CN220761560U - Diaphragm valve jump ring installation frock - Google Patents

Abstract

The utility model provides a diaphragm valve clamp spring mounting tool, and belongs to the technical field of diaphragm valve assembly; comprising the following steps: a frame, a drive assembly, and a guide; the driving assembly is arranged on the frame, the output end of the driving assembly can move along the expansion and contraction direction of the spring assembly, the guide piece is sleeved on the top end of the valve body, and the guide piece comprises a guide hole through which the clamp spring can pass; the inner wall of the guide hole is provided with at least one inclined plane, and the inclined plane is inclined from one end far away from the valve body to one end close to the valve body. The technical problem that in the prior art, the torque of the diaphragm valve and the pneumatic execution end cannot be accurately controlled is solved, and the technical effect of accurately controlling the torque of the diaphragm valve during assembly and improving the performance of the diaphragm valve is achieved.

Description

Diaphragm valve jump ring installation frock

Technical Field

The application relates to the technical field of diaphragm valve assembly, in particular to a diaphragm valve clamp spring installation tool.

Background

The modularized gas system (Integrated Gas System, hereinafter referred to as IGS) is equipment for gas control in the semiconductor industry, is specially designed for supplying dangerous special gases such as inflammable, explosive, corrosive, toxic and the like, and is often used for high-purity safe and stable transportation of the special gases, so that the high requirement on the gas transportation capability of a diaphragm valve in the IGS system is required.

The system is often used for a diaphragm valve as shown in fig. 1, and the diaphragm valve commonly used in the IGS system comprises a valve body, a valve cover, a clamp spring and a spring assembly positioned in the valve body; the valve cover is connected with the spring assembly, and the spring assembly is required to be installed against the resistance of the spring assembly during installation; the installation of the clamp spring is particularly important, the clamp spring is directly related to the opening and closing precision of the valve, the existing clamp spring is assembled by means of direct extrusion or conical surface extrusion fit, and the assembly strength and the precision of the clamp spring cannot be controlled.

Therefore, the technical problems of the prior art are: the assembly strength and the precision of the diaphragm valve clamp spring cannot be controlled.

Disclosure of Invention

The application provides a diaphragm valve jump ring installation frock has solved the unable controllable technical problem of equipment intensity and precision of diaphragm valve jump ring among the prior art, reaches equipment intensity and precision size when accurate control jump ring installation, improves the technical effect of diaphragm valve performance.

Diaphragm valve jump ring installation frock includes: a frame, a drive assembly, and a guide; the driving assembly is arranged on the frame, the output end of the driving assembly can move along the expansion and contraction direction of the spring assembly, the guide piece is sleeved on the top end of the valve body, and the guide piece comprises a guide hole through which the clamp spring can pass; the inner wall of the guide hole is provided with at least one inclined plane, and the inclined plane is inclined from one end far away from the valve body to one end close to the valve body.

Preferably, the guide member includes a stepped surface that engages the top of the diaphragm valve.

Preferably, the driving assembly further comprises a protection block, and the protection block is arranged at the output end of the driving assembly.

Preferably, the bottom of the inclined plane is connected with the step surface, and the clamp spring can penetrate through the inclined plane to complete installation under the pushing of the protection block.

Preferably, the contour of the protection block is the same as that of the guide hole, and the protection block can enter the guide hole to be abutted with the clamp spring.

Preferably, the protection block further comprises at least one receiving groove, and the receiving groove can receive part of the diaphragm valve body.

Preferably, the rack further comprises a bottom and a clamp assembly arranged at the bottom, wherein the clamp assembly comprises a fixed clamp and a movable clamp, and the movable clamp can move on the bottom to be close to or far away from the fixed clamp.

Preferably, the clamp assembly further comprises a protection layer, wherein the protection layer is respectively installed on the movable clamp and the fixed clamp, and the protection layer is abutted with the valve body to protect the valve body.

Preferably, the clamp assembly further comprises a transverse moving driving piece, and the output end of the transverse moving driving piece is connected with the movable clamp to drive the movable clamp to move.

Preferably, the frame further comprises a support member and a top plate, wherein the support member is higher than the diaphragm valve, and the top plate is mounted at the top end of the support member and used for supporting the driving member.

In summary, the beneficial technical effects of the application are:

the diaphragm valve clamp spring mounting tool has the advantages that the guide hole with the gradually transitional inclined surface is formed, so that the clamp spring can stably pass through the inclined surface under the driving of the driving piece, the opening shrinkage of the clamp spring is slowly performed at the moment, and the strength of the clamp spring is not influenced; meanwhile, the guide hole can guide the advancing direction of the clamp spring, so that the assembly strength and the precision of the clamp spring can be controlled, the clamp spring can enter the clamp spring mounting part on the valve body along the inclined plane of the mounting hole during mounting by arranging the guide piece with the inclined plane and the guide hole for the clamp spring to pass through, the clamp spring is not required to be extruded, the assembly strength and the precision of the clamp spring during mounting can be accurately controlled, and the performance of the diaphragm valve is improved.

Drawings

FIG. 1 is a schematic structural view of a pneumatic diaphragm valve assembly tooling of the present utility model;

FIG. 2 is a left side view of a pneumatic diaphragm valve assembly tooling of the present utility model;

FIG. 3 is a cross-sectional view taken along the direction A-A in FIG. 2;

FIG. 4 is a schematic view of a part of the structure of an actuating end of a pneumatic valve according to the present utility model;

fig. 5 is a schematic structural view of a guide member in a pneumatic valve according to the present utility model.

Reference numerals illustrate: 100. a diaphragm valve; 110. a valve body; 120. a valve cover; 130. a spring assembly; 140. clamping springs; 200. a frame; 210. a base; 220. a clamp assembly; 221. a fixing clamp; 222. a movable clamp; 223. a protective layer; 224. a traversing driving member; 230. a support; 240. a top plate; 300. a drive assembly; 310. a protection block; 311. a receiving groove; 400. a guide member; 410. a guide hole; 420. an inclined plane; 430. a step surface.

Detailed Description

The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The terms "coupled" and "connected," as used herein, are intended to encompass both direct and indirect coupling (coupling), unless otherwise indicated. In the description of the present application, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," etc. indicate or refer to an orientation or positional relationship based on that shown in the drawings, merely for convenience of description and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present application.

In this application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

The modularized gas system (I ntegrated Gas System, hereinafter abbreviated as ISS) is equipment for gas control in the semiconductor industry, and can be designed by adopting standard valve blocks, valves, flow meters, filters, pressure sensors and other elements on a panel in a building block building manner according to a customer PID diagram. As semiconductor manufacturing processes become more advanced, the requirements for gas control equipment are also becoming more and more stringent, and the system requires simpler installation and maintenance of valves while reducing the equipment volume. The system is often used in a diaphragm valve 100 as shown in fig. 1, wherein the diaphragm valve 100 commonly used in the vigs system comprises a valve body 110, a valve cover 120, a clamp spring 140 and a spring assembly 130 positioned in the valve body 110; wherein, a mounting groove for mounting the jump ring 140 is reserved on the top of the valve body 110, the spring assembly 130 is positioned in the valve body 110, the valve cover 120 is connected with the spring assembly 130, and the jump ring 140 needs to be mounted against the resistance of the spring assembly 130 during mounting; the installation of the clamp spring 140 is particularly important, the installation directly relates to the opening and closing precision of the valve, the existing clamp spring 140 is assembled by direct extrusion or conical surface extrusion fit, and the assembly strength and the precision of the clamp spring 140 cannot be controlled.

In order to solve the above-mentioned problem, the application provides a diaphragm valve jump ring installation frock, has solved the unable controllable technical problem of equipment intensity and precision of jump ring 140 among the prior art, reaches the technical effect of equipment intensity and precision size when accurate control jump ring 140 installs, improves diaphragm valve 100 performance.

The foregoing aspects will be described in detail with reference to the drawings and detailed description. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.

A diaphragm valve jump ring installation frock, as shown in FIG. 1, includes: a housing 200, a drive assembly 300, and a guide 400; the driving assembly 300 is mounted on the frame 200, the output end of the driving assembly 300 can move along the expansion and contraction direction of the spring assembly 130, the guide piece 400 is sleeved on the top end of the valve body 110, and the guide piece 400 comprises a guide hole 410 through which the clamp spring 140 can pass; wherein, the inner wall of the guiding hole 410 has at least one inclined surface 420, and the inclined surface 420 is inclined from one end far away from the valve body 110 to one end close to the valve body 110.

Specifically, referring to fig. 1, the spring assembly 130 is installed in the valve body 110 and can be contracted under the action of an external force, the clamp spring 140 is installed at the top end of the valve body 110, the valve body 110 is provided with a containing groove 311 specially used for containing the clamp spring 140, and when the clamp spring 140 is installed in the containing groove 311 of the diaphragm valve 100, the spring assembly 130 abuts the clamp spring 140 against the valve body 110. Therefore, when the jump ring 140 is installed, the spring assembly 130 needs to be pressed first, in this application, the driving assembly 300 with the movement direction of the output end being the same as the contraction direction of the spring assembly 130 is set, so that the driving assembly 300 can press the spring assembly 130 to contract to complete the installation of the jump ring 140.

The guide member 400 is further provided with a guide member 400 as shown in fig. 5, the guide member 400 is sleeved on the top of the diaphragm valve 100, the guide member 400 comprises a guide hole 410 through which the clamp spring 140 can pass, the guide hole 410 comprises at least one inclined surface 420, the inclined surface 420 is inclined from one end far away from the valve body 110 to one end close to the valve body 110, and the clamp spring 140 can enter the clamp spring 140 installation part on the valve body 110 through the inclined surface 420 on the guide member 400 by arranging the guide member 400; the shape of the clamp spring 140 is shown in fig. 1, which is an arc-shaped metal ring with an opening, and when the clamp spring 140 passes through the inclined surface 420 on the guide hole 410, the opening of the clamp spring 140 gradually decreases with the change of the inclination, until the clamp spring 140 reaches a designated position, and the clamp spring 140 is restored to the original state without the limitation of the guide 400. By arranging the guide hole 410 with the gradually transitional inclined surface 420, the clamp spring 140 can stably pass through the inclined surface 420 under the driving of the driving piece, the opening shrinkage of the clamp spring is slowly performed, and meanwhile, the guide hole 410 can also guide the advancing direction of the clamp spring 140, so that the assembly strength and the assembly precision of the clamp spring 140 can be controlled. In the IGS system, the installation of the clamp spring 140 is particularly important, and directly relates to the opening and closing accuracy of the valve, and by providing the guide member 400 with the inclined surface 420 and the guide hole 410 through which the clamp spring 140 passes, the clamp spring 140 can enter the installation part of the clamp spring 140 on the valve body 110 along the inclined surface 420 of the installation hole during installation, and the clamp spring 140 does not need to be extruded additionally.

Further, the guide 400 includes a stepped surface 430, and the stepped surface 430 is engaged with the top of the diaphragm valve 100. By providing the stepped surface 430 on the guide 400, the guide 400 can be snapped onto the top of the diaphragm valve 100 while the stepped surface 430 can transmit a portion of the pressure to the valve body 110 of the diaphragm valve 100.

Further, the profile of the guide hole 410 is the same as that of the snap spring 140, the bottom of the inclined plane 420 is connected with the step surface 430, and the snap spring 140 can pass through the inclined plane 420 to complete the installation under the pushing of the protection block 310. By arranging the guide hole 410 with the same outline as the clamp spring 140, the clamp spring 140 can be better attached to the inner wall of the guide hole 410, and the clamp spring 140 can be better protected; meanwhile, the inclined surface 420 positioned in the clamp spring 140 is connected with the step surface 430, and the clamp spring 140 can directly enter the accommodating groove 311 through the inclined surface 420, so that the installation accuracy of the clamp spring 140 is improved.

Referring to fig. 3, the driving assembly 300 further includes a protection block 310, and the protection block 310 is disposed at an output end of the driving assembly 300. Referring to fig. 3, the protection block 310 is disposed at an output end of the driving assembly 300, and the protection block 310 is used for driving components abutting against the protection block 310 under the driving of the driving assembly 300, it is conceivable that, in order to protect the components, the protection block 310 is preferably made of a flexible material, so as to avoid damage to other components caused by contact and friction.

Further, the profile of the protection block 310 is the same as that of the guide hole 410, and the protection block 310 can enter the guide hole 410 to abut against the clamp spring 140. The protection block 310 in the present application can enter the guide hole 410 to push the jump ring 140 located in the guide hole 410 to enter the designated position, as the protection block 310 in the previous embodiment has the function of protecting the jump ring 140; meanwhile, in order to better and more uniformly complete the task of pushing the clamp spring 140, the end face, which is contacted with the clamp spring 140, of the protection block 310 is preferably a plane, and can be better abutted with the clamp spring 140.

Preferably, the protection block 310 further includes at least one receiving groove 311, and the receiving groove 311 can receive a portion of the valve cover 120. As before, the spring assembly 130 needs to be extruded in the installation process of the clamp spring 140, at least one accommodating groove 311 is formed in the protecting block 310, and the accommodating groove 311 can accommodate the valve cover 120 of the diaphragm valve 100, so that the protecting block 310 can push the valve cover 120 to press the spring assembly 130 to complete the installation of the clamp spring 140 while completing the pushing of the clamp spring 140.

Referring to fig. 4, the rack 200 further includes a bottom and a fixture assembly 220 disposed at the bottom, the fixture assembly 220 includes a fixed fixture 221 and a movable fixture 222, and the movable fixture 222 is movable on the bottom to be close to or far from the fixed fixture 221. The diaphragm valve 100 is clamped by arranging the clamp assembly 220, so that the influence on the installation precision of the diaphragm valve 100 caused by the movement of the diaphragm valve 100 in the assembly process is avoided, and meanwhile, the diaphragm valves 100 with different types can be suitable by arranging the movable clamp 222 and the fixed clamp 221; it is contemplated that for better gripping of the diaphragm valve 100, the clamp assembly 220 is provided with mounting grooves that are shaped to the contour of the diaphragm valve 100. By providing the fixing jig 221 and the movable jig 222, the fixing jig 221 is mounted to the base 210 for preliminary positioning and mounting of the diaphragm valve 100, and the movable jig 222 can be moved closer to or away from the fixing jig 221 to complete mounting and dismounting of the diaphragm valve 100.

Referring to fig. 2-4, the clamp assembly 220 further includes a protection layer 223, the protection layer 223 is respectively mounted on the movable clamp 222 and the fixed clamp 221, and the protection layer 223 abuts against the valve body 110 to protect the valve body 110. The fixture assembly 220 further comprises a protection layer 223, the protection layer 223 is detachably connected with the fixed fixture 221 and the movable fixture 222 respectively, the protection layer 223 is arranged at a part close to the diaphragm valve 100, the protection layer 223 is made of flexible materials such as rubber, and damage to the surface of the diaphragm valve 100 in the mounting process can be avoided by arranging the protection layer 223 on the valve body 110 of the diaphragm valve 100.

Referring to fig. 2-4, the clamp assembly 220 further includes a traverse driving member 224, wherein an output end of the traverse driving member 224 is connected to the movable clamp 222 to drive the movable clamp 222 to move. By arranging the traversing driving piece 224 on the base 210, the output end of the traversing driving piece 224 is connected with the movable clamp 222, the movable space can be close to or far away from the fixed clamp 221 under the driving of the traversing driving piece 224, and the traversing driving piece 224 can be one of a driving motor, a telescopic rod, an air cylinder, an oil cylinder and the like; preferably, the base 210 is further provided with a moving slot, and the movable clamp 222 can move in the moving slot, so that the moving direction of the movable clamp 222 can be limited by arranging the moving slot, and meanwhile, positioning accuracy can be provided for mounting the movable clamp 222.

Referring to fig. 2 to 4, the frame 200 further includes a supporting member 230 and a top plate 240, wherein the supporting member 230 is higher than the diaphragm valve 100, and the top plate 240 is mounted on the top end of the supporting member 230 for supporting the driving member. By providing the support 230 higher than the diaphragm valve 100 and the top plate 240 at the top end of the support 230, the driving member can be directly mounted on the top plate 240; preferably, the plurality of supporting members 230 are uniformly disposed on the base 210, and the supporting members 230 are detachably connected with the base 210, so that the diaphragm valve 100 can be adapted to a model-impossible diaphragm valve 100 by replacing the supporting members 230 with different heights, thereby improving the versatility of the diaphragm valve 100.

The technical effects are as follows: the diaphragm valve clamp spring installation tool has the advantages that the guide hole 410 with the gradual transition inclined plane 420 is formed, so that the clamp spring 140 can stably pass through the inclined plane 420 under the driving of the driving piece, at the moment, the opening shrinkage of the clamp spring 140 is slowly performed, and the strength of the clamp spring 140 is not influenced; meanwhile, the guide hole 410 can guide the advancing direction of the clamp spring 140, so that the assembly strength and precision of the clamp spring 140 can be controlled, and the clamp spring 140 can enter the clamp spring 140 mounting part on the valve body 110 along the inclined plane 420 of the mounting hole during mounting by arranging the guide piece 400 with the inclined plane 420 and the guide hole 410 for the clamp spring 140 to pass through, so that the clamp spring 140 does not need to be extruded additionally, the assembly strength and precision of the clamp spring 140 during mounting can be controlled accurately, and the performance of the diaphragm valve 100 is improved.

While preferred embodiments of the present application have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the application. It will be apparent to those skilled in the art that various modifications and variations can be made in the present application without departing from the spirit or scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims and the equivalents thereof, the present application is intended to cover such modifications and variations.

Claims (10)

1. Diaphragm valve jump ring installation frock, diaphragm valve (100) include valve body (110), valve gap (120), spring assembly (130) and jump ring (140), its characterized in that, installation frock includes:

a frame (200);

the driving assembly (300) is arranged on the rack (200), and the output end of the driving assembly (300) can move along the telescopic direction of the spring assembly (130); and

the guide piece (400) is sleeved at the top end of the valve body (110), and the guide piece (400) comprises a guide hole (410) through which the clamp spring (140) can pass;

the inner wall of the guide hole (410) is provided with at least one inclined surface (420), and the inclined surface (420) is inclined from one end far away from the valve body (110) to one end close to the valve body (110).

2. The diaphragm valve clamp spring installation tool according to claim 1, wherein the guide member (400) comprises a step surface (430), and the step surface (430) is clamped with the top of the diaphragm valve (100).

3. The diaphragm valve clamp spring installation tool according to claim 2, wherein the driving assembly (300) further comprises a protection block (310), and the protection block (310) is disposed at an output end of the driving assembly (300).

4. A diaphragm valve clamp spring installation tool according to claim 3, wherein the bottom of the inclined surface (420) is connected with the step surface (430), and the clamp spring (140) can pass through the inclined surface (420) to complete the installation under the pushing of the protection block (310).

5. The diaphragm valve clamp spring installation tool according to claim 4, wherein the contour of the protection block (310) is the same as the contour of the guide hole (410), and the protection block (310) can enter the guide hole (410) to be abutted with the clamp spring (140).

6. The diaphragm valve clamp spring installation tool according to claim 5, wherein the protection block (310) further comprises at least one accommodating groove (311), and the accommodating groove (311) can accommodate a part of the valve body (110) of the diaphragm valve (100).

7. The diaphragm valve clamp spring mounting fixture of any of claims 1-5, wherein said frame (200) further comprises a bottom and a clamp assembly (220) disposed at the bottom, said clamp assembly (220) comprising a stationary clamp (221) and a movable clamp (222), said movable clamp (222) being movable on said bottom to be closer to or farther from said stationary clamp (221).

8. The diaphragm valve clamp spring installation tool according to claim 7, wherein the clamp assembly (220) further comprises a protection layer (223), the protection layer (223) is respectively installed on the movable clamp (222) and the fixed clamp (221), and the protection layer (223) is abutted with the valve body (110) to protect the valve body (110).

9. The diaphragm valve clamp spring installation tool of claim 8, wherein the clamp assembly (220) further comprises a traverse actuator (224), and wherein an output end of the traverse actuator (224) is coupled to the movable clamp (222).

10. The diaphragm valve clamp spring installation tool according to claim 7, wherein the frame (200) further comprises a supporting member (230) and a top plate, the supporting member (230) is higher than the diaphragm valve (100), and the top plate is installed at the top end of the supporting member (230) for supporting the driving member.