CN221207215U - Cyclone filter device of crystal growth furnace - Google Patents
Cyclone filter device of crystal growth furnace Download PDFInfo
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- CN221207215U CN221207215U CN202322893410.0U CN202322893410U CN221207215U CN 221207215 U CN221207215 U CN 221207215U CN 202322893410 U CN202322893410 U CN 202322893410U CN 221207215 U CN221207215 U CN 221207215U
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- tank body
- cooling
- pipe
- crystal growth
- growth furnace
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- 239000013078 crystal Substances 0.000 title claims abstract description 32
- 238000001816 cooling Methods 0.000 claims abstract description 49
- 239000002912 waste gas Substances 0.000 claims abstract description 29
- 230000007246 mechanism Effects 0.000 claims abstract description 17
- 238000007789 sealing Methods 0.000 claims abstract description 3
- 239000002893 slag Substances 0.000 claims description 14
- 238000007599 discharging Methods 0.000 claims description 13
- 239000012535 impurity Substances 0.000 claims description 10
- 238000001914 filtration Methods 0.000 abstract description 8
- 238000013461 design Methods 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 abstract 1
- 239000004744 fabric Substances 0.000 description 11
- 239000000428 dust Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 3
- 239000002826 coolant Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
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- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The utility model discloses a cyclone filtering device of a crystal growth furnace, which is used for solving the problems that the tank body of the existing filtering tank is of an integrated structure, can not be opened and is inconvenient to clean the inside of the tank body, and the technical scheme is as follows: the filter comprises a tank body, wherein a filter cavity is formed in the tank body, an opening is formed in the top of the tank body, and the opening is communicated with the filter cavity; the end cover is positioned at the top end of the tank body and is detachably connected with the tank body, and is used for sealing the opening; the cooling mechanism is arranged on the tank body, and the cooling end of the cooling mechanism is positioned in the filter cavity and is used for cooling waste gas of the single crystal furnace entering the filter cavity. The utility model adopts the design of the end cover which is detachably connected, is convenient for cleaning and overhauling the tank body, and saves time and labor cost.
Description
Technical Field
The utility model relates to the field of dust removal equipment, in particular to a cyclone filter device of a crystal growth furnace.
Background
In the production process of the single crystal furnace, a large amount of oxide dust and waste gas are usually generated, and in order to maintain the vacuum environment of the single crystal furnace, a vacuum pump is used for vacuumizing the single crystal furnace. In order to avoid the oxide dust pumped by the vacuum pump, a filter tank is usually connected between the single crystal furnace and the vacuum pump, and a filter cloth bag is arranged in the filter tank and can adsorb the dust, so that the adsorption capacity of the filter cloth bag is limited, and the filter cloth bag needs to be cleaned frequently.
In the prior art, the application number is: the chinese patent document of cn 20202323901. X discloses a filtering tank, the inlet and outlet ends of which are respectively connected with a single crystal furnace and a vacuum pump, to maintain the vacuum degree in the single crystal furnace, and to protect the vacuum pump, comprising: the tank body is provided with an air inlet, an air outlet, a filter cloth bag frame and a plurality of filter cloth bags; the air inlet is connected with the single crystal furnace; the air outlet is connected with a vacuum pump; the filter cloth bag frame is arranged in the tank body; the filter cloth bag is arranged on the filter cloth bag frame; under negative pressure, waste gas in the single crystal furnace enters the tank body, and after passing through the filter cloth bag, oxide powder is trapped and separated; the purging device is partially arranged in the tank body, blows gas into the inner side of the filter cloth bag and cleans the filter cloth bag; the dust collection device is connected with the bottom of the tank body and used for sucking out and collecting oxide dust falling in the tank body.
According to the above, the tank body of the existing filtering tank is of an integrated structure, and cannot be opened, so that the inside of the tank body is inconvenient to clean. Therefore, there is a need for an improvement in such a structure to overcome the above-mentioned drawbacks.
Disclosure of utility model
The utility model aims to provide a cyclone filtering device of a crystal growth furnace, which is used for solving the problems that the tank body of the existing filtering tank is of an integrated structure, cannot be opened and is inconvenient to clean the inside of the tank body.
The technical aim of the utility model is realized by the following technical scheme:
A cyclone filter device of a crystal growth furnace, comprising:
the tank body is internally provided with a filter cavity, the top of the tank body is provided with an opening, and the opening is communicated with the filter cavity;
the end cover is positioned at the top end of the tank body and is detachably connected with the tank body, and is used for sealing the opening;
the cooling mechanism is arranged on the tank body, and the cooling end of the cooling mechanism is positioned in the filter cavity and is used for cooling waste gas of the single crystal furnace entering the filter cavity.
The utility model is further provided with: the outer end of the end cover is provided with a first connecting part, a plurality of first connecting holes are formed in the first connecting part, the connecting holes penetrate through the upper end and the lower end of the first connecting part, the outer wall of the top end of the tank body is provided with a second connecting part, a plurality of second connecting holes matched with the first connecting holes are formed in the second connecting part, and the fixing bolts penetrate through the first connecting holes and extend into the second connecting holes to fix the end cover and the tank body.
The utility model is further provided with: the cooling mechanism comprises a cooling pipe, two ends of the cooling pipe are arranged on the tank body, and the cooling end of the cooling pipe is spirally arranged in the filter cavity.
The utility model is further provided with: the inside guide cap that is provided with of jar body, the top of guide cap is provided with the filter screen, and the outside of guide cap is connected with the inside wall of jar body, and the bottom export of guide cap sets up towards cooling tube mechanism, and waste gas gets into the guide cap from the intake pipe and flows to the cooling tube under the guide of guide cap.
The utility model is further provided with: the side of the tank body is provided with an air inlet pipe, the input end of the air inlet pipe is connected with the output end of the single crystal furnace, the output end of the air inlet pipe penetrates through the tank body and extends into the guide cover, and waste gas can be introduced into the guide cover through the air inlet pipe.
The utility model is further provided with: the bottom of the tank body is provided with a slag discharging pipe, the top end of the slag discharging pipe is communicated with the filter cavity, the bottom end of the slag discharging pipe extends to the outside of the tank body, and impurities in the filter cavity can be discharged outwards through the slag discharging pipe.
The utility model is further provided with: the bottom of the tank body is also provided with an air outlet pipe, the input end of the air outlet pipe is positioned at the upper end of the tank body, the output end of the air outlet pipe is positioned outside the tank body and communicated with an external pump, and waste gas can be discharged outwards through the air outlet pipe.
The utility model is further provided with: a plurality of stand columns are arranged on the outer wall of the bottom of the tank body, and lockable universal wheels are arranged at the bottoms of the stand columns.
In summary, the utility model has the following beneficial effects:
1. The design of the end cover which is detachably connected is adopted, so that the tank body is convenient to clean and overhaul, and the time and labor cost are saved;
2. The cooling mechanism is arranged, and the cooling pipe in the cooling mechanism can cool the waste gas, so that the waste gas and impurities can be separated. The design can improve the purity and the purification effect of the waste gas.
Drawings
Fig. 1 is a schematic view of the internal structure of the present utility model.
Fig. 2 is a top view of the present utility model.
Number labels: tank 1, end cover 2, filter cavity 3, first connecting part 4, second connecting part 5, fixing bolt 6, cooling pipe 7, guide cover 8, air inlet pipe 9, air outlet pipe 10, slag discharging pipe 11, upright post 12, universal wheel 13, filter screen 14
Detailed Description
In order that the manner in which the above-recited features, advantages, objects and advantages of the utility model are obtained, a more particular description of the utility model will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.
As shown in fig. 1 to 2, the cyclone filter device of the crystal growth furnace provided by the utility model comprises a tank body 1, an end cover 2 and a cooling mechanism, wherein a filter cavity 3 is arranged in the tank body 1, an opening is arranged at the top of the tank body 1 and is communicated with the filter cavity 3, and the end cover 2 is positioned at the top end of the tank body 1 and is detachably connected with the tank body 1, so that the tank body 1 is convenient to clean and overhaul; the cooling mechanism is arranged on the tank body 1, the cooling end of the cooling mechanism is positioned in the filter cavity 3 and is used for cooling waste gas of the single crystal furnace entering the filter cavity 3 and separating impurities contained in the waste gas.
In this embodiment, be provided with connecting portion one 4 on the outer end of end cover 2, a plurality of connecting holes one have been seted up on connecting portion one 4, connecting portion one 4 upper and lower both ends are run through to the connecting hole, be provided with connecting portion two 5 on the outer wall on jar body 1 top, a plurality of and connecting hole one assorted connecting hole two have been seted up on connecting portion two 5, during the use, with end cover 2 one set up on jar body 1, connecting hole one aligns with connecting hole two, fixing bolt 6 passes connecting hole one and extends to in the connecting hole two, realize the fixed between end cover 2 and the jar body 1, when need clear up the maintenance to jar body 1 inside, only need unscrew the bolt and take off end cover 2 can.
In this embodiment, cooling mechanism includes cooling tube 7, and cooling tube 7's both ends set up on jar body 1, and cooling tube 7's cooling end spiral sets up in filter chamber 3, and during the use, let in cooling tube 7 with the coolant, when waste gas contacted cooling tube 7, through coolant and waste gas heat exchange, cool off fast waste gas, the impurity cooling that contains in the waste gas solidifies for with waste gas and impurity separation.
In this embodiment, the inside of the tank 1 is provided with a guide cover 8, the top end of the guide cover 8 is provided with a filter screen 14, the filter screen 14 is used for filtering exhaust gas discharged from the top of the guide cover 8, the outer side of the guide cover 8 is connected with the inner side wall of the tank 1, the bottom outlet of the guide cover 8 is arranged towards the cooling pipe 7 mechanism, exhaust gas enters the guide cover 8 from the air inlet pipe 9, and then flows to the cooling pipe 7 under the guidance of the guide cover 8.
The side of the tank body 1 is provided with an air inlet pipe 9, the input end of the air inlet pipe 9 is connected with the output end of the single crystal furnace, the output end of the air inlet pipe 9 penetrates through the tank body 1 and extends into the guide cover 8, and waste gas of the single crystal furnace can be introduced into the guide cover 8 through the air inlet pipe 9. The bottom of the tank body 1 is provided with a slag discharging pipe 11, the top end of the slag discharging pipe 11 is communicated with the filter cavity 3, the bottom end of the slag discharging pipe 11 extends to the outside of the tank body 1, and impurities in the filter cavity 3 can be discharged outwards through the slag discharging pipe 11. The bottom of the tank body 1 is also provided with an air outlet pipe 10, the input end of the air outlet pipe 10 is positioned at the upper end of the tank body 1, the output end of the air outlet pipe 10 is positioned outside the tank body 1 and communicated with an external pump (not shown in the figure), and cooled waste gas can be discharged outwards through the air outlet pipe 10.
In this embodiment, a plurality of columns 12 are installed on the outer wall of the bottom of the tank body 1, and lockable universal wheels 13 are arranged at the bottoms of the columns 12, so that a worker can conveniently move the filtering device.
The application process and principle of the utility model are as follows: during the use, get into the filter chamber 3 with the waste gas of single crystal growing furnace through intake pipe 9, after the waste gas got into guide cover 8, by guide cover 8 guide flow direction cooling tube 7, through cooling tube 7 to waste gas cooling, the impurity cooling solidification that contains in the waste gas to realize the separation of waste gas and impurity, the impurity in the filter chamber 3 can outwards be discharged through slag tap pipe 11, then start external pump machine, the waste gas after the processing can be discharged from jar body 1 inside through outlet duct 10.
In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "upper", "lower", "inner", "outer", "left", "right", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in place when the inventive product is used, or are directions or positional relationships conventionally understood by those skilled in the art, are merely for convenience of describing the present utility model and for simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, terms such as "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances. In this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a list of elements is included, and may include other elements not expressly listed.
The above description of the embodiments of the present utility model, which is not related to the present utility model, belongs to the technology known in the art, and may be implemented with reference to the technology known in the art.
The foregoing has shown and described the basic principles, principal features and advantages of the utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (8)
1. A cyclone filter device for a crystal growth furnace, comprising:
the filter comprises a tank body, wherein a filter cavity is formed in the tank body, an opening is formed in the top of the tank body, and the opening is communicated with the filter cavity;
the end cover is positioned at the top end of the tank body and is detachably connected with the tank body, and is used for sealing the opening;
The cooling mechanism is arranged on the tank body, and the cooling end of the cooling mechanism is positioned in the filter cavity and is used for cooling waste gas of the single crystal furnace entering the filter cavity.
2. The cyclone filter device of the crystal growth furnace according to claim 1, wherein a first connecting portion is arranged at the outer end of the end cover, a plurality of first connecting holes are formed in the first connecting portion, the first connecting holes penetrate through the upper end and the lower end of the first connecting portion, a second connecting portion is arranged on the outer wall of the top end of the tank body, a plurality of second connecting holes matched with the first connecting holes are formed in the second connecting portion, and fixing bolts penetrate through the first connecting holes and extend into the second connecting holes to fix the end cover and the tank body.
3. The cyclone filter device of a crystal growth furnace according to claim 1, wherein the cooling mechanism comprises a cooling pipe, two ends of the cooling pipe are arranged on the tank body, and the cooling end of the cooling pipe is spirally arranged in the filter cavity.
4. The cyclone filter device of a crystal growth furnace according to claim 1, wherein a guide cover is arranged in the tank body, a filter screen is arranged at the top end of the guide cover, the outer side of the guide cover is connected with the inner side wall of the tank body, the bottom outlet of the guide cover is arranged towards the cooling pipe mechanism, and the waste gas enters the guide cover from the air inlet pipe and flows to the cooling pipe under the guidance of the guide cover.
5. The cyclone filter device of the crystal growth furnace according to claim 1, wherein an air inlet pipe is arranged on the side face of the tank body, the input end of the air inlet pipe is connected with the output end of the single crystal furnace, the output end of the air inlet pipe penetrates through the tank body to extend into the guide cover, and waste gas can be introduced into the guide cover through the air inlet pipe.
6. The cyclone filter device of the crystal growth furnace according to claim 1, wherein a slag discharging pipe is arranged at the bottom of the tank body, the top end of the slag discharging pipe is communicated with the filter cavity, the bottom end of the slag discharging pipe extends to the outside of the tank body, and impurities in the filter cavity can be discharged outwards through the slag discharging pipe.
7. The cyclone filter device of the crystal growth furnace according to claim 1, wherein an air outlet pipe is further arranged at the bottom of the tank body, the input end of the air outlet pipe is positioned at the upper end of the tank body, the output end of the air outlet pipe is positioned outside the tank body and communicated with an external pump, and the waste gas can be discharged outwards through the air outlet pipe.
8. The cyclone filter device of the crystal growth furnace according to claim 1, wherein a plurality of stand columns are arranged on the outer wall of the bottom of the tank body, and lockable universal wheels are arranged at the bottoms of the stand columns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322893410.0U CN221207215U (en) | 2023-10-27 | 2023-10-27 | Cyclone filter device of crystal growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322893410.0U CN221207215U (en) | 2023-10-27 | 2023-10-27 | Cyclone filter device of crystal growth furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221207215U true CN221207215U (en) | 2024-06-25 |
Family
ID=91579431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322893410.0U Active CN221207215U (en) | 2023-10-27 | 2023-10-27 | Cyclone filter device of crystal growth furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221207215U (en) |
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2023
- 2023-10-27 CN CN202322893410.0U patent/CN221207215U/en active Active
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