CN221226252U - Maintenance tool for tubular PE-POLY reaction chamber - Google Patents
Maintenance tool for tubular PE-POLY reaction chamber Download PDFInfo
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- CN221226252U CN221226252U CN202323033708.0U CN202323033708U CN221226252U CN 221226252 U CN221226252 U CN 221226252U CN 202323033708 U CN202323033708 U CN 202323033708U CN 221226252 U CN221226252 U CN 221226252U
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- rod
- placing
- socket
- tubular
- reaction chamber
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 54
- 238000012423 maintenance Methods 0.000 title claims abstract description 30
- 230000007246 mechanism Effects 0.000 claims abstract description 34
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 16
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 238000009434 installation Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 230000006872 improvement Effects 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- 230000005611 electricity Effects 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
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Abstract
The utility model discloses a maintenance tool for a tubular PE-POLY reaction chamber, which comprises: the boat pushing mechanism, the first taking and placing rod and the second taking and placing rod; the first picking and placing rods are symmetrically arranged at two sides of the boat pushing mechanism through the first fixing seats and are used for picking and placing the supporting rods; the second picking and placing rods are symmetrically arranged at two sides of the boat pushing mechanism through second fixing seats and are used for picking and placing the guide rods; under the drive of the boat pushing mechanism, the first taking and placing rod and the second taking and placing rod respectively drive the supporting rod and the guide rod to move in the horizontal direction and the vertical direction in the tubular PE-POLY reaction chamber, so that the supporting rod and the guide rod can be automatically disassembled and assembled in the tubular PE-POLY reaction chamber. The utility model has the advantages of compact structure, convenient operation, stable support, capability of realizing the installation and the disassembly of the power-on component in a high-temperature state, and the like.
Description
Technical Field
The utility model belongs to the technical field of maintenance of tubular PE-POLY reaction chambers, and particularly relates to a maintenance tool for a tubular PE-POLY reaction chamber.
Background
Along with the gradual mainstream position of TOPCON batteries in the market, the tunneling passivation layer and the doped amorphous silicon layer of TOPNCON batteries are prepared by utilizing tubular PECVD, namely PE-POLY has become an important choice of battery manufacturers, PE-POLY equipment is operated on TOPCON battery production lines in batches, the problems on equipment hardware encountered by PE-POLY at present are concentrated on a power-leading structure in a reaction chamber, amorphous silicon formed in the process is attached to an insulating sleeve of the power-leading structure, the insulating performance of the power-leading system and the reaction chamber is reduced, the discharging process in the POLY process is influenced after long-term use, and the process effect is deteriorated, so that the power-leading structure in the reaction chamber needs to be maintained after the equipment is used for a period of time.
The existing maintenance means mainly comprises cooling maintenance, wherein the internal structure of the PE-POLY reaction chamber is shown in fig. 1, a supporting rod 3 is arranged between a furnace mouth flange 1 and a furnace tail flange 2, the supporting rod 3 is connected with a lead rod 4 through a seat electrode block 5, the lead rod 4 is connected with a lead column 6 through threads, the lead column 6 is connected with a lead wire seat 7 through a flange, the supporting rod 3 and a lead device on the lead column are required to be taken out, the threaded connection between the lead rod 4 and the lead column 6 is required to be removed by bare hands, then the supporting rod 3 is taken down from a supporting sleeve 8, and the whole process is required to be operated after the internal temperature of the reaction chamber is reduced to normal temperature. The cooling process takes a long time, which itself affects the productivity of the equipment. Furthermore, frequent temperature rise and drop can also reduce the service life of certain components in the reaction chamber, and increase the running cost of the equipment.
Disclosure of utility model
The utility model aims to solve the technical problem of overcoming the defects of the prior art and providing a maintenance tool for a tubular PE-POLY reaction chamber, which has the advantages of compact structure, convenient operation, stable support and capability of realizing the installation and the disassembly of a power-on component in a high-temperature state.
In order to solve the technical problems, the utility model adopts the following technical scheme:
A maintenance tool for a tubular PE-POLY reaction chamber, comprising: the boat pushing mechanism, the first taking and placing rod and the second taking and placing rod; the first picking and placing rods are detachably and symmetrically arranged on two sides of the boat pushing mechanism through the first fixing seat and are used for realizing that the support rods are picked and placed in the support sleeves; the second picking and placing rods are detachably and symmetrically arranged on two sides of the boat pushing mechanism through second fixing seats and are used for achieving picking and placing of the conducting rods in the electric inserting seats; under the drive of the boat pushing mechanism, the first taking and placing rod and the second taking and placing rod respectively drive the supporting rod and the guide rod to pass through the furnace tail flange to move in the horizontal direction and the vertical direction in the tubular PE-POLY reaction chamber, so that the supporting rod and the guide rod can be automatically disassembled and assembled in the tubular PE-POLY reaction chamber.
As a further improvement of the utility model, the socket comprises a socket male head and a socket female head which are matched with each other, wherein two ends of the socket male head are respectively connected with a guide rod and a second picking and placing rod, and the socket female head is arranged on a furnace tail flange so as to fix the socket male head and the guide rod in a tubular PE-POLY reaction chamber; when the conducting rod is taken and put, the second taking and putting rod is inserted into the male plug of the electric socket and drives the conducting rod and the male plug of the electric socket to integrally move.
As a further improvement of the utility model, the bottom of the male plug of the plug socket is provided with a plug pin, the female plug of the plug socket is provided with a plug pin hole, and the plug pin is matched with the plug pin hole so as to realize plug connection between the male plug of the plug socket and the female plug of the plug socket.
As a further improvement of the utility model, the side part of the male plug of the plug-in socket is provided with a square hole, the front end of the second picking and placing rod is provided with a square head, and the square head is matched with the square hole so as to realize plug-in connection between the second picking and placing rod and the male plug of the plug-in socket.
As a further improvement of the utility model, the side part of the male head of the plug-in socket is provided with an internal threaded hole, the square hole is opposite to the threaded hole, the tail part of the lead rod is provided with an external threaded hole, and the internal threaded hole is matched with the external threaded hole so as to realize the threaded connection of the lead rod and the male head of the plug-in socket.
As a further improvement of the utility model, the front end of the first picking and placing rod is provided with a conical head.
As a further improvement of the utility model, the support sleeve baffle ring is arranged on the support sleeve and is used for assisting the first taking and placing rod to be inserted into the support rod.
As a further improvement of the utility model, the height of the supporting sleeve baffle ring is equal to the thickness of the supporting rod, and the supporting sleeve baffle ring is used for limiting the displacement of the supporting rod on the supporting sleeve.
Compared with the prior art, the utility model has the advantages that:
According to the maintenance tool for the tubular PE-POLY reaction chamber, the first taking and placing rods are detachably and symmetrically arranged on two sides of the boat pushing mechanism, the second taking and placing rods are symmetrically arranged on two sides of the boat pushing mechanism, the supporting rods are taken and placed in the supporting sleeves of the furnace tail flange by the aid of the first taking and placing rods, the conducting rods are taken and placed in the plug-in seats of the furnace tail flange by the aid of the second taking and placing rods, and therefore the maintenance tool with compact structure, convenience in operation and stable support is obtained; based on the requirement of taking and placing the graphite boat, the boat pushing mechanism can enter and exit the reaction chamber at high temperature, and under the drive of the boat pushing mechanism, the first taking and placing rod and the second taking and placing rod respectively drive the supporting rod and the guide rod to pass through the furnace tail flange to move in the horizontal direction and the vertical direction in the tubular PE-POLY reaction chamber, so that the automatic disassembly and assembly of the supporting rod and the guide rod in the tubular PE-POLY reaction chamber is realized; the whole disassembly and assembly process does not need to be manually participated, the whole in-out reaction chamber of the support rod assembly and the electricity guiding structure is realized, and the maintenance efficiency of the support rod assembly and the electricity guiding structure is obviously improved. The utility model solves the problems that the existing maintenance mode needs to be carried out after long-time cooling to influence the productivity of equipment, the service life of certain parts in the reaction chamber can be reduced due to frequent temperature rise and fall, and the like, and improves the convenience of maintenance of the power-on structure.
Drawings
FIG. 1 is a schematic diagram of the structural principle of a tubular PE-POLY reaction chamber in the prior art.
Fig. 2 is a schematic structural diagram of a maintenance tool according to an embodiment of the present utility model.
Fig. 3 is a schematic structural diagram of the front end of the first pick-and-place rod according to an embodiment of the present utility model.
Fig. 4 is a schematic structural diagram of the front end of the second pick-and-place rod according to an embodiment of the present utility model.
Fig. 5 is a schematic view of the structural principle of the furnace tail flange according to the embodiment of the utility model.
Fig. 6 is a schematic structural diagram of a male plug of a socket according to an embodiment of the present utility model.
Fig. 7 is a schematic structural diagram of another view of the male plug of the socket according to an embodiment of the present utility model.
Fig. 8 is a schematic structural diagram of a maintenance tool in a working state according to an embodiment of the present utility model.
Legend description: 1. a furnace mouth flange; 2. a furnace tail flange; 3. a support rod; 4. a lead rod; 5. a seat electrode block; 6. a power-on column; 7. a lead wire seat; 8. a support sleeve; 9. a boat pushing mechanism; 91. a steel bar; 92. a clamp; 93. a load-bearing rod; 10. a first pick-and-place lever; 101. a conical head; 11. a second pick-and-place rod; 111. square head; 12. a first fixing seat; 13. the second fixing seat; 14. a male plug of the plug socket; 141. square holes; 142. a plug pin; 143. an internal threaded hole; 15. a socket female head; 16. and supporting the sleeve baffle ring.
Detailed Description
The utility model is further described below in connection with the drawings and the specific preferred embodiments, but the scope of protection of the utility model is not limited thereby.
Examples
As shown in fig. 2 to 8, the maintenance tool for a tubular PE-POLY reaction chamber of the present utility model includes: a boat pushing mechanism 9, a first pick-and-place lever 10 and a second pick-and-place lever 11. The two first picking and placing rods 10 are detachably and symmetrically arranged on two sides of the boat pushing mechanism 9 through first fixing seats 12 respectively, and the first picking and placing rods 10 are used for realizing that the supporting rods 3 are picked and placed in the supporting sleeves 8 of the furnace tail flange 2. The two second picking and placing rods 11 are detachably and symmetrically arranged on two sides of the boat pushing mechanism 9 through second fixing seats 13 respectively, and the second picking and placing rods 11 are used for achieving that the conducting rods 4 are picked and placed in the plug-in seats of the furnace tail flange 2. Under the drive of the boat pushing mechanism 9, the first taking and placing rod 10 and the second taking and placing rod 11 respectively drive the supporting rod 3 and the guide rod 4 to move in the horizontal direction and the vertical direction in the tubular PE-POLY reaction chamber through the furnace tail flange 2, so that the supporting rod 3 and the guide rod 4 can be automatically disassembled and assembled in the tubular PE-POLY reaction chamber.
In this embodiment, the boat pushing mechanism 9 includes a steel bar 91, a clamp 92 and a bearing rod 93, one end of the steel bar 91 is connected with a driving mechanism outside the tubular PE-POLY reaction chamber, the other end of the steel bar 91 is connected with the bearing rod 93 through the clamp 92, and the bearing rod 93 is used for carrying a graphite boat. Under the drive of the driving mechanism, the boat pushing mechanism 9 drives the graphite boat to automatically enter and exit the tubular PE-POLY reaction chamber. When the tubular PE-POLY reaction chamber is required to be maintained, the first taking and placing rod 10 and the second taking and placing rod 11 can be connected to the boat pushing mechanism 9, and the installation positions of the first taking and placing rod 10 and the second taking and placing rod 11 connected to the boat pushing mechanism 9 can be flexibly adjusted according to actual requirements. The boat pushing mechanism 9 is driven to move by the driving mechanism, so that the first taking and placing rod 10 and the second taking and placing rod 11 can automatically enter and exit the tubular PE-POLY reaction chamber, and the supporting rod 3 and the guide rod 4 can be automatically disassembled and assembled in the tubular PE-POLY reaction chamber.
In the embodiment, the first picking and placing rods 10 are detachably and symmetrically arranged at two sides of the boat pushing mechanism 9, the second picking and placing rods 11 are symmetrically arranged at two sides of the boat pushing mechanism 9, the support rods 3 are picked and placed in the support sleeves 8 of the furnace tail flange 2 by using the first picking and placing rods 10, and the conducting rods 4 are picked and placed in the plug-in seats of the furnace tail flange 2 by using the second picking and placing rods 11, so that a maintenance tool with compact structure, convenient operation and stable support is obtained; based on the requirement of taking and placing the graphite boat, the boat pushing mechanism 9 can enter and exit the reaction chamber at high temperature, and under the drive of the boat pushing mechanism 9, the first taking and placing rod 10 and the second taking and placing rod 11 respectively drive the supporting rod 3 and the conducting rod 4 to pass through the furnace tail flange 2 to move in the horizontal direction and the vertical direction in the tubular PE-POLY reaction chamber, so that the supporting rod 3 and the conducting rod 4 are automatically disassembled and assembled in the tubular PE-POLY reaction chamber; the whole disassembly and assembly process does not need to be manually participated, the whole in-out reaction chamber of the support rod assembly and the electricity guiding structure is realized, and the maintenance efficiency of the support rod assembly and the electricity guiding structure is obviously improved. The utility model solves the problems that the existing maintenance mode needs to be carried out after long-time cooling to influence the productivity of equipment, the service life of certain parts in the reaction chamber can be reduced due to frequent temperature rise and fall, and the like, and improves the convenience of maintenance of the power-on structure.
As shown in fig. 5 to 7, in the present embodiment, the socket includes a socket male 14 and a socket female 15 that are matched with each other. The two ends of the male plug 14 of the plug seat are respectively connected with the conducting rod 4 and the second picking and placing rod 11, and the female plug 15 of the plug seat is arranged on the furnace tail flange 2 so as to fix the male plug 14 of the plug seat and the conducting rod 4 in the tubular PE-POLY reaction chamber. When the conducting rod 4 is taken and put, the second taking and putting rod 11 is inserted into the plug-in seat male head 14 and drives the conducting rod 4 and the plug-in seat male head 14 to integrally move, so that the integral movement of the conducting structure is realized.
As shown in fig. 6, in this embodiment, a pin 142 is disposed at the bottom of the male plug 14, a pin hole is disposed on the female plug 15, and the pin 142 is matched with the pin hole to realize plug connection between the male plug 14 and the female plug 15.
As shown in fig. 4 and 6, in the present embodiment, a square hole 141 is provided on the side of the male plug 14 of the socket, a square head 111 is provided at the front end of the second pick-and-place rod 11, and the square head 111 is matched with the square hole 141 to realize the plug connection between the second pick-and-place rod 11 and the male plug 14 of the socket. The second picking and placing rod 11 is inserted into the square hole 141 of the male plug 14 of the socket, can guide and prevent rotation, and has a positioning function.
As shown in fig. 7, in this embodiment, an internal threaded hole 143 is provided on the side of the male plug 14, a square hole 141 is provided opposite to the threaded hole 143, and an external threaded hole is provided on the tail of the lead rod 4, and the internal threaded hole 143 is matched with the external threaded hole, so as to realize threaded connection between the lead rod 4 and the male plug 14.
As shown in fig. 3, in the present embodiment, the front end of the first pick-and-place rod 10 is provided with a conical head 101, so that the first pick-and-place rod 10 is more smoothly inserted into the inner hole of the support rod 3, so as to form a cantilever structure for carrying the support rod 3.
As shown in fig. 5, in this embodiment, the support sleeve blocking ring 16 is further included, the support sleeve blocking ring 16 is disposed on the support sleeve 8, and the support sleeve blocking ring 16 is used for assisting the first pick-and-place rod 10 to be smoothly inserted into the support rod 3. Further, the height of the support sleeve stopper ring 16 is equal to the thickness of the support rod 3 for restricting the displacement of the support rod 3 on the support sleeve 8.
When the tubular PE-POLY reaction chamber needs to be maintained, the first taking and placing rod 10 and the second taking and placing rod 11 are arranged on the boat pushing mechanism 9, then the first taking and placing rod 10 is pushed to a position close to the support rod 3 by point movement or manual operation, the first taking and placing rod 10 stretches into an inner hole of the support rod 3 for a certain length, meanwhile, the front end of the second taking and placing rod 11 stretches into the square hole 141 of the male plug 14 of the plug socket, and then the whole maintenance tool is lifted, so that the support rod 3 and the power guiding structure are separated from the furnace tail flange together. After the reaction chamber is lifted to a certain height, the whole support rod 3 and the electricity guiding structure can be taken out integrally after the reaction chamber is slowly withdrawn. Similarly, the placement of the support rod 3 and the power-on structure is the reverse process. The inner parts of the reaction chamber are taken and placed by the push boat at high temperature, so that the manual disassembly for cooling is not needed, and the defect of cooling is avoided.
While the utility model has been described with reference to preferred embodiments, it is not intended to be limiting. Any person skilled in the art can make many possible variations and modifications to the technical solution of the present utility model or equivalent embodiments using the method and technical solution disclosed above without departing from the spirit and technical solution of the present utility model. Therefore, any simple modification, equivalent substitution, equivalent variation and modification of the above embodiments according to the technical substance of the present utility model, which do not depart from the technical solution of the present utility model, still fall within the scope of the technical solution of the present utility model.
Claims (8)
1. A maintenance tool for a tubular PE-POLY reaction chamber, comprising: the boat pushing mechanism (9), the first taking and placing rod (10) and the second taking and placing rod (11); the first taking and placing rods (10) are detachably and symmetrically arranged on two sides of the boat pushing mechanism (9) through first fixing seats (12), and the first taking and placing rods (10) are used for achieving taking and placing of the support rods (3) in the support sleeves (8); the second taking and placing rods (11) are detachably and symmetrically arranged on two sides of the boat pushing mechanism (9) through second fixing seats (13), and the second taking and placing rods (11) are used for achieving taking and placing of the guide rods (4) in the electric inserting seats; under the drive of a boat pushing mechanism (9), the first taking and placing rod (10) and the second taking and placing rod (11) respectively drive the supporting rod (3) and the guide rod (4) to penetrate through the furnace tail flange (2) to move in the horizontal direction and the vertical direction in the tubular PE-POLY reaction chamber, so that the supporting rod (3) and the guide rod (4) can be automatically disassembled and assembled in the tubular PE-POLY reaction chamber.
2. The maintenance tool for the tubular PE-POLY reaction chamber according to claim 1, wherein the socket comprises a socket male head (14) and a socket female head (15) which are matched with each other, two ends of the socket male head (14) are respectively connected with a lead rod (4) and a second picking and placing rod (11), and the socket female head (15) is arranged on a furnace tail flange (2) so as to fix the socket male head (14) and the lead rod (4) in the tubular PE-POLY reaction chamber; when the conducting rod (4) is taken and put, the second taking and putting rod (11) is inserted into the male plug (14) of the plug socket, and the conducting rod (4) and the male plug (14) of the plug socket are driven to integrally move.
3. The maintenance tool for the tubular PE-POLY reaction chamber according to claim 2, wherein a plug pin (142) is arranged at the bottom of the male plug socket (14), a plug pin hole is arranged on the female plug socket (15), and the plug pin (142) is matched with the plug pin hole so as to realize plug connection between the male plug socket (14) and the female plug socket (15).
4. The maintenance tool for the tubular PE-POLY reaction chamber according to claim 2, wherein a square hole (141) is formed in the side portion of the male plug (14) of the socket, a square head (111) is formed at the front end of the second pick-and-place rod (11), and the square head (111) is matched with the square hole (141) so as to realize plug-and-socket connection of the second pick-and-place rod (11) and the male plug (14) of the socket.
5. The maintenance tool for a tubular PE-POLY reaction chamber according to claim 4, wherein an internal threaded hole (143) is formed in the side portion of the male plug (14) of the socket, the square hole (141) is opposite to the internal threaded hole (143), an external threaded hole is formed in the tail portion of the lead rod (4), and the internal threaded hole (143) is matched with the external threaded hole so as to realize threaded connection of the lead rod (4) and the male plug (14) of the socket.
6. Maintenance tool for tubular PE-POLY reaction chambers according to any of the claims 1 to 5, characterized in that the front end of the first pick-and-place rod (10) is provided with a conical head (101).
7. The maintenance tool for a tubular PE-POLY reaction chamber according to any one of claims 1 to 5, further comprising a support sleeve stopper ring (16), the support sleeve stopper ring (16) being disposed on the support sleeve (8), the support sleeve stopper ring (16) being used to assist the insertion of the first pick-and-place rod (10) into the support rod (3).
8. The maintenance tool for a tubular PE-POLY reaction chamber according to claim 7, wherein the height of the support sleeve stopper ring (16) is equal to the thickness of the support rod (3) for restricting the displacement of the support rod (3) on the support sleeve (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323033708.0U CN221226252U (en) | 2023-11-09 | 2023-11-09 | Maintenance tool for tubular PE-POLY reaction chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323033708.0U CN221226252U (en) | 2023-11-09 | 2023-11-09 | Maintenance tool for tubular PE-POLY reaction chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221226252U true CN221226252U (en) | 2024-06-25 |
Family
ID=91574057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323033708.0U Active CN221226252U (en) | 2023-11-09 | 2023-11-09 | Maintenance tool for tubular PE-POLY reaction chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221226252U (en) |
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2023
- 2023-11-09 CN CN202323033708.0U patent/CN221226252U/en active Active
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