CN220617563U - Automatic stacking device for diffused silicon wafers - Google Patents
Automatic stacking device for diffused silicon wafers Download PDFInfo
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- CN220617563U CN220617563U CN202322351274.2U CN202322351274U CN220617563U CN 220617563 U CN220617563 U CN 220617563U CN 202322351274 U CN202322351274 U CN 202322351274U CN 220617563 U CN220617563 U CN 220617563U
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 113
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 113
- 239000010703 silicon Substances 0.000 title claims abstract description 113
- 235000012431 wafers Nutrition 0.000 title abstract description 97
- 239000010453 quartz Substances 0.000 claims abstract description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 35
- 238000009792 diffusion process Methods 0.000 claims abstract description 12
- 230000003287 optical effect Effects 0.000 claims description 34
- 230000002457 bidirectional effect Effects 0.000 claims description 22
- 239000003638 chemical reducing agent Substances 0.000 claims description 17
- 238000003756 stirring Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 8
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to the technical field of silicon wafer production and processing, in particular to an automatic stacking device after silicon wafer diffusion, which carries a quartz boat through a traversing device and sends silicon wafers on the quartz boat into a working area one by one; the height of the silicon wafer is changed through the lifting device, the silicon wafer is taken out of the quartz boat, the space position of the silicon wafer is changed through the rotating device, the silicon wafer is inclined to enter the pushing device, the silicon wafer is fixed through the clamping device, and the stress area is increased to prevent the silicon wafer from being broken; the pushing device is matched with the rotating device and the clamping device to collect and store the silicon wafers, the space position of the limiting device is detected through the limiting device, the silicon wafers are prevented from being damaged due to collision with the silicon wafers, and the practicability of the device is improved; the quartz boat comprises a quartz boat and limiting grooves, wherein a plurality of groups of bearing columns are arranged on the quartz boat, and a plurality of groups of limiting grooves are formed in the bearing columns; the device also comprises a traversing device, a lifting device, a rotating device, a clamping device, a pushing device and a limiting device.
Description
Technical Field
The utility model relates to the technical field of silicon wafer production and processing, in particular to an automatic stacking device for diffused silicon wafers.
Background
The silicon wafers are required to be processed through a diffusion process in the production process, the cleaned silicon wafers are orderly arranged on a quartz boat, then the quartz boat filled with the silicon wafers is pushed into a diffusion furnace for high-temperature processing, and the diffused silicon wafers are required to be taken out one by an operator through special tweezers and stacked in a special container for waiting for the next processing.
Because the thickness of the silicon wafer can reach 0.3 millimeter at the thinnest, operators need to carefully and slowly move the silicon wafer in the process of taking out and stacking the silicon wafer so as to prevent the silicon wafer from being broken in the moving process.
Certain proficiency is needed for clamping and moving the silicon wafer, the work is often operated by special personnel, the overall state of the operator can greatly influence the efficiency and the quality of the work, and meanwhile, the consumption of manpower in the silicon wafer production process is increased.
Disclosure of Invention
In order to solve the technical problems, the utility model provides a device for carrying quartz boats through a traversing device and conveying silicon wafers on the quartz boats into a working area one by one; the height of the silicon wafer is changed through the lifting device, the silicon wafer is taken out of the quartz boat, the space position of the silicon wafer is changed through the rotating device, the silicon wafer is inclined to enter the pushing device, the silicon wafer is fixed through the clamping device, and the stress area is increased to prevent the silicon wafer from being broken; the pushing device is matched with the rotating device and the clamping device to collect and store the silicon wafers, the space position of the limiting device is detected through the limiting device, the silicon wafers are prevented from being damaged due to impact with the silicon wafers, and the practical silicon wafer diffusion back automatic stacking device of the device is improved.
The utility model relates to an automatic stacking device for diffused silicon wafers, which comprises a quartz boat and limiting grooves, wherein a plurality of groups of bearing columns are arranged on the quartz boat, and a plurality of groups of limiting grooves are formed in the bearing columns; the device comprises a traversing device, a lifting device, a rotating device, a clamping device, a pushing device and a limiting device, wherein the lifting device is arranged on the traversing device; carrying the quartz boat by a traversing device, and conveying silicon wafers on the quartz boat into a working area one by one; the height of the silicon wafer is changed through the lifting device, the silicon wafer is taken out of the quartz boat, the space position of the silicon wafer is changed through the rotating device, the silicon wafer is inclined to enter the pushing device, the silicon wafer is fixed through the clamping device, and the stress area is increased to prevent the silicon wafer from being broken; through pusher cooperation rotary device and clamping device to collect and store the silicon chip, detect stop device's spatial position through stop device, prevent to strike with the silicon chip and cause the silicon chip to damage, improved the practicality of device.
Preferably, the transverse moving device comprises a bottom plate, a screw rod, a transverse moving platform, a speed reducer, a servo motor and limiting rods, wherein the screw rod and two groups of limiting rods are horizontally arranged on the upper end surface of the bottom plate through a supporting plate, the two groups of limiting rods are respectively positioned on the front side and the rear side of the screw rod, the transverse moving platform is connected with the screw rod through nuts, the two groups of limiting rods penetrate through the transverse moving platform, the speed reducer is arranged on the left end surface of a left mounting plate, the servo motor is arranged on the speed reducer, the output end of the speed reducer penetrates through the mounting plate to be connected with the screw rod, and a group of rectangular grooves are respectively arranged on the left side and the right side of the upper end surface of the transverse moving platform; starting the servo motor to transmit power to the screw rod through the speed reducer to drive the screw rod to rotate, driving the traversing platform to move left and right on the bottom plate through the cooperation of the screw rod and the nut on the traversing platform, limiting the movement of the traversing platform through two groups of limiting rods, reducing vibration generated in the moving process, and carrying and limiting the quartz boat through the rectangular groove on the traversing platform.
Preferably, the lifting device comprises a portal, a first electric cylinder and a lifting platform, wherein the portal is arranged in the middle of the bottom plate, the first electric cylinder is arranged on the upper end face of the portal, and the moving end of the first electric cylinder penetrates through the upper end face of the portal and extends to the lower side of the first electric cylinder to be connected with the upper end face of the lifting platform; and controlling the elongation of the first electric cylinder to change the height of the clamping device, and taking out the silicon wafers in the quartz boat by matching the clamping device and the rotating device.
Preferably, the rotating device comprises a rotating box, rotating shafts, a toggle plate and a second electric cylinder, wherein a group of rotating shafts are respectively connected to the left end face and the right end face of the rotating box, the other ends of the two groups of rotating shafts are connected with the inner side face of the lifting platform through bearings, the toggle plate is connected to the right end face of the rotating box, the second electric cylinder is arranged on the right part of the upper end face of the lifting platform, and the moving end of the second electric cylinder penetrates through the upper end face of the lifting platform and extends into the lifting platform; the second electric cylinder is controlled to extend, so that the moving end of the second electric cylinder pushes the toggle plate, the rotary box is driven to integrally rotate along with the rotary shaft, the inclination angle of the clamping device is changed, and the silicon wafer is conveniently placed into the pushing device in an inclined mode to be collected.
Preferably, the clamping device comprises a gear motor, a bidirectional screw rod, nuts, an elastic plate and a rubber clamping plate, wherein the gear motor is arranged on the left end face of the rotating box, the output end of the gear motor penetrates through the left end face of the rotating box to enter the rotating box to be connected with the bidirectional screw rod, the right end face of the bidirectional screw rod is connected with the right end face in the rotating box, the two groups of nuts are respectively sleeved on the left part and the right part of the bidirectional screw rod, the elastic plate is connected on the side face of the nuts, and the rubber clamping plate is connected on the lower part of the elastic plate; the gear motor is started to transmit power to the bidirectional screw rod to drive the bidirectional screw rod to rotate, so that two groups of nuts on the bidirectional screw rod move in opposite directions or back to back, the elastic plate and the rubber clamping plate are matched to clamp and release the silicon wafer, the scratch on the surface of the silicon wafer in the clamping process is reduced through the rubber clamping plate, the silicon wafer is prevented from being broken due to overlarge pressure on the surface of the silicon wafer in the clamping process through the elastic plate, and the practicability of the device is improved.
Preferably, the pushing device comprises a bearing platform, sliding rails, a bearing box, a third electric cylinder and an electromagnet, wherein the middle part of the left end face of the portal is connected with the bearing platform, a group of sliding rails are respectively arranged in front of and behind the upper end face of the bearing platform, a rectangular hole is formed in the right part of the upper end face of the bearing platform, the rectangular hole is positioned between the two groups of sliding rails, a plurality of groups of limiting grooves are formed in the lower end face of the bearing box, the bearing box is placed on the two groups of sliding rails through the limiting grooves, the third electric cylinder is arranged in the left part of the upper end face of the bearing platform, the electromagnet is connected to the moving end of the third electric cylinder, the right side of the bottom in the bearing box is higher than the left side by a certain gradient, and a rubber protection strip is arranged on the left end face in the bearing box; the rear end face of the bearing box is adsorbed by the electromagnet, so that the stability of the bearing box in the moving process of the sliding rail is improved, the silicon wafer in the bearing box is prevented from sliding out of the bearing box in the moving process of the following bearing box by the gradient of the bottom of the bearing box, and a space is provided for the silicon wafer to follow the rotating device in the rotating process by the rectangular groove on the upper end face of the bearing platform.
Preferably, the limiting device comprises an optical signal generator, a signal receiving controller and a positioning groove, wherein the optical signal generator is arranged on the upper parts of the front end surface and the rear end surface of the lifting platform through a supporting plate, the signal receiving controller is correspondingly arranged on the upper end surface of a bottom plate right below the optical signal generator, the positioning groove is arranged at the outer side of a bearing column of the quartz boat and corresponds to the position of the limiting groove, and the positions of the optical signal generator and the signal receiving controller correspond to the center position of the clamping device; the optical signal generator emits optical signals and is received by the signal receiving controller, when the silicon wafer moves to the right lower side of the clamping device along with the traversing device, the positioning groove is positioned at the right lower side of the optical signal generator, the optical signals emitted by the optical signal generator can be received by the signal receiving controller, when the silicon wafer is not positioned at the right lower side of the clamping device, the positioning groove is not positioned at the lower side of the optical signal generator, the optical signal receiving controller emitted by the optical signal generator cannot receive the optical signals, and then the signal receiving controller controls equipment to stop working
Compared with the prior art, the utility model has the beneficial effects that: carrying the quartz boat by a traversing device, and conveying silicon wafers on the quartz boat into a working area one by one; the height of the silicon wafer is changed through the lifting device, the silicon wafer is taken out of the quartz boat, the space position of the silicon wafer is changed through the rotating device, the silicon wafer is inclined to enter the pushing device, the silicon wafer is fixed through the clamping device, and the stress area is increased to prevent the silicon wafer from being broken; through pusher cooperation rotary device and clamping device to collect and store the silicon chip, detect stop device's spatial position through stop device, prevent to strike with the silicon chip and cause the silicon chip to damage, improved the practicality of device.
Drawings
FIG. 1 is a schematic view of a first axial structure of the present utility model;
FIG. 2 is a schematic cross-sectional view of the present utility model;
FIG. 3 is a schematic view of a load bearing structure of the traversing platform to the quartz boat;
FIG. 4 is a schematic cross-sectional view of a rotating device and a clamping device;
FIG. 5 is a schematic view of a second axial structure of the present utility model;
the reference numerals in the drawings: 1. a bottom plate; 2. a screw rod; 3. a traversing platform; 4. a speed reducer; 5. a servo motor; 6. a limit rod; 7. a quartz boat; 8. a limit groove; 9. a door frame; 10. a first electric cylinder; 11. a lifting platform; 12. a rotating box; 13. a rotating shaft; 14. a toggle plate; 15. a second electric cylinder; 16. a speed reducing motor; 17. a bidirectional screw rod; 18. a nut; 19. an elastic plate; 20. a rubber clamping plate; 21. a load-bearing platform; 22. a slide rail; 23. a carrying case; 24. a third electric cylinder; 25. an electromagnet; 26. an optical signal generator; 27. a signal receiving controller; 28. and a positioning groove.
Detailed Description
In order that the utility model may be readily understood, a more complete description of the utility model will be rendered by reference to the appended drawings. This utility model may be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Example 1
As shown in fig. 1, 2, 3, 4 and 5, the lifting device is arranged on the traversing device, the rotating device is arranged on the lifting device, the clamping device is arranged on the rotating device, and the pushing device is arranged on the lifting device;
firstly, a quartz boat 7 is placed on a traversing platform 3, the position of the quartz boat 7 is fixed through a rectangular groove on the traversing platform 3, a servo motor 5 is started to transmit power to a screw rod 2 through a speed reducer 4 to drive the screw rod 2 to rotate, the traversing platform 3 is driven to move leftwards through the matching of the screw rod 2 and a nut on the traversing platform 3 until a silicon wafer is positioned at the lower side of a clamping device, a first electric cylinder 10 is controlled to extend so that two groups of rubber clamping plates 20 move downwards to the left side and the right side of the silicon wafer, then a speed reducing motor 16 is started to transmit power to a bidirectional screw rod 17 to drive the bidirectional screw rod 17 to rotate, so that two groups of nuts 18 on the bidirectional screw rod 17 move oppositely to clamp and fix the silicon wafer, then the first electric cylinder 10 is controlled to shrink and lift the height of the silicon wafer, a second electric cylinder 15 is controlled to extend so that the moving end of the second electric cylinder 15 pushes a toggle plate 14, the whole rotary box 12 is driven to rotate along with a rotating shaft 13, the inclination angle of the clamping device is changed to be the same as that of the bottom of a bearing box 23, then a third electric cylinder 24 is controlled to extend so that the bearing box 23 is pushed rightwards to enter the inside the bearing box 23, then the silicon wafer is controlled to rotate, and the speed reducing motor 16 is controlled to rotate the two groups of rubber clamping plates 20 to clamp the silicon wafer, and the silicon wafer is reciprocally moved into the silicon wafer box, so that the silicon wafer can be reciprocally moved into a silicon wafer box, and the silicon wafer can be reciprocally and the silicon device, and the silicon wafer can be moved one by a device, and the silicon cassette, and the silicon device is one and is moved to be 23;
the transverse moving device comprises a bottom plate 1, a screw rod 2, a transverse moving platform 3, a speed reducer 4, a servo motor 5 and limiting rods 6, wherein the screw rod 2 and two groups of limiting rods 6 are horizontally arranged on the upper end face of the bottom plate 1 through a supporting plate, the two groups of limiting rods 6 are respectively positioned on the front side and the rear side of the screw rod 2, the transverse moving platform 3 is connected with the screw rod 2 through nuts, the two groups of limiting rods 6 penetrate through the transverse moving platform 3, the speed reducer 4 is arranged on the left end face of a left mounting plate, the servo motor 5 is arranged on the speed reducer 4, the output end of the speed reducer 4 penetrates through the mounting plate to be connected with the screw rod 2, and a group of rectangular grooves are respectively arranged on the left side and the right side of the upper end face of the transverse moving platform 3;
the lifting device comprises a portal 9, a first electric cylinder 10 and a lifting platform 11, wherein the portal 9 is installed in the middle of the bottom plate 1, the first electric cylinder 10 is installed on the upper end surface of the portal 9, and the moving end of the first electric cylinder 10 passes through the upper end surface of the portal 9 to extend to the lower side of the first electric cylinder 10 and be connected with the upper end surface of the lifting platform 11;
the rotating device comprises a rotating box 12, rotating shafts 13, a toggle plate 14 and a second electric cylinder 15, wherein a group of rotating shafts 13 are respectively connected to the left end face and the right end face of the rotating box 12, the other ends of the two groups of rotating shafts 13 are connected with the inner side face of the lifting platform 11 through bearings, the toggle plate 14 is connected to the right end face of the rotating box 12, the second electric cylinder 15 is arranged on the right part of the upper end face of the lifting platform 11, and the moving end of the second electric cylinder 15 penetrates through the upper end face of the lifting platform 11 and extends into the lifting platform 11;
the clamping device comprises a gear motor 16, a bidirectional screw rod 17, nuts 18, an elastic plate 19 and a rubber clamping plate 20, wherein the gear motor 16 is arranged on the left end face of the rotary box 12, the output end of the gear motor 16 passes through the left end face of the rotary box 12 and enters the rotary box 12 to be connected with the bidirectional screw rod 17, the right end face of the bidirectional screw rod 17 is connected with the right end face in the rotary box 12, two groups of nuts 18 are respectively sleeved on the left part and the right part of the bidirectional screw rod 17, the side face of each nut 18 is connected with the elastic plate 19, and the lower part of the elastic plate 19 is connected with the rubber clamping plate 20;
the pushing device comprises a bearing platform 21, sliding rails 22, a bearing box 23, a third electric cylinder 24 and an electromagnet 25, wherein the middle part of the left end face of the portal 9 is connected with the bearing platform 21, a group of sliding rails 22 are respectively arranged in front of and behind the upper end face of the bearing platform 21, rectangular holes are formed in the right part of the upper end face of the bearing platform 21 and are positioned between the two groups of sliding rails 22, a plurality of groups of limiting grooves are formed in the lower end face of the bearing box 23, the bearing box 23 is placed on the two groups of sliding rails 22 through the limiting grooves, the third electric cylinder 24 is arranged on the left part of the upper end face of the bearing platform 21, the electromagnet 25 is connected to the moving end of the third electric cylinder 24, the right side of the inner bottom of the bearing box 23 is higher than the left side to form a certain gradient, and a rubber protection strip is arranged on the left end face in the bearing box 23;
carrying the quartz boat 7 by a traversing device, and conveying silicon wafers on the quartz boat 7 into a working area one by one; the height of the silicon wafer is changed through the lifting device, the silicon wafer is taken out of the quartz boat 7, the space position of the silicon wafer is changed through the rotating device, the silicon wafer is inclined to enter the pushing device, the silicon wafer is fixed through the clamping device, and the stress area is increased to prevent the silicon wafer from being broken; the silicon wafer is collected and stored by the pushing device matched with the rotating device and the clamping device.
Example 2
The improvement on the basis of the first embodiment comprises a limiting device which is arranged on the lifting device;
the space position of the limiting device is detected through the limiting device, so that the silicon wafer is prevented from being damaged due to collision with the silicon wafer, and the practicability of the device is improved;
the optical signal generator 26 emits optical signals and is received by the signal receiving controller 27, when the silicon wafer moves to the right lower side of the clamping device along with the traversing device, the positioning groove 28 is positioned at the right lower side of the optical signal generator 26, the optical signals emitted by the optical signal generator 26 can be received by the signal receiving controller 27, when the silicon wafer is not positioned at the right lower side of the clamping device, the positioning groove 28 is not positioned at the lower side of the optical signal generator 26, the optical signal receiving controller 27 emitted by the optical signal generator 26 cannot receive the optical signals, and the signal receiving controller 27 controls equipment to stop working;
the limiting device comprises an optical signal generator 26, a signal receiving controller 27 and a positioning groove 28, wherein the optical signal generator 26 is installed on the upper parts of the front end face and the rear end face of the lifting platform 11 through supporting plates, the signal receiving controller 27 is correspondingly installed on the upper end face of the bottom plate 1 right below the optical signal generator 26, the positioning groove 28 is formed in the outer side of a bearing column of the quartz boat 7 and corresponds to the position of the limiting groove 8, and the positions of the optical signal generator 26 and the signal receiving controller 27 correspond to the center position of the clamping device.
As shown in fig. 1 to 5, in the automatic stacking device after silicon wafer diffusion, when the automatic stacking device works, firstly, a quartz boat 7 is placed on a traversing platform 3, the position of the quartz boat 7 is fixed through a rectangular groove on the traversing platform 3, a servo motor 5 is started to transmit power to a screw rod 2 through a speed reducer 4 to drive the screw rod 2 to rotate, the traversing platform 3 is driven to move leftwards until a positioning groove 28 is positioned at the lower side of an optical signal generator 26 through the cooperation of the screw rod 2 and a nut on the traversing platform 3, a signal receiving controller 27 receives a signal sent by the optical signal generator 26, at the moment, the traversing device stops, a first electric cylinder 10 is controlled to extend so that two groups of rubber clamping plates 20 move downwards to the left side and the right side of a silicon wafer, then a speed reducing motor 16 is started to transmit power to a bidirectional screw rod 17 to drive the bidirectional screw rod 17 to rotate, so that two groups of nuts 18 on the bidirectional screw rod 17 move oppositely, then the two groups of rubber clamping plates 20 are controlled to clamp and fix the silicon wafers, the first electric cylinder 10 is controlled to shrink the height of the lifting silicon wafer, then the second electric cylinder 15 is controlled to extend so that the moving end of the second electric cylinder 15 pushes a pulling plate 14, so that the moving end of the second electric cylinder 15 is driven to slide to the rotating box 12, the rotating box 12 is driven to slide to the silicon wafer into the inner part of a bearing box 23, and then the silicon wafer is controlled to slide into the bearing box 23, and the silicon wafer is inclined to slide into the bearing box 23, and the whole, and the silicon wafer is controlled to slide into the bearing box 23, and the silicon wafer is rotated to slide down, and the silicon wafer is one by the whole.
The first electric cylinder 10, the third electric cylinder 24, the speed reducer 4, the servo motor 5, the electromagnet 25, the optical signal generator 26, the signal receiving controller 27, the speed reducing motor 16 and the second electric cylinder 15 of the automatic stacking device for the diffused silicon wafers are purchased in the market, and a person skilled in the art only needs to install and operate according to the attached using instruction without creative labor of the person skilled in the art.
The foregoing is merely a preferred embodiment of the present utility model, and it should be noted that it will be apparent to those skilled in the art that modifications and variations can be made without departing from the technical principles of the present utility model, and these modifications and variations should also be regarded as the scope of the utility model.
Claims (7)
1. The automatic stacking device after the silicon wafer diffusion comprises a quartz boat (7) and limiting grooves (8), wherein a plurality of groups of bearing columns are arranged on the quartz boat (7), and a plurality of groups of limiting grooves (8) are formed in the bearing columns; the device is characterized by comprising a traversing device, a lifting device, a rotating device, a clamping device, a pushing device and a limiting device, wherein the lifting device is arranged on the traversing device, the rotating device is arranged on the lifting device, the clamping device is arranged on the rotating device, the pushing device is arranged on the lifting device, and the limiting device is arranged on the lifting device.
2. The automatic stacking device after silicon wafer diffusion according to claim 1, wherein the traversing device comprises a bottom plate (1), a screw rod (2), a traversing platform (3), a speed reducer (4), a servo motor (5) and limiting rods (6), the screw rod (2) and two groups of limiting rods (6) are horizontally arranged on the upper end face of the bottom plate (1) through a supporting plate, the two groups of limiting rods (6) are respectively arranged on the front side and the rear side of the screw rod (2), the traversing platform (3) is connected with the screw rod (2) through nuts, the two groups of limiting rods (6) penetrate through the traversing platform (3), the speed reducer (4) is arranged on the left end face of a left side mounting plate, the servo motor (5) is arranged on the speed reducer (4), the output end of the speed reducer (4) penetrates through the mounting plate to be connected with the screw rod (2), and a group of rectangular grooves are respectively arranged on the left side and the right side of the upper end face of the traversing platform (3).
3. The automatic stacking device after silicon wafer diffusion according to claim 2, wherein the lifting device comprises a portal (9), a first electric cylinder (10) and a lifting platform (11), the portal (9) is installed in the middle of the bottom plate (1), the first electric cylinder (10) is installed on the upper end face of the portal (9), and the moving end of the first electric cylinder (10) penetrates through the upper end face of the portal (9) to extend to the lower side of the first electric cylinder (10) and be connected with the upper end face of the lifting platform (11).
4. The automatic stacking device after silicon wafer diffusion according to claim 3, wherein the rotating device comprises a rotating box (12), rotating shafts (13), stirring plates (14) and second electric cylinders (15), a group of rotating shafts (13) are respectively connected to the left end face and the right end face of the rotating box (12), the other ends of the two groups of rotating shafts (13) are connected with the inner side face of a lifting platform (11) through bearings, the stirring plates (14) are connected to the right end face of the rotating box (12), the second electric cylinders (15) are arranged on the right part of the upper end face of the lifting platform (11), and the moving ends of the second electric cylinders (15) penetrate through the upper end face of the lifting platform (11) to extend into the lifting platform (11).
5. The automatic stacking device after silicon wafer diffusion according to claim 4, wherein the clamping device comprises a speed reducing motor (16), a bidirectional screw (17), a nut (18), an elastic plate (19) and a rubber clamping plate (20), the speed reducing motor (16) is installed on the left end face of the rotary box (12), the output end of the speed reducing motor (16) penetrates through the left end face of the rotary box (12) to enter the rotary box (12) to be connected with the bidirectional screw (17), the right end face of the bidirectional screw (17) is connected with the right end face in the rotary box (12), two groups of nuts (18) are respectively sleeved on the left part and the right part of the bidirectional screw (17), the elastic plate (19) is connected on the side face of the nut (18), and the lower part of the elastic plate (19) is connected with the rubber clamping plate (20).
6. The automatic stacking device after silicon wafer diffusion as claimed in claim 3, wherein the pushing device comprises a bearing platform (21), sliding rails (22), a bearing box (23), a third electric cylinder (24) and an electromagnet (25), the middle part of the left end face of the portal (9) is connected with the bearing platform (21), a group of sliding rails (22) are respectively installed in front of and behind the upper end face of the bearing platform (21), rectangular holes are formed in the right part of the upper end face of the bearing platform (21), the rectangular holes are located between the two groups of sliding rails (22), a plurality of groups of limiting grooves are formed in the lower end face of the bearing box (23), the bearing box (23) is placed on the two groups of sliding rails (22) through the limiting grooves, the third electric cylinder (24) is installed on the left part of the upper end face of the bearing platform (21), the electromagnet (25) is connected to the moving end of the third electric cylinder (24), the right side of the inner bottom of the bearing box (23) is higher than the left side by a certain gradient, and a rubber protection strip is arranged on the left end face in the bearing box (23).
7. The automatic stacking device after silicon wafer diffusion according to claim 3, wherein the limiting device comprises an optical signal generator (26), a signal receiving controller (27) and a positioning groove (28), the optical signal generator (26) is installed on the upper parts of the front end face and the rear end face of the lifting platform (11) through a supporting plate, the signal receiving controller (27) is correspondingly installed on the upper end face of the bottom plate (1) right below the optical signal generator (26), the positioning groove (28) is formed in the outer side of a bearing column of the quartz boat (7) and corresponds to the position of the limiting groove (8), and the positions of the optical signal generator (26) and the signal receiving controller (27) correspond to the center position of the clamping device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322351274.2U CN220617563U (en) | 2023-08-31 | 2023-08-31 | Automatic stacking device for diffused silicon wafers |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322351274.2U CN220617563U (en) | 2023-08-31 | 2023-08-31 | Automatic stacking device for diffused silicon wafers |
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| Publication Number | Publication Date |
|---|---|
| CN220617563U true CN220617563U (en) | 2024-03-19 |
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| CN202322351274.2U Active CN220617563U (en) | 2023-08-31 | 2023-08-31 | Automatic stacking device for diffused silicon wafers |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118458359A (en) * | 2024-06-24 | 2024-08-09 | 济南创泽生物医药科技有限公司 | Silicon plate conveying device |
| CN118529502A (en) * | 2024-06-11 | 2024-08-23 | 天津环博科技有限责任公司 | A method and device for arranging inclined stacks of multiple silicon wafers |
-
2023
- 2023-08-31 CN CN202322351274.2U patent/CN220617563U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118529502A (en) * | 2024-06-11 | 2024-08-23 | 天津环博科技有限责任公司 | A method and device for arranging inclined stacks of multiple silicon wafers |
| CN118458359A (en) * | 2024-06-24 | 2024-08-09 | 济南创泽生物医药科技有限公司 | Silicon plate conveying device |
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