CN220176447U - Automatic exhaust control system for semiconductor manufacturing process - Google Patents
Automatic exhaust control system for semiconductor manufacturing process Download PDFInfo
- Publication number
- CN220176447U CN220176447U CN202321722147.2U CN202321722147U CN220176447U CN 220176447 U CN220176447 U CN 220176447U CN 202321722147 U CN202321722147 U CN 202321722147U CN 220176447 U CN220176447 U CN 220176447U
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- water
- control system
- automatic control
- motor
- pipe
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 114
- 239000000428 dust Substances 0.000 claims abstract description 43
- 238000003860 storage Methods 0.000 claims abstract description 33
- 238000004140 cleaning Methods 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 20
- 230000008569 process Effects 0.000 claims abstract description 20
- 241000220317 Rosa Species 0.000 claims description 19
- 239000003595 mist Substances 0.000 abstract description 6
- 239000007921 spray Substances 0.000 abstract description 6
- 230000007246 mechanism Effects 0.000 description 5
- 241000883990 Flabellum Species 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
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- Separation Of Particles Using Liquids (AREA)
Abstract
The utility model relates to the technical field of semiconductor process exhaust, and provides an automatic control system for semiconductor process exhaust. According to the utility model, when the filter plate adsorbs dust in the first exhaust pipe, the water inlet pipe is connected with the water storage tank, the water pump operates, the water inlet pipe connected to one side of the water pump conveys water flow into the water storage block along with the operation of the water pump through the water pipe, the spray heads arranged at the top ends of the water storage block in an equal sequence pump out the water flow in the water storage block, the pumped water flow sprays fine water mist through the water outlet, the cleaning brush scrapes wet dust, the wiping plates connected to the two ends in the water storage block wipe the water mist on the filter plate, and therefore dust can be prevented from splashing everywhere when the fan blades and the cleaning brush clean the dust on the filter plate, and the second motor and the first motor are protected.
Description
Technical Field
The utility model relates to the technical field of semiconductor process exhaust, in particular to an automatic control system for semiconductor process exhaust.
Background
The automatic control system of semiconductor process exhaust is mainly suitable for exhausting in semiconductor process, the automatic control system of semiconductor process exhaust mainly includes the board, rose box and second motor, secondly still include second dwang, filter plate and cleaning brush, specific process is that the board is through first blast pipe exhaust, the second motor is operated, the second dwang of connection on second motor top is along with the operation of second motor drive filter plate rotates, the filter plate adsorbs the dust that produces when exhausting, the cleaning brush of scheduling arrangement on the water storage piece scrapes the dust on the filter plate, first motor is operated, the first dwang of connection in first motor bottom is along with the operation drive flabellum of first motor rotates, blow the dust that remains on the filter plate, the dust drops and gathers in the dust collection box.
The utility model discloses a semiconductor manufacturing shop exhaust system as disclosed in publication number CN211914922U, including the board, the board passes through exhaust duct and main exhaust duct connection, exhaust duct fixedly connected with filter equipment, filter equipment includes motor, filter mechanism and cleaning mechanism, the output shaft and the filter mechanism fixed connection of motor, filter mechanism passes through driving medium and cleaning mechanism meshing connection, filter equipment is equipped with the collection room. The utility model has simple structure, convenient operation and scientific and reasonable design, and effectively avoids dust generated in the working process of the machine from spreading over the whole exhaust system by arranging the special filtering device on the exhaust pipeline between the machine and the main exhaust pipeline, reduces the difficulty of cleaning the exhaust system by workers, reduces the blockage of the exhaust pipeline, improves the continuous working capacity of equipment, improves the working efficiency of the semiconductor manufacturing process and increases the economic benefit.
However, the above case can not collect and clean the dust that can't splash, when the board is discharged through first blast pipe, the second motor drives the second dwang and rotates, fix the filter plate of second dwang outer wall along with the rotation of second dwang adsorb the dust in the first blast pipe, because the dust of adhesion is more on the filter plate, the dust can splash everywhere when the dust on the filter plate is cleared up to flabellum and cleaning brush, thereby lead to the unable comprehensive dust that drops to the dust collection box, and more dust drops on first motor and second motor, the radiating effect of first motor and second motor has been reduced.
Disclosure of Invention
The utility model provides an automatic control system for exhaust gas in a semiconductor manufacturing process, which solves the problem that splashed dust cannot be collected and cleaned in the related art.
The technical scheme of the utility model is as follows: the utility model provides a semiconductor manufacturing process exhaust automatic control system, includes the board, one side fixedly connected with first blast pipe of board, the outer wall fixedly connected with rose box of first blast pipe, the outer wall bolted connection of first blast pipe one side is kept away from to the rose box has the water pump, the rose box is close to the inside of water pump one side and is provided with the water storage piece, the top of water storage piece is arranged in proper order has the shower nozzle, the delivery port has been seted up on the top of shower nozzle, the middle part fixedly connected with cleaning brush on shower nozzle top, the rose box is close to the inside both ends of first blast pipe one side and is provided with the board of cleaning.
Further, the top fixedly connected with second blast pipe of first blast pipe, one side that the rose box was kept away from to the water pump is provided with the inlet tube.
Further, one side of the water pump away from the water inlet pipe is fixedly connected with a water delivery pipe, the water delivery pipe penetrates through one side of the filter box close to the water pump, and one side of the water delivery pipe away from the water pump is fixedly connected with the water storage block.
Further, the bottom swing joint that the rose box is close to water pump one side has the baffle, the middle part bolted connection that baffle kept away from rose box one side has the handle.
Further, the bottom bolt connection that the rose box is close to one side of the board of cleaning has the second motor, the top swing joint of second motor has the second dwang.
Further, a filter plate is connected to the top end of the outer wall of the second rotating rod through bolts.
Further, the inside top bolted connection of rose box has the backup pad, and the bottom of backup pad and the top swing joint of second dwang.
Further, the filter box is far away from the top bolted connection of second motor one side has first motor, the bottom swing joint of first motor has first dwang, and first dwang runs through the backup pad.
Further, the bottom bolt of first dwang is connected with the flabellum.
Further, the filter tank is provided with the dust collection box near the inside bottom of water storage piece one side.
The working principle and the beneficial effects of the utility model are as follows:
1. according to the utility model, when the filter plate adsorbs dust in the first exhaust pipe, the water inlet pipe is connected with the water storage tank, the water pump operates, the water inlet pipe connected to one side of the water pump conveys water flow into the water storage block along with the operation of the water pump through the water pipe, the spray heads arranged at the top ends of the water storage block in an equal sequence pump out the water flow in the water storage block, the pumped water flow sprays fine water mist through the water outlet, the cleaning brush scrapes wet dust, the wiping plates connected to the two ends in the water storage block wipe the water mist on the filter plate, and therefore dust can be prevented from splashing everywhere when the fan blades and the cleaning brush clean the dust on the filter plate, and the second motor and the first motor are protected.
Drawings
The utility model will be described in further detail with reference to the drawings and the detailed description.
FIG. 1 is a schematic view of the overall structure of the present utility model;
FIG. 2 is a schematic cross-sectional view of a filter box according to the present utility model;
FIG. 3 is a schematic diagram of a water pump according to the present utility model;
FIG. 4 is a schematic view of a cleaning brush according to the present utility model;
in the figure: 1. a machine table; 2. a first exhaust pipe; 3. a second exhaust pipe; 4. a filter box; 41. a baffle; 42. a grip; 43. a wiper plate; 44. a support plate; 45. a dust collection box; 46. a first motor; 47. a first rotating lever; 48. a fan blade; 5. a water pump; 51. a water inlet pipe; 52. a water pipe; 6. a second motor; 61. a second rotating lever; 7. a filter plate; 8. a water storage block; 81. a spray head; 82. a water outlet; 83. and cleaning the brush.
Detailed Description
The technical solutions of the embodiments of the present utility model will be clearly and completely described below in conjunction with the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-4, the present utility model provides a technical solution: the utility model provides a semiconductor manufacturing process exhaust automatic control system, which comprises a machine bench 1, one side fixedly connected with first blast pipe 2 of board 1, the outer wall fixedly connected with rose box 4 of first blast pipe 2, the outer wall bolted connection of one side of first blast pipe 2 is kept away from to rose box 4 has water pump 5, the inside that rose box 4 is close to one side of water pump 5 is provided with water storage block 8, the top of water storage block 8 is arranged in an equal order has shower nozzle 81, delivery port 82 has been seted up on the top of shower nozzle 81, the middle part fixedly connected with cleaning brush 83 on shower nozzle 81 top, the inside both ends that rose box 4 is close to one side of first blast pipe 2 are provided with and clean board 43, the top fixedly connected with second blast pipe 3 of first blast pipe 2, one side that the rose box 4 was kept away from to the water pump 5 is provided with inlet tube 51, when using, be connected with inlet tube 51 and storage tank, water pump 5 runs, the inlet tube 51 of connection in water pump 5 is carried rivers to water storage block 8 through raceway 52, the water flow in water storage block 8 is taken out to the shower nozzle 81 in water storage block 8 in the equal order, the water flow that the shower nozzle 81 was taken out is blown out through delivery port 82, the water flow that the water that has sprayed out the fine fog of water of shower nozzle 83, the motor 83 is clean up on the fan blade 83 when clean board is the filter plate 46 and clean the filter plate 46 and dust on the second fan blade 46 is connected with the filter plate 7 when dust on the filter plate 46 and the filter plate is prevented from splashing on the filter plate 46, and dust cleaning board is connected to the filter plate 46, and dust in the filter plate is protected on the filter plate 46.
Referring to fig. 2 and 3, one side of the water pump 5 far away from the water inlet pipe 51 is fixedly connected with a water pipe 52, and the water pipe 52 runs through one side of the filter tank 4 close to the water pump 5, one side of the water pipe 52 far away from the water pump 5 is fixedly connected with the water storage block 8, the bottom swing joint of one side of the filter tank 4 close to the water pump 5 has a baffle 41, the middle part of one side of the baffle 41 far away from the filter tank 4 is connected with a handle 42 by bolts, the bottom of one side of the filter tank 4 close to the wiping plate 43 is connected with a second motor 6 by bolts, the top of the second motor 6 is movably connected with a second rotating rod 61, the top of the outer wall of the second rotating rod 61 is connected with a filter plate 7 by bolts, the top of the inside of the filter tank 4 is connected with a supporting plate 44, the bottom of the supporting plate 44 is movably connected with a first motor 46 by bolts, the bottom of the first motor 46 is movably connected with a first rotating rod 47, and the first rotating rod 47 runs through the supporting plate 44, the bottom of the first rotating rod 47 is connected with a fan blade 48, the bottom of the filter tank 4 is close to the inner bottom of one side of the water storage block 8 by bolts is provided with a dust collecting tank 45, when the dust collecting tank 45 is held by the handle 45, and the dust collecting tank 45 is pulled by the handle 42 and the dust collecting tank 45 is conveniently cleaned by pulling the filter tank 45, and the dust collecting tank 45 is conveniently cleaned and the dust collecting tank 45 is placed in the filter tank 45.
The working principle and the using flow of the utility model are as follows: firstly, when the semiconductor process is required to be exhausted, the machine 1 conveys gas into the first exhaust pipe 2 to be exhausted, then the second motor 6 operates, the second rotating rod 61 connected to the top end of the second motor 6 drives the filter plate 7 to rotate along with the operation of the second motor 6, the filter plate 7 adsorbs dust generated during the exhausting process, the water inlet pipe 51 is connected with the water storage tank, the water pump 5 operates, the water inlet pipe 51 connected to one side of the water pump 5 conveys water flow into the water storage block 8 through the water conveying pipe 52 along with the operation of the water pump 5, the spray heads 81 arranged at the top end of the water storage block 8 in an equal order are used for extracting the water flow in the water storage block 8, the extracted water flow is sprayed with fine water mist through the water outlet 82, the cleaning brush 83 is used for scraping wet dust, the wiping plates 43 connected to the two ends of the inside of the water storage block 8 are used for wiping the water mist on the filter plate 7, the first motor 46 is used for preventing dust on the filter plate 7 from being adsorbed everywhere when the fan blades 48 and the cleaning the dust on the filter plate 7, the first motor 46 is used for operating, the first rotating rod 47 connected to the bottom end of the first motor 46 is used for driving the fan blades 48 to rotate along with the operation of the first motor 46, the dust is used for carrying out the filter plate 45, the dust is held on the filter plate 45, the filter plate 45 is pulled down along with the filter box 45 is pulled down, and finally the dust is held in the filter box is held for being held in the filter box 42, and the filter box is held for being held in the filter box is held by 4, and the filter box is held by 4 after being held by the filter box is held by 4 and is pulled and is held by the filter box 4 and is held by the filter box 4.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.
Claims (10)
1. The utility model provides a semiconductor manufacturing process exhaust automatic control system, its characterized in that, including board (1), one side fixedly connected with first blast pipe (2) of board (1), the outer wall fixedly connected with rose box (4) of first blast pipe (2), the outer wall bolted connection of one side of first blast pipe (2) is kept away from to rose box (4) has water pump (5), the inside that rose box (4) is close to water pump (5) one side is provided with water storage block (8), the top of water storage block (8) is ordered to be arranged has shower nozzle (81), delivery port (82) have been seted up on the top of shower nozzle (81), the middle part fixedly connected with cleaning brush (83) on shower nozzle (81) top, the inside both ends that rose box (4) are close to one side of first blast pipe (2) are provided with and clean board (43).
2. The automatic control system for semiconductor process exhaust according to claim 1, wherein the top end of the first exhaust pipe (2) is fixedly connected with a second exhaust pipe (3), and a water inlet pipe (51) is arranged on one side of the water pump (5) away from the filter box (4).
3. The automatic control system for semiconductor process exhaust according to claim 1, wherein a water pipe (52) is fixedly connected to one side of the water pump (5) away from the water inlet pipe (51), the water pipe (52) penetrates through the filter box (4) to be close to one side of the water pump (5), and one side of the water pipe (52) away from the water pump (5) is fixedly connected with the water storage block (8).
4. The automatic control system for semiconductor process exhaust according to claim 1, wherein a baffle plate (41) is movably connected to the bottom end of the side, close to the water pump (5), of the filter box (4), and a grip (42) is connected to the middle bolt of the side, far away from the filter box (4), of the baffle plate (41).
5. The automatic control system for semiconductor process exhaust according to claim 1, wherein a second motor (6) is connected to the bottom end of the filter box (4) close to one side of the wiping plate (43) through bolts, and a second rotating rod (61) is movably connected to the top end of the second motor (6).
6. The automatic control system for semiconductor process exhaust gas according to claim 5, wherein a filter plate (7) is bolted to the top end of the outer wall of the second rotating rod (61).
7. The automatic control system for semiconductor process exhaust according to claim 1, wherein a supporting plate (44) is bolted to the top end of the inside of the filter box (4), and the bottom end of the supporting plate (44) is movably connected to the top end of the second rotating rod (61).
8. The automatic control system for semiconductor process exhaust according to claim 1, wherein a first motor (46) is connected to a top end of the filter box (4) on a side far away from the second motor (6), a first rotating rod (47) is movably connected to a bottom end of the first motor (46), and the first rotating rod (47) penetrates through the supporting plate (44).
9. The automatic control system for semiconductor process exhaust according to claim 8, wherein a fan blade (48) is bolted to the bottom end of the first rotating rod (47).
10. The automatic control system for semiconductor process exhaust according to claim 1, wherein the filter box (4) is provided with a dust box (45) at the inner bottom end of one side close to the water storage block (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321722147.2U CN220176447U (en) | 2023-07-04 | 2023-07-04 | Automatic exhaust control system for semiconductor manufacturing process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321722147.2U CN220176447U (en) | 2023-07-04 | 2023-07-04 | Automatic exhaust control system for semiconductor manufacturing process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220176447U true CN220176447U (en) | 2023-12-15 |
Family
ID=89113712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321722147.2U Active CN220176447U (en) | 2023-07-04 | 2023-07-04 | Automatic exhaust control system for semiconductor manufacturing process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220176447U (en) |
-
2023
- 2023-07-04 CN CN202321722147.2U patent/CN220176447U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A Semiconductor Process Exhaust Automatic Control System Granted publication date: 20231215 Pledgee: Guanggu Branch of Wuhan Rural Commercial Bank Co.,Ltd. Pledgor: Wuhan blue ocean Intelligent Control Technology Co.,Ltd. Registration number: Y2024980009667 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |