CN221685803U - Device leak detection device and device leak detection system - Google Patents
Device leak detection device and device leak detection system Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims abstract description 78
- 208000032750 Device leakage Diseases 0.000 claims description 31
- 239000007789 gas Substances 0.000 claims description 30
- 238000007789 sealing Methods 0.000 claims description 20
- 239000001307 helium Substances 0.000 claims description 16
- 229910052734 helium Inorganic materials 0.000 claims description 16
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 8
- 230000000712 assembly Effects 0.000 abstract description 2
- 238000000429 assembly Methods 0.000 abstract description 2
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- 102100026388 L-amino-acid oxidase Human genes 0.000 description 1
- 102100023591 Polyphosphoinositide phosphatase Human genes 0.000 description 1
- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 1
- 101100233916 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) KAR5 gene Proteins 0.000 description 1
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Abstract
Description
技术领域Technical Field
本实用新型属于结构组装件检漏技术领域,具体涉及器件检漏装置以及器件检漏系统。The utility model belongs to the technical field of structural assembly leakage detection, and in particular relates to a component leakage detection device and a component leakage detection system.
背景技术Background Art
对于一些气密性有要求的结构组装件,例如在第一元件的安装孔内通过焊接、封胶、卡扣等组装工艺组装第二元件,从而形成第一元件与第二元件紧固连接的组装件;通常需要快速判断出组装处是否漏气,现有技术中,检漏方法根据被检件所处的状态可分为加压检漏法和真空检漏法,目前市面上主要是一些测漏仪器装置,造价昂贵,使用复杂,而且该仪器通常只能用于加压检漏或真空检漏的其中一种方式,无法兼容两种检漏方法。For some structural assemblies that require air tightness, for example, a second component is assembled in a mounting hole of a first component through welding, sealing, snapping and other assembly processes to form an assembly where the first component and the second component are tightly connected; it is usually necessary to quickly determine whether there is a leak at the assembly point. In the prior art, leak detection methods can be divided into pressurized leak detection method and vacuum leak detection method according to the state of the inspected component. Currently, there are mainly some leak detection instruments on the market, which are expensive and complicated to use. Moreover, the instrument can usually only be used for one of the pressurized leak detection or vacuum leak detection methods, and is not compatible with both leak detection methods.
实用新型内容Utility Model Content
为了克服现有技术的不足,本实用新型提供器件检漏装置以及器件检漏系统,以解决现有技术无法兼容两种检漏方法的问题。In order to overcome the deficiencies of the prior art, the utility model provides a device leakage detection apparatus and a device leakage detection system to solve the problem that the prior art is not compatible with two leakage detection methods.
本实用新型其中一实施例提供了一种器件检漏装置,包括安装座和固定环;One embodiment of the utility model provides a device leakage detection device, including a mounting seat and a fixing ring;
所述安装座的顶部沿边缘设置有第一安装孔,所述安装座的中部设置有第一腔体;A first mounting hole is arranged along the edge of the top of the mounting seat, and a first cavity is arranged in the middle of the mounting seat;
所述固定环的边缘设置有第二安装孔,所述第二安装孔与所述第一安装孔同轴对应;所述固定环的中部设置有第二腔体;所述第二安装孔内设置有紧固件连接至所述第一安装孔,用于所述固定环与所述安装座之间的可拆卸安装;所述第一腔体与所述第二腔体闭合形成容置腔体,所述容置腔体用于容置待测器件;The edge of the fixing ring is provided with a second mounting hole, and the second mounting hole is coaxially corresponding to the first mounting hole; the middle of the fixing ring is provided with a second cavity; a fastener is provided in the second mounting hole and connected to the first mounting hole for detachable installation between the fixing ring and the mounting seat; the first cavity and the second cavity are closed to form a receiving cavity, and the receiving cavity is used to receive the device under test;
所述安装座的底部还设置有接气管,所述接气管与所述第一腔体连通。An air connection pipe is also provided at the bottom of the mounting seat, and the air connection pipe is communicated with the first cavity.
在本实施例中,兼容加压方式检漏和抽真空方式检漏,实现了一物多用,而且相对于市面上的测漏仪器,该装置结构简单,使用方便,测漏效率高。In this embodiment, it is compatible with both pressurized leak detection and vacuum leak detection, achieving multiple uses of one item. Moreover, compared with leak detection instruments on the market, the device has a simple structure, is easy to use, and has a high leak detection efficiency.
在其中一个实施例中,所述第一腔体开口的边缘具有第一圆环槽,所述第一圆环槽向所述安装座的内部凹陷,用于支撑待测器件的第一元件。In one embodiment, the edge of the opening of the first cavity has a first annular groove, and the first annular groove is recessed toward the inside of the mounting seat for supporting the first element of the device under test.
在其中一个实施例中,所述第一圆环槽的底部具有安装环槽,所述安装环槽与所述第一圆环槽同轴设置;In one embodiment, the bottom of the first annular groove has a mounting annular groove, and the mounting annular groove is coaxially arranged with the first annular groove;
所述安装环槽内安装有密封圈,所述密封圈与待测器件的第一元件的底部抵接。A sealing ring is installed in the installation ring groove, and the sealing ring abuts against the bottom of the first element of the device under test.
在其中一个实施例中,所述第二腔体朝向所述第一腔体的开口边缘具有第二圆环槽,所述第二圆环槽向所述固定环的内部凹陷,所述第二圆环槽用于下压定位待测器件的第一元件。In one embodiment, the opening edge of the second cavity facing the first cavity has a second annular groove, the second annular groove is recessed toward the inside of the fixing ring, and the second annular groove is used to press down and position the first element of the device under test.
在其中一个实施例中,所述安装环槽同轴设置有若干个,若干个同轴设置的所述安装环槽的半径依次减小,若干个所述安装环槽内均设置有密封圈。In one of the embodiments, a plurality of the mounting ring grooves are coaxially arranged, the radii of the plurality of the coaxially arranged mounting ring grooves decrease successively, and a sealing ring is arranged in each of the plurality of the mounting ring grooves.
在其中一个实施例中,所述第二腔体的开口在所述待测器件的投影覆盖所述待测器件的第二元件以及缝隙孔,所述第二腔体用于避位待测器件的第二元件以及缝隙孔。In one embodiment, the opening of the second cavity covers the second component and the slit hole of the device under test in the projection of the device under test, and the second cavity is used to avoid the second component and the slit hole of the device under test.
在其中一个实施例中,所述第一安装孔至少设置有三个,若干个所述第一安装孔呈环形等间距地设置在所述安装座的顶部;In one embodiment, at least three first mounting holes are provided, and a plurality of the first mounting holes are arranged in a circular shape at equal intervals on the top of the mounting seat;
和/或,所述紧固件为固定螺栓。And/or, the fastener is a fixing bolt.
在其中一个实施例中,所述接气管的端部设置有气管接头,所述气管接头为VCR接头、卡套接头或法兰接头中的任意一种,用于将所述接气管与外部气源设备或气体设备连接。In one of the embodiments, a gas pipe joint is provided at the end of the gas connecting pipe, and the gas pipe joint is any one of a VCR joint, a ferrule joint or a flange joint, which is used to connect the gas connecting pipe to an external gas source device or a gas device.
本实施例提供一种器件检漏系统,包括上述多个实施例中任意一项所述的器件检漏装置,还包括充气装置、水箱,所述充气装置与所述器件检漏装置的接气管相连接,用于向所述器件检漏装置供气;所述水箱装有液体,安装有待测器件的所述器件检漏装置放置在所述水箱内,所述器件检漏装置浸没在液面以下。The present embodiment provides a device leakage detection system, comprising the device leakage detection device described in any one of the above-mentioned multiple embodiments, and also comprising an inflation device and a water tank, wherein the inflation device is connected to the air connecting pipe of the device leakage detection device and is used to supply air to the device leakage detection device; the water tank is filled with liquid, and the device leakage detection device installed with the device to be tested is placed in the water tank, and the device leakage detection device is immersed below the liquid surface.
本实施例提供一种器件检漏系统,包括上述多个实施例中任意一项所述的器件检漏装置,还包括氦气源、氦质谱检漏仪,所述氦质谱检漏仪与所述器件检漏装置的接气管相连接。This embodiment provides a device leak detection system, including the device leak detection device described in any one of the above multiple embodiments, and also includes a helium source and a helium mass spectrometer leak detector, wherein the helium mass spectrometer leak detector is connected to the gas connection pipe of the device leak detection device.
本实用新型提供的器件检漏装置以及器件检漏系统有益效果如下:The device leakage detection device and device leakage detection system provided by the utility model have the following beneficial effects:
1、兼容加压方式检漏和抽真空方式检漏,实现了一物多用,而且相对于市面上的测漏仪器,该装置结构简单,使用方便,测漏效率高。1. It is compatible with both pressurized leak detection and vacuum leak detection, achieving multiple uses of one item. Compared with the leak detection instruments on the market, this device has a simple structure, is easy to use, and has high leak detection efficiency.
2、多重密封圈可以有效地防止液体或气体的泄漏,密封圈之间的互相压紧和相互配合可以提供更可靠的密封性,减少泄漏的风险。2. Multiple sealing rings can effectively prevent the leakage of liquid or gas. The mutual compression and cooperation between the sealing rings can provide more reliable sealing and reduce the risk of leakage.
3、所述气管接头为VCR接头、卡套接头或法兰接头中的任意一种都具备快速连接和拆卸的特点,使得安装和维修更加方便快捷。3. Any of the air pipe joints, such as a VCR joint, a ferrule joint or a flange joint, has the characteristics of quick connection and disassembly, making installation and maintenance more convenient and quick.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了更清楚地说明本实用新型实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本实用新型的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图示出的结构获得其他的附图。In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.
图1表示本实用新型的安装座的结构示意图;FIG1 is a schematic structural diagram of a mounting base of the present invention;
图2表示本实用新型的固定环正面视角的立体结构示意图;FIG2 is a schematic diagram showing the three-dimensional structure of the fixing ring of the present invention from the front view;
图3表示本实用新型的固定环反面视角的立体结构示意图;FIG3 is a schematic diagram showing the three-dimensional structure of the fixing ring of the present invention from the reverse side;
图4表示本实用新型的器件检漏装置的整体结构示意图;FIG4 is a schematic diagram showing the overall structure of the device leakage detection device of the present invention;
图5表示本实用新型的待测器件的结构示意图。FIG5 is a schematic structural diagram of a device under test of the present invention.
附图标号说明如下:The following are the descriptions of the accompanying figures:
1-安装座;11-第一安装孔;12-第一腔体;13-第一圆环槽;1-mounting seat; 11-first mounting hole; 12-first cavity; 13-first annular groove;
2-固定环;21-第二安装孔;22-第二腔体;23-第二圆环槽;2-fixing ring; 21-second mounting hole; 22-second cavity; 23-second annular groove;
3-紧固件;3- Fasteners;
4-接气管;41-气管接头;4-trachea connection; 41-trachea connector;
5-密封圈;5- Sealing ring;
6-待测器件;61-第一元件;62-第二元件;63-缝隙孔。6-device under test; 61-first element; 62-second element; 63-slit hole.
具体实施方式DETAILED DESCRIPTION
下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本实用新型的一部分实施例,而不是全部的实施例。基于本实用新型中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本实用新型保护的范围。The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
需要说明,若本实用新型实施例中有涉及方向性指示(诸如上、下、左、右、前、后……),则该方向性指示仅用于解释在某一特定姿态下各部件之间的相对位置关系、运动情况等,如果该特定姿态发生改变时,则该方向性指示也相应地随之改变。It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.
另外,若本实用新型实施例中有涉及“第一”、“第二”等的描述,则该“第一”、“第二”等的描述仅用于描述目的,而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。另外,若全文中出现的“和/或”或者“及/或”,其含义包括三个并列的方案,以“A和/或B”为例,包括A方案、或B方案、或A和B同时满足的方案。另外,各个实施例之间的技术方案可以相互结合,但是必须是以本领域普通技术人员能够实现为基础,当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在,也不在本实用新型要求的保护范围之内。In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and/or" or "and/or" appears in the full text, its meaning includes three parallel solutions. Taking "A and/or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.
请参照图1-图5,本实用新型其中一实施例提供了一种器件检漏装置,包括安装座1和固定环2;Referring to FIGS. 1 to 5 , one embodiment of the present utility model provides a device leakage detection device, including a mounting seat 1 and a fixing ring 2;
所述安装座1的顶部沿边缘设置有第一安装孔11,所述安装座1的中部设置有第一腔体12;A first mounting hole 11 is provided along the edge of the top of the mounting seat 1, and a first cavity 12 is provided in the middle of the mounting seat 1;
所述固定环2的边缘设置有第二安装孔21,所述第二安装孔21与所述第一安装孔11同轴对应;所述固定环2的中部设置有第二腔体22;所述第二安装孔21内设置有紧固件3连接至所述第一安装孔11,用于所述固定环2与所述安装座1之间的可拆卸安装;所述第一腔体12与所述第二腔体22闭合形成容置腔体,所述容置腔体用于容置待测器件6;The edge of the fixing ring 2 is provided with a second mounting hole 21, and the second mounting hole 21 is coaxially corresponding to the first mounting hole 11; the middle of the fixing ring 2 is provided with a second cavity 22; a fastener 3 is provided in the second mounting hole 21 and connected to the first mounting hole 11, which is used for detachable installation between the fixing ring 2 and the mounting seat 1; the first cavity 12 and the second cavity 22 are closed to form a receiving cavity, and the receiving cavity is used to receive the device under test 6;
所述安装座1的底部还设置有接气管4,所述接气管4与所述第一腔体12连通。An air connection pipe 4 is also provided at the bottom of the mounting base 1 , and the air connection pipe 4 is connected to the first cavity 12 .
在本实施例中,兼容加压方式检漏和抽真空方式检漏,实现了一物多用,而且相对于市面上的测漏仪器,该装置结构简单,使用方便,测漏效率高。In this embodiment, it is compatible with both pressurized leak detection and vacuum leak detection, achieving multiple uses of one item. Moreover, compared with leak detection instruments on the market, the device has a simple structure, is easy to use, and has a high leak detection efficiency.
请参照图1-图3,在其中一个实施例中,所述第一腔体12开口的边缘具有第一圆环槽13,所述第一圆环槽13向所述安装座1的内部凹陷,用于支撑待测器件6的第一元件61。Please refer to FIG. 1 to FIG. 3 , in one embodiment, the edge of the opening of the first cavity 12 has a first annular groove 13 , and the first annular groove 13 is recessed toward the inside of the mounting seat 1 for supporting the first element 61 of the device under test 6 .
在其中一个实施例中,所述第一圆环槽13的底部具有安装环槽,所述安装环槽与所述第一圆环槽13同轴设置;In one embodiment, the bottom of the first annular groove 13 has a mounting annular groove, and the mounting annular groove is coaxially arranged with the first annular groove 13;
所述安装环槽内安装有密封圈5,所述密封圈5与待测器件6的第一元件61的底部抵接。A sealing ring 5 is installed in the installation ring groove, and the sealing ring 5 abuts against the bottom of the first element 61 of the device under test 6 .
在其中一个实施例中,所述第二腔体22朝向所述第一腔体12的开口边缘具有第二圆环槽23,所述第二圆环槽23向所述固定环2的内部凹陷,所述第二圆环槽23用于下压定位待测器件6的第一元件61。In one embodiment, the second cavity 22 has a second annular groove 23 at its opening edge facing the first cavity 12 . The second annular groove 23 is recessed into the interior of the fixing ring 2 . The second annular groove 23 is used to press down and position the first element 61 of the device under test 6 .
在本实施例的其中一个应用场景,安装方式如下:将待测器件放入第一圆环槽13,待测器件与第一圆环槽13之间设有密封圈4,将固定环2放在待测器件的上表面,其中第二圆环槽23朝向待测器件,第二圆环槽23与第一圆环槽13卡住待测器件,所述安装座1和固定环2通过紧固件3(如固定螺栓)连接。In one of the application scenarios of the present embodiment, the installation method is as follows: the device under test is placed in the first annular groove 13, a sealing ring 4 is provided between the device under test and the first annular groove 13, the fixing ring 2 is placed on the upper surface of the device under test, wherein the second annular groove 23 faces the device under test, the second annular groove 23 and the first annular groove 13 clamp the device under test, and the mounting seat 1 and the fixing ring 2 are connected by fasteners 3 (such as fixing bolts).
在其中一个实施例中,所述安装环槽同轴设置有若干个,若干个同轴设置的所述安装环槽的半径依次减小,若干个所述安装环槽内均设置有密封圈5。In one embodiment, a plurality of the mounting ring grooves are coaxially arranged, the radii of the plurality of the coaxially arranged mounting ring grooves decrease successively, and a sealing ring 5 is arranged in each of the plurality of the mounting ring grooves.
在本实施例中,多重密封圈可以有效地防止液体或气体的泄漏,密封圈之间的互相压紧和相互配合可以提供更可靠的密封性,减少泄漏的风险。In this embodiment, multiple sealing rings can effectively prevent leakage of liquid or gas, and the mutual compression and cooperation between the sealing rings can provide more reliable sealing and reduce the risk of leakage.
在其中一个实施例中,所述第二腔体22的开口在所述待测器件6的投影覆盖所述待测器件6的第二元件62以及缝隙孔63,所述第二腔体22用于避位待测器件6的第二元件62以及缝隙孔63。In one embodiment, the projection of the opening of the second cavity 22 on the device under test 6 covers the second component 62 and the slit hole 63 of the device under test 6 , and the second cavity 22 is used to avoid the second component 62 and the slit hole 63 of the device under test 6 .
在本实施例中,所述第二腔体22和所述第二圆环槽23形成了阶梯状结构,这种结构除了通过阶梯面对第二元件62进行固定之外,还形成了包含第一元件61朝向第二腔体的表面、第二元件62表面以及缝隙孔63的空腔,便于在空腔内实现注入标识气体,实现待测器件的检漏。In this embodiment, the second cavity 22 and the second annular groove 23 form a stepped structure. In addition to fixing the second element 62 through the stepped surface, this structure also forms a cavity including the surface of the first element 61 facing the second cavity, the surface of the second element 62 and the gap hole 63, which facilitates the injection of identification gas into the cavity to achieve leak detection of the device under test.
请参照图1-图3,在其中一个实施例中,所述第一安装孔11至少设置有三个,若干个所述第一安装孔11呈环形等间距地设置在所述安装座1的顶部;Referring to FIGS. 1 to 3 , in one embodiment, at least three first mounting holes 11 are provided, and a plurality of the first mounting holes 11 are provided in a circular shape at equal intervals on the top of the mounting seat 1 ;
和/或,所述紧固件3为固定螺栓。And/or, the fastener 3 is a fixing bolt.
请参照图1,在其中一个实施例中,所述接气管4的端部设置有气管接头41,所述气管接头41为VCR接头、卡套接头或法兰接头中的任意一种,用于将所述接气管4与外部气源设备或气体设备连接。Please refer to Figure 1. In one embodiment, a gas pipe connector 41 is provided at the end of the gas connecting pipe 4. The gas pipe connector 41 is any one of a VCR connector, a ferrule connector or a flange connector, and is used to connect the gas connecting pipe 4 to an external gas source device or a gas device.
在本实施例中,所述气管接头41为VCR接头、卡套接头或法兰接头中的任意一种都具备快速连接和拆卸的特点,使得安装和维修更加方便快捷。无论是VCR接头的螺纹连接、卡套接头的卡口式连接,还是法兰接头的螺栓连接,都能够在不需要专业工具的情况下进行操作,并且可以在高压环境下安全可靠地工作,保证气体传输的稳定性和连续性。In this embodiment, the gas pipe joint 41 is any one of a VCR joint, a ferrule joint or a flange joint, which has the characteristics of quick connection and disassembly, making installation and maintenance more convenient and quick. Whether it is the threaded connection of the VCR joint, the bayonet connection of the ferrule joint, or the bolt connection of the flange joint, it can be operated without the need for professional tools, and can work safely and reliably under high pressure environment, ensuring the stability and continuity of gas transmission.
在本实施例中的一应用场景中,所述气管接头选用法兰连接头,可以适应不同尺寸和材质的管道和设备连接,灵活性较高。In an application scenario of the present embodiment, the air pipe joint uses a flange connector, which can adapt to the connection of pipes and equipment of different sizes and materials and has high flexibility.
本实施例提供一种器件检漏系统,包括上述多个实施例中任意一项所述的器件检漏装置,还包括充气装置、水箱,所述充气装置与所述器件检漏装置的接气管4相连接,用于向所述器件检漏装置供气;所述水箱装有液体(优选为纯净水),安装有待测器件6的所述器件检漏装置放置在所述水箱内,所述器件检漏装置浸没在液面以下。The present embodiment provides a device leakage detection system, comprising the device leakage detection device described in any one of the above-mentioned multiple embodiments, and also comprising an inflation device and a water tank, wherein the inflation device is connected to the air connecting pipe 4 of the device leakage detection device and is used to supply air to the device leakage detection device; the water tank is filled with liquid (preferably pure water), and the device leakage detection device installed with the device to be tested 6 is placed in the water tank, and the device leakage detection device is immersed below the liquid surface.
在本实施例中,通过所述气管接头41将接气口6与外部气源设备(如高压充气装置)连接,充入一定量的高压气体,然后将所述器件检漏装置放置在所述水箱内并浸入液体中,且缝隙孔63浸没在液面以下,若缝隙孔63冒泡即可判定待测器件漏气;若缝隙孔63在一定时间内没有冒泡,即可判定待测器件的封闭效果良好,没有漏气。In this embodiment, the air inlet 6 is connected to an external air source device (such as a high-pressure inflation device) through the air pipe joint 41, and a certain amount of high-pressure gas is filled. Then, the device leak detection device is placed in the water tank and immersed in the liquid, and the slit hole 63 is immersed below the liquid surface. If bubbles appear in the slit hole 63, it can be determined that the device to be tested is leaking; if there is no bubble in the slit hole 63 within a certain period of time, it can be determined that the sealing effect of the device to be tested is good and there is no leakage.
本实施例提供一种器件检漏系统,包括上述多个实施例中任意一项所述的器件检漏装置,还包括氦气源、氦质谱检漏仪,所述氦质谱检漏仪与所述器件检漏装置的接气管4相连接。This embodiment provides a device leak detection system, including the device leak detection device described in any one of the above multiple embodiments, and also includes a helium source and a helium mass spectrometer leak detector, and the helium mass spectrometer leak detector is connected to the gas connection pipe 4 of the device leak detection device.
在本实施例中,通过所述气管接头41将接气管4与氦质谱检漏仪的连接口连接,氦质谱检漏仪处于检漏状态,氦质谱检漏仪检测接气管4内部的是否出现氦气;In this embodiment, the gas connection pipe 4 is connected to the connection port of the helium mass spectrometer leak detector through the gas pipe joint 41, and the helium mass spectrometer leak detector is in a leak detection state, and the helium mass spectrometer leak detector detects whether helium appears inside the gas connection pipe 4;
检测应用时,向第二腔体22内注入氦气,令氦气充盈整体第二腔体内部,同时环绕在第一元件61朝向第二腔体的表面、第二元件62表面以及缝隙孔63,若氦质谱检漏仪的漏率高于设定值,则可判定待测器件漏气;若氦质谱检漏仪在一定时间检测的漏率低于设定值,即可判定待测器件的封闭效果良好,没有漏气。During the detection application, helium is injected into the second cavity 22 to fill the entire second cavity and surround the surface of the first element 61 facing the second cavity, the surface of the second element 62 and the gap hole 63. If the leakage rate of the helium mass spectrometer leak detector is higher than the set value, it can be determined that the device under test is leaking; if the leakage rate detected by the helium mass spectrometer leak detector within a certain period of time is lower than the set value, it can be determined that the sealing effect of the device under test is good and there is no leakage.
以上所述仅为本实用新型的优选实施例,并非因此限制本实用新型的专利范围,凡是在本实用新型的实用新型构思下,利用本实用新型说明书及附图内容所作的等效结构变换,或直接/间接运用在其他相关的技术领域均包括在本实用新型的专利保护范围内。The above description is only a preferred embodiment of the utility model, and does not limit the patent scope of the utility model. All equivalent structural changes made by using the contents of the utility model specification and drawings under the utility model concept, or directly/indirectly used in other related technical fields are included in the patent protection scope of the utility model.
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