，有利于本实用新型的涂布系统的高效自动化以及量产化。The utility model provides a coating platform bottom plate device for lifting a flat plate with high precision, comprising a parallel guide column plate and a coating platform bottom plate, and adopts a horizontal fine-tuning mechanism for manual adjustment of a 3-point micrometer Y-axis lifting platform to ensure the stability of the coating platform bottom plate assembly and the small displacement caused by the small vibration after leveling the lifting flat plate; the flat plate lifting is driven by a servo motor, guided by three precision guide columns, and synchronously lifted at 9 points, which eliminates the error caused by the lifting of the flat plate to the greatest extent, is conducive to the realization of nanometer-level high-precision and high-efficiency flat plate coating, greatly improves the stability and consistency of the operation of the whole machine, and is conducive to the efficient automation and mass production of the coating system of the utility model.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本实用新型的结构示意图。FIG1 is a schematic structural diagram of the utility model.
图2为本实用新型的俯视图。FIG. 2 is a top view of the utility model.
图3为本实用新型的侧视图。FIG. 3 is a side view of the utility model.
图4为本实用新型的应用示意图。FIG. 4 is a schematic diagram of an application of the present utility model.
图5为本实用新型的吸附平台组件的结构示意图。FIG. 5 is a schematic structural diagram of an adsorption platform assembly of the present invention.
图6为本实用新型的吸附平台组件的仰视图。FIG. 6 is a bottom view of the adsorption platform assembly of the present invention.
吸附平台组件1、大理石吸附台11、吸附台密封板12、第一靠栅座13、第二靠栅座14、限位柱15、标定平板16、基准球座17、半球基准块18、位移转感器19、Adsorption platform assembly 1, marble adsorption platform 11, adsorption platform sealing plate 12, first grid seat 13, second grid seat 14, limit column 15, calibration plate 16, reference ball seat 17, hemispherical reference block 18, displacement transducer 19,
涂布平台底板组件2、涂布平台底板21、导柱板22、导柱23、直线轴承24、支柱管25、托举气缸26、气缸限位板27、限位板支柱28、千分尺精密调整平台29、基准球210、接近开关支架211、光纤传感器212、传感器检测板213。Coating platform base plate assembly 2, coating platform base plate 21, guide column plate 22, guide column 23, linear bearing 24, support tube 25, lifting cylinder 26, cylinder limit plate 27, limit plate support 28, micrometer precision adjustment platform 29, reference ball 210, proximity switch bracket 211, optical fiber sensor 212, sensor detection plate 213.
具体实施方式DETAILED DESCRIPTION
为更好地理解本实用新型的技术方案，以下将结合相关图示作详细说明。应理解，以下具体实施例并非用以限制本实用新型的技术方案的具体实施态样，其仅为本实用新型技术方案可采用的实施态样。需先说明，本文关于各组件位置关系的表述，如A部件位于B部件上方，其系基于图示中各组件相对位置的表述，并非用以限制各组件的实际位置关系。In order to better understand the technical solution of the present invention, the following will be described in detail in conjunction with the relevant illustrations. It should be understood that the following specific embodiments are not intended to limit the specific implementation of the technical solution of the present invention, and are only implementations that can be adopted by the technical solution of the present invention. It should be noted that the description of the positional relationship of each component in this article, such as component A being located above component B, is based on the description of the relative positions of the components in the illustration, and is not intended to limit the actual positional relationship of the components.
实施例1Example 1
参见图1-6，图1绘制的是本实施例的一种高精密托举平板的涂布平台底板装置的结构示意图。如图所示，本实施例1涉及的一种高精密托举平板的涂布平台底板装置，应用于涂布机的涂布平台组件，涂布平台组件包括上下布置的吸附平台组件1和涂布平台底板组件2，所述吸附平台组件1包括大理石吸附台11，所述涂布平台底板组件2即本实施例的涂布平台底板装置，它包括涂布平上下平行设置的导柱板22和涂布平台底板21，所述导柱板22上设有4×4阵列布置的支柱管25，所述支柱管25的底端通过加长螺母与导柱板22固定，所述涂布平台底板21的底面中心设有托举气缸26，所述托举气缸26的输出端连接导柱板22的中心处，并通过气缸限位板27连接，所述气缸限位板27设置在导柱板22的上表面中心处，所述气缸限位板27通过限位板支柱28连接涂布平台底板21，提供支撑力；所述涂布平台底板21上设有三个均布的导柱23，所述导柱23上设有直线轴承24，所述直线轴承24与导柱板22连接，通过托举电机驱动直线轴承沿导柱23带动导柱板22上下移动；Referring to Figures 1-6, Figure 1 is a schematic diagram of the structure of a coating platform bottom plate device for a high-precision lifting flat plate of the present embodiment. As shown in the figure, the coating platform bottom plate device for a high-precision lifting flat plate involved in the present embodiment 1 is applied to a coating platform assembly of a coating machine, and the coating platform assembly includes an adsorption platform assembly 1 and a coating platform bottom plate assembly 2 arranged up and down, the adsorption platform assembly 1 includes a marble adsorption table 11, the coating platform bottom plate assembly 2 is the coating platform bottom plate device of the present embodiment, which includes a coating plane guide column plate 22 arranged in parallel up and down and a coating platform bottom plate 21, the guide column plate 22 is provided with a 4×4 array of support tubes 25, the bottom ends of the support tubes 25 are fixed to the guide column plate 22 by lengthened nuts, the coating A lifting cylinder 26 is provided at the center of the bottom surface of the coating platform bottom plate 21, and the output end of the lifting cylinder 26 is connected to the center of the guide column plate 22 and connected through a cylinder limit plate 27. The cylinder limit plate 27 is arranged at the center of the upper surface of the guide column plate 22, and the cylinder limit plate 27 is connected to the coating platform bottom plate 21 through a limit plate support 28 to provide support force; three evenly distributed guide columns 23 are provided on the coating platform bottom plate 21, and linear bearings 24 are provided on the guide columns 23. The linear bearings 24 are connected to the guide column plate 22, and the linear bearings are driven by the lifting motor to move up and down along the guide columns 23 to drive the guide column plate 22;
所述涂布平台底板21和导柱板22之间均匀布置有三个千分尺精密调整平台29，所述千分尺精密调整平台29上设有基准球210，所述基准球210设置在导柱板22的上方，三个基准球210用于托举支撑大理石吸附台11，千分尺精密调整平台29用于调整基准球210，达到大理石吸附台11的高度平稳；Three micrometer precision adjustment platforms 29 are evenly arranged between the coating platform bottom plate 21 and the guide column plate 22. The micrometer precision adjustment platform 29 is provided with a reference ball 210. The reference ball 210 is arranged above the guide column plate 22. The three reference balls 210 are used to lift and support the marble adsorption platform 11. The micrometer precision adjustment platform 29 is used to adjust the reference ball 210 to achieve a stable height of the marble adsorption platform 11.
支柱管25阵列的上方放置待涂布平板，所述支柱管25的顶面设有硅胶垫，防止损伤待涂布平板；所述支柱管25的中心设有光纤传感器212，用于检测待涂布平板有无放置在支柱管25上；所述导柱板22上还设有传感器检测板213；The plate to be coated is placed above the support tube 25 array. The top surface of the support tube 25 is provided with a silicone pad to prevent damage to the plate to be coated. The center of the support tube 25 is provided with an optical fiber sensor 212 for detecting whether the plate to be coated is placed on the support tube 25. The guide column plate 22 is also provided with a sensor detection plate 213.
所述涂布平台底板21上还设有接近开关支架211，接近开关支架211上设置接近开关，接近开关的位置与导柱板22的初始位置对应，当涂布完成将导柱板22下移时，到达接近开关即可感应，随即控制托举气缸26停止驱动。The coating platform bottom plate 21 is also provided with a proximity switch bracket 211, on which a proximity switch is arranged. The position of the proximity switch corresponds to the initial position of the guide column plate 22. When the coating is completed and the guide column plate 22 is moved down, it reaches the proximity switch for sensing, and then controls the lifting cylinder 26 to stop driving.
所述大理石吸附台11上设有多个通孔，通孔位置与支柱管25一一对应，用于支柱管25的穿插；所述大理石吸附台11的前后侧面设有吸附台密封板12，所述吸附台密封板12上设有第一靠栅座13，所述大理石吸附台11的右侧设有第二靠栅座14，所述第二靠栅座14的顶端设有限位柱15，限位柱15的顶面臂待涂布平板的底面低，比大理石吸附台11的顶面高，从而在不影响模头涂布的情况下将待涂布平板限位；所述大理石吸附台11的左侧设有标定平板16；The marble adsorption platform 11 is provided with a plurality of through holes, and the positions of the through holes correspond to the support tubes 25 one by one, and are used for the insertion of the support tubes 25; the front and rear sides of the marble adsorption platform 11 are provided with an adsorption platform sealing plate 12, and the adsorption platform sealing plate 12 is provided with a first grid seat 13, and the right side of the marble adsorption platform 11 is provided with a second grid seat 14, and the top of the second grid seat 14 is provided with a limiting column 15, and the top surface arm of the limiting column 15 is lower than the bottom surface of the plate to be coated and higher than the top surface of the marble adsorption platform 11, so as to limit the plate to be coated without affecting the die head coating; the left side of the marble adsorption platform 11 is provided with a calibration plate 16;
所述大理石吸附台11的底面设有三个基准球座17，基准球座17的位置与基准球210一一对应，所述基准球座17上设有半球基准块18，更有利于基准球210的托举；所述大理石吸附台11的底面还设有一个位移转感器19，该位移转感器19的位置与传感器检测板213对应，使得传感器检测板213可感应大理石吸附台11的位置；The bottom surface of the marble adsorption platform 11 is provided with three reference ball seats 17, the positions of the reference ball seats 17 correspond to the reference balls 210 one by one, and the reference ball seats 17 are provided with hemispherical reference blocks 18, which are more conducive to the lifting of the reference balls 210; the bottom surface of the marble adsorption platform 11 is also provided with a displacement sensor 19, the position of the displacement sensor 19 corresponds to the sensor detection plate 213, so that the sensor detection plate 213 can sense the position of the marble adsorption platform 11;
所述大理石吸附台11上设置48个0.2mm微孔布压，均压流道设计，左右各4点位负压均布，吸附力均衡，平面度达到6μm。The marble adsorption platform 11 is provided with 48 0.2mm micropores for pressure distribution and a pressure equalization flow channel design. The negative pressure is evenly distributed at 4 points on the left and right, the adsorption force is balanced, and the flatness reaches 6μm.
工作原理：Working principle:
大理石吸附台采用均压流道设计，左右各4点位负压均布，48个0.2mm微孔布压，吸附力均衡，平面度达到6μm；通过3点位千分尺Y轴升降平台手动调节，伺服电机驱动，三个精密导柱导向，9点位同步顶升，接料位柔性材料保护；上料后对玻璃位置进行气动控制矫正，手动微调矫正位，采用气动位移传感器对模唇高度，以及玻璃上表面高度进行手动校零。The marble adsorption table adopts a pressure-equalizing flow channel design, with negative pressure evenly distributed at 4 points on the left and right, 48 0.2mm micropores for pressure distribution, balanced adsorption force, and a flatness of 6μm; it is manually adjusted by a 3-point micrometer Y-axis lifting platform, driven by a servo motor, guided by three precision guide pillars, synchronously lifted at 9 points, and protected by flexible materials at the material receiving position; after loading, the glass position is pneumatically controlled and corrected, the correction position is manually fine-tuned, and a pneumatic displacement sensor is used to manually calibrate the die lip height and the height of the upper surface of the glass to zero.
本实用新型整机采用总线控制模式，采用以太网PLC控制系统，使整机运行更加平稳、高速；本实用新型采用高精密模头、高精度减速机、高精度轴承、高精度涂布辊，提高涂布机的速度精度，保证设备运行时的稳定性和一致性。The whole machine of the utility model adopts bus control mode and Ethernet PLC control system to make the whole machine run more smoothly and at high speed; the utility model adopts high-precision die head, high-precision reducer, high-precision bearing, and high-precision coating roller to improve the speed accuracy of the coating machine and ensure the stability and consistency of the equipment during operation.
以上仅是本实用新型的具体应用范例，对本实用新型的保护范围不构成任何限制。凡采用等同变换或者等效替换而形成的技术方案，均落在本实用新型权利保护范围之内。The above are only specific application examples of the utility model, and do not constitute any limitation on the protection scope of the utility model. Any technical solution formed by equivalent transformation or equivalent replacement shall fall within the protection scope of the utility model.
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