CN221223711U - Detection device for surface flatness of silicon disc - Google Patents
Detection device for surface flatness of silicon disc Download PDFInfo
- Publication number
- CN221223711U CN221223711U CN202322824592.6U CN202322824592U CN221223711U CN 221223711 U CN221223711 U CN 221223711U CN 202322824592 U CN202322824592 U CN 202322824592U CN 221223711 U CN221223711 U CN 221223711U
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- frame
- clamping columns
- silicon
- silicon disc
- sliding
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 54
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 54
- 239000010703 silicon Substances 0.000 title claims abstract description 54
- 238000001514 detection method Methods 0.000 title claims abstract description 36
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims 5
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Details Of Measuring And Other Instruments (AREA)
Abstract
The utility model discloses a detection device for the surface evenness of a silicon disc, which comprises a frame, wherein a detection table and a support frame are rotatably arranged on the frame, three vertical clamping columns are slidably arranged on the detection table, the three clamping columns are distributed in an equilateral triangle shape, the three clamping columns are driven by a first driving mechanism to synchronously slide, the sliding directions of the three clamping columns are connected to one point, a horizontally arranged tray is arranged on the detection table through the support frame, three strip-shaped holes are formed in the tray corresponding to the three clamping columns, a mounting frame extending to the upper side of the tray is arranged at the upper end of the support frame, a moving frame which is driven by a second driving mechanism to slide is slidably arranged on the mounting frame, an infrared range finder which is arranged downwards is arranged at the lower end of the moving frame, the silicon discs with various sizes can be detected through the structure, the surfaces of the silicon discs can be completely exposed for detection, in addition, the three clamping columns can synchronously move and can be centered, and the centers of the silicon discs can be positioned at the same position when different silicon discs are detected.
Description
Technical Field
The utility model relates to the technical field of silicon disc detection, in particular to a detection device for surface flatness of a silicon disc.
Background
The silicon disc is a supporting part for a silicon wafer in the processing process, and the requirement on the flatness of the surface of the silicon wafer is higher due to the requirement on the application field of the silicon wafer, so that the silicon disc for supporting the silicon wafer also needs to have higher flatness requirement, thereby ensuring that the silicon wafer can be horizontally placed. Therefore, after the processing of the silicon disc is finished, the surface of the silicon disc needs to be detected, in the prior art, the silicon disc needs to be fixed during the detection, one mode is to press the edge of the silicon disc to fix through a plurality of pressing blocks in a pressing mode, but in the mode, the pressing blocks can shield part of the area of the edge of the silicon disc when pressing the silicon disc, so that the flatness detection cannot be carried out on the part of the area; the other mode is to fix the silicon disc by a vacuum adsorption mode, and the surface of the silicon disc can be completely exposed for detection by the mode, but when the vacuum adsorption mode is applied to devices for detecting silicon discs with different sizes, the silicon disc needs to be centered by a relatively complex structure, so that the utility model aims at improving the detection device for the surface flatness of the silicon disc by the disc-shaped silicon disc in the prior art.
Disclosure of utility model
In order to solve the defects in the prior art, the utility model provides a device for detecting the surface flatness of a silicon disc.
In order to achieve the technical effects, the utility model adopts the following scheme:
The utility model provides a detection device of silicon disc surface smoothness, includes the frame, install detection platform and support frame in the frame, detection platform rotates through the fourth rotating electrical machines and installs in the frame, the slip is equipped with three vertically setting's grip post on the surface of detection platform, and three grip post is equilateral triangle form and distributes, and three grip post drives through first actuating mechanism and carries out synchronous sliding, and the slip direction of three grip post links in a bit, and the contained angle of the slip direction of two adjacent grip posts is 120, there is the tray through support mounting on the detection platform, the tray level sets up, the length direction in bar hole is unanimous with the direction of movement of corresponding grip post has been seted up to three bar hole on the tray, the mounting bracket that extends to the tray top is installed to the upper end of support frame, the slip is equipped with the removal frame that drives the slip through the second actuating mechanism on the mounting bracket, the infrared range finder that sets up down is installed to the lower extreme of removal frame.
The preferred technical scheme, first actuating mechanism is including rotating the driving disk of locating the detection platform surface, the driving disk passes through first rotating electrical machines drive rotation, set up three convex regulation hole on the driving disk, three regulation hole is around the rotation center evenly distributed of driving disk, the one end of regulation hole is close to the border setting of driving disk, the other end of regulation hole is the rotation center that the circular arc is close to the driving disk towards anticlockwise or clockwise and extends, and three grip posts pass three regulation hole setting respectively.
The preferred technical scheme, the spliced pole passes through first slide rail slidable mounting in the surface of detecting the platform, the length direction of first slide rail is unanimous with the spliced pole slip direction that corresponds, the last matching slip of first slide rail is equipped with first slider, spliced pole fixed mounting is on first slider.
The preferred technical scheme, the mounting bracket rotates and installs on the support frame, the mounting bracket passes through second rotary mechanism drive rotation.
According to the preferred technical scheme, the second rotating mechanism comprises a second rotating motor, an output shaft of the second rotating motor is arranged upwards and is fixedly provided with a driving gear, and the tail end of the mounting frame is fixedly provided with a gear piece meshed with the driving gear.
The preferred technical scheme, second actuating mechanism includes the level setting up the second slide rail on the mounting bracket, remove frame and second slide rail matching sliding connection, it is equipped with a wire hole to remove to run through in the frame level, wear to be equipped with the lead screw in the wire hole, the both ends of lead screw are rotated respectively and are installed on the mounting bracket, the lead screw passes through the drive of third rotating electrical machines and rotates.
Compared with the prior art, the beneficial effects are as follows:
The utility model has simple structure and convenient use, the three clamping columns are driven by the first driving mechanism to synchronously move so as to clamp the silicon disc, then the detection table rotates, the infrared range finder moves back and forth on the mounting frame so as to detect the surface of the silicon disc, the silicon disc with various sizes can be detected through the structure, the surface of the silicon disc can be completely exposed for detection, in addition, the three clamping columns can synchronously move so as to be centered, and the centers of the three clamping columns can be positioned at the same position when different silicon discs are detected.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic top view of a drive disk of the present utility model;
FIG. 3 is a schematic top view of the support tray of the present utility model;
fig. 4 is a schematic top view of the mounting bracket of the present utility model.
Reference numerals: 1. a frame; 2. a detection table; 3. a support frame; 4. a first slide rail; 5. a first slider; 6. a clamping column; 7. a drive plate; 8. a fourth rotating electrical machine; 9. a first rotating electric machine; 10. a tray; 11. a mounting frame; 12. a moving rack; 13. an infrared range finder; 14. a second slide rail; 15. a screw rod; 16. a third rotary electric machine; 17. a second rotating electric machine; 18. a drive gear; 19. a gear plate; 20. an adjustment aperture; 21. and a strip-shaped hole.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.
The utility model provides a detection device of silicon disc surface smoothness, includes frame 1, install detection platform 2 and support frame 3 in the frame 1, detection platform 2 drives through fourth rotating electrical machines 8 and rotates and install in frame 1, and the center of detection platform 2 lower extreme is fixed and is equipped with down the pivot, the pivot rotates with frame 1 to be connected, the pivot passes through fourth rotating electrical machines 8 drive rotation, and detection platform 2 horizontal rotation, support frame 3 and frame 1 fixed connection, the on-surface slip of detection platform 2 is equipped with three vertically set up jack post 6, and three jack posts 6 are equilateral triangle form and distribute, and three jack posts 6 drive through first actuating mechanism and carry out synchronous slip, and the slip direction of three jack posts 6 is in the center of the triangle area of enclosing and links to one point, and the contained angle of the slip direction of two adjacent jack posts 6 is 120, install tray 10 through the support on the detection platform 2, tray 10 horizontal setting up, three holes 21 have been seted up to corresponding three jack posts 6 on the support platform 2, the length of jack post 21 corresponds the length of jack post and installs the jack post 12 through the drive frame 11 to the second through the rotation of the jack post that rotates on the mounting bracket 11 side of the rotary distance meter, and the distance meter is equipped with the end through the rotary actuator of the jack mount 11 to take out the side of the jack post 11 to the side of the distance meter on the rotary actuator 13.
The silicon disc is placed on the supporting disc 10 and is located in a triangular area surrounded by the three clamping columns 6, the first driving mechanism drives the three clamping columns 6 to synchronously move inwards to clamp the silicon disc, and as the three clamping columns 6 synchronously move towards one point, the center of the silicon disc can be fixed at one fixed point, and in this way, the surface of the silicon disc can be completely exposed for complete detection; after the silicon disc is fixed, the mounting frame 11 is rotated to move the infrared range finder 13 to the upper side of the silicon disc, the detection table 2 is rotated to drive the silicon disc to rotate, meanwhile, the infrared range finder 13 is driven to move through the back and forth movement of the moving frame 12 on the mounting frame 11, the silicon disc is matched with the rotation of the silicon disc, the surface of the silicon disc is detected, and whether the surface of the silicon disc is smooth or not is judged through the distance between the infrared range finder 13 and the surface of the silicon disc.
The preferred technical scheme, first actuating mechanism is including rotating the driving disk of locating the surface of detecting table 2, the driving disk passes through first rotating electrical machines 9 drive rotation, set up three convex regulation hole 20 on the driving disk, three regulation hole 20 evenly distributed around the rotation center of driving disk, the one end of regulation hole 20 is close to the border setting of driving disk, the other end of regulation hole 20 is the rotation center that the circular arc is close to the driving disk towards anticlockwise or clockwise and extends, and three grip post 6 pass three regulation hole 20 setting respectively, and the slip direction of three grip post 6 links to one point in the rotation center department of driving disk.
The first rotary motor 9 rotates the driving disk so as to restrict the movement of the clamp column 6 toward or away from the rotation center of the driving disk by the arrangement of the adjustment hole 20.
The preferable technical scheme, clamping column 6 is through first slide rail 4 slidable mounting in the surface of detecting platform 2, the length direction of first slide rail 4 is unanimous with corresponding clamping column 6 slip direction, match the slip on the first slide rail 4 and be equipped with first slider 5, clamping column 6 fixed mounting is on first slider 5.
In a preferred technical scheme, the second rotating mechanism comprises a second rotating motor 17, an output shaft of the second rotating motor 17 is upward arranged and fixedly provided with a driving gear 18, and a gear piece 19 in meshed connection with the driving gear 18 is fixedly arranged at the tail end of the mounting frame 11.
The second rotary motor 17 drives the mounting frame 11 to rotate through the connection of the driving teeth and the gear piece 19.
The preferred technical scheme, second actuating mechanism includes the level setting up the second slide rail 14 on mounting bracket 11, remove frame 12 and second slide rail 14 matching sliding connection, it is equipped with a wire hole to go up the level penetration of frame 12, wear to be equipped with lead screw 15 in the wire hole, the both ends of lead screw 15 rotate respectively and install on mounting bracket 11, lead screw 15 passes through the drive of third rotating electrical machines 16 and rotates.
In the description of the present utility model, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "top", "bottom", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, or the directions or positional relationships conventionally put in place when the inventive product is used, or the directions or positional relationships conventionally understood by those skilled in the art are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific direction, be configured and operated in a specific direction, and therefore should not be construed as limiting the present utility model.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Claims (6)
1. The utility model provides a detection device of silicon disc surface smoothness, its characterized in that, including frame (1), install detection platform (2) and support frame (3) on frame (1), detection platform (2) are installed on frame (1) through fourth rotating electrical machines (8) rotation, the surperficial slip of detection platform (2) is equipped with three vertically setting grip post (6), and three grip post (6) are equilateral triangle form and distribute, and three grip post (6) drive through first actuating mechanism and carry out synchronous sliding, and the slip direction of three grip post (6) links in a bit, and the contained angle of the slip direction of two adjacent grip post (6) is 120, have through support mounting to hold tray (10) on detection platform (2), hold tray (10) level setting, hold tray (10) on corresponding three grip post (6) and seted up three bar hole (21), the length direction of bar hole (21) is unanimous with the direction of movement of corresponding grip post (6), the slip direction of three grip post (6) is continuous with one point, the slip direction of support frame (3) is equipped with distance measuring instrument (12) down through the second of installing support frame (12) and is equipped with on the mounting bracket (12) and is equipped with down the slide instrument (12).
2. The device for detecting the surface flatness of the silicon disc according to claim 1, wherein the first driving mechanism comprises a driving disc rotatably arranged on the surface of the detecting table (2), the driving disc is driven to rotate by a first rotating motor (9), three circular arc-shaped regulating holes (20) are formed in the driving disc, the three regulating holes (20) are uniformly distributed around the rotation center of the driving disc, one end of each regulating hole (20) is close to the edge of the driving disc, the other end of each regulating hole (20) extends towards the rotation center of the driving disc in a anticlockwise or clockwise direction in an arc shape, and three clamping columns (6) are respectively arranged through the three regulating holes (20).
3. The device for detecting the surface flatness of the silicon disc according to claim 2, wherein the clamping columns (6) are slidably mounted on the surface of the detecting table (2) through the first sliding rails (4), the length direction of the first sliding rails (4) is consistent with the sliding direction of the corresponding clamping columns (6), the first sliding rails (4) are provided with the first sliding blocks (5) in a matched sliding manner, and the clamping columns (6) are fixedly mounted on the first sliding blocks (5).
4. The device for detecting the surface flatness of the silicon disc according to claim 1, wherein the second driving mechanism comprises a second sliding rail (14) horizontally arranged on the mounting frame (11), the movable frame (12) is in matched sliding connection with the second sliding rail (14), a wire hole is horizontally penetrated through the movable frame (12), a screw rod (15) is penetrated in the wire hole, two ends of the screw rod (15) are respectively rotatably arranged on the mounting frame (11), and the screw rod (15) is driven to rotate through a third rotating motor (16).
5. The device for detecting the surface flatness of the silicon disc according to claim 1, wherein the mounting frame (11) is rotatably mounted on the supporting frame (3), and the mounting frame (11) is driven to rotate by the second rotating mechanism.
6. The device for detecting the surface flatness of the silicon disc according to claim 5, wherein the second rotating mechanism comprises a second rotating motor (17), an output shaft of the second rotating motor (17) is arranged upwards and fixedly provided with a driving gear (18), and a gear piece (19) meshed and connected with the driving gear (18) is fixedly arranged at the tail end of the mounting frame (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322824592.6U CN221223711U (en) | 2023-10-20 | 2023-10-20 | Detection device for surface flatness of silicon disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322824592.6U CN221223711U (en) | 2023-10-20 | 2023-10-20 | Detection device for surface flatness of silicon disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221223711U true CN221223711U (en) | 2024-06-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322824592.6U Active CN221223711U (en) | 2023-10-20 | 2023-10-20 | Detection device for surface flatness of silicon disc |
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| Country | Link |
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| CN (1) | CN221223711U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119104825A (en) * | 2024-10-28 | 2024-12-10 | 上海汇聚自动化科技有限公司 | Intelligent assembly detection device |
-
2023
- 2023-10-20 CN CN202322824592.6U patent/CN221223711U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119104825A (en) * | 2024-10-28 | 2024-12-10 | 上海汇聚自动化科技有限公司 | Intelligent assembly detection device |
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