CN220717132U - Photoresist production container cleaning device - Google Patents
Photoresist production container cleaning device Download PDFInfo
- Publication number
- CN220717132U CN220717132U CN202322382584.0U CN202322382584U CN220717132U CN 220717132 U CN220717132 U CN 220717132U CN 202322382584 U CN202322382584 U CN 202322382584U CN 220717132 U CN220717132 U CN 220717132U
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- China
- Prior art keywords
- cleaning
- shaft
- driving device
- photoresist production
- photoresist
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- 238000004140 cleaning Methods 0.000 title claims abstract description 175
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 68
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 60
- 230000005540 biological transmission Effects 0.000 claims description 12
- 238000005406 washing Methods 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 5
- 239000002994 raw material Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- -1 sensitizer Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Abstract
The cleaning device for the photoresist production container comprises a cleaning support, wherein a cleaning groove is arranged on the cleaning support, a cleaning shaft is arranged in the cleaning groove, the bottom of the cleaning shaft penetrates through the bottom of the cleaning groove and extends to the outer side of the cleaning groove, a cleaning driving device for driving the cleaning shaft to rotate is arranged on the cleaning support, and a plurality of cleaning brushes are arranged on the cleaning shaft in the cleaning groove through elastic elements; the cleaning device comprises a cleaning tank, a cleaning support, a supporting shaft, a fixing plate, a supporting plate, a transverse driving device, a clamping plate and a photoresist production container, wherein the cleaning support above the cleaning tank is provided with the supporting shaft and the rotary driving device for driving the supporting shaft to rotate, the fixing plate is arranged on the supporting shaft, the supporting plate is arranged on the fixing plate through the vertical driving device, the clamping plates are arranged on two sides of the supporting plate through the transverse driving device, and a clamping gap matched with the photoresist production container is reserved between the clamping plates. The photoresist production container can be quickly cleaned, time and labor are saved, efficiency is high, and meanwhile workload of workers is greatly reduced.
Description
Technical Field
The utility model relates to the technical field of photoresist production, in particular to a cleaning device for a photoresist production container.
Background
The photoresist is a material used as an anti-corrosion coating in the photoetching process, and is mainly prepared from raw materials such as photosensitive resin, sensitizer, solvent and the like; at present, in the production process of photoresist, a plurality of containers are used for containing the photoresist or raw materials thereof so as to facilitate the operations of blending, mixing and the like, however, as the photoresist and the raw materials of the photoresist have certain viscosity and are easily adhered to the inner wall of the container, the photoresist is not easy to clean, and the photoresist is manually cleaned or cleaned by adopting the existing cleaning equipment, the photoresist cleaning device is time-consuming and labor-consuming, has low cleaning efficiency and has large workload of workers, so that the photoresist cleaning device capable of solving the technical problem is lacking.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model provides the photoresist production container cleaning device which can rapidly clean the photoresist production container, saves time and labor and has high efficiency.
The technical problem to be solved by the utility model is realized by the following technical scheme that the cleaning device for the photoresist production container comprises a cleaning support, wherein a cleaning tank for cleaning the photoresist production container is arranged on the cleaning support, a cleaning shaft is arranged in the cleaning tank, the bottom of the cleaning shaft penetrates through the bottom of the cleaning tank and extends to the outer side of the cleaning tank, a rotary seal is arranged at the joint of the cleaning shaft and the cleaning tank, a cleaning driving device for driving the cleaning shaft to rotate is arranged on the cleaning support, and a plurality of cleaning brushes are arranged on the cleaning shaft in the cleaning tank through elastic elements;
the cleaning device comprises a cleaning tank, a cleaning support, a supporting shaft, a fixing plate, a supporting plate, a transverse driving device, a clamping plate and a photoresist production container, wherein the cleaning support above the cleaning tank is provided with the supporting shaft and the rotary driving device for driving the supporting shaft to rotate, the fixing plate is arranged on the supporting shaft, the supporting plate is arranged on the fixing plate through the vertical driving device, the clamping plates are arranged on two sides of the supporting plate through the transverse driving device, and a clamping gap matched with the photoresist production container is reserved between the clamping plates.
Further, the cleaning driving device is a cleaning driving motor, and a motor shaft of the cleaning driving motor is in transmission connection with the cleaning shaft through a transmission gear.
Further, the elastic element is a compression spring.
Further, the inside of wasing the axle is provided with the washing chamber, and the top of wasing the axle sets up to the blind end, and the rotary joint of the external washing water or the washing liquid of being convenient for is installed to the bottom of wasing the axle, installs a plurality of washing nozzles with wasing the chamber intercommunication on wasing the epaxial washing in the washing tank.
Further, the rotary driving device is a rotary driving motor, two ends of the supporting shaft are arranged on the cleaning support through bearings and bearing seats, and a motor shaft of the rotary driving motor is in transmission connection with the supporting shaft through a transmission gear.
Further, the vertical driving device is a vertical driving cylinder, the vertical driving cylinder is arranged on the fixed plate, and the supporting plate is arranged on the piston rod end of the vertical driving cylinder.
Further, the transverse driving device is a transverse driving cylinder, the transverse driving cylinder is arranged on the supporting plate, and the clamping plate is arranged on the piston rod end of the transverse driving cylinder.
Further, the clamping plate is an arc clamping plate, and a rubber anti-slip pad is further arranged on the arc clamping plate.
Compared with the prior art, the utility model has the beneficial effects that:
1. the cleaning tank is provided with the cleaning shaft and the cleaning brush, and the cleaning shaft and the cleaning brush are arranged in the cleaning tank, so that the photoresist production container can be cleaned conveniently and rapidly, time and labor are saved, and the efficiency is high;
2. the clamping plate is further arranged above the cleaning tank, so that the photoresist production container can be clamped and fixed, the photoresist production container can be conveniently rotated and moved up and down, and then the photoresist production container can be conveyed into the cleaning tank for cleaning, time and labor are saved, and the workload of workers is greatly reduced.
Drawings
FIG. 1 is a schematic view of a construction of the present utility model;
FIG. 2 is a schematic view of the structure of the clamping plate of the present utility model;
FIG. 3 is a schematic view of a use state of the present utility model.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1 to 3, a cleaning device for a photoresist production container comprises a cleaning support 1, wherein a cleaning tank 2 for cleaning a photoresist production container 20 is mounted on the cleaning support 1, a cleaning shaft 3 is mounted in the cleaning tank 2, the bottom of the cleaning shaft 3 penetrates through the bottom of the cleaning tank 2 and extends to the outer side of the cleaning tank 2, a rotary seal is mounted at the joint of the cleaning shaft 3 and the cleaning tank 2, a cleaning driving device 6 for driving the cleaning shaft 3 to rotate is mounted on the cleaning support 1, and a plurality of cleaning brushes 4 are mounted on the cleaning shaft 3 in the cleaning tank 2 through elastic elements 5; the cleaning tank 2 is arranged, so that the photoresist production container 20 is conveniently placed in the cleaning tank, and the photoresist production container 20 is cleaned, specifically, the cleaning driving device 6 drives the cleaning shaft 3 to drive the cleaning brush 4 to rotate, so that the inner wall of the photoresist production container 20 is cleaned, and the cleaning tank is time-saving, labor-saving, high in efficiency and good in effect; the arrangement of the rotary seal ensures the tightness of the joint of the cleaning shaft 3 and the cleaning tank 2 and does not influence the rotation of the cleaning shaft 3; the elastic element 5 is arranged, so that the cleaning brush 4 can generate certain deformation and change the length when contacting with the photoresist production container 20, so that the cleaning brush 4 can be in close contact with the inner wall of the photoresist production container 20, and the cleaning effect can be improved; preferably, the elastic element 5 is a compression spring;
specifically, the cleaning driving device 6 is a cleaning driving motor, and a motor shaft of the cleaning driving motor is in transmission connection with the cleaning shaft 3 through a transmission gear, so that the cleaning shaft 3 can be conveniently driven to rotate according to the requirement;
in order to further improve the cleaning effect on the photoresist production container 20, a cleaning cavity is arranged in the cleaning shaft 3, the top end of the cleaning shaft 3 is a closed end, a rotary joint 8 which is convenient for externally connecting cleaning water or cleaning liquid is arranged at the bottom of the cleaning shaft 3, a plurality of cleaning nozzles 7 which are communicated with the cleaning cavity are arranged on the cleaning shaft 3 in the cleaning tank 2, during the cleaning operation, the cleaning water or the cleaning liquid can be conveyed into the cleaning cavity through the rotary joint 8 and then sprayed onto the inner wall of the photoresist production container 20 through the cleaning nozzles 7, and the cleaning effect is good and the efficiency is high in cooperation with the brushing operation of the cleaning brush 4;
in order to facilitate the cleaning operation of placing the photoresist production vessel 20 into the cleaning tank 2, a support shaft 9 and a rotary driving device 12 for driving the support shaft 9 to rotate are mounted on the cleaning support 1 above the cleaning tank 2, a fixing plate 10 is mounted on the support shaft 9, a support plate 13 is mounted on the fixing plate 10 through a vertical driving device 11, clamping plates 14 are mounted on both sides of the support plate 13 through a lateral driving device 15, and a clamping gap 16 matched with the photoresist production vessel 20 is left between the clamping plates 14. After the photoresist production container 20 is placed at the clamping gap 16, the clamping plate 14 is driven by the transverse driving device 15 to clamp the photoresist production container 20, then the supporting shaft 9 is driven by the rotary driving device 12 to rotate, then the photoresist production container 20 is driven by the vertical driving device 11 to move downwards by the supporting plate 13, and the photoresist production container extends into the cleaning tank 2, so that the cleaning brush 4 is conveniently driven by the cleaning shaft 3 to carry out cleaning operation, and the workload of workers is greatly reduced;
specifically, the rotary driving device 12 is a rotary driving motor, two ends of the supporting shaft 9 are mounted on the cleaning support 1 through bearings and bearing seats, and a motor shaft of the rotary driving motor is in transmission connection with the supporting shaft 9 through a transmission gear, so that the supporting shaft 9 can be conveniently driven to rotate as required;
the vertical driving device 11 is a vertical driving cylinder, the vertical driving cylinder is arranged on the fixed plate 10, and the supporting plate 13 is arranged at the piston rod end of the vertical driving cylinder, so that the supporting plate 13 can be conveniently driven to vertically move according to the requirement; in actual use, in order to ensure safety, the support plate 13 is also provided with a guide rod 17 matched with the fixed plate 10, the fixed plate 10 is provided with a guide hole matched with the guide rod 17, one end of the guide rod 17 is fixedly connected with the support plate 13, the other end of the guide rod 17 penetrates through the guide hole to extend to the other side of the fixed plate 10 and is fixedly provided with a limiting block 18, when the support plate 13 moves vertically, the guide rod 17 can play a guide role on the support plate 13, and the limiting block 18 can carry out limit fit on the fixed plate 10, so that the condition that the support plate 13 falls accidentally is avoided, and safety is ensured;
the transverse driving device 15 is a transverse driving cylinder, the transverse driving cylinder is mounted on the supporting plate 13, and the clamping plate 14 is mounted on a piston rod end of the transverse driving cylinder, so that the clamping plate 14 can be conveniently driven to transversely move according to the requirement, and the clamping operation of the photoresist production container 20 is realized; preferably, the clamping plate 14 is an arc-shaped clamping plate 14, and a rubber anti-slip pad 19 is further installed on the arc-shaped clamping plate 14, so that the clamping operation of the photoresist production container 20 can be realized conveniently, and the reliability of the clamping operation is ensured.
When the photoresist production container 20 is used, a worker only needs to place the photoresist production container 20 at the clamping gap 16, then the transverse driving device 15 drives the clamping plate 14 to transversely move, the photoresist production container 20 is clamped and fixed, then the rotary driving device 12 drives the supporting shaft 9 to drive the photoresist production container 20 to rotate (generally, when the photoresist production container is started, the supporting plate 13 is horizontally placed, the supporting shaft 9 only needs to rotate 180 degrees), the photoresist production container 20 is inverted, then the vertical driving device 11 drives the supporting plate 13 to vertically move, the photoresist production container 20 is placed in the cleaning tank 2, meanwhile, the cleaning driving device 6 drives the cleaning shaft 3 to drive the cleaning brush 4 to rotate, the cleaning brush 4 performs cleaning operation on the inner wall of the photoresist production container 20 while the photoresist production container 20 is moved, cleaning water or cleaning liquid can be sprayed on the photoresist production container 20 through the cleaning nozzle 7, the cleaning effect is further improved, after the cleaning is finished, the vertical driving device 11 and the rotary driving device 12 reversely act, the photoresist production container 20 is returned to the initial placing state, the transverse driving device 15 drives the clamping plate 14 to release the photoresist production container 20, the cleaning operation is greatly reduced, and the labor is saved, and the work of the cleaning of the photoresist production container is greatly reduced.
Claims (8)
1. A photoresist production container belt cleaning device, its characterized in that: the device comprises a cleaning support, wherein a cleaning tank for cleaning a photoresist production container is arranged on the cleaning support, a cleaning shaft is arranged in the cleaning tank, the bottom of the cleaning shaft penetrates through the bottom of the cleaning tank and extends to the outer side of the cleaning tank, a rotary seal is arranged at the joint of the cleaning shaft and the cleaning tank, a cleaning driving device for driving the cleaning shaft to rotate is arranged on the cleaning support, and a plurality of cleaning brushes are arranged on the cleaning shaft in the cleaning tank through elastic elements;
the cleaning device comprises a cleaning tank, a cleaning support, a supporting shaft, a fixing plate, a supporting plate, a transverse driving device, a clamping plate and a photoresist production container, wherein the cleaning support above the cleaning tank is provided with the supporting shaft and the rotary driving device for driving the supporting shaft to rotate, the fixing plate is arranged on the supporting shaft, the supporting plate is arranged on the fixing plate through the vertical driving device, the clamping plates are arranged on two sides of the supporting plate through the transverse driving device, and a clamping gap matched with the photoresist production container is reserved between the clamping plates.
2. The photoresist production vessel cleaning apparatus according to claim 1, wherein: the cleaning driving device is a cleaning driving motor, and a motor shaft of the cleaning driving motor is in transmission connection with the cleaning shaft through a transmission gear.
3. The photoresist production vessel cleaning apparatus according to claim 1 or 2, wherein: the elastic element is a compression spring.
4. The photoresist production vessel cleaning apparatus according to claim 1 or 2, wherein: the inside of wasing the axle is provided with the washing chamber, and the top of wasing the axle sets up to the blind end, and the rotary joint of external washing water or washing liquid of being convenient for is installed to the bottom of wasing the axle, installs a plurality of washing nozzles with wasing the chamber intercommunication on wasing the epaxial washing that installs in the washing tank.
5. The photoresist production vessel cleaning apparatus according to claim 1, wherein: the rotary driving device is a rotary driving motor, two ends of the supporting shaft are arranged on the cleaning support through bearings and bearing blocks, and a motor shaft of the rotary driving motor is in transmission connection with the supporting shaft through a transmission gear.
6. The photoresist production vessel cleaning apparatus according to claim 1 or 5, wherein: the vertical driving device is a vertical driving cylinder, the vertical driving cylinder is arranged on the fixed plate, and the supporting plate is arranged on the piston rod end of the vertical driving cylinder.
7. The photoresist production vessel cleaning apparatus according to claim 1, wherein: the transverse driving device is a transverse driving cylinder, the transverse driving cylinder is arranged on the supporting plate, and the clamping plate is arranged on the piston rod end of the transverse driving cylinder.
8. The photoresist production vessel cleaning apparatus according to claim 1 or 7, wherein: the clamping plate is an arc clamping plate, and a rubber anti-slip pad is further arranged on the arc clamping plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322382584.0U CN220717132U (en) | 2023-09-04 | 2023-09-04 | Photoresist production container cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322382584.0U CN220717132U (en) | 2023-09-04 | 2023-09-04 | Photoresist production container cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220717132U true CN220717132U (en) | 2024-04-05 |
Family
ID=90490677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322382584.0U Active CN220717132U (en) | 2023-09-04 | 2023-09-04 | Photoresist production container cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220717132U (en) |
-
2023
- 2023-09-04 CN CN202322382584.0U patent/CN220717132U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |