CN221063572U - Lamination check out test set - Google Patents

Abstract

The utility model discloses lamination detection equipment, which comprises a material box transfer mechanism, a lamination transfer unit and a lamination detection mechanism, wherein: the material box transferring mechanism is configured to receive a material box with a lamination and move the material box to a preset position, and the lamination is a group of stacked silicon wafers; the lamination transferring unit is configured to pick up the lamination in the material box at the preset position and move the lamination to the detection station; the lamination detection mechanism is located and detects the station, and lamination detection mechanism is including fixing at the peripheral multiunit detection camera of detection station, multiunit detection camera is configured to simultaneously shoot four sides and four chamfers of lamination on the detection station to acquire the image information of four sides and four chamfers of lamination. Above-mentioned lamination check out test set can carry out disposable shooting to four sides and four chamfers of lamination on the detection station and detect, has improved the detection efficiency of lamination, has guaranteed the detection precision of lamination.

Description

Lamination check out test set

Technical Field

The utility model belongs to the technical field of silicon wafer production, and particularly relates to lamination detection equipment.

Background

After the silicon wafers are detected and sorted by a sorting machine, the qualified wafers are collected and stacked in a material box one by one to form a lamination. The stack in the magazine is removed from the magazine by a worker and then packed and placed in a package.

However, after the stack is removed from the cassette, the wafer may have quality flaws that are difficult to identify by the naked eye alone. The laminations in the magazine are typically removed and inspected for appearance by a lamination inspection apparatus to reject failed laminations. The existing lamination detection equipment is used for detecting whether the lamination is qualified or not by shooting the side edges and the chamfer angles of the lamination in sequence and analyzing the acquired image information by rotating the camera around the lamination for one circle.

Obviously, the above detection method can realize appearance detection of the lamination, but has the defect of low lamination detection efficiency.

Disclosure of utility model

The utility model aims to provide lamination detection equipment so as to solve the problem of low detection efficiency in appearance detection of lamination in the prior art.

To achieve the purpose, the utility model adopts the following technical scheme:

Lamination check out test set, it includes magazine transfer mechanism, lamination transfer unit and lamination check out test set, wherein: the material box transferring mechanism is configured to receive a material box with a lamination and move the material box to a preset position, and the lamination is a group of stacked silicon wafers; the lamination transferring unit is configured to pick up the lamination in the material box at the preset position and move the lamination to the detection station; the lamination detection mechanism is located and detects the station, and lamination detection mechanism is including fixing at the peripheral multiunit detection camera of detection station, multiunit detection camera is configured to simultaneously shoot four sides and four chamfers of lamination on the detection station to acquire the image information of four sides and four chamfers of lamination.

Through the cooperation of magazine transfer mechanism and lamination transfer unit, realized transferring the lamination to the detection station automatically, through fixed multiunit detection camera in detection station periphery, multiunit detection camera carries out disposable shooting to four sides and four chamfers of the lamination on the detection station, and then acquires the image information of four sides and four chamfers of lamination to the image information of analysis collection judges whether this lamination is qualified, has improved the detection efficiency of lamination, has guaranteed the detection precision of lamination.

Optionally, the plurality of groups of detection cameras include four groups of first detection cameras and four groups of second detection cameras, each group of first detection cameras corresponds to one side of the lamination to photograph one side of the lamination, and each group of second detection cameras corresponds to one chamfer of the lamination to photograph one chamfer of the lamination; each group of first detection cameras comprises two cameras which are transversely arranged at intervals, and the two cameras of each group are used for shooting one side edge of the lamination.

Through setting up four first detection cameras of group and four second detection cameras of group, every first detection camera of group is photographed one of them side of lamination, and every second detection camera of group is photographed one of them chamfer of lamination, has realized once only photographing four sides and four chamfers of lamination.

Optionally, the lamination transfer unit includes a lamination handling mechanism and a lamination conveying mechanism, wherein: the lamination carrying mechanism is configured to pick up the lamination in the material box at the preset position and transfer the lamination to the lamination conveying mechanism; the lamination conveying mechanism conveys the lamination to the detection station.

Through lamination transport mechanism and lamination conveying mechanism cooperation, realized transferring the lamination to the detection station voluntarily, provided a high lamination transfer unit of work efficiency, can satisfy the production requirement of fast beat.

Optionally, the lamination conveying mechanism is arranged below the detection station, and the lamination conveying mechanism comprises a traversing module and a lamination transferring mechanism; the transverse moving module is configured to drive the lamination transfer mechanism to reciprocate between the material receiving station and the lifting station along a first direction, the lamination transfer mechanism comprises a first lifting driving piece and a bearing table, the driving end of the first lifting driving piece is connected with the bearing table, and the first lifting driving piece is configured to drive the bearing table to lift; when the lamination transfer mechanism is at the material receiving station, the bearing table is configured to receive and bear the lamination placed by the lamination carrying mechanism; when the lamination transfer mechanism is at the lifting station, the first lifting driving piece drives the bearing table to rise to a preset height, so that the lamination on the bearing table is lifted to the detection station.

The lamination transfer mechanism is alternately operated between the material receiving station and the lifting station through the transverse moving module, and the lamination is lifted to the detection station for photographing detection through the cooperation of the first lifting driving piece and the bearing table, so that the lamination after photographing detection is lowered to the initial height, and the lamination is conveniently detected. The lamination conveying mechanism is reasonable in layout, small in occupied space and high in working efficiency.

Optionally, the lamination transfer mechanism further includes a conveying component, a cavity through which the bearing table vertically passes is formed in the middle of the conveying component, and the conveying component is configured to convey the detected lamination to the next procedure along a second direction at the lifting station, wherein the second direction is perpendicular to the first direction.

Through the conveying component, the automatic conveying to the next process of the detected lamination is realized, and the lamination transfer mechanism with the automatic conveying of the detected lamination is provided, so that the equipment integration level is high and the occupied space is small.

Optionally, the lamination transfer mechanism further comprises a normalization mechanism configured to normalize the laminations prior to inspection; the normalizing mechanism comprises two sets of first normalizing assemblies and two sets of second normalizing assemblies, the two sets of first normalizing assemblies are correspondingly arranged on the outer side of the conveying assembly along the first direction, the two sets of second normalizing assemblies are correspondingly arranged on two opposite sides of the bearing table along the second direction and are positioned in cavities of the conveying assembly, and at least one set of second normalizing assemblies can be lifted relative to the conveying assembly so as to avoid when the conveying assembly conveys detected laminations along the second direction.

Through the regulation mechanism, the lamination is regulated before detection, so that the position accuracy of the lamination at the detection station is guaranteed, the detection accuracy of equipment is improved, and at least one set of second regulation assembly can be lifted relative to the conveying assembly, and avoidance is realized when the conveying assembly conveys the detected lamination.

Optionally, the lamination handling mechanism includes a handling driving assembly and a clamping jaw assembly, the clamping jaw assembly is mounted at the driving end of the handling driving assembly, and the handling driving assembly is configured to drive the clamping jaw assembly to reciprocate between a preset position and the lamination conveying mechanism; the clamping jaw assembly comprises a connecting plate, a clamping driving piece, a first clamping piece, a second clamping piece and a floating pressing plate, wherein the connecting plate is arranged at the driving end of the carrying driving assembly, the fixed end of the clamping driving piece is arranged on the connecting plate, the driving end of the clamping driving piece is connected with the first clamping piece and the second clamping piece, the clamping driving piece drives the first clamping piece and the second clamping piece to be close to or far away from each other so as to clamp or loosen the lamination, the floating pressing plate is arranged below the connecting plate in a floating mode, and the floating pressing plate is configured to float and press the lamination before clamping the lamination.

Through the cooperation of transport drive assembly and clamping jaw subassembly, realized carrying the lamination of predetermineeing position department to lamination conveying mechanism department, through the cooperation of clamping drive piece, first clamping piece, second clamping piece and floating clamp plate, guaranteed the clamping jaw subassembly and pressed from both sides stability and the reliability of getting the lamination.

Optionally, the lamination transfer mechanism includes a first lamination transfer mechanism and a second lamination transfer mechanism, the first lamination transfer mechanism and the second lamination transfer mechanism share a traversing module, and the traversing module is configured to drive the first lamination transfer mechanism and the second lamination transfer mechanism to move synchronously;

The material receiving station comprises a first material receiving station and a second material receiving station, the first material receiving station and the second material receiving station are respectively positioned at two sides of the lifting station, the traversing module is configured to drive the first lamination transfer mechanism to reciprocate between the first material receiving station and the lifting station along a first direction, and the traversing module is also configured to drive the second lamination transfer mechanism to reciprocate between the second material receiving station and the lifting station along the first direction;

The transverse moving module drives the first lamination transfer mechanism to move from the first material receiving work to the lifting work and simultaneously moves the second lamination transfer mechanism from the lifting work to the second material receiving work;

The transverse moving module drives the second lamination transfer mechanism to move from the second material receiving work to the lifting work and simultaneously moves the first lamination transfer mechanism from the lifting work to the first material receiving work.

Through sideslip module, first lamination transport mechanism and second lamination transport mechanism's cooperation, realized that duplex position is transported the material loading mode of lamination to lifting station in turn, improved the work efficiency of equipment to satisfy the detection requirement of fast beat.

Optionally, the lamination handling mechanism includes a first lamination handling mechanism configured to pick up a lamination at a preset position and to handle the picked up lamination onto a carrier of the first lamination handling mechanism at the first receiving station, and a second lamination handling mechanism configured to pick up a lamination at a preset position and to handle the picked up lamination onto a carrier of the second lamination handling mechanism at the second receiving station.

Through setting up first lamination transport mechanism and second lamination transport mechanism, realized transporting the separate individual feed of mechanism and second lamination transport mechanism respectively to first lamination, further improve the work efficiency of equipment.

Optionally, the magazine transferring mechanism includes a second lifting drive member and a lifting member, the lifting member is mounted at a driving end of the second lifting drive member, the lifting member is configured to carry a magazine with a stack of laminations, and the second lifting drive member is configured to drive the lifting member to lift so as to move the magazine and the stack of laminations to the preset position.

Through the cooperation of second lift driving piece and lifter, realized moving the magazine that is equipped with the lamination to preset the position voluntarily, provided a simple structure, easily realized magazine transfer mechanism.

Drawings

Fig. 1 is a schematic perspective view of a lamination detection apparatus according to an embodiment of the present utility model;

fig. 2 is a schematic perspective view of a lamination detection mechanism of a lamination detection apparatus according to an embodiment of the present utility model;

Fig. 3 is a schematic perspective view of a first lamination transfer mechanism of a lamination detection apparatus according to an embodiment of the present utility model;

fig. 4 is a schematic perspective view of a jaw assembly of a lamination detection apparatus according to an embodiment of the present utility model.

The following reference numerals are included in fig. 1 to 4:

A magazine transfer mechanism 10, a second elevation drive member 100, and an elevation member 101;

A lamination detection mechanism 20, a plurality of groups of detection cameras 21, a first detection camera 210, and a second detection camera 211;

Lamination 30, cartridge 31;

Laminate handling mechanism 40, first laminate handling mechanism 400, second laminate handling mechanism 401, handling drive assembly 402, jaw assembly 403, connecting plate 4030, clamping drive 4031, first clamping 4032, second clamping 4033, floating platen 4034, clamping 4035, laminate transport mechanism 41, traversing module 42, laminate transport mechanism 43, first laminate transport mechanism 43a, second laminate transport mechanism 43b, first lift drive 430, carrier 431, transport assembly 432, normalization mechanism 433, first normalization assembly 4330, second normalization assembly 4331;

the device comprises a detection station A, a lifting station B, a first receiving station C1 and a second receiving station C2.

Detailed Description

In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to the appended drawings and appended detailed description.

After the silicon wafers are detected and sorted by a sorting machine, the qualified wafers are collected and stacked in a material box one by one to form a lamination. The stack in the magazine is removed from the magazine by a worker and then packed and placed in a package. However, after the stack is removed from the cassette, the wafer may have quality flaws that are difficult to identify by the naked eye alone. The laminations in the magazine are typically removed and inspected for appearance by a lamination inspection apparatus to reject failed laminations. The existing lamination detection equipment is used for detecting whether the lamination is qualified or not by shooting the side edges and the chamfer angles of the lamination in sequence and analyzing the acquired image information by rotating the camera around the lamination for one circle. Obviously, the existing detection mode can realize appearance detection of the lamination, but has the defect of low lamination detection efficiency.

Accordingly, the present utility model provides a lamination detection apparatus for detecting appearance of a lamination before packaging, as shown in fig. 1 and 2, the lamination detection apparatus provided in the embodiment of the present utility model includes a magazine transfer mechanism 10, a lamination transfer unit, and a lamination detection mechanism 20, wherein: the cassette transfer mechanism 10 is configured to receive cassettes 31 loaded with stacks 30 and move the cassettes 31 to a preset position, the stacks 30 being a stack of silicon wafers; the lamination transfer unit is configured to pick up the lamination 30 in the magazine 31 at a preset position and move the lamination 30 to the inspection station a; lamination inspection mechanism 20 is located at inspection station a. Lamination inspection mechanism 20 includes a plurality of sets of inspection cameras 21 fixed at the periphery of inspection station a. Plurality of sets of inspection cameras 21 are configured to take pictures of four sides and four chamfers of lamination 30 at inspection station a simultaneously to obtain image information of four sides and four chamfers of lamination 30.

It can be seen that, through the cooperation of magazine transfer mechanism 10 and lamination transfer unit, realized automatic transfer to detection station A with lamination 30, through fixed multiunit detection camera 21 in detection station A periphery, multiunit detection camera 21 once only shoots four sides and four chamfers of lamination 30 on detection station A, and then acquire the image information of four sides and four chamfers of lamination 30, and the image information of analysis collection judges whether this lamination 30 is qualified, has improved the detection efficiency of lamination 30, has guaranteed the detection precision of lamination 30.

As an embodiment, the plurality of sets of inspection cameras 21 includes four sets of first inspection cameras 210 and four sets of second inspection cameras 211, each set of first inspection cameras 210 corresponding to one side of the lamination 30 to photograph one of the sides of the lamination 30, and each set of second inspection cameras 211 corresponding to one of the chamfers of the lamination 30 to photograph one of the chamfers of the lamination 30.

Specifically, each set of first inspection cameras 210 includes two cameras disposed at a lateral interval, and each set of two cameras together completes photographing one side of the lamination 30, and each set of second inspection cameras 211 includes one camera, and each set of one camera photographs one chamfer of the lamination 30.

It can be seen that, by setting four groups of first detection cameras 210 and four groups of second detection cameras 211, each group of first detection cameras 210 photographs one side edge of the lamination 30, each group of second detection cameras 211 photographs one of the chamfer angles of the lamination 30, so that the four side edges and four chamfer angles of the lamination 30 are photographed at the same time at one time, and simultaneously, each group of first detection cameras 210 is provided with two cameras, and the two cameras photograph one side edge of the lamination 30 together, so as to ensure that all image information of the corresponding side edge is acquired.

As an embodiment, the lamination transfer unit includes a lamination handling mechanism 40 and a lamination conveying mechanism 41, wherein: the stack handling mechanism 40 is configured to pick up the stack 30 in the magazine 31 at a preset position, and transfer the stack 30 to the stack conveying mechanism 41; lamination transport mechanism 41 transports lamination 30 to inspection station a.

Therefore, by matching the lamination carrying mechanism 40 and the lamination conveying mechanism 41, the lamination 30 is automatically transferred to the detection station A, a lamination transfer unit with high working efficiency is provided, and the production requirement of fast beat can be met.

Referring to fig. 2 and 3, as an embodiment, a lamination conveying mechanism 41 is disposed below the detection station a, and the lamination conveying mechanism 41 includes a traversing module 42 and a lamination transferring mechanism 43; the traversing module 42 is configured to drive the lamination transferring mechanism 43 to reciprocate between the receiving station or the lifting station B along the first direction, the lamination transferring mechanism 43 includes a first lifting driving member 430 and a bearing table 431, a driving end of the first lifting driving member 430 is connected to the bearing table 431, and the first lifting driving member 430 is configured to drive the bearing table 431 to lift;

the lamination transfer mechanism 43 is configured to receive and carry the laminations 30 placed by the lamination handling mechanism 40 at the receiving station; when the lamination transfer mechanism 43 lifts the station B, the first lifting driving member 430 drives the carrying platform 431 to rise to a preset height, so that the lamination 30 on the carrying platform 431 is lifted to the detection station a.

It can be seen that the lamination transfer mechanism 43 is realized through the traversing module 42 to work alternately between the material receiving station and the lifting station B, and through the cooperation of the first lifting driving member 430 and the bearing table 431, the lamination 30 is lifted to the detection station for photographing and detecting, and the lamination 30 after photographing and detecting is lowered to the initial height, so that the lamination detection is facilitated. A lamination conveying mechanism 41 with reasonable layout, small occupied space and high working efficiency is provided.

As one embodiment, the lamination transfer mechanism 43 includes a first lamination transfer mechanism 43a and a second lamination transfer mechanism 43b, the first lamination transfer mechanism 43a and the second lamination transfer mechanism 43b share a traversing module 42, and the traversing module 42 is configured to drive the first lamination transfer mechanism 43a and the second lamination transfer mechanism 43b to move synchronously;

The material receiving station comprises a first material receiving station C1 and a second material receiving station C2, the first material receiving station C1 and the second material receiving station C2 are respectively positioned at two sides of the lifting station B, the traversing module 42 is configured to drive the first lamination transfer mechanism 43a to reciprocate between the first material receiving station C1 or the lifting station B along a first direction, and the traversing module 42 is further configured to drive the second lamination transfer mechanism 43B to reciprocate between the second material receiving station C2 or the lifting station B along the first direction;

The traversing module 42 drives the first lamination transfer mechanism 43a to move from the first receiving station C1 to the lifting station B and simultaneously moves the second lamination transfer mechanism 43B from the lifting station B to the second receiving station C2;

the traversing module 42 drives the second lamination transfer mechanism 43B to move from the second receiving station C2 to the lifting station B while simultaneously moving the first lamination transfer mechanism 43a from the lifting station B to the first receiving station C1.

Therefore, through the cooperation of the transverse moving module 42, the first lamination transfer mechanism 43a and the second lamination transfer mechanism 43B, a feeding mode of alternately transferring the lamination to the lifting station B in double-station mode is realized, and the working efficiency of the equipment is improved so as to meet the detection requirement of fast beats.

As an embodiment, the first lamination transfer mechanism 43a and the second lamination transfer mechanism 43b have the same structure, and only the structure of the first lamination transfer mechanism 43a will be described in detail in this example. The first lamination transfer mechanism 43a includes a first lifting driving member 430, a bearing table 431 and a conveying assembly 432, wherein a driving end of the first lifting driving member 430 is connected with the bearing table 431, the first lifting driving member 430 is configured to drive the bearing table 431 to lift, a cavity for the bearing table 431 to vertically pass through is formed in the middle of the conveying assembly 432, the conveying assembly 432 is configured to convey the detected lamination 30 to the next process along a second direction at the lifting station B, and the second direction is perpendicular to the first direction.

Specifically, the conveying assembly 432 includes two narrow strips disposed in parallel and spaced apart, and a cavity is formed between the two narrow strips for the carrier 431 to vertically pass through, and the two narrow strips extend along the second direction.

It can be seen that, through conveying assembly 432, realized carrying to the next process to the automation of lamination after detecting 30, provided a lamination transport mechanism 43 that has the lamination after automatic conveying detection concurrently, equipment integrated level is high, and occupation space is little.

As one embodiment, the first lamination transfer mechanism 43a further includes a normalization mechanism 433, the normalization mechanism 433 configured to normalize the laminations 30 prior to inspection; the straightening mechanism 433 includes two sets of first straightening assemblies 4330 and two sets of second straightening assemblies 4331, the two sets of first straightening assemblies 4330 are correspondingly arranged on the outer side of the conveying assembly 432 along the first direction, the two sets of second straightening assemblies 4331 are correspondingly arranged on two opposite sides of the bearing table 431 along the second direction and are positioned in the cavity of the conveying assembly 432, and at least one set of second straightening assemblies 4331 can be lifted relative to the conveying assembly 432 so as to avoid when the conveying assembly 432 conveys the detected lamination along the second direction.

Specifically, the two first regular assemblies 4330 and one second regular assembly 4331 have the same structure, each of the two first regular assemblies includes a regular cylinder and a regular piece, the driving end of the regular cylinder is connected with the regular piece, the regular piece is driven by the regular cylinder to approach or separate from the lamination 30 on the bearing table 431, the remaining second regular assemblies 4331 include a regular cylinder, a regular piece and a jacking cylinder, and the driving end of the jacking cylinder is connected with the fixed end of the regular cylinder. When the leveling device is in leveling, the jacking cylinder drives the leveling cylinder to rise to a high-position state, and the leveling cylinder of each leveling component drives corresponding leveling pieces to be close to four sides of the lamination 30 on the bearing table 431 in four directions so as to level the lamination 30. After the lamination 30 is inspected, the first lift driving member 430 drives the stage 431 to descend to an initial state, and the lift cylinder drives the regulating cylinder to descend to a lowered state, so as to avoid when the conveying assembly 432 conveys the inspected lamination in the second direction.

It can be seen that, through the regulation mechanism 433, the lamination is regulated before the detection is realized to guarantee the position accuracy of lamination at detection station A, be favorable to improving the detection accuracy of equipment, set up at least one set of second regulation subassembly 4331 into can be for carrying subassembly 432 lift simultaneously, realize dodging when carrying the lamination after the subassembly 432 carries the detection.

Referring to fig. 1 and 4, as an embodiment, the lamination handling mechanism 40 includes a first lamination handling mechanism 400 and a second lamination handling mechanism 401, the first lamination handling mechanism 400 being configured to pick up the lamination 30 at a preset position and to handle the picked up lamination 30 onto the carrying table 431 of the first lamination transfer mechanism 43a at the first receiving station C1, and the second lamination handling mechanism 401 being configured to pick up the lamination 30 at a preset position and to handle the picked up lamination 30 onto the carrying table 431 of the second lamination transfer mechanism 43b at the second receiving station C2.

It can be seen that by providing the first lamination handling mechanism 400 and the second lamination handling mechanism 401, separate feeding of the first lamination transfer mechanism 43a and the second lamination transfer mechanism 43b is achieved, and the working efficiency of the apparatus is further improved.

As an embodiment, the first lamination conveying mechanism 400 and the second lamination conveying mechanism 401 have the same structure, and only the structure of the first lamination conveying mechanism 400 will be described in detail in this example. The first lamination handling mechanism 400 includes a handling drive assembly 402 and a jaw assembly 403, the jaw assembly 403 being mounted at a drive end of the handling drive assembly 402, the handling drive assembly 402 being configured to drive the jaw assembly 403 to reciprocate between a preset position and the first lamination transfer mechanism 43 a; the clamping jaw assembly 403 includes a connecting plate 4030, a clamping driving member 4031, a first clamping member 4032, a second clamping member 4033 and a floating pressure plate 4034, the connecting plate 4030 is mounted at the driving end of the carrying driving assembly 402, the fixed end of the clamping driving member 4031 is mounted on the connecting plate 4030, the driving end of the clamping driving member 4031 connects the first clamping member 4032 and the second clamping member 4033, the clamping driving member 4031 drives the first clamping member 4032 and the second clamping member 4033 to approach or separate from each other so as to clamp or unclamp the lamination 30, the floating pressure plate 4034 is mounted under the connecting plate 4030 in a floating manner, and the floating pressure plate 4034 is configured to float and compress the lamination 30 before clamping the lamination 30.

Specifically, the conveyance driving unit 402 employs a three-axis transfer module formed by mounting an X-direction module, a Y-direction module, and a Z-direction module.

Specifically, the first clamping member 4032 and the second clamping member 4033 have the same structure, the two ends of the first clamping member 4032 along the length direction are both provided with clamping portions 4035, the inner side of the clamping portion 4035 is provided with a clamping surface matched with the chamfer setting of the lamination 30, and the clamping driving member 4031 drives the first clamping member 4032 and the second clamping member 4033 to be close to each other, so that the four chamfers of the lamination 30 are clamped through the four clamping portions 4035.

It can be seen that, through the cooperation of carrying the driving component 402 and the clamping jaw component 403, the lamination 30 at the preset position is carried to the first lamination transfer mechanism 43a, and through the cooperation of the clamping driving component 4031, the first clamping component 4032, the second clamping component 4033 and the floating pressing plate 4034, the stability and reliability of the clamping jaw component 403 for clamping the lamination 30 are ensured, and meanwhile, the clamping jaw component 403 can perform the function of pre-positioning the lamination 30 when clamping the lamination 30.

Referring again to fig. 1, as an embodiment, the magazine transfer mechanism 10 includes a second lift driving member 100 and a lift member 101, the lift member 101 is mounted at a driving end of the second lift driving member 100, the lift member 101 is configured to carry the magazine 31 with the lamination stack 30, and the second lift driving member 100 is configured to drive the lift member 101 to lift to move the magazine 31 and the lamination stack 30 to a preset position.

It can be seen that by the cooperation of the second lift driving member 100 and the lift member 101, automatic movement of the magazine 31 with the stack 30 to a preset position is achieved, providing a magazine transfer mechanism 10 that is simple in structure and easy to implement.

The lamination check out test set who provides in this embodiment theory of operation does:

In the initial state, the traversing module 42 drives the first lamination transfer mechanism 43a to move to the first receiving station C1, the second lamination transfer mechanism 43B to move to the lifting station B,

Step two, the first lamination handling mechanism 400 clips the lamination 30 in the material taking box 31 at a preset position, and handles the clipped lamination 30 onto the carrying table 431 of the first lamination transfer mechanism 43a,

Step three, the traversing module 42 drives the first lamination transfer mechanism 43a to move from the first receiving station C1 to the lifting station B, and simultaneously, the second lamination transfer mechanism 43B moves from the lifting station B to the second receiving station C2;

fourth, after the alignment mechanism 433 of the first lamination transfer mechanism 43a aligns the lamination 30 on the carrying table 431, the first lifting driving member 430 of the first lamination transfer mechanism 43a drives the carrying table 431 to lift from the lifting station B to the detecting station a, and the plurality of groups of detecting cameras 21 take photos of four sides and four chamfers of the lamination 30 on the detecting station a, so as to obtain image information of the four sides and four chamfers of the lamination 30, so as to detect the appearance of the lamination 30; meanwhile, in the fourth step, the second lamination handling mechanism 401 clamps the lamination 30 in the material taking box 31 at a preset position and transfers the clamped lamination 30 to the bearing table 431 of the second lamination transferring mechanism 43 b;

Step five, after the detection is completed, the first lifting driving member 430 of the first lamination transfer mechanism 43a drives the bearing table 431 and the detected lamination 30 to descend from the detection station a to the lifting station B;

Step six, the conveying assembly 432 of the first lamination transfer mechanism 43a works to automatically convey the detected lamination 30 to the next process, and when the conveying assembly 432 works, one set of the second regulating assemblies 4331 of the first lamination transfer mechanism 43a descends to a low-level state so as to avoid conveying the lamination 30;

Step seven, the traversing module 42 drives the first lamination transfer mechanism 43a to move from the lifting station B to the first receiving station C1 for receiving, meanwhile, the second lamination transfer mechanism 43B moves from the second receiving station C2 to the lifting station B, the second lamination transfer mechanism 43B works to detect the lamination 30 on the bearing table 431 of the second lamination transfer mechanism 43B, the detection action process of the second lamination transfer mechanism 43B and the first lamination transfer mechanism 43a at the lifting station B is the same, and no more description is made here, after the lamination on the second lamination transfer mechanism 43B completes detection and the detected lamination is automatically conveyed to the next procedure, the steps one to six are repeated.

It should be noted that, in the initial state, the traverse module 42 may drive the second lamination transfer mechanism 43B to move to the second receiving station C2 for receiving, and the first lamination transfer mechanism 43a may move to the lifting station B. The difference is that in the initial state, the first lamination transfer mechanism 43a is in an idle state, the second lamination handling mechanism 401 clips the lamination 30 in the material taking box 31 at a preset position, and handles the clipped lamination 30 onto the bearing table 431 of the second lamination transfer mechanism 43 b.

The lamination detection equipment provided by the utility model has the following advantages:

1) The plurality of groups of detection cameras can take photos of four sides and four chamfers of the lamination on the detection station at one time, so that image information of the four sides and the four chamfers of the lamination is obtained, the detection efficiency of the lamination is improved, and the detection precision of the lamination is ensured;

2) The working efficiency is high, and the production requirement of fast beats can be met;

3) Reasonable layout, compact structure and small occupied space;

4) Lamination transfer mechanism has the function of transferring, regularly and carrying the back lamination of detecting concurrently, and equipment integration is high.

The above embodiments merely illustrate the basic principles and features of the present utility model, and the present utility model is not limited to the above examples, but can be variously changed and modified without departing from the spirit and scope of the present utility model, which is within the scope of the present utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims (10)

1. Lamination check out test set, its characterized in that, lamination check out test set includes magazine transfer mechanism, lamination transfer unit and lamination check out test set, wherein:

The magazine transfer mechanism is configured to receive a magazine loaded with a stack of silicon wafers and move the magazine to a preset position, the stack being a stack of silicon wafers;

The lamination transferring unit is configured to pick up laminations in the material box at a preset position and move the laminations to a detection station;

The lamination detection mechanism is located the detection station, the lamination detection mechanism is including fixing the peripheral multiunit detection camera of detection station, multiunit detection camera is configured to simultaneously to four sides and four chamfers of lamination on the detection station are photographed, in order to acquire the image information of four sides and four chamfers of lamination.

2. The laminate inspection apparatus of claim 1, wherein the plurality of sets of inspection cameras includes four sets of first inspection cameras and four sets of second inspection cameras, each set of first inspection cameras corresponding to one side of the laminate to photograph one of the sides of the laminate, each set of second inspection cameras corresponding to one of the chamfers of the laminate to photograph one of the chamfers of the laminate;

Each group of the first detection cameras comprises two cameras which are arranged at intervals transversely, and the two cameras of each group are used for shooting one side edge of the lamination.

3. The lamination inspection apparatus of claim 1, wherein the lamination transfer unit comprises a lamination handling mechanism and a lamination transport mechanism, wherein:

The lamination carrying mechanism is configured to pick up laminations in a magazine at a preset position and transfer the laminations to the lamination conveying mechanism;

the lamination conveying mechanism conveys the lamination to the detection station.

4. A lamination inspection apparatus according to claim 3, wherein the lamination transport mechanism is disposed below the inspection station, the lamination transport mechanism comprising a traversing module and a lamination transfer mechanism;

The transverse moving module is configured to drive the lamination transfer mechanism to reciprocate between a material receiving station and a lifting station along a first direction, the lamination transfer mechanism comprises a first lifting driving piece and a bearing table, the driving end of the first lifting driving piece is connected with the bearing table, and the first lifting driving piece is configured to drive the bearing table to lift;

The bearing table is configured to receive and bear the lamination placed by the lamination conveying mechanism when the lamination transferring mechanism is at the material receiving station;

and when the lamination transfer mechanism is at the lifting station, the first lifting driving piece drives the bearing table to rise to a preset height, so that the lamination on the bearing table is lifted to the detection station.

5. The lamination inspection apparatus of claim 4, wherein the lamination transfer mechanism further comprises a transport assembly having a cavity therebetween for the vertical passage of the carrier, the transport assembly configured to transport the inspected laminations in a second direction perpendicular to the first direction at the lifting station to a next process.

6. The lamination inspection apparatus of claim 5, wherein the lamination transfer mechanism further comprises a normalization mechanism configured to normalize the laminations prior to inspection;

The alignment mechanism comprises two sets of first alignment assemblies and two sets of second alignment assemblies, the two sets of first alignment assemblies are correspondingly arranged on the outer sides of the conveying assemblies along the first direction, the two sets of second alignment assemblies are correspondingly arranged on the opposite sides of the bearing table along the second direction and are positioned in the cavity of the conveying assemblies, and at least one set of second alignment assemblies can be lifted relative to the conveying assemblies so as to avoid the detected lamination sheets when the conveying assemblies convey the lamination sheets along the second direction.

7. The lamination inspection apparatus of claim 4, wherein the lamination handling mechanism comprises a handling drive assembly and a jaw assembly, the jaw assembly mounted at a drive end of the handling drive assembly, the handling drive assembly configured to drive the jaw assembly to reciprocate between the preset position and the lamination transport mechanism;

The clamping jaw assembly comprises a connecting plate, a clamping driving piece, a first clamping piece, a second clamping piece and a floating pressing plate, wherein the connecting plate is arranged at the driving end of the carrying driving assembly, the fixed end of the clamping driving piece is arranged on the connecting plate, the driving end of the clamping driving piece is connected with the first clamping piece and the second clamping piece, the clamping driving piece drives the first clamping piece and the second clamping piece to be close to or far away from each other so as to clamp or loosen the lamination, the floating pressing plate is arranged below the connecting plate in a floating mode, and the floating pressing plate is configured to clamp the lamination in a floating mode before the lamination is clamped.

8. The lamination inspection apparatus of any one of claims 4-7, wherein the lamination transport mechanism comprises a first lamination transport mechanism and a second lamination transport mechanism, the first lamination transport mechanism and the second lamination transport mechanism sharing a traversing module configured to drive the first lamination transport mechanism and the second lamination transport mechanism to move synchronously;

The material receiving station comprises a first material receiving station and a second material receiving station, the first material receiving station and the second material receiving station are respectively positioned at two sides of the lifting station, the traversing module is configured to drive the first lamination transfer mechanism to reciprocate between the first material receiving station and the lifting station along a first direction, and the traversing module is further configured to drive the second lamination transfer mechanism to reciprocate between the second material receiving station and the lifting station along the first direction;

The transverse moving module drives the first lamination transfer mechanism to move from the first material receiving station to the lifting station and simultaneously moves the second lamination transfer mechanism from the lifting station to the second material receiving station;

The transverse moving module drives the second lamination transfer mechanism to move from the second receiving station to the lifting station and simultaneously moves the first lamination transfer mechanism from the lifting station to the first receiving station.

9. The lamination inspection apparatus of claim 8, wherein the lamination handling mechanism comprises a first lamination handling mechanism configured to pick up a lamination at the preset location and to handle the picked up lamination onto a carrier of the first lamination handling mechanism at the first receiving station and a second lamination handling mechanism configured to pick up a lamination at the preset location and to handle the picked up lamination onto a carrier of the second lamination handling mechanism at the second receiving station.

10. The lamination detection apparatus according to claim 1, wherein the magazine transfer mechanism comprises a second elevation drive member and an elevation member, the elevation member being mounted at a drive end of the second elevation drive member, the elevation member being configured to carry a magazine with laminations, the second elevation drive member being configured to drive the elevation member to elevate to move the magazine and laminations to the preset position.