CN221282063U - Wafer arranging machine capable of automatically and circularly transferring, loading and unloading - Google Patents
Wafer arranging machine capable of automatically and circularly transferring, loading and unloading Download PDFInfo
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- CN221282063U CN221282063U CN202322766884.9U CN202322766884U CN221282063U CN 221282063 U CN221282063 U CN 221282063U CN 202322766884 U CN202322766884 U CN 202322766884U CN 221282063 U CN221282063 U CN 221282063U
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- 238000012546 transfer Methods 0.000 claims abstract description 61
- 125000004122 cyclic group Chemical group 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000012423 maintenance Methods 0.000 abstract description 5
- 235000012431 wafers Nutrition 0.000 description 128
- 238000000034 method Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a wafer arranging machine capable of automatically and circularly carrying, loading and unloading, which comprises a arranging platform carrying device and a side hanging clamping carrying device; the wafer arranging platform transfer device comprises a wafer arranging platform which is driven to horizontally move, a supporting base which is arranged at the top of the wafer arranging platform, a driving shaft seat which is arranged on the supporting base, and a driving shaft which is arranged on the driving shaft seat and is arranged in the horizontal direction, wherein a plurality of supporting grooves which are used for balancing and supporting and positioning the wafer basket are formed in the top of the supporting base, the driving shaft extends into the opening at the bottom of the wafer basket and is in contact with the circumferential edge of the wafer, the driving shaft is driven to rotate and return to the unfilled corner position of the wafer and the suspended interval of the wafer, and the side-hanging clamping transfer device comprises a gripper which is driven by multi-shaft transfer and used for clamping and carrying the wafer basket. The utility model simplifies the driving structure, automatically rotates and adjusts the unfilled corner position of the wafer to be normalized, and reduces the manufacturing cost and the maintenance cost of the wafer arranging machine.
Description
Technical Field
The utility model belongs to the technical field of wafer production, and particularly relates to a wafer arranging machine capable of automatically and circularly transferring, loading and unloading.
Background
The shape of the wafer is usually a non-positive wafer structure, a unfilled corner or a notch exists on the wafer, the unfilled corner is a section line position on the wafer structure, and because the wafer is not a positive wafer, a wafer basket for loading the wafer to keep the unfilled corner in a specific direction and position is needed in the production circulation process, and the wafer in the unified and normal direction is convenient to transport in the wafer basket on one hand, so that the wafers arranged in different directions are prevented from being knocked and damaged; on the other hand, in the subsequent processing process, the processing efficiency can be improved.
During the processing, when the unfilled corners of a plurality of wafers in the wafer basket are positioned at different positions, wafer arranging treatment is needed. If current patent number is CN202223117578.8 a wafer reason piece mechanism, disclose including mounting frame, rotation axis, reason piece, rotary drive spare and reason piece driving piece, rotary drive spare drive rotation axis is rotatory, reason piece can rise and descend along with reason piece driving piece, and the wafer box is arranged in before the working plate, and reason piece is in the extreme that is at the bottom, can prevent that partial wafer striking reason piece from leading to the loss when the wafer box is put into. Above-mentioned reason piece mechanism is provided with reason piece in the side of rotation axis, and reason piece plays the effect of normalizing the direction wafer, and reason piece needs to set up corresponding driving piece, and whole reason piece mechanism structure is complicated, although can adjust the high position of rotation axis, corresponding manufacturing cost and maintenance cost are higher.
Disclosure of utility model
The utility model aims to solve the technical problems and provide the wafer arranging machine capable of automatically and circularly transferring, loading and unloading, thereby simplifying a driving structure, adjusting the unfilled corner position of a wafer to be correct by setting a driving shaft with proper height to be matched with the contact position of the bottom of the wafer in a wafer basket, and reducing the manufacturing cost and the maintenance cost of the wafer arranging machine. In order to achieve the above purpose, the technical scheme of the utility model is as follows:
The wafer arranging machine capable of automatically and circularly carrying the upper and lower materials comprises an arranging platform carrying device and a side hanging clamping carrying device arranged above the arranging platform carrying device; the wafer arranging platform transfer device comprises a wafer arranging platform which is driven to horizontally move, a supporting base which is arranged at the top of the wafer arranging platform, a driving shaft seat which is arranged on the supporting base, and a driving shaft which is arranged on the driving shaft seat and is arranged in the horizontal direction, wherein a plurality of supporting grooves which are used for balancing and supporting and positioning the wafer basket are formed in the top of the supporting base, the driving shaft extends into the opening at the bottom of the wafer basket and is in contact with the circumferential edge of the wafer, the driving shaft is driven to rotate and return to the unfilled corner position of the wafer and the suspended interval of the wafer, and the side-hanging clamping transfer device comprises a gripper which is driven by multi-shaft transfer and used for clamping and carrying the wafer basket.
Specifically, a group of the wafer arranging platform transfer devices are horizontally arranged at intervals, and a group of the side hanging clamping transfer devices are arranged above a corresponding group of wafer arranging platform transfer devices.
Specifically, the wafer arranging platform transfer device further comprises a movable bottom plate, and a plurality of travelling wheels are arranged at the bottom of the movable bottom plate.
Specifically, the top of reason piece platform is located the side of supporting base and is provided with the driving piece that is used for connecting the drive shaft.
Specifically, the inner cavity of the wafer basket is in profiling arrangement with the round edge of the wafer, and the axial direction of the driving shaft and the perpendicular bisector of the unfilled corner line of the wafer are in relative vertical positions.
Specifically, the support base comprises a group of base plates which are arranged at intervals, and a support piece for limiting the wafer basket is arranged on the side surface of one base plate.
Specifically, the top of base plate is provided with a set of supporting groove of interval arrangement, the supporting groove is the trapezoid structure that falls, the bottom of wafer basket is provided with the basket seat that corresponds the frame in the supporting groove.
Specifically, a position sensor for detecting the position of the basket seat is arranged on one base plate.
Specifically, a group of side hang centre gripping moves and carries the device and install in the both sides of mount, side hang centre gripping moves the device and includes the fixed plate that sets up on the mount, installs the movable plate that receives the drive and go up and down on the fixed plate, installs on the movable plate and receives the horizontal movement of drive and carry the frame, installs and carries the handle that receives the horizontal movement of drive in the frame bottom.
Specifically, the top of both sides of wafer basket is provided with the hand portion respectively, the hand portion setting is held to tongs centre gripping location.
Compared with the prior art, the wafer arranging machine for automatically and circularly transferring the loading and unloading has the following main beneficial effects:
The wafer arranging platform transfer device has an automatic horizontal transfer function, the supporting base stably positions the wafer basket, the driving shaft is kept to extend to the position inside the wafer basket to be highly suitable for contacting the round edge of the wafer, the driving shaft is suspended at intervals with the unfilled corner position, in the process that the driving shaft drives the wafer to be righted, the unfilled corner position is not contacted with the driving shaft to finish wafer arranging, and compared with the traditional structure, the wafer arranging mode is simpler and more efficient, and the manufacturing cost and the maintenance cost of the wafer arranging structure are reduced; the side hanging clamping transfer device has the function of automatically transferring and carrying the wafer basket, and the combined mechanism is formed by combining the wafer arranging platform transfer device, so that the whole station is convenient to transfer and use, the applicability is wider, the loading and unloading of the wafer basket are effectively combined, and the working efficiency is improved.
Drawings
FIG. 1 is a schematic diagram of a front view structure of an embodiment of the present utility model;
FIG. 2 is a schematic diagram of a transfer apparatus of a wafer handling platform according to the present embodiment;
FIG. 3 is a schematic view of a wafer carrier and wafer loading in this embodiment;
FIG. 4 is a schematic view of a wafer carrier in this embodiment;
FIG. 5 is a schematic view of a wafer structure according to the present embodiment;
FIG. 6 is a schematic view of the supporting base structure in the present embodiment;
fig. 7 is a schematic diagram of a side-hung clamping transfer device in the embodiment;
the figures represent the numbers:
1a wafer arranging platform transfer device, 11 a wafer arranging platform, 12 a supporting base, 13 a driving shaft seat, 14 a driving shaft, 15 a supporting groove, 16 a moving bottom plate, 17 a driving piece, 2a side hanging clamping transfer device, 21 a gripper, 22 a fixed joint frame, 23 a fixed plate, 24 a moving plate, 25 a transfer frame, 26 a first slide rail, 3a wafer basket, 31 a wafer, 32 a corner lacking position, 33 a supporting piece, 34 a basket seat and 35 a handle part.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely, but is apparent to those skilled in the art in view of the present utility model.
Examples:
Referring to fig. 1-7, the embodiment is a wafer arranging machine capable of automatically and circularly carrying, loading and unloading, and comprises a group of arranging platform carrying devices 1 and a group of side hanging clamping carrying devices 2 which are symmetrically arranged at double stations; the wafer arranging platform transferring device 1 comprises a wafer arranging platform 11 which is arranged by driving to horizontally move, a supporting base 12 which is arranged at the top of the wafer arranging platform 11, a driving shaft seat 13 which is arranged on the supporting base 12, and a driving shaft 14 which is arranged on the driving shaft seat 13 and is arranged in the horizontal direction, wherein a plurality of supporting grooves 15 which are used for balancing and supporting and positioning the wafer basket 3 are formed in the top of the supporting base 12, the driving shaft seat 13 is arranged to avoid the wafer basket 3, the driving shaft 14 extends to the inside of the opening at the bottom of the wafer basket 3 and is in contact with the circumferential edge of the wafer 31, the driving shaft 14 is driven to rotate and return to the unfilled corner position 32 of the wafer 31 and the suspended interval of the wafer 31, and the side hanging and transferring clamping device 2 comprises a gripper 21 which is used for clamping the wafer basket 3 and is driven by multi-shaft transferring.
In this embodiment, a set of the wafer stage transfer devices 1 are horizontally arranged at intervals, and a set of the side-hanging clamping transfer devices 2 are disposed above a corresponding set of the wafer stage transfer devices 1. The side hanging clamping transfer device 2 correspondingly carries a wafer basket 3 to the corresponding wafer arranging platform transfer device 1 for arranging the wafers 31.
The wafer arranging platform transfer device 1 further comprises a movable bottom plate 16, a plurality of travelling wheels are arranged at the bottom of the movable bottom plate 16, the wafer arranging platform 11 horizontally sliding along the movable bottom plate 16 is arranged at the top of the movable bottom plate 16, the wafer arranging platform 11 is driven to move along a top sliding rail of the movable bottom plate 16, and the driving mode of the wafer arranging platform 11 comprises a common screw motor structure or a motor driving shaft connecting belt chain structure. The moving bottom plate 16 can move the whole wafer arranging platform transferring device 1 to a proper station, so that the convenience of processing is improved.
The top of the wafer arranging platform 11 is provided with a driving piece 17 which is used for connecting a driving shaft 14 and is arranged on the side edge of the supporting base 12, the driving piece 17 is a motor, the driving piece 17 provides rotary power for the driving shaft 14, one end of the driving shaft 14 is connected with the driving piece 17 through a coupler, and the other end of the driving shaft 14 is arranged on the driving shaft seat 13. The driving shaft 14 is kept in a horizontal installation state, so that the driving shaft 14 can be applicable to different wafers 31 as much as possible, the inner cavity of the wafer basket 3 is in profiling arrangement with the round edge of the wafer 31, the different wafer baskets 3 can control the position height of the wafer 31 contacting the driving shaft 14, the round edge of the wafer 31 is kept to contact the driving shaft 14, meanwhile, the unfilled corner position of the wafer 31 is not contacted with the driving shaft 14, the axial direction of the driving shaft 14 is in relative vertical position with the perpendicular bisector of the unfilled corner line of the wafer 31, and the unfilled corner line of the wafer 31 is a cut-off line of a round structure.
The support base 12 comprises a group of base plates arranged at intervals, the side face of one base plate is provided with a support piece 33 used for limiting the wafer basket 3, the top of the base plate is provided with a group of support grooves 15 arranged at intervals, the support grooves 15 are of inverted trapezoid structures, the bottom of the wafer basket 3 is provided with a basket seat 34 correspondingly arranged in the support grooves 15, and meanwhile, the end part of the basket seat 34 abuts against the side edge of the support piece 33 to be limited, so that the positioning stability of the whole wafer basket 3 is kept. A position sensor for detecting the position of the basket seat 34 is arranged on a base plate, and is used for detecting whether the wafer basket 3 is placed in place or not, and after the wafer basket 3 is positioned in place, the driving shaft 14 is started to work subsequently.
The group of side-hung clamping transfer devices 2 are arranged on two sides of the fixed frame 22, and each side-hung clamping transfer device 2 comprises a fixed plate 23 arranged on the fixed frame 22, a movable plate 24 arranged on the fixed plate 23 and driven to lift, a transfer frame 25 arranged on the movable plate 24 and driven to horizontally move, and a gripper 21 arranged at the bottom of the transfer frame 25 and driven to horizontally move. The fixed plate 23 is provided with a first sliding rail 26 for being matched with the movable plate 24, the movable plate 24 is provided with a second sliding rail (not shown in the figure) for being matched with the transfer frame 25, and the driving mode of the movable plate 24, the transfer frame 25 and the grippers 21 is not limited to a screw motor structure, so that the functions of automatically lifting the movable plate 24, horizontally moving the transfer frame 25 and horizontally moving the grippers 21 can be realized. The gripper 21 has an automatic opening/closing and clamping function. The top of both sides of the wafer basket 3 is respectively provided with a handle part 35, and the handles 21 clamp and position the handle parts 35, so that the whole wafer basket 3 is carried and transferred.
When the wafer 31 is placed in the wafer basket 3, the wafer basket 3 is transported by the side-hanging clamping and transporting device 2 and positioned to the wafer arranging platform transporting device 1, the driving shaft 14 in the wafer arranging platform transporting device 1 is rotated to contact the wafer 31 of the wafer basket 3, the wafer 31 is continuously rotated in the wafer basket 3, the unfilled corner position 32 of the wafer 31 faces the driving shaft 14, and the wafer 31 is continuously rotated and restored in the wafer basket 3, so that all the unfilled corner positions 32 are kept in the same direction.
In this embodiment, the wafer arranging platform transfer device 1 has an automatic horizontal transfer function, the supporting base 12 stably positions the wafer basket 3, the driving shaft 14 is kept to extend to the position inside the wafer basket 3 to highly adapt to the round edge contacting the wafer 31 and is suspended at intervals with the unfilled corner position 32, and in the process that the driving shaft 14 drives the wafer 31 to be normalized, the unfilled corner position 32 does not contact the driving shaft 14 to finish wafer arranging, so that the wafer arranging mode is simpler and more efficient than the traditional structure, and the manufacturing cost and maintenance cost of the wafer arranging structure are reduced; the side hanging clamping transfer device 2 has the function of automatically transferring and carrying the wafer basket 3, and the combined mechanism is formed by combining the wafer arranging platform transfer device 1, so that the whole station is convenient to transfer and use, the applicability is wider, the loading and unloading of the wafer basket 3 are effectively combined, and the working efficiency is improved.
In the description of the present specification, the term "particular embodiment" or "a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although the embodiments of the present utility model are described above, the embodiments are only used for facilitating understanding of the present utility model, and are not intended to limit the present utility model. Any person skilled in the art can make any modification and variation in form and detail without departing from the spirit and scope of the present disclosure, but the scope of the present disclosure is to be determined by the appended claims.
Claims (10)
1. Automatic wafer reason mascerating machine of unloading in cyclic transfer, its characterized in that: comprises a wafer arranging platform transfer device and a side hanging clamping transfer device arranged above the wafer arranging platform transfer device; the wafer arranging platform transfer device comprises a wafer arranging platform which is driven to horizontally move, a supporting base which is arranged at the top of the wafer arranging platform, a driving shaft seat which is arranged on the supporting base, and a driving shaft which is arranged on the driving shaft seat and is arranged in the horizontal direction, wherein a plurality of supporting grooves which are used for balancing and supporting and positioning the wafer basket are formed in the top of the supporting base, the driving shaft extends into the opening at the bottom of the wafer basket and is in contact with the circumferential edge of the wafer, the driving shaft is driven to rotate and return to the unfilled corner position of the wafer and the suspended interval of the wafer, and the side-hanging clamping transfer device comprises a gripper which is driven by multi-shaft transfer and used for clamping and carrying the wafer basket.
2. The wafer arranging machine for automatic cycle transfer loading and unloading according to claim 1, wherein: the wafer arranging platform transfer devices are horizontally arranged at intervals relatively, and the side hanging clamping transfer devices are arranged above the corresponding wafer arranging platform transfer devices.
3. The wafer arranging machine for automatic cycle transfer loading and unloading according to claim 1, wherein: the wafer arranging platform transfer device further comprises a movable bottom plate, and a plurality of travelling wheels are arranged at the bottom of the movable bottom plate.
4. The wafer arranging machine for automatic cycle transfer loading and unloading according to claim 1, wherein: the top of the reason piece platform is provided with a driving piece used for connecting a driving shaft at the side edge of the supporting base.
5. The wafer arranging machine for automatic cycle transfer loading and unloading according to claim 1, wherein: the inner cavity of the wafer basket is in profiling arrangement with the round edge of the wafer, and the axial direction of the driving shaft and the perpendicular bisector of the unfilled corner line of the wafer are in opposite vertical positions.
6. The wafer arranging machine for automatic cycle transfer loading and unloading according to claim 1, wherein: the support base comprises a group of base plates which are arranged at intervals, and a support piece used for limiting the wafer basket is arranged on the side face of one base plate.
7. The wafer arranging machine for automatic cycle transfer loading and unloading according to claim 6, wherein: the top of base plate is provided with a set of supporting groove of interval arrangement, the supporting groove is the trapezoid structure that falls, the bottom of wafer basket is provided with the basket seat that corresponds the frame and place in the supporting groove.
8. The wafer arranging machine for automatic cycle transfer loading and unloading according to claim 7, wherein: a position sensor for detecting the position of the basket seat is arranged on the base plate.
9. The wafer arranging machine for automatic cycle transfer loading and unloading according to claim 1, wherein: the side hanging clamping transfer device comprises a fixed plate arranged on the fixed frame, a moving plate arranged on the fixed plate and driven to lift, a transfer frame arranged on the moving plate and driven to horizontally move, and a gripper arranged at the bottom of the transfer frame and driven to horizontally move.
10. The wafer arranging machine for automatic cycle transfer loading and unloading according to claim 1, wherein: the top of both sides of the wafer basket is provided with a handle part respectively, and the handles are used for clamping and positioning the handle part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322766884.9U CN221282063U (en) | 2023-10-16 | 2023-10-16 | Wafer arranging machine capable of automatically and circularly transferring, loading and unloading |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322766884.9U CN221282063U (en) | 2023-10-16 | 2023-10-16 | Wafer arranging machine capable of automatically and circularly transferring, loading and unloading |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221282063U true CN221282063U (en) | 2024-07-05 |
Family
ID=91705913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322766884.9U Active CN221282063U (en) | 2023-10-16 | 2023-10-16 | Wafer arranging machine capable of automatically and circularly transferring, loading and unloading |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221282063U (en) |
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2023
- 2023-10-16 CN CN202322766884.9U patent/CN221282063U/en active Active
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