CN219899317U

CN219899317U - Cleaning equipment

Info

Publication number: CN219899317U
Application number: CN202321136232.0U
Authority: CN
Inventors: 高翔鹰; 韩军; 胡进忠
Original assignee: Shanghai Xinbi Technology Co ltd
Current assignee: Shanghai Xinbi Technology Co ltd
Priority date: 2023-05-11
Filing date: 2023-05-11
Publication date: 2023-10-27
Anticipated expiration: 2033-05-11

Abstract

The utility model discloses cleaning equipment, which comprises an equipment main body, wherein a motor is fixedly connected to the outer part of the equipment main body, a reciprocating screw rod is rotatably connected to the inner part of the equipment main body, a sliding block is connected to the outer thread of the reciprocating screw rod, a cleaning box is fixedly connected to the top of the sliding block, a sleeve is rotatably connected to the inner part of the cleaning box, and a stirring rod is fixedly connected to the outer part of the sleeve; the beneficial effects achieved by the utility model are as follows: can make pawl and ratchet groove block under the effect of spring, when the motor drives the forward rotation of pivot, the pivot can drive the puddler through the sleeve pipe and stir the semiconductor in the washing case, and the washing of cooperation cleaner promotes the cleaning effect for semiconductor and cleaner contact are more abundant, and when the motor drive pivot reverse rotation, the pivot can drive reciprocating screw through first gear and second gear and rotate, drives the washing case through the slider and removes, reaches the purpose of adjusting the position of washing case.

Description

Cleaning equipment

Technical Field

The utility model relates to the technical field of semiconductor manufacturing, in particular to cleaning equipment.

Background

Semiconductors are widely used in electronic products, such as computers, mobile phones or digital recorders, and have a very close relationship with semiconductors. During the manufacture of semiconductors, oil stains remain on the surface, and therefore cleaning of the semiconductors is required. At present, dipping cleaning is mainly adopted, stains are dissolved in cleaning liquid to cause the reduction of cleaning quality, and after the cleaning, the surface of a semiconductor still has liquid residues to influence the cleaning effect.

The Chinese patent discloses a cleaning device for semiconductor manufacturing, the patent number of which is CN202122389650.8, and the scheme records a cleaning device for semiconductor manufacturing, which belongs to the technical field of semiconductor manufacturing and comprises a device main body and a cleaning water tank, wherein the cleaning water tank is positioned above the device main body, the interior of the device main body is divided into a cleaning chamber and a drying chamber by a partition board, sliding rails are symmetrically arranged on the side wall between the cleaning chamber and the drying chamber and positioned below the partition board, the sliding rails are movably connected with a cleaning box, and one side of the cleaning box is connected with the side wall of the drying chamber by a telescopic device; the cleaning device is characterized in that a fixed pipe is arranged below a water inlet of the cleaning chamber, a pressurizing pump is arranged on the fixed pipe, the bottom end of the fixed pipe is connected with a spray head, the water inlet of the cleaning chamber is communicated with a water outlet of a cleaning water tank, a stirring device is arranged in the cleaning water tank, and a dryer is arranged at the top of the drying chamber. The equipment is used for directly drying the semiconductor after cleaning, so that liquid is prevented from remaining on the surface of the semiconductor, but certain problems still exist, and when the semiconductor placed in the cleaning box is cleaned, the semiconductor is simply washed by the cleaning agent sprayed by the spray head, the semiconductor in the cleaning process is not stirred, and the condition that the semiconductor is not fully contacted with the cleaning agent easily occurs, so that the cleaning effect is influenced.

Disclosure of Invention

The present utility model is directed to a cleaning apparatus for solving the above-mentioned problems.

In order to achieve the above purpose, the present utility model provides the following technical solutions:

the utility model provides a cleaning equipment, includes the equipment main part, the outside fixedly connected with motor of equipment main part, the inside rotation of equipment main part is connected with reciprocating screw, reciprocating screw's outside threaded connection has the slider, the top fixedly connected with washs the case, the inside rotation of wasing the case is connected with the sleeve pipe, the outside fixedly connected with puddler of sleeve pipe, the inside sliding connection of sleeve pipe has the pivot, the one end and the equipment main part rotation of pivot are connected, the other end and the output fixed connection of motor of pivot, the outside rotation of pivot is connected with first gear, reciprocating screw's outside fixedly connected with second gear, second gear and first gear engagement are connected, the inside rotation of pivot is connected with the pawl, fixedly connected with spring between pawl and the pivot, the ratchet groove that uses with the pawl cooperation has been seted up to the inside of first gear.

Preferably, the inside fixedly connected with baffle of equipment main part, fixedly connected with shower nozzle between baffle and the equipment main part, the top fixedly connected with force (forcing) pump of shower nozzle, the top fixedly connected with clean water tank of equipment main part, the water inlet of force (forcing) pump communicates with clean water tank through the pipeline, the delivery port of force (forcing) pump communicates with the shower nozzle through the pipeline.

Preferably, a dryer is fixedly connected to the inside of the apparatus body.

Preferably, the outside fixedly connected with control panel of equipment main part, motor, force (forcing) pump, drying-machine all with control panel electric connection.

Preferably, the cross section of the rotating shaft is of a square structure.

The beneficial effects achieved by the utility model are as follows: through the equipment main part, a motor, reciprocating screw, the slider, wash the case, the sleeve pipe, the puddler, the pivot, first gear, the second gear, the pawl, the spring, the ratchet groove, can make pawl and ratchet groove block under the effect of spring, when the motor drives the forward rotation of pivot, the pivot can drive the puddler through the sleeve pipe and stir the semiconductor in the case of wasing, the washing of cooperation cleaner promotes the cleaning performance, make semiconductor and cleaner contact more abundant, drive the pivot and reverse rotation when the motor, the pivot can drive reciprocating screw through first gear and second gear and rotate, drive the case through the slider and remove, reach the purpose of adjusting the position of wasing the case.

Drawings

The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model. In the drawings:

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic cross-sectional view of the present utility model;

fig. 3 is a schematic cross-sectional view of a spindle according to the present utility model.

In the figure: 1. an apparatus main body; 2. a motor; 3. a reciprocating screw rod; 4. a slide block; 5. a cleaning box; 6. a sleeve; 7. a stirring rod; 8. a rotating shaft; 9. a first gear; 10. a second gear; 11. a pawl; 12. a spring; 13. ratchet grooves; 14. a partition plate; 15. a spray head; 16. a pressurizing pump; 17. cleaning the water tank; 18. a dryer; 19. and a control panel.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1 to 3, the present utility model provides a technical solution:

the cleaning equipment comprises an equipment main body 1, wherein a motor 2 is fixedly connected to the outside of the equipment main body 1, a reciprocating screw rod 3 is rotatably connected to the inside of the equipment main body 1, a sliding block 4 is connected to the outside of the reciprocating screw rod 3 in a threaded manner, a cleaning box 5 is fixedly connected to the top of the sliding block 4, a sleeve 6 is rotatably connected to the inside of the cleaning box 5, a stirring rod 7 is fixedly connected to the outside of the sleeve 6, and the stirring rod 7 is driven to stir semiconductors in the cleaning box 5 through the sleeve 6 when a rotating shaft 8 rotates, so that the semiconductors can be better contacted with a cleaning agent, and the cleaning effect is improved; the inside sliding connection of sleeve pipe 6 has pivot 8, the one end and the equipment main part 1 rotation of pivot 8 are connected, the other end and the output fixed connection of motor 2 of pivot 8, the outside rotation of pivot 8 is connected with first gear 9, the outside fixedly connected with second gear 10 of reciprocating screw 3, second gear 10 and first gear 9 meshing are connected, the inside rotation of pivot 8 is connected with pawl 11, fixedly connected with spring 12 between pawl 11 and the pivot 8, ratchet groove 13 with pawl 11 cooperation use has been seted up to the inside of first gear 9, spring 12 drives pawl 11 and ratchet groove 13 block all the time, but only can drive the outside first gear 9 rotation of pivot 8 when pivot 8 counter-rotating, thereby cooperation second gear 10 drives reciprocating screw 3 rotation.

The inside of the equipment main body 1 is fixedly connected with a partition plate 14, a spray head 15 is fixedly connected between the partition plate 14 and the equipment main body 1, the top of the spray head 15 is fixedly connected with a pressure pump 16, the top of the equipment main body 1 is fixedly connected with a cleaning water tank 17, a water inlet of the pressure pump 16 is communicated with the cleaning water tank 17 through a pipeline, a water outlet of the pressure pump 16 is communicated with the spray head 15 through a pipeline, and the pressure pump 16 pumps out a cleaning agent in the cleaning water tank 17 and sprays the cleaning agent to the cleaning tank 5 through the spray head 15 to clean semiconductors; a dryer 18 is fixedly connected to the inside of the apparatus body 1 for drying the washed semiconductor; the control panel 19 is fixedly connected to the outside of the equipment main body 1, the motor 2, the booster pump 16 and the dryer 18 are electrically connected with the control panel 19, and electric equipment in the equipment is powered by an external power supply; the cross section of pivot 8 is square structure, and square structure makes pivot 8 can drive sleeve pipe 6 and rotate to drive puddler 7 and rotate, and pivot 8 cooperation sleeve pipe 6 plays the effect that carries out spacingly to wasing case 5 simultaneously, can drive through slider 4 and washs case 5 and remove when making reciprocal lead screw 3 rotate.

Specifically, when the utility model is used, firstly, the pressurizing pump 16 is started through the control panel 19 to pump out the cleaning agent in the cleaning water tank 17, the cleaning agent is sprayed to the cleaning tank 5 through the spray head 15, semiconductors in the cleaning tank 5 are washed, meanwhile, the motor 2 is started to drive the rotating shaft 8 to rotate positively, at the moment, the rotating shaft 8 only rotates independently, the stirring rod 7 is driven by the sleeve 6 to stir the semiconductors in the cleaning tank 5, the stirring effect is improved, after the cleaning is finished, the motor 2 is controlled to rotate reversely, at the moment, the rotating shaft 8 drives the first gear 9 to rotate under the action of the pawl 11 and the ratchet groove 13, so that the reciprocating screw 3 drives the cleaning tank 5 to move to the lower part of the dryer 18 through the sliding block 4, and the dryer 18 is started to dry the cleaned semiconductors.

In the description of the present utility model, it should be understood that the terms "coaxial," "bottom," "one end," "top," "middle," "another end," "upper," "one side," "top," "inner," "front," "center," "two ends," etc. indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," "third," "fourth," and the like are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated, whereby features defining "first," "second," "third," "fourth" may explicitly or implicitly include at least one such feature.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "configured," "connected," "secured," "screwed," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intermediaries, or in communication with each other or in interaction with each other, unless explicitly defined otherwise, the meaning of the terms described above in this application will be understood by those of ordinary skill in the art in view of the specific circumstances.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a cleaning equipment, includes equipment main part (1), the outside fixedly connected with motor (2) of equipment main part (1), the inside rotation of equipment main part (1) is connected with reciprocating screw (3), the outside threaded connection of reciprocating screw (3) has slider (4), the top fixedly connected with of slider (4) washs case (5), its characterized in that: the inside of wasing case (5) rotates and is connected with sleeve pipe (6), the outside fixedly connected with puddler (7) of sleeve pipe (6), the inside sliding connection of sleeve pipe (6) has pivot (8), the one end and the equipment main part (1) swivelling joint of pivot (8), the other end and the output fixed connection of motor (2) of pivot (8), the outside of pivot (8) rotates and is connected with first gear (9), the outside fixedly connected with second gear (10) of reciprocating screw (3), second gear (10) and first gear (9) meshing are connected, the inside rotation of pivot (8) is connected with pawl (11), fixedly connected with spring (12) between pawl (11) and pivot (8), ratchet groove (13) that use with pawl (11) cooperation have been seted up to the inside of first gear (9).

2. A cleaning apparatus as claimed in claim 1, wherein: the novel cleaning device comprises a device body (1), wherein a partition plate (14) is fixedly connected to the inside of the device body (1), a spray head (15) is fixedly connected between the partition plate (14) and the device body (1), a pressurizing pump (16) is fixedly connected to the top of the spray head (15), a cleaning water tank (17) is fixedly connected to the top of the device body (1), a water inlet of the pressurizing pump (16) is communicated with the cleaning water tank (17) through a pipeline, and a water outlet of the pressurizing pump (16) is communicated with the spray head (15) through a pipeline.

3. A cleaning apparatus as claimed in claim 2, wherein: the inside of the equipment main body (1) is fixedly connected with a dryer (18).

4. A cleaning apparatus according to claim 3, wherein: the outside fixedly connected with control panel (19) of equipment main part (1), motor (2), force (forcing) pump (16), drying-machine (18) all are connected with control panel (19) electric property.

5. A cleaning apparatus as claimed in claim 1, wherein: the cross section of the rotating shaft (8) is of a square structure.