CN219951206U

CN219951206U - Display panel transfer device and coating processing equipment

Info

Publication number: CN219951206U
Application number: CN202321546947.3U
Authority: CN
Inventors: 杨贤烁
Original assignee: LG Display Optoelectronics Technology China Co Ltd
Current assignee: LG Display Optoelectronics Technology China Co Ltd
Priority date: 2023-06-16
Filing date: 2023-06-16
Publication date: 2023-11-03
Anticipated expiration: 2033-06-16

Abstract

The utility model relates to a display panel transfer device and a coating treatment device, wherein the display panel transfer device comprises: the box body is internally provided with a first transfer chamber; the support component is arranged at the bottom of the first transfer chamber; the gas treatment assembly is used for carrying out exhaust treatment and gas injection treatment on the first transfer chamber and comprises a gas pump and a gas pipe, the gas pipe is annularly arranged on the periphery of the first transfer chamber, a plurality of gas holes are formed in the gas pipe at intervals, one end of the gas pump is communicated with the gas pipe, and the other end of the gas pump is communicated with the outside of the box body. During the air extraction or air injection process, air is exhausted or injected from the peripheral region of the first transfer chamber, and the air disturbance region is far away from the display panel positioned in the middle of the first transfer chamber. Air is discharged through a plurality of air holes, the area where gas disturbance occurs in the first transfer cavity is more dispersed, the strength of the air disturbance is reduced, the display panel is prevented from vibrating due to the air disturbance, and the processing quality is guaranteed.

Description

Display panel transfer device and coating processing equipment

Technical Field

The present utility model relates to the field of display manufacturing technologies, and in particular, to a display panel transfer device and a coating processing apparatus.

Background

In the process of manufacturing the display panel, a film layer is formed on a glass plate or a resin plate by a method such as vapor deposition or sputtering, patterns are formed by means of exposure, etching and the like, and then the display panel is subjected to cleaning and drying treatment, and finally the display panel with a display function is formed. When the display panel is subjected to coating treatment, the display panel needs to be transported by using a transfer device. Because the coating chamber for coating treatment is in a vacuum state, when the display panel is conveyed from the transfer device to the coating chamber, the interior of the transfer device needs to be in the same vacuum state as the coating chamber; when the display panel is transported from the relay device to the outside, it is necessary to make the inside of the relay device in the same normal pressure state as the outside.

In the prior art, referring to fig. 1 and 2, a transfer device for transferring a display panel 4' includes a box 1', a transfer chamber 10' is provided in the box 1', four air pipes 2' are distributed on a wall of the transfer chamber 10', and each air pipe 2' is provided with an air pump. Air is pumped into the transfer chamber 10' by the air pipe 2', so that the transfer chamber 10' is in a vacuum state; alternatively, the transfer chamber 10' is inflated by the air pipe 2' so that the transfer chamber 10' is in a normal pressure state. A supporting device 3 'for supporting is arranged in the transfer chamber 10', and a display panel 4 'is placed on the supporting device 3'. The prior art has the following defects: when air is pumped or injected, the four air pipes work simultaneously and are affected by the faults or aging of the air pump, and the working efficiency of the four air pumps is different, so that the air injection efficiency or the air pumping efficiency of the four air pipes is different. Therefore, air disturbance in the transfer chamber 10' is caused during air suction or air injection, and the display panel 4' vibrates under the air disturbance due to the thin thickness of the display panel 4', so that the display panel 4' rubs against the supporting device 3' to cause static electricity, abrasion and other defects.

Disclosure of Invention

An objective of the present utility model is to provide a display panel transfer device, which can prevent the display panel from vibrating due to air disturbance, and ensure the processing quality of the display panel.

Another object of the present utility model is to provide a plating apparatus, which is beneficial to improving the processing quality of the display panel.

To achieve the purpose, the utility model adopts the following technical scheme:

provided is a display panel transfer device including:

the box body is internally provided with a first transferring chamber which can be selectively sealed;

the support component is arranged at the bottom of the first middle rotating chamber and is used for placing a display panel;

the gas treatment assembly is used for carrying out exhaust treatment and gas injection treatment on the first transfer chamber and comprises an air pump and an air pipe, the air pipe is annularly arranged on the periphery of the first transfer chamber, a plurality of air holes are formed in the air pipe at intervals, the air pipe is communicated with the first transfer chamber through the air holes, one end of the air pump is communicated with the air pipe, and the other end of the air pump is communicated with the outside of the box body;

during exhaust treatment, the air pump drives air to flow from the first transfer chamber to the outside of the box body, and the first transfer chamber is in a vacuum state; during gas injection treatment, the gas pump drives air to flow from the outside of the box body to the first transfer chamber, and the first transfer chamber is in a normal pressure state.

As a preferable scheme of the display panel transfer device, the supporting component can be arranged in a lifting manner, and the air pipe and the display panel are positioned on the same horizontal plane during exhaust treatment or gas injection treatment.

As a preferable scheme of the display panel transfer device, two air pipes are arranged, and the two air pipes are respectively positioned at two sides of the display panel in the thickness direction.

As a preferable scheme of the display panel transfer device, the air pipe is provided with a plurality of air hole groups, the air hole groups are uniformly distributed at intervals along the axial direction of the air pipe, each air hole group comprises a plurality of air holes, and the air holes in each air hole group are uniformly distributed at intervals along the circumferential direction of the air pipe.

As a preferable scheme of the transfer device of the display panel, the air holes in the two adjacent air hole groups are distributed in a staggered mode.

As a preferable scheme of the display panel transfer device, the support assembly comprises a support rod and a vacuum chuck arranged at the end part of the support rod, and the vacuum chuck is used for adsorbing the display panel.

As a preferable scheme of the transfer device of the display panel, the aperture of the air hole is 1mm-2mm.

As a preferable scheme of the display panel transfer device, the first transfer chambers are multiple, and the multiple first transfer chambers are distributed at intervals along the vertical direction.

Still provide a coating processing equipment, including coating device and display panel transfer device, coating device includes coating chamber and second transfer cavity, the coating chamber with first transfer cavity passes through the second transfer cavity intercommunication, be provided with the manipulator in the second transfer cavity, the manipulator is used for transporting display panel first transfer cavity with move between the coating chamber.

As a preferable mode of the display panel transfer device, the plurality of coating chambers are arranged, and the plurality of coating chambers are annularly arranged on the periphery of the second transfer chamber.

Compared with the prior art, the utility model has the beneficial effects that:

according to the display panel transfer device and the coating treatment equipment, the air pipe is arranged on the periphery of the first transfer chamber in a surrounding mode, and a plurality of air holes are formed in the air pipe. When the air extraction treatment or the air injection treatment is performed, air is discharged or injected from the peripheral area of the first transfer chamber, so that the air disturbance area is far away from the display panel positioned in the middle of the first transfer chamber, the display panel is prevented from vibrating due to air disturbance, and the adverse condition caused by mutual friction between the display panel and the supporting component is further avoided. And the air is discharged through a plurality of air holes on the air pipe, and when the air suction treatment or the air injection treatment is carried out, the area where the air disturbance occurs in the first transfer chamber can be more dispersed, so that the intensity of the air disturbance is reduced, and the display panel is prevented from vibrating. Therefore, the transfer device in the embodiment can avoid the display panel from vibrating due to air disturbance, further avoid the adverse conditions of static electricity, abrasion and the like caused by friction between the display panel and the supporting component, and is beneficial to ensuring the processing quality of the display panel.

Drawings

Fig. 1 is a cross-sectional view of a first view of a prior art transfer device.

Fig. 2 is a cross-sectional view of a second perspective of a prior art transfer device.

Fig. 3 is a cross-sectional view of a first view of a transfer device in a display panel according to a first embodiment of the utility model.

Fig. 4 is a cross-sectional view of a second view of the transfer device in the display panel according to the first embodiment of the utility model.

Fig. 5 is a partial schematic view of a trachea according to a first embodiment of the utility model.

Fig. 6 is a cross-sectional view of a transfer device for a display panel according to a second embodiment of the utility model.

Fig. 7 is a cross-sectional view of a relay device for a display panel according to a third embodiment of the present utility model.

Fig. 8 is a schematic diagram of a plating processing apparatus according to a fourth embodiment of the present utility model.

In fig. 1 and 2:

1', a box body; 10', a transfer chamber; 2', trachea; 3', a supporting device; 4', a display panel.

Fig. 3 to 8:

1. a case; 11. a first transfer chamber; 12. an outer door; 13. an inner door; 2. a gas treatment assembly; 21. an air pipe; 22. an air pump; 23. air holes; 3. a support assembly; 31. a bottom plate; 32. a support rod; 33. a vacuum chuck; 34. a clamping channel; 4. a display panel;

100. a film coating chamber; 200. a second transfer chamber; 300. a manipulator; 400. and a conveying device.

Detailed Description

Advantages and features of the present utility model and methods of accomplishing the same may become apparent with reference to the following detailed description of embodiments taken in conjunction with the accompanying drawings. However, the present utility model is not limited to the embodiments disclosed below, but may be embodied in various different forms, which are provided only for the purpose of completing the disclosure of the present utility model and fully understanding the scope of the present utility model by those skilled in the art, and the present utility model is limited only by the scope of the claims. Like reference numerals denote like constituent elements throughout the specification.

Hereinafter, the present utility model will be described in detail with reference to the accompanying drawings.

Example 1

As shown in fig. 3 and 4, a display panel relay device (hereinafter referred to as relay device) for transferring the display panel 4 is provided. The display panel 4 includes a glass substrate and a film layer formed on the glass substrate, and is patterned by exposure, etching, and the like, and then is subjected to cleaning, baking, and the like to provide the display function to the display panel 4. The transfer device in this embodiment is used in cooperation with the coating device, that is, the glass substrate is transferred into the coating device through the transfer device to carry out coating treatment, and then transferred to the next process through the transfer device after coating is completed. Therefore, before the coating process, the display panel 4 is a glass substrate; after the film plating treatment, the display panel 4 is a generic name of a glass substrate and a film layer.

The transfer device comprises a box body 1, a gas treatment assembly 2 and a support assembly 3. Wherein, the box 1 is a cuboid cavity structure, and a first transferring chamber 11 for accommodating the display panel 4 is arranged in the box 1. Along the transfer direction of the display panel 4, the opposite sides of the case 1 are respectively provided with an outer door 12 and an inner door 13, and the display panel 4 can enter and exit the first transfer chamber 11 through the outer side 12 or the inner door 13. Specifically, the outer door 12 and the inner surface 13 are located on both sides in the width direction (Y direction in the drawing) of the case 1, respectively. When the outside door 12 and the inside face 13 are in the closed state, the first transit chamber 11 is in the sealed state. The support assembly 3 is arranged at the bottom of the first transfer chamber 11, the display panel 4 can be placed on the support assembly 3, and the support assembly 3 plays a role in supporting the display panel 4. The gas treatment assembly 2 is used for carrying out exhaust treatment and gas injection treatment on the first transfer chamber 11. When the display panel 4 needs to be subjected to the film plating treatment, the display panel 4 needs to be transferred from the first transferring chamber 11 to a film plating device communicated with the box body 1, and the interior of the film plating device is in a vacuum state. Before transferring, the gas treatment assembly 2 is used for carrying out exhaust treatment on the first transferring chamber 11, and air in the first transferring chamber 11 is discharged to the outside of the box body 1, so that the first transferring chamber 11 is in a vacuum state. In a vacuum state, the display panel 4 is transported into the coating device from the first transfer chamber 11; when the display panel 4 is transferred to the next process after being coated, the display panel 4 needs to be transferred from the first transferring chamber 11 to the normal pressure space outside the case 1. Before transferring, the gas treatment assembly 2 is used for carrying out gas injection treatment on the first transferring chamber 11, and external air is injected into the first transferring chamber 11 so as to enable the first transferring chamber 11 to be in a normal pressure state. The display panel 4 is transferred from the first transfer chamber 11 into the external space of the cabinet 1 in the normal pressure state.

The gas treatment assembly 2 comprises a gas pipe 21 and a gas pump 22. The air pipe 21 is annular, and the shape of the air pipe 21 is matched with the shape of the first transfer chamber 11. In this embodiment, the air pipe 21 is formed by enclosing a pipe connected end to end, and the air pipe 21 has a rectangular annular structure. The air pipe 21 is annularly provided at the peripheral portion of the first transfer chamber 11, and the air pipe 21 is mounted on the chamber wall of the first transfer chamber 11. A plurality of air holes 23 are formed in the air pipe 21 at intervals, and the air pipe 21 is communicated with the first transfer chamber 11 through the air holes 23. The air pump 22 is installed outside the case 1, one end of the air pump 22 is communicated with the air pipe 21, and the other end is communicated with the outside of the case 1. At the time of the discharge process, the air pump 22 drives air to flow from the first transfer chamber 11 toward the outside of the casing 1 through the air pipe 21; in the gas injection process, the air pump 22 drives air to flow from the outside of the casing 1 toward the first transfer chamber 11 through the air pipe 21.

It will be appreciated that by surrounding the air pipe 21 around the periphery of the first transfer chamber 11, a plurality of air holes 23 are formed in the air pipe 21. During the air extraction or air injection treatment, air is discharged or injected from the peripheral area of the first transferring chamber 11, so that the air disturbance area is far away from the display panel 4 positioned in the middle of the first transferring chamber 11, and the display panel 4 is prevented from vibrating due to air disturbance, and further, adverse conditions caused by mutual friction between the display panel 4 and the supporting component 3 are avoided. And, the air is discharged through a plurality of air holes 23 on the air pipe 21, so that the area where the air disturbance occurs in the first transfer chamber 11 can be more dispersed during the air extraction or the air injection, thereby reducing the intensity of the air disturbance and further avoiding the vibration of the display panel 4.

Alternatively, each air tube 21 is provided with two air pumps 22, two air pumps 22 are installed at both ends of the length direction (X direction in the drawing) of the case 1, and the two air pumps 22 are connected with the air tubes 21 through connection pipes, respectively.

Alternatively, the support assembly 3 is mounted on a cavity wall at the bottom of the first transfer chamber 11, and the support assembly 3 is located at a middle position of the corresponding cavity wall. The display panel 4 is horizontally placed on the support assembly 3, and the display panel 4 is spaced apart from the cavity wall of the first transfer chamber 11. The air tube 21 is annularly arranged along the circumferential direction of the display panel 4, and the circumferential portion of the display panel 4 is directed to the inner ring side of the air tube 21. By arranging the air pipe 21 and the display panel 4 on the same horizontal plane, the region where air disturbance occurs is located at the peripheral position of the display panel 4 during the air extraction or injection process, and the intensities of the air disturbance occurring on the two sides of the display panel 4 in the thickness direction are similar, so that friction generated due to relative movement between the display panel 4 and the support assembly 3 can be avoided.

In order to avoid interference with the air pipe 21 when the display panel 4 enters and exits the first transferring chamber 11, the supporting component 3 can be lifted and lowered. Namely, a driving piece is also arranged between the supporting component 3 and the box body 1, and the driving piece can be an air cylinder, an electric telescopic piece and the like. The driving piece is used for driving the supporting component 3 to lift. When the box body 1 is required to be subjected to exhaust treatment or gas injection treatment, the driving piece drives the supporting component 3 to descend, and the display panel 4 and the gas pipe 21 are positioned on the same horizontal plane; when the display panel 4 needs to be transported, the driving piece drives the supporting component 3 to ascend, and the display panel 4 and the air pipe 21 are not in the same horizontal plane, so that interference with the air pipe 21 during transportation of the display panel 4 is avoided.

The support assembly 3 includes a base plate 31, a support rod 32, and a vacuum chuck 33. The bottom plate 31 is disposed at the bottom of the first transfer chamber 11, and the bottom plate 31 is parallel to the display panel 4. The support rods 32 are a plurality of, the plurality of support rods 32 are arranged on the bottom plate 31 at intervals, and the support rods 32 are perpendicular to the bottom plate 31. The vacuum chucks 33 are a plurality of, and the plurality of vacuum chucks 33 are arranged in one-to-one correspondence with the plurality of support rods 32. The vacuum chuck 33 is disposed at an end of the support bar 32 facing away from the bottom plate 31, and the display panel 4 is placed on the vacuum chuck 33 so that the display panel 4 can be adsorbed on the vacuum chuck 33. The vacuum chuck 33 is connected with an air pump outside the case 1, and the vacuum chuck 33 is pumped and inflated by the air pump. When the first transferring chamber 11 is subjected to the exhaust treatment or the gas injection treatment, the vacuum chuck 33 is synchronously pumped, so that the display panel 4 is adsorbed on the vacuum chuck 33, and the relative movement between the display panel 4 and the supporting component 3 due to the air disturbance is further avoided.

To facilitate the transport of the display panel 4, the display panel 4 is provided with clamping positions for clamping. The support assembly 3 is provided with a clamping channel 34 corresponding to the clamping position. Specifically, the support rods 32 are arranged at intervals, and by adjusting the interval between the support rods 32, a clamping channel 34 is formed between adjacent support rods 32. In transferring the display panel 4, the clip channel 34 is used to avoid the clip assembly for clipping the display panel 4. The clamping assembly may be a handling robot.

Optionally, the air pipe 21 is provided with a plurality of air hole groups, and the plurality of air hole groups are uniformly distributed at intervals along the axial direction of the air pipe 21. Each of the air hole groups includes a plurality of air holes 23, and the plurality of air holes 23 in each air hole group are uniformly spaced apart in the circumferential direction of the air tube 21. The air holes in the two adjacent air hole groups are distributed in a staggered manner, so that all the air holes 23 are distributed on the air pipe 21 more uniformly. During the exhaust process or the gas injection process, air turbulence mainly occurs in the surrounding area of the air hole 23. By uniformly arranging the air holes 23, the area where the air disturbance occurs can be more dispersed and uniform, thereby avoiding the vibration of the display panel 4 due to the air disturbance.

Alternatively, referring to fig. 5, a plurality of air holes 23 are distributed in the circumferential portion of the air tube 21. The pore diameter of the air hole 23 is D, d=1 mm to 2mm. Specifically, the size of the aperture D of the air hole 23 includes, but is not limited to, 1mm, 1.2mm, 1.4mm, 1.6mm, 1.8mm, 2mm. In practical application, the aperture size of the air hole 23 can be reasonably selected according to factors such as the air flow rate of the air hole 23, the distance between the air pipe 21 and the display panel 4, and the like, so as to reduce the risk of vibration of the display panel 4 caused by air disturbance.

The technical effects of this embodiment are: the air pipe 21 is surrounded by the peripheral portion of the first transfer chamber 11, and a plurality of air holes 23 are formed in the air pipe 21. During the air extraction or air injection treatment, air is discharged or injected from the peripheral area of the first transferring chamber 11, so that the air disturbance area is far away from the display panel 4 positioned in the middle of the first transferring chamber 11, and the display panel 4 is prevented from vibrating due to air disturbance, and further, adverse conditions caused by mutual friction between the display panel 4 and the supporting component 3 are avoided. And, the air is discharged through a plurality of air holes 23 on the air pipe 21, so that the area where the air disturbance occurs in the first transfer chamber 11 can be more dispersed during the air extraction or the air injection, thereby reducing the intensity of the air disturbance and further avoiding the vibration of the display panel 4. Therefore, the transfer device in this embodiment can avoid the display panel 4 from vibrating due to air disturbance, so as to avoid the adverse conditions of static electricity, abrasion and the like caused by friction between the display panel 4 and the supporting component 3, which is beneficial to ensuring the processing quality of the display panel 4.

Example two

As shown in fig. 6, the structure of the display panel transfer device provided in this embodiment is similar to that of the first embodiment, in which a plurality of first transfer chambers 11 are disposed in the case 1, and the plurality of first transfer chambers 11 are distributed at intervals along the vertical direction. Each first transfer chamber 11 is internally provided with a support component 3, and each first transfer chamber 11 is correspondingly provided with a set of gas treatment components 2. The gas treatment assembly 2 is used for carrying out exhaust treatment and gas injection treatment on the corresponding first transfer chamber 11. This configuration allows each first transfer chamber 11 to operate independently. So as to transport the plurality of display panels 4 and thereby improve the processing efficiency.

Example III

As shown in fig. 7, the present embodiment provides a display panel transfer device, which has a similar structure to the first embodiment, and the area is that two air pipes 21 are provided, and the two air pipes 21 are respectively located at two sides of the thickness direction (Z direction in the drawing) of the display panel 4. It will also be appreciated that the two air pipes 21 are adjacent to the top and bottom chamber walls of the first transfer chamber 11, respectively. The display panel 4 is located between the two air tubes 21, and the space between the display panel 4 and the two air tubes 21 is the same. This configuration allows the air holes 23 to be more dispersed throughout the first transfer chamber 11, further reducing air turbulence during exhaust and injection processes.

Example IV

As shown in fig. 8, there is also provided a plating processing apparatus for performing a plating process on the display panel 4. The coating treatment equipment comprises a coating device and a display panel transfer device, wherein the coating device carries out coating treatment on the display panel 4 through a chemical vapor deposition process. The chemical vapor deposition process is a prior art and will not be described in detail herein. The coating device comprises a coating chamber 100 and a second transfer chamber 200. The coating chamber 100 and the second transfer chamber 200 are in a vacuum state. The cross section of the second transferring chamber 200 is hexagonal, that is, in the horizontal direction, the second transferring chamber 200 has six sides, and each side is provided with a chamber door for the display panel 4 to enter and exit. One end of the case 1 having the inner door 13 is connected to one of the sides of the second transfer chamber 200, and the case 1 communicates with the second transfer chamber 200 through the inner door 13. The number of the coating chambers 100 is five, and the five coating chambers 100 are respectively communicated with five sides of the second transfer chamber 200, on which the box body 1 is not arranged. The second transfer chamber 200 is internally provided with a manipulator 300, and the manipulator 300 is used for transferring the display panel 4 in the first transfer chamber 11 into the coating chamber 100 through the second transfer chamber 200, or transferring the display panel 4 in the coating chamber 100 into the first transfer chamber 11 through the second transfer chamber 200. The end of the case 1 having the outer door 12 is provided with a conveying device 400, and the conveying device 400 includes a plurality of rollers for conveying the display panel 4.

It is understood that the coating chambers 100 are provided in plurality, and the plurality of coating chambers 100 are disposed around the periphery of the second transfer chamber 200. In practice, the coating chamber 100 may be matched according to the shape of the second transfer chamber 200. That is, when the second transfer chamber 200 is hexagonal, one side of the second transfer chamber 200 is used for mounting the case 1, and the remaining five sides are used for disposing the coating chamber 100. By arranging the plurality of coating chambers 100, the synchronous coating treatment of the plurality of coating chambers 100 is facilitated, and the processing efficiency is improved.

The working process of the coating treatment equipment is as follows: in the first step, the display panel 4 is conveyed into the first transferring chamber 11 by the conveying device 400, the inner door 13 and the outer door 12 of the first transferring chamber 11 are both closed, and the gas treatment assembly 2 is utilized to perform the exhaust treatment on the first transferring chamber 11, so that the first transferring chamber 11 is in a vacuum state. In the second step, the inner door 13 of the first transfer chamber 11 is opened, and the robot 300 transfers the display panel 4 from the first transfer chamber 11 through the second transfer chamber 200 into the plating chamber 100. In the third step, the display panel 4 is subjected to a coating process in the coating chamber 100. Fourth, after the film plating is completed, the manipulator 300 transfers the display panel 4 from the film plating chamber 100 through the second transfer chamber 200 into the first transfer chamber 11. And fifthly, closing the inner door 13 of the first transfer chamber 11, and performing gas injection treatment on the first transfer chamber 11 by using the gas treatment assembly 2, so that the first transfer chamber 11 is in a normal pressure state. In the sixth step, the outer door 12 of the first transfer chamber 11 is opened, and the display panel 4 is transported to the next process by the transporting device 400.

In this embodiment, since the air disturbance of the display panel 4 in the first rotating chamber 11 is small, the adverse conditions such as static electricity and abrasion caused by friction between the display panel 4 and the supporting component 3 are avoided, and the processing quality of the display panel 4 is improved. Meanwhile, the plurality of coating chambers 100 are annularly arranged at the periphery of the second transferring chamber 200, so that the manipulator 300 can continuously transfer the display panel 4 into the coating chambers 100, thereby improving the processing efficiency.

Although the embodiments of the present utility model have been described above with reference to the accompanying drawings, the present utility model is not limited to the above embodiments, but may be manufactured in various forms, and it will be understood by those skilled in the art that the present utility model may be embodied in other specific forms without changing the technical spirit or essential features of the present utility model. Accordingly, it should be understood that the above-described embodiments are illustrative in all respects and not restrictive.

Claims

1. A display panel relay device, comprising:

2. The display panel transfer device of claim 1, wherein the support assembly is configured to be lifted and lowered, and the air pipe and the display panel are positioned at the same horizontal plane during the exhaust treatment or the gas injection treatment.

3. The display panel relay device according to claim 1, wherein the number of the air pipes is two, and the two air pipes are respectively located at both sides of the display panel in the thickness direction.

4. The display panel transfer device according to claim 1, wherein a plurality of air hole groups are provided on the air pipe, the plurality of air hole groups are uniformly spaced along the axis direction of the air pipe, each air hole group comprises a plurality of air holes, and the plurality of air holes in each air hole group are uniformly spaced along the circumferential direction of the air pipe.

5. The relay device of claim 4, wherein the air holes in two adjacent air hole groups are staggered.

6. The display panel relay device of claim 1, wherein the support assembly comprises a support bar and a vacuum chuck disposed at an end of the support bar, the vacuum chuck being configured to adsorb the display panel.

7. The relay device for display panels according to any one of claims 1 to 6, wherein the pore diameter of the air hole is 1mm to 2mm.

8. The display panel relay device according to any one of claims 1 to 6, wherein the first relay chambers are plural and the plural first relay chambers are spaced apart in a vertical direction.

9. A film plating apparatus comprising a film plating device and the display panel transfer device according to any one of claims 1 to 8, wherein the film plating device comprises a film plating chamber and a second transfer chamber, the film plating chamber is communicated with the first transfer chamber through the second transfer chamber, and a manipulator is arranged in the second transfer chamber and is used for conveying the display panel to move between the first transfer chamber and the film plating chamber.

10. The plating apparatus of claim 9, wherein there are a plurality of said plating chambers, a plurality of said plating chambers being disposed around a periphery of said second transfer chamber.