CN221747192U - Chip positioning structure - Google Patents
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- CN221747192U CN221747192U CN202323428077.2U CN202323428077U CN221747192U CN 221747192 U CN221747192 U CN 221747192U CN 202323428077 U CN202323428077 U CN 202323428077U CN 221747192 U CN221747192 U CN 221747192U
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Abstract
Description
技术领域Technical Field
本申请涉及芯片加工技术领域,具体涉及芯片定位结构。The present application relates to the field of chip processing technology, and in particular to a chip positioning structure.
背景技术Background Art
芯片,一般是指集成电路,采用一定的工艺,把一个电路中所需的晶体管、电阻、电容和电感等元件及布线互连一起,制作在一小块或几小块半导体晶片或介质基片上,然后封装在一个管壳内,成为具有所需电路功能的微型结构,其中所有元件在结构上已组成一个整体,使电子元件向着微小型化、低功耗、智能化和高可靠性方面迈进了一大步。A chip generally refers to an integrated circuit. It uses a certain process to interconnect the transistors, resistors, capacitors, inductors and other components and wiring required in a circuit, and is made on a small piece or several small pieces of semiconductor wafers or dielectric substrates. The chips are then packaged in a tube shell to become a miniature structure with the required circuit functions. All components are structurally integrated, making a major step forward in the direction of miniaturization, low power consumption, intelligence and high reliability of electronic components.
芯片在加工中有众多工序,例如其中光刻和刻蚀等,这就使得在加工中芯片的固定非常重要,一旦出现不希望的移动或者晃动,可能导致芯片的损坏,因此,会采用定位结构对芯片进行定位固定,现有的定位结构一般是基座,基座上滑动设置有若干个压持台,压持台上设置有压持机构(一般是快速压钳),在对芯片进行定位时,将芯片放置在若干个压持台上,利用多个压持机构分别对芯片的四个边或者四个角压持固定,从而达到定位固定的作用,虽然压持机构(即快速压钳)的压持或解除压持较为简单便捷,但是在实际使用中,由于是采用多点固定,因此在固定或解除固定时,需要调节多个压持机构,使得操作工序繁琐,从而降低了加工效率,因此,本申请提出一种芯片定位结构。There are many processes in chip processing, such as photolithography and etching, which makes it very important to fix the chip during processing. Once unwanted movement or shaking occurs, the chip may be damaged. Therefore, a positioning structure is used to position and fix the chip. The existing positioning structure is generally a base, and a plurality of pressing tables are slidably arranged on the base. A pressing mechanism (generally a quick pressing clamp) is arranged on the pressing table. When positioning the chip, the chip is placed on a plurality of pressing tables, and a plurality of pressing mechanisms are used to press and fix the four sides or four corners of the chip respectively, so as to achieve the effect of positioning and fixing. Although the pressing or releasing of the pressing mechanism (i.e., the quick pressing clamp) is relatively simple and convenient, in actual use, since multi-point fixation is adopted, multiple pressing mechanisms need to be adjusted when fixing or releasing the fixation, which makes the operation process cumbersome, thereby reducing the processing efficiency. Therefore, the present application proposes a chip positioning structure.
实用新型内容Utility Model Content
本申请的目的在于:为解决现有的采用多个独立的快速压钳对芯片进行定位固定,固定或解除固定的工序繁琐的问题,本申请提供了芯片定位结构。The purpose of the present application is to provide a chip positioning structure to solve the problem of complicated procedures of positioning and fixing a chip by using multiple independent quick clamps and fixing or releasing the chip.
本申请为了实现上述目的具体采用以下技术方案:In order to achieve the above-mentioned purpose, this application specifically adopts the following technical solutions:
芯片定位结构,包括:Chip positioning structure, including:
基座;Pedestal;
安装板,设置在基座上,所述安装板的外周侧阵列设置有若干个承托块,所述承托块上设置有支座,所述支座上铰接有压杆;A mounting plate is arranged on the base, a plurality of supporting blocks are arranged in an array on the outer peripheral side of the mounting plate, a support is arranged on the supporting block, and a pressure rod is hinged on the support;
活动环,所述基座上设置有两个导杆,两个导杆的端部均设置有限位板,活动环滑动套设在两个导杆上,所述活动环与所述基座之间安装有套设在导杆上的弹簧,所述活动环外周侧阵列设置有若干个连接杆,若干个连接杆的端部均设置有调节杆,若干个调节杆的端部分别与若干个压杆滑动连接。A movable ring, wherein two guide rods are arranged on the base, and limit plates are arranged at the ends of the two guide rods. The movable ring is slidably sleeved on the two guide rods, and a spring sleeved on the guide rods is installed between the movable ring and the base. A plurality of connecting rods are arranged in an array on the outer peripheral side of the movable ring, and adjusting rods are arranged at the ends of the plurality of connecting rods, and the ends of the plurality of adjusting rods are slidably connected with a plurality of pressure rods respectively.
进一步地,所述压杆的一端贯穿开设有第一穿槽,所述第一穿槽的内壁相对侧均贯穿开设有第二穿槽,所述调节杆的端部设置有支杆,所述支杆的两端分别滑动贯穿两个第二穿槽。Furthermore, a first through slot is formed through one end of the pressure rod, and second through slots are formed through opposite sides of the inner wall of the first through slot. A support rod is provided at the end of the adjustment rod, and both ends of the support rod slide through the two second through slots respectively.
进一步地,所述支杆的两端均套设有轴承轮,两个轴承轮分别滚动插设在两个第二穿槽内。Furthermore, bearing wheels are sleeved on both ends of the support rod, and the two bearing wheels are respectively inserted and rolled in the two second through grooves.
进一步地,所述安装板的外周侧阵列开设有若干个插槽,若干个所述插槽内均滑动插设有插杆,若干个承托块分别设置在若干个插杆上,所述连接杆采用伸缩杆,所述承托块上设置有支板,调节杆滑动贯穿支板,所述基座上设置有调节若干个插杆同步滑动的调节件。Furthermore, a plurality of slots are provided in an array on the outer peripheral side of the mounting plate, and rods are slidably inserted into a plurality of the slots, and a plurality of supporting blocks are respectively arranged on the plurality of rods. The connecting rod is a telescopic rod, and a support plate is arranged on the supporting block. The adjusting rod slides through the support plate, and an adjusting part for adjusting the synchronous sliding of the plurality of rods is arranged on the base.
进一步地,所述调节件包括:Furthermore, the adjusting member comprises:
转杆,转动连接在基座和安装板之间,所述转杆上固定有蜗轮,所述基座上转动设置有与蜗轮啮合的蜗杆;A rotating rod is rotatably connected between the base and the mounting plate, a worm wheel is fixed on the rotating rod, and a worm meshing with the worm wheel is rotatably arranged on the base;
圆盘,固设在转杆上,所述圆盘上偏心铰接有若干个拉杆,若干个拉杆的自由端分别与若干个承托块铰接。The disc is fixed on the rotating rod. A plurality of pull rods are eccentrically hinged on the disc. The free ends of the plurality of pull rods are respectively hinged to a plurality of supporting blocks.
进一步地,所述承托块上设置有V形板。Furthermore, a V-shaped plate is provided on the supporting block.
进一步地,所述压杆远离第一穿槽的一端设置有橡胶头。Furthermore, a rubber head is provided at one end of the pressure rod away from the first through slot.
进一步地,所述基座上转动设置有限位杆,所述限位杆的端部设置有卡块。Furthermore, a limit rod is rotatably arranged on the base, and a clamping block is arranged at the end of the limit rod.
本申请的有益效果如下:The beneficial effects of this application are as follows:
在本申请中,在若干个承托块上分别通过支座铰接压杆,活动环表面设置若干个分别与承托块对应的连接杆,连接杆上设置与压杆滑动连接的调节杆,通过滑动活动环,即可带动若干个调节杆同步移动,从而带动若干个压杆分别绕各自铰接点同步转动,从而可以对芯片进行同步压持固定或解除固定,使得对芯片的定位安装或解除方式较为简单快捷,从而提高了加工效率。In the present application, pressure rods are hingedly connected to several supporting blocks through supports, and several connecting rods corresponding to the supporting blocks are arranged on the surface of the movable ring. Adjustment rods slidably connected to the pressure rods are arranged on the connecting rods. By sliding the movable ring, several adjustment rods can be driven to move synchronously, thereby driving several pressure rods to rotate synchronously around their respective hinge points, so that the chip can be pressed and fixed or released synchronously, making the positioning, installation or release of the chip simpler and faster, thereby improving the processing efficiency.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是本申请立体结构图;FIG1 is a three-dimensional structural diagram of the present application;
图2是本申请又一视角立体结构图;FIG2 is a three-dimensional structural diagram of the present application from another viewing angle;
图3是本申请立体结构剖视图;FIG3 is a cross-sectional view of the three-dimensional structure of the present application;
图4是本申请图1中A处放大图;FIG4 is an enlarged view of point A in FIG1 of the present application;
附图标记:1、基座;2、安装板;3、承托块;4、支座;5、压杆;6、活动环;7、导杆;8、弹簧;9、连接杆;10、调节杆;11、第一穿槽;12、第二穿槽;13、支杆;14、轴承轮;15、插槽;16、插杆;17、支板;18、调节件;19、V形板;20、橡胶头;21、限位杆;22、卡块;1801、转杆;1802、蜗轮;1803、蜗杆;1804、圆盘;1805、拉杆。1801, rotating rod; 1802, worm wheel; 1803, worm; 1804, disc; 1805, pull rod.
具体实施方式DETAILED DESCRIPTION
为使本申请实施例的目的、技术方案和优点更加清楚,下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述。In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application.
如图1-图4所示,本申请一个实施例提出的芯片定位结构,包括:As shown in FIG. 1 to FIG. 4 , a chip positioning structure proposed in one embodiment of the present application includes:
基座1;Base 1;
安装板2,设置在基座1上,安装板2的外周侧阵列设置有若干个承托块3,承托块3上设置有支座4,支座4上铰接有压杆5;A mounting plate 2 is arranged on the base 1, a plurality of supporting blocks 3 are arranged in an array on the outer peripheral side of the mounting plate 2, a support 4 is arranged on the supporting block 3, and a pressure rod 5 is hinged on the support 4;
活动环6,基座1上设置有两个导杆7,两个导杆7的端部均设置有限位板,活动环6滑动套设在两个导杆7上,活动环6与基座1之间安装有套设在导杆7上的弹簧8,活动环6外周侧阵列设置有若干个连接杆9,若干个连接杆9的端部均设置有调节杆10,若干个调节杆10的端部分别与若干个压杆5滑动连接,在对芯片进行加工时,需要对其定位固定时,先向下滑动活动环6,使得活动环6沿两个导杆7上向下滑动,活动环6挤压弹簧8,当活动环6向下移动时,带动若干个连接杆9向下移动,从而带动若干个调节杆10向下移动,由于调节杆10的端部与压杆5滑动连接,而调节杆10又是竖向滑动,因此,调节杆10向下移动时从而带动压杆5与支座4的铰接点转动,从而使得若干个压杆5的端部分别同步远离承托块3,再将芯片放置在若干个承托块3上,优选的,承托块3的数量为四个且呈矩形分布,芯片的四个侧边分别放置在四个承托块3上,再松动活动环6,在弹簧8的弹力抵触下,活动环6向上滑动复位,从而带动若干个调节杆10向上移动复位,从而带动若干个压杆5绕铰接点转动复位,从而使得压杆5对放置在承托块3上的芯片进行压持,从而达到定位固定的作用,便于加工,装置整体的设置,通过调节活动环6移动,再利用弹簧8的弹力抵触,可以同步调节若干个压杆5绕铰接点转动,从而使得若干个压杆5同步对芯片进行压持抵触,相较于现有的依靠多个独立的快速压钳进行压持,减少了调节工序,从而提高了加工效率。The movable ring 6 has two guide rods 7 on the base 1, and the ends of the two guide rods 7 are provided with limit plates. The movable ring 6 is slidably sleeved on the two guide rods 7. A spring 8 sleeved on the guide rods 7 is installed between the movable ring 6 and the base 1. A plurality of connecting rods 9 are arranged in an array on the outer peripheral side of the movable ring 6, and the ends of the plurality of connecting rods 9 are provided with adjusting rods 10. The ends of the plurality of adjusting rods 10 are respectively slidably connected with the plurality of pressure rods 5. When the chip is processed and needs to be positioned and fixed, the movable ring 6 is first slid downward so that the movable ring 6 slides downward along the two guide rods 7. The movable ring 6 squeezes the spring 8. When the movable ring 6 moves downward, it drives the plurality of connecting rods 9 to move downward, thereby driving the plurality of adjusting rods 10 to move downward. Since the end of the adjusting rod 10 is slidably connected with the pressure rod 5, and the adjusting rod 10 slides vertically, the adjusting rod 10 moves downward, thereby driving the hinge point of the pressure rod 5 and the support 4 to rotate. , so that the ends of several pressure rods 5 are synchronously away from the supporting blocks 3, and then the chips are placed on several supporting blocks 3. Preferably, the number of supporting blocks 3 is four and they are distributed in a rectangular shape. The four sides of the chip are placed on the four supporting blocks 3 respectively, and then the movable ring 6 is loosened. Under the elastic force of the spring 8, the movable ring 6 slides upward and resets, thereby driving several adjustment rods 10 to move upward and reset, thereby driving several pressure rods 5 to rotate and reset around the hinge point, so that the pressure rod 5 presses the chip placed on the supporting block 3, thereby achieving the role of positioning and fixing, which is convenient for processing. The overall setting of the device can adjust the movement of the movable ring 6 and then use the elastic force of the spring 8 to synchronously adjust the rotation of several pressure rods 5 around the hinge point, so that several pressure rods 5 synchronously press and resist the chip. Compared with the existing pressure clamps that rely on multiple independent quick pressing pliers, the adjustment process is reduced, thereby improving the processing efficiency.
如图4所示,在一些实施例中,压杆5的一端贯穿开设有第一穿槽11,第一穿槽11的内壁相对侧均贯穿开设有第二穿槽12,调节杆10的端部设置有支杆13,支杆13的两端分别滑动贯穿两个第二穿槽12,调节杆10滑动时,支杆13的两端分别沿两个第二穿槽12内滑动,由于调节杆10是竖向滑动,因此,当调节杆10移动时,支杆13沿第二穿槽12内滑动,从而达到带动压杆5绕铰接点转动,以达到压持固定或解除压持固定的作用。As shown in Figure 4, in some embodiments, one end of the pressure rod 5 is penetrated by a first through groove 11, and the opposite sides of the inner wall of the first through groove 11 are penetrated by second through grooves 12. A support rod 13 is provided at the end of the adjusting rod 10, and the two ends of the support rod 13 slide through the two second through grooves 12 respectively. When the adjusting rod 10 slides, the two ends of the support rod 13 slide along the two second through grooves 12 respectively. Since the adjusting rod 10 slides vertically, when the adjusting rod 10 moves, the support rod 13 slides along the second through groove 12, thereby driving the pressure rod 5 to rotate around the hinge point to achieve the effect of pressing and fixing or releasing the pressing and fixing.
如图4所示,在一些实施例中,支杆13的两端均套设有轴承轮14,两个轴承轮14分别滚动插设在两个第二穿槽12内,通过设置的轴承轮14,以用于减少支杆13沿第二穿槽12内的滑动摩擦阻力,使得调节压杆5绕铰接点转动时更为顺畅。As shown in FIG. 4 , in some embodiments, bearing wheels 14 are provided at both ends of the support rod 13. The two bearing wheels 14 are respectively inserted and rolled in the two second through grooves 12. The bearing wheels 14 are provided to reduce the sliding friction resistance of the support rod 13 along the second through grooves 12, so that the adjustment pressure rod 5 can rotate around the hinge point more smoothly.
如图3所示,在一些实施例中,安装板2的外周侧阵列开设有若干个插槽15,若干个插槽15内均滑动插设有插杆16,若干个承托块3分别设置在若干个插杆16上,连接杆9采用伸缩杆,优选的,伸缩杆包括外杆,外杆与活动环6连接,外杆内滑动插设有内杆,承托块3设置在内杆上,承托块3上设置有支板17,调节杆10滑动贯穿支板17,基座1上设置有调节若干个插杆16同步滑动的调节件18,通过在安装板2的外周侧开设插槽15,在插槽15内活动插设插杆16,将承托块3设置在插杆16上,通过调节件18调节若干个插杆16同步滑动,从而可以同时调节若干个承托块3之间的距离,以适用于放置不同尺寸的芯片,通过在承托块3上设置支板17,调节杆10滑动贯穿支板17,连接杆9采用伸缩杆,因此,承托块3移动时,可以带动调节杆10同步移动,使得在对不同尺寸的芯片进行压持定位时,调节活动环6滑动时,依然可以同步调节若干个压杆5对芯片进行压持固定。As shown in FIG3 , in some embodiments, a plurality of slots 15 are provided in an array on the outer peripheral side of the mounting plate 2, and plug rods 16 are slidably inserted in the plurality of slots 15, and a plurality of supporting blocks 3 are respectively arranged on the plurality of plug rods 16, and the connecting rod 9 adopts a telescopic rod. Preferably, the telescopic rod comprises an outer rod, which is connected to the movable ring 6, and an inner rod is slidably inserted in the outer rod, and the supporting block 3 is arranged on the inner rod, and a support plate 17 is provided on the supporting block 3, and an adjusting rod 10 slides through the support plate 17, and an adjusting member 18 for adjusting the synchronous sliding of the plurality of plug rods 16 is provided on the base 1. By providing the slots 15 on the outer peripheral side of the mounting plate 2, An insertion rod 16 is movably inserted in the slot 15, and the supporting block 3 is set on the insertion rod 16. The adjusting member 18 is used to adjust the synchronous sliding of several insertion rods 16, so that the distance between several supporting blocks 3 can be adjusted at the same time to be suitable for placing chips of different sizes. By setting a support plate 17 on the supporting block 3, the adjusting rod 10 slides through the support plate 17, and the connecting rod 9 adopts a telescopic rod. Therefore, when the supporting block 3 moves, the adjusting rod 10 can be driven to move synchronously, so that when chips of different sizes are pressed and positioned, when the movable ring 6 is adjusted to slide, several pressing rods 5 can still be adjusted synchronously to press and fix the chip.
如图2和图3所示,在一些实施例中,调节件18包括:转杆1801,转动连接在基座1和安装板2之间,转杆1801上固定有蜗轮1802,基座1上转动设置有与蜗轮1802啮合的蜗杆1803;圆盘1804,固设在转杆1801上,圆盘1804上偏心铰接有若干个拉杆1805,若干个拉杆1805的自由端分别与若干个承托块3铰接,扭动蜗杆1803转动,通过蜗杆1803和蜗轮1802的啮合,从而带动转杆1801转动,从而带动圆盘1804转动,由于若干个拉杆1805的一端与圆盘1804偏心铰接,另一端分别与若干个承托块3铰接,因此,圆盘1804转动时,若干个拉杆1805分别拉扯或抵触若干个承托块3,从而达到同步调节若干个插杆16移动,从而达到调节若干个承托块3位置的作用。As shown in FIGS. 2 and 3 , in some embodiments, the adjusting member 18 includes: a rotating rod 1801, which is rotatably connected between the base 1 and the mounting plate 2, a worm wheel 1802 is fixed on the rotating rod 1801, and a worm 1803 meshing with the worm wheel 1802 is rotatably provided on the base 1; a disc 1804, which is fixed on the rotating rod 1801, and a plurality of pull rods 1805 are eccentrically hinged on the disc 1804, and the free ends of the plurality of pull rods 1805 are respectively hinged to the plurality of supporting blocks 3, and the worm 1803 is twisted to adjust the rotation of the rotating rod 1801. 3 rotates, and the engagement of the worm 1803 and the worm wheel 1802 drives the rotating rod 1801 to rotate, thereby driving the disk 1804 to rotate. Since one end of the plurality of pull rods 1805 is eccentrically hinged to the disk 1804, and the other end is respectively hinged to the plurality of supporting blocks 3, when the disk 1804 rotates, the plurality of pull rods 1805 respectively pull or resist the plurality of supporting blocks 3, thereby achieving the effect of synchronously adjusting the movement of the plurality of insertion rods 16, thereby achieving the effect of adjusting the positions of the plurality of supporting blocks 3.
如图1和图4所示,在一些实施例中,承托块3上设置有V形板19,优选的,V形板19的夹角为90°,由于芯片大多是方形结构,在对芯片固定时,将芯片的四个边角分别放置在四个V形板19内,从而对芯片进行定位,避免其水平向位移,配合压杆5的压持,使得对芯片的定位固定效果更好。As shown in Figures 1 and 4, in some embodiments, a V-shaped plate 19 is provided on the supporting block 3. Preferably, the angle of the V-shaped plate 19 is 90°. Since most chips are square structures, when fixing the chip, the four corners of the chip are respectively placed in four V-shaped plates 19 to position the chip and avoid horizontal displacement. The pressure of the pressure rod 5 can better position and fix the chip.
如图4所示,在一些实施例中,压杆5远离第一穿槽11的一端设置有橡胶头20,通过设置的橡胶头20,以用于对芯片防护,避免压杆5对芯片的表面造成硬性压持导致产生压痕。As shown in FIG. 4 , in some embodiments, a rubber head 20 is provided at one end of the pressure rod 5 away from the first through groove 11 , and the rubber head 20 is provided to protect the chip and prevent the pressure rod 5 from pressing the surface of the chip hard and causing indentations.
如图2所示,在一些实施例中,基座1上转动设置有限位杆21,限位杆21的端部设置有卡块22,在对芯片进行定位固定时,先转动限位杆21,将活动环6下移挤压弹簧8后,再转动限位杆21,使得卡块22搭接在活动环6上,从而对活动环6卡设限位,可以对活动环6进行临时固定,便于将芯片的四个边角精准的放置在四个V形板19内,同时,在取卸芯片时,也可以将活动环6进行临时固定,以便于更好的取卸芯片。As shown in Figure 2, in some embodiments, a limit rod 21 is rotatably provided on the base 1, and a block 22 is provided at the end of the limit rod 21. When the chip is positioned and fixed, the limit rod 21 is first rotated to move the movable ring 6 down to squeeze the spring 8, and then the limit rod 21 is rotated so that the block 22 overlaps the movable ring 6, thereby setting a limit on the movable ring 6. The movable ring 6 can be temporarily fixed, which is convenient for accurately placing the four corners of the chip in the four V-shaped plates 19. At the same time, when removing and unloading the chip, the movable ring 6 can also be temporarily fixed to facilitate better removal and unloading of the chip.
对所公开的实施例的上述说明,使本领域专业技术人员能够实现或使用本申请。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的,本文中所定义的一般原理可以在不脱离本申请的精神或范围的情况下,在其它实施例中实现。因此,本申请将不会被限制于本文所示的这些实施例,而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。The above description of the disclosed embodiments enables those skilled in the art to implement or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.
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