CN221738987U - A dual wafer runway - Google Patents

Abstract

The utility model discloses a double-flow-sheet runway, which comprises a base, a support, a first belt conveying line, a second belt conveying line and a driving mechanism, wherein the first belt conveying line and the second belt conveying line are arranged on the support, the driving mechanism comprises a motor, a driving wheel, a transmission shaft, a synchronous wheel, a synchronous belt, a first tensioning transmission piece and a second tensioning transmission piece which are arranged on the base, the first tensioning transmission piece comprises a first seat, a first bolt, a fixed shaft, a first wheel and a plurality of first tensioning wheels which are arranged at one end of the transmission shaft, the first seat is provided with a lateral slotting and a first screw hole, the first bolt penetrates through the first screw hole to be in threaded connection with the fixed shaft, and the two ends of the transmission shaft are provided with the second tensioning wheels. The advantages are that: structural design and concrete implementation of actuating mechanism can effectually reduce the volume of equipment, the design of tensioning driving medium, the rate of tension of being convenient for is adjusted, is convenient for utilize a belt line and No. two belt lines to carry two silicon chips simultaneously, improves conveying efficiency and stability.

Description

A dual wafer runway

Technical Field

The utility model relates to the field of conveying runways, in particular to a double-flow sheet runway.

Background Art

During the production process, silicon wafers are usually transported by belt conveyor lines. Due to the design of the production line, it is sometimes necessary to set up multiple belt conveyor lines in parallel and drive them through the same drive mechanism. In order to facilitate the tensioning of the belt, a tensioning mechanism is usually set up. The traditional tensioning mechanism mainly uses a cylinder to directly press the belt to achieve belt tensioning. However, this method has inaccuracies, which makes it difficult to calculate the stroke of the cylinder when adjusting the belt tension, resulting in inconsistent tension between adjacent belts.

For example, the Chinese patent with publication number CN213264482U discloses a silicon wafer temporary storage unloading machine. The unloading machine includes a machine platform, an X-axis horizontal linear belt conveyor, a Y-axis horizontal linear belt conveyor, a belt conveyor lifting mechanism, an inclined slide, a baffle, a temporary storage box, an in-and-out box horizontal linear belt conveyor, a belt tensioning mechanism, a temporary storage box lifting mechanism, and a loading horizontal linear belt conveyor. The belt tensioning mechanism is composed of a slide cylinder and a roller. The cylinder body of the slide cylinder is fixed on the machine platform. The two ends of the slide seat of the slide cylinder are respectively rotatably connected to rollers, and the rollers are attached to the belt of the in-and-out box horizontal linear belt conveyor. The belt tensioning mechanism of the above-mentioned silicon wafer temporary storage unloading machine uses a slide cylinder to directly drive the roller to compress the belt, and there may be inconsistent tension between the belts.

In view of this, it is necessary to provide a dual tape-out track.

Summary of the invention

The utility model provides a double-flow sheet runway, which effectively solves the problem that the tensioning setting of the existing belt tensioning mechanism is difficult to adjust during tensioning, which easily leads to inconsistent tensioning degrees of adjacent belts.

The technical solution adopted by the utility model is

A double-film runway comprises a base, a support, and also comprises a No. 1 belt conveyor line and a No. 2 belt conveyor line which are arranged in parallel on the support, and a driving mechanism which is arranged on the base and is used to drive the No. 1 belt conveyor line and the No. 2 belt conveyor line to move synchronously. The driving mechanism comprises a motor arranged on the base, a driving wheel arranged on the motor, a transmission shaft, a synchronous wheel arranged on the transmission shaft, a synchronous belt wound around the driving wheel and the synchronous wheel, a No. 1 tensioning transmission member arranged on the base and used to tension the No. 1 belt conveyor line, and a No. 2 tensioning transmission member for tensioning the No. 2 belt conveyor line. The No. 1 tensioning transmission member comprises a No. 1 seat arranged on the base, a No. 1 bolt, a fixed shaft, a No. 1 wheel arranged at one end of the transmission shaft, and a plurality of No. 1 tensioning wheels arranged on the No. 1 seat and located on the side of the No. 1 wheel. The No. 1 seat is provided with a lateral slot for installing the fixed shaft and a No. 1 screw hole which is connected to the lateral slot. The fixed shaft is arranged in the lateral slot. The No. 1 bolt passes through the No. 1 screw hole and is threadedly connected to the fixed shaft. No. 2 tensioning wheels are arranged at both ends of the transmission shaft.

Furthermore, the No. 1 belt conveyor line and the No. 2 belt conveyor line have the same structure, and the No. 1 belt conveyor line includes a No. 1 plate and a No. 2 plate arranged in parallel on a bracket, a No. 1 connecting block and a No. 2 connecting block connecting the two ends of the No. 1 plate and the No. 2 plate, a No. 1 rotating shaft arranged on the No. 1 block, a No. 2 rotating shaft arranged on the No. 2 block, a No. 1 pulley coaxially arranged at both ends of the No. 1 rotating shaft, a No. 2 pulley coaxially arranged at both ends of the No. 2 rotating shaft, and two transmission belts, the No. 1 plate and the No. 2 plate are fixedly connected to the bracket at the same time, and the transmission belt is wound around the No. 1 pulley, the No. 2 pulley, the No. 1 wheel, the No. 1 tensioning wheel and the No. 2 tensioning wheel.

Furthermore, a plurality of adjusting bolts are arranged on the base.

Furthermore, the base includes a fixed seat and a mounting seat threadedly arranged on the fixed seat, a limiting groove is arranged on the fixed seat, the mounting seat is arranged in the limiting groove, a waist-shaped groove is arranged on the mounting seat, and a No. 2 screw hole matching the waist-shaped groove is arranged on the fixed seat, the limiting groove and the waist-shaped groove are consistent with the extension direction of the lateral slot, and the motor is arranged on the mounting seat.

Furthermore, the bracket includes a No. 1 support column, a No. 2 support column and a plurality of connecting columns for connecting the No. 1 support column and the No. 2 support column, the No. 1 belt line is arranged on the No. 1 support column, and the No. 2 belt line is arranged on the No. 2 support column.

Beneficial effects of the utility model: the structural design of the driving mechanism and the specific implementation method can effectively reduce the size of the equipment. The design of the No. 1 tensioning transmission part facilitates the adjustment of the tension and facilitates the use of the No. 1 belt line and the No. 2 belt line to simultaneously transport two silicon wafers, thereby improving the transportation efficiency and stability.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG1 is an overall schematic diagram of a dual wafer runway provided in an embodiment of the present application.

FIG. 2 is a schematic diagram of a driving mechanism of a dual wafer runway provided in an embodiment of the present application from one perspective.

FIG3 is a schematic diagram of the driving mechanism of the dual wafer runway provided in an embodiment of the present application from another perspective.

FIG. 4 is a schematic diagram of a No. 1 belt conveyor line of a dual wafer runway provided in an embodiment of the present application.

The markings in the figure are: 1, base; 2, bracket; 3, No. 1 belt conveyor line; 4, No. 2 belt conveyor line; 5, driving mechanism; 51, motor; 52, driving wheel; 53, transmission shaft; 54, synchronous wheel; 56, synchronous belt; 57, No. 1 tensioning transmission member; 58, No. 2 tensioning transmission member; 571, No. 1 seat; 572, No. 1 wheel; 573, No. 1 tensioning wheel; 574, fixed shaft; 575, No. 2 tensioning wheel; 501, Lateral slot; 502, screw hole No. 1; 31, plate No. 1; 32, plate No. 2; 33, connecting block No. 1; 34, connecting block No. 2; 35, rotating shaft No. 1; 36, rotating shaft No. 2; 37, pulley No. 1; 38, pulley No. 2; 39, transmission belt; 7, adjusting bolt; 11, mounting seat; 12, fixing seat; 101, limiting slot; 102, waist-shaped slot; 21, supporting column No. 1; 22, supporting column No. 2; 23, connecting column.

DETAILED DESCRIPTION

In order to make the above-mentioned objects, features and advantages of the present invention more obvious and understandable, the specific implementation methods of the present invention are described in detail below with reference to the accompanying drawings.

As shown in Figures 1, 2 and 3, a dual-film runway provided in an embodiment of the present application comprises a base 1, a bracket 2 arranged on the base 1, a No. 1 belt conveyor line 3 and a No. 2 belt conveyor line 4 arranged in parallel on the bracket 2, and a driving mechanism 5 arranged on the base 1 for driving the No. 1 belt conveyor line and the No. 2 belt conveyor line to move synchronously, wherein the driving mechanism 5 comprises a motor 51 arranged on the base 1, a driving wheel 52 arranged on the motor 51, a transmission shaft 53, a synchronous wheel 54 arranged on the transmission shaft 53, a synchronous belt 56 wound around the driving wheel 52 and the synchronous wheel 54, and a No. 1 tensioning transmission member 5 arranged on the base 1 for tensioning the No. 1 belt conveyor line 3. 7 and a No. 2 tensioning transmission member 58 for tensioning the No. 2 belt conveyor line 4, the No. 1 tensioning transmission member 57 includes a No. 1 seat 571 arranged on the base 1, a No. 1 bolt, a fixed shaft 574, a No. 1 wheel 572 arranged at one end of the transmission shaft 53, and a plurality of No. 1 tensioning wheels 573 arranged on the No. 1 seat 571 and located on the side of the No. 1 wheel 572, the No. 1 seat 571 is provided with a lateral slot 501 for installing the fixed shaft 574 and a No. 1 screw hole 502 connected to the lateral slot, the fixed shaft 574 is arranged in the lateral slot, the No. 1 bolt passes through the No. 1 screw hole 502 and is threadedly connected to the fixed shaft 574, and No. 2 tensioning wheels 575 are arranged at both ends of the transmission shaft 53.

During actual use, the motor 51 rotates to drive the driving wheel 52 to rotate. With the cooperation of the synchronous wheel 54, the transmission shaft 53 is driven to rotate synchronously through the synchronous belt 56. The transmission shaft 53 drives the second tensioning wheel 575 to rotate. The No. 1 tensioning wheel 573, the No. 1 wheel 572 and the No. 2 tensioning wheel 575 are used to tension the No. 1 belt line. When the tension of the No. 1 belt line needs to be adjusted, the position of the fixed shaft 574 in the lateral slot 501 is adjusted by the No. 1 bolt, thereby changing the tension of the No. 1 belt line and realizing stable transportation of silicon wafers on the No. 1 belt line.

In the above design, the structural design and specific implementation method of the driving mechanism 5 can effectively reduce the volume of the equipment. The design of the No. 1 tensioning transmission member 57 facilitates the adjustment of the tension and facilitates the use of the No. 1 belt line and the No. 2 belt line to simultaneously transport two silicon wafers, thereby improving the transportation efficiency and stability.

Specifically: as shown in Figure 4, the No. 1 belt conveyor line 3 and the No. 2 belt conveyor line 4 have the same structure. The No. 1 belt conveyor line 3 includes a No. 1 plate 31 and a No. 2 plate 32 arranged in parallel on the bracket 2, a No. 1 connecting block 33 and a No. 2 connecting block 34 connecting the two ends of the No. 1 plate 31 and the No. 2 plate 32, a No. 1 rotating shaft 35 arranged on the No. 1 block, a No. 2 rotating shaft 36 arranged on the No. 2 block, a No. 1 pulley 37 coaxially arranged at both ends of the No. 1 rotating shaft 35, a No. 2 pulley 38 coaxially arranged at both ends of the No. 2 rotating shaft 36, and two transmission belts 39. The No. 1 plate 31 and the No. 2 plate 32 are fixedly connected to the bracket 2 at the same time, and the transmission belt 39 is wound around the No. 1 pulley 37, the No. 2 pulley 38, the No. 1 wheel 572, the No. 1 tensioning wheel 573 and the No. 2 tensioning wheel 575.

In actual use, the first wheel 572 rotates, and under the cooperation of the first pulley 37, the second pulley 38, the first tensioning wheel 573 and the second tensioning wheel 575, the transmission belt 39 is driven for transmission.

In the above design, the structural design and specific implementation methods of the No. 1 belt conveyor line 3 and the No. 2 belt conveyor line 4 can effectively realize the stable transportation of silicon wafers.

Specifically: as shown in FIG. 1 , the base 1 is further provided with a plurality of adjusting bolts 7 .

In the above design, the height of the base 1 is adjusted by adjusting the adjusting bolt 7 .

In the above design, the structural design and specific implementation of the adjusting bolt 7 can effectively realize the rapid adjustment of the height of the base 1.

Specifically: As shown in Figure 1, the base 1 includes a fixed seat 12 and a mounting seat 11 threadedly arranged on the fixed seat 12, a limiting groove 101 is arranged on the fixed seat 12, the mounting seat 11 is arranged in the limiting groove 101, a waist-shaped groove 102 is arranged on the mounting seat 11, and a No. 2 screw hole matching the waist-shaped groove 102 is arranged on the fixed seat 12, the limiting groove 101 and the waist-shaped groove 102 are both consistent with the extension direction of the lateral groove 501, and the motor 51 is arranged on the mounting seat 11.

In actual use, the position of the mounting seat 11 in the limiting groove 101 is adjusted so that the second screw hole corresponds to different positions of the waist-shaped groove 102 .

In the above design, the structural design and specific implementation of the base 1 facilitate adjustment of the horizontal position of the motor 51, making it easier to tighten the synchronous belt 56.

Specifically, as shown in Figure 1, the bracket 2 includes a No. 1 support column 21, a No. 2 support column 22, and a plurality of connecting columns 23 for connecting the No. 1 support column 21 and the No. 2 support column 22. The No. 1 belt line is arranged on the No. 1 support column 21, and the No. 2 belt line is arranged on the No. 2 support column 22.

In the above design, the structural design and specific implementation method of the bracket 2 can effectively support the No. 1 belt conveyor line 3 and the No. 2 belt conveyor line 4.

To further explain in detail, it should be understood that the above is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims (5)

1. A dual-flow wafer runway, comprising a base (1), a bracket (2) arranged on the base (1), characterized in that it also comprises a No. 1 belt conveyor line (3) and a No. 2 belt conveyor line (4) arranged in parallel on the bracket (2), and a driving mechanism (5) arranged on the base (1) for driving the No. 1 belt conveyor line and the No. 2 belt conveyor line to move synchronously, wherein the driving mechanism (5) comprises a motor (51) arranged on the base (1), a driving wheel (52) arranged on the motor (51), a transmission shaft (53), a synchronous wheel (54) arranged on the transmission shaft (53), a synchronous belt (56) wound around the driving wheel (52) and the synchronous wheel (54), and a No. 1 tensioning transmission member (56) arranged on the base (1) for tensioning the No. 1 belt conveyor line (3). 57) and a No. 2 tensioning transmission member (58) for tensioning a No. 2 belt conveyor line (4), the No. 1 tensioning transmission member (57) comprising a No. 1 seat (571) arranged on a base (1), a No. 1 bolt, a fixed shaft (574), a No. 1 wheel (572) arranged at one end of a transmission shaft (53), and a plurality of No. 1 tensioning wheels (573) arranged on the No. 1 seat (571) and located on the side of the No. 1 wheel (572), the No. 1 seat (571) being provided with a lateral slot (501) for mounting the fixed shaft (574) and a No. 1 screw hole (502) communicating with the lateral slot, the No. 1 bolt passing through the No. 1 screw hole (502) being threadedly connected to the fixed shaft (574), and No. 2 tensioning wheels (575) being provided at both ends of the transmission shaft (53). 2. The dual-wafer runway according to claim 1 is characterized in that: the No. 1 belt conveyor line (3) and the No. 2 belt conveyor line (4) have the same structure, and the No. 1 belt conveyor line (3) includes a No. 1 plate (31) and a No. 2 plate (32) arranged in parallel on the bracket (2), a No. 1 connecting block (33) and a No. 2 connecting block (34) connecting the two ends of the No. 1 plate (31) and the No. 2 plate (32), a No. 1 rotating shaft (35) arranged on the No. 1 block, and a No. 2 rotating shaft (35) arranged on the No. 2 block. A shaft (36), a first pulley (37) coaxially arranged at both ends of a first rotating shaft (35), a second pulley (38) coaxially arranged at both ends of a second rotating shaft (36), and two transmission belts (39); the first plate (31) and the second plate (32) are fixedly connected to the bracket (2) at the same time; the transmission belt (39) is wound around the first pulley (37), the second pulley (38), the first wheel (572), the first tensioning wheel (573) and the second tensioning wheel (575). 3. The dual-flow wafer runway according to claim 1 is characterized in that: a plurality of adjustment bolts (7) are also provided on the base (1). 4. The dual-wafer runway according to claim 1 is characterized in that: the base (1) includes a fixed seat (12) and a mounting seat (11) threadedly arranged on the fixed seat (12), a limiting groove (101) is arranged on the fixed seat (12), the mounting seat (11) is arranged in the limiting groove (101), the mounting seat (11) is provided with a waist-shaped groove (102), the fixed seat (12) is provided with a No. 2 screw hole matching the waist-shaped groove (102), the limiting groove (101) and the waist-shaped groove (102) are both consistent with the extension direction of the lateral slot (501), and the motor (51) is arranged on the mounting seat (11). 5. The dual-wafer runway according to claim 1 is characterized in that: the bracket (2) includes a No. 1 support column (21), a No. 2 support column (22) and a plurality of connecting columns (23) for connecting the No. 1 support column (21) and the No. 2 support column (22), the No. 1 belt line is arranged on the No. 1 support column (21), and the No. 2 belt line is arranged on the No. 2 support column (22).