CN219798407U - A monitoring system for clean storage environment - Google Patents

Abstract

The utility model provides a monitoring system for a clean storage environment, which includes: at least one sensor module. Each sensor module is arranged one-to-one in each storage area and is configured to perform operations related to the storage area where the sensor module is located. Measurement operations associated with the environment; at least one first control module connected to the sensor module in a one-to-one correspondence, the first control module is configured to collect the measurement results of the sensor module connected to it and send the Analyzing the measurement results to obtain environmental parameters; and a second control module connected to each of the first control modules, the second control module being configured to obtain the environmental parameters analyzed by each of the first control modules and converting the The above environmental parameters are transmitted to the host computer. The utility model can monitor in real time whether the environment in the storage area is abnormal/faulty, thereby ensuring the environmental safety of the storage area and preventing storage objects from being contaminated or damaged during storage.

Description

A monitoring system for clean storage environment

Technical field

The utility model relates to the field of environmental monitoring, in particular to a monitoring system for a clean storage environment.

Background technique

Semiconductor products (such as wafers) or semiconductor production tools (such as masks) have certain requirements for the cleanliness of the storage environment during storage. For example, for masks, if a mask is contaminated or damaged during storage, any defects in the mask may be repeatedly transferred to hundreds or thousands of semiconductor wafers, causing immeasurable losses. .

The traditional mask box storage equipment is not equipped with a corresponding monitoring system. When the gas pipelines in the mask box storage equipment are blocked, leaked and other abnormal/faulty conditions occur, monitoring cannot be carried out in a timely manner, which may lead to mask failure. The version is contaminated or damaged.

Utility model content

In order to solve the problem that the existing technology cannot timely monitor whether gas pipeline blockage, leakage and other abnormalities/failures occur in a clean storage environment, the utility model provides a monitoring system for a clean storage environment.

In order to achieve the above objects, the present utility model provides the following technical solutions:

A monitoring system for clean storage environment, including:

At least one sensor module, each of which is disposed one-to-one in each storage area and configured to perform measurement operations associated with the environment of the storage area where the sensor module is located;

At least one first control module is connected to the sensor module in a one-to-one correspondence, the first control module is configured to collect the measurement results of the sensor module connected thereto and analyze the measurement results to obtain environmental parameters; and ,

A second control module connected to each of the first control modules, the second control module is configured to obtain the environmental parameters analyzed by each of the first control modules and transmit the environmental parameters to the host computer.

Preferably, the sensor module includes at least one of a temperature sensor, a humidity sensor, a pressure sensor and an air flow sensor, wherein the storage area is an internal storage space of a storage box, and the probe of the sensor module is disposed on the storage box. within the internal accommodation space.

Preferably, the monitoring system further includes the host computer, and the host computer is connected to the second control module.

Preferably, the monitoring system further includes an alarm module connected to the host computer, or the host computer has an alarm module.

Preferably, the first control module includes:

The first micro control unit;

A sensor interface unit, the sensor interface unit is used to implement communication between the first micro-control unit and the sensor module; and,

A first communication unit, the first communication unit is used to implement communication between the first micro control unit and the second control module;

The second control module includes:

second microcontrol unit; and,

A second communication unit, the second communication unit is used to realize communication between the second micro-control unit and the first control module, and between the second micro-control unit and the host computer.

Preferably, the sensor interface unit is an IIC communication interface, and the first communication unit and the second communication unit are RS485 communication units.

Preferably, the second communication unit includes a plurality of reserved communication interfaces for connecting with the first control module.

Preferably, each of the first control modules is disposed on a different daughter board, and the second control module is disposed on a motherboard.

Preferably, the daughter board is arranged in a daughter board installation box, and the daughter board installation box includes a first box body, the first box body is provided with a first opening for exposing the sensor interface unit, and a first opening for exposing the sensor interface unit, and a first opening for exposing the sensor interface unit. The second opening exposes the interface of the first communication unit.

Preferably, the motherboard is disposed in a motherboard installation box, the motherboard installation box includes a second box body, and a third opening for exposing the interface of the second communication unit is opened on the second box body. .

Preferably, the daughter board and the mother board are provided in the same installation box.

Compared with the existing technology, the utility model has the following beneficial effects:

When the monitoring system of the present invention is used, the environmental changes in the storage area can be monitored in real time through the sensor modules installed in each storage area. At the same time, the measurement results of the sensor modules can be transmitted in real time through the first control module and the second control module. to the host computer so that the host computer can monitor the environment in the storage area in real time for abnormalities/faults such as gas pipeline occlusion and air leakage, providing a basis for timely warning, thereby ensuring the environmental safety of the storage area and avoiding storage objects (such as masks). version) is contaminated or damaged during storage. In addition, by setting the hierarchical structure of the first control module and the second control module, the environmental parameters analyzed by each first control module are collected by the second control module and then sent to the host computer, which can avoid frequent interactions between each first control module. The host computer communicates and wastes the communication resources of the host computer.

Description of the drawings

Figure 1 is a circuit schematic diagram of a clean storage environment monitoring system in Embodiment 1 of the present utility model;

Figure 2 is a circuit schematic diagram of a clean storage environment monitoring system in Embodiment 2 of the present utility model;

Figure 3 is a circuit schematic diagram of the first control module in Embodiment 3 of the present utility model;

Figure 4 is a circuit schematic diagram of the second control module in Embodiment 4 of the present utility model;

Figure 5A is an application schematic diagram of Embodiment 5 of the present utility model;

Figure 5B is another application schematic diagram of Embodiment 5 of the present utility model;

Figure 6A is a schematic structural diagram of a neutron board installation box in Embodiment 5 of the present utility model;

Figure 6B is a cross-sectional view of the neutron board installation box in Embodiment 5 of the present utility model;

Figure 7 is a front view of the motherboard installation box in Embodiment 5 of the present invention;

Figure 8 is an installation schematic diagram of the motherboard and the daughter board installed in the same installation box in Embodiment 5 of the present invention.

Detailed ways

In order to make the purpose, technical solutions and advantages of the present utility model more clear, the utility model will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention and are not intended to limit the present invention. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present utility model.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the disclosure. As used in this disclosure and the appended claims, the singular forms "a," "the" and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. It will also be understood that the term "and/or" as used herein refers to and includes any and all possible combinations of one or more of the associated listed items.

Example 1

This embodiment provides a monitoring system for a clean storage environment. As shown in FIG. 1 , the monitoring system includes at least one sensor module 1 , at least one first control module 2 , a second control module 3 and a host computer 4 . Wherein, each sensor module 1 is arranged one-to-one in each storage area and is configured to perform measurement operations associated with the environment of the storage area where the sensor module is located; the first control module 2 is connected to the sensor module 1 in a one-to-one correspondence , and the first control module 2 is configured to collect the measurement results of the sensor module 1 connected thereto and analyze the measurement results to obtain environmental parameters; the second control module 3 is connected to each first control module 2 and the host computer 4, and the The second control module 3 is configured to obtain the environmental parameters analyzed by each first control module 2 and transmit the obtained environmental parameters to the host computer 4 .

Specifically, the sensor module 1 in this embodiment may include one or more of a temperature sensor, a humidity sensor, a pressure sensor and an air flow sensor. Among them, the temperature sensor is used to measure the temperature of the storage area, the humidity sensor is used to measure the humidity of the storage area, the pressure sensor is used to measure the pressure of the storage area, and the air flow sensor is used to measure the air flow of the storage area. In an optional implementation, the temperature sensor and the humidity sensor can be integrated together, that is, a temperature and humidity sensor with integrated temperature and humidity measurement function can be used. For example, a high-precision temperature and humidity detection chip can be used.

When the above monitoring system is in use, the environmental changes in the storage area can be monitored in real time through the sensor module 1 installed in each storage area. At the same time, the measurement results of the sensor module 1 can be recorded in real time through the first control module 2 and the second control module 3. Transmitted to the host computer 4, so that the host computer 4 can monitor in real time whether the environment in the storage area is abnormal/faulty, and provide a basis for issuing early warnings in a timely manner, thereby ensuring the environmental security of the storage area and preventing storage objects (such as masks) from being stored in the storage area. contaminated or damaged. In addition, by setting the hierarchical structure of the first control module 2 and the second control module 3 so that the environmental parameters analyzed by each first control module 2 are collected by the second control module 3 and then sent to the host computer 4, it is possible to avoid each A control module 2 frequently communicates with the host computer 4 and wastes the communication resources of the host computer 4 .

It should be noted that the storage area in this embodiment is the internal storage space of the storage box (such as the mask box), and the probe of the sensor module is arranged in the internal storage space of the storage box to measure the environment in the storage box. .

Example 2

This embodiment is a further improvement to Embodiment 1. As shown in Figure 2, compared to Embodiment 1, the monitoring system in this embodiment adds an alarm module 5 connected to the host computer 4.

In this embodiment, after receiving the environmental parameters uploaded by the second control module 3, the host computer 4 will store the environmental parameters and determine whether an alarm is needed based on the environmental parameters. Specifically, a threshold range of corresponding environmental parameters is preset in the host computer 4. When the environmental parameters exceed the corresponding threshold range, the host computer 4 determines that an alarm is needed, and then controls the alarm module 5 to send out corresponding alarm information, so that timely Remind staff to ensure environmental safety in storage areas.

For example, for mask box storage equipment, when the temperature and humidity in the storage area exceed the upper limit, there may be insufficient inflation, which may be caused by leakage or blockage of the air inlet air path; when the temperature and humidity are lower than the lower limit, When the value is exceeded, there may be situations where the probe is damaged and cannot work normally, and the alarm module 5 should be controlled to send out corresponding alarm information.

Preferably, the alarm module 5 can be implemented using a sound and light alarm. In an optional implementation, the alarm module 5 includes one or more sound and light alarms. The sound and light alarms are set in one-to-one correspondence with each sensor module 1. When the environmental parameter corresponding to a certain sensor module 1 exceeds the corresponding threshold range, the host computer 4 will control the sound and light alarm to issue an alarm message so that the staff can quickly locate the abnormality. /Faulty storage area. In addition, the alarm module 5 can also be implemented using a display screen. The display screen can also be used to display the environmental parameters corresponding to each storage area in real time for the staff to view, so that the staff can quickly find the storage area where an abnormality/fault occurs.

It should be noted that, in addition to the embodiment shown in Figure 2 in which the alarm module 5 is connected to the host computer 4, the alarm module 5 can also be integrated into the host computer 4, that is, the host computer 4 has the alarm module 5. For example, the alarm module can be an information sending module integrated in the host computer. When the environmental parameter corresponding to a certain sensor module 1 exceeds the corresponding threshold range, the host computer 4 will send a corresponding alarm to the mobile terminal of the staff through the alarm module 5 information.

Example 3

This embodiment provides a specific implementation of the first control module 2 in the previous embodiment. In this embodiment, as shown in FIG. 3 , the first control module 2 specifically includes: a first micro control unit (MCU) 21 , a sensor interface unit 22 and a first communication unit 23 . Among them, the sensor interface unit 22 is used to realize communication between the first micro-control unit 21 and the sensor module 1; the first communication unit 23 is used to realize the communication between the first micro-control unit 21 and the second control module 3. For example, the sensor interface unit 22 can be implemented using an IIC communication interface, and the first communication unit 23 can be implemented using an RS485 communication unit.

In addition, as shown in Figure 3, the first control module 2 in this embodiment may also include a first memory 24 connected to the first micro control unit 21 and a first power supply unit 25, both of which are conventional in the control module. Settings will not be described in detail here.

When this embodiment is used, the measurement results of the sensor module 1 are first uploaded to the first micro-control unit 21 through the sensor interface unit 22, and then the measurement results are analyzed into corresponding environmental parameters through the first micro-control unit 21, and the analysis is The obtained environmental parameters are uploaded to the second control module 3 through the first communication unit 23 .

Example 4

This embodiment provides a specific implementation of the second control module 3 in the previous embodiment. In this embodiment, as shown in Figure 4, the second control module 3 specifically includes: a second micro-control unit 31 and a second communication unit 32, where the second communication unit 32 is used to implement the communication between the second micro-control unit 31 and the second communication unit 32. Communication between the first control modules 2 and between the second micro control unit 31 and the host computer 4 . For example, the second communication unit 32 can be implemented using an RS485 communication interface.

In an implementable manner, the second communication unit 32 is connected to the second micro-control unit 31 and includes a communication interface (can be recorded as a first communication interface) for connecting to the host computer 4, and a plurality of communication interfaces for connecting to the host computer 4. A communication interface connected to the first control module 2 (can be recorded as a second communication interface). In another implementable manner, the second communication unit 32 has a communication interface that is connected to the upper computer 4 and the first control module 2 at the same time. The communication interface can be connected to the upper computer 4 and the first control module 2 in a time-division multiplexing manner. Module 2 Communication.

In this embodiment, the second communication unit 32 may reserve multiple communication interfaces for connecting with the first control module 2, thereby being able to support multiple first control modules 2 according to the number of actual storage areas. At the same time, the modular structure can also simplify the upgrade and transformation work. Compared with the direct connection between each sensor module 1 or the first control module 2 and the host computer 4, this implementation can reduce the distance between the sensor module 1 and the host computer 4. hardware connection costs, thereby reducing overall costs.

In addition, as shown in Figure 4, the second control module 3 in this embodiment may also include a second memory 33 connected to the second micro-control unit 31 and a second power supply unit 34, both of which are conventional in the control module. Settings will not be described in detail here.

When this embodiment is used, the environmental parameters uploaded by the first control module 2 are first transmitted to the second micro-control unit 31 through the second communication interface in the second communication unit 32, and then the second micro-control unit 31 transmits the environmental parameters to the second micro-control unit 31. The parameters are uploaded to the host computer 4 through the first communication interface in the second communication unit 32 .

Example 5

This embodiment is a further improvement to the previous embodiment. In this embodiment, each first control module 2 is disposed on a different daughter board 6 , and the second control module 3 is disposed on a motherboard 7 .

In this embodiment, the first control module 2 and the second control module 3 are respectively arranged on independent daughter boards 6 and motherboards 7. The daughter board 6 can be placed close to the sensor module 1, thereby overcoming the overall impact of the length of the sensor signal line. Due to the limitations of the system layout, the daughter board 6 and the sensor module 1 can be connected using a short signal line, thereby ensuring that the measurement results can be reliably transmitted to the daughter board 6 . The standard transmission protocol can be used for long-distance transmission between the daughter board 6 and the motherboard 7, thereby achieving reliable and stable real-time monitoring and ensuring the environmental safety of the storage area; on the basis of the above, it can also reduce wiring requirements and improve equipment in the workshop. (Clean storage) layout flexibility.

Referring to Figure 5A, an application example of this embodiment is provided. For clean storage equipment of storage boxes such as mask boxes, the sub-board 6 corresponds to the storage areas of each storage box one by one. Each storage area can be located in a clean On the storage device, it can also be located on a different clean storage device.

In some embodiments, the distance between the clean storage device and the motherboard 7 is relatively long, and the signal line between the motherboard 7 and the daughter board 6 can be set longer. The daughter board 6 can be disposed relatively close to the storage area, so that the length of the signal line between the two can be reduced.

Specifically, the length of the signal line connecting the sensor module 1 and the daughter board 6 can refer to the following range:

(1) 3~5m, transmission is possible within this range, and the daughter board 6 can read the measurement data of the sensor module 1;

(2) Less than 3m, preferably 0.5 to 2m. Reliable transmission is possible within this range, and the daughter board 6 can be easily installed close to the sensor module 1, and the wiring can also be optimized.

Referring to FIG. 5B , another application example of this embodiment is provided. The motherboard 7 can also be disposed on one of the clean storage devices. The clean storage device may be far away from other clean storage devices. Similarly, the signal lines between the motherboard 7 and the daughter board 6 can be set longer, and the connection between the daughter board 6 and the sensor module 1 is not affected.

The motherboard 7 can be provided with a separate installation box as needed, or can be installed on a clean storage device. Each of the motherboard 7 and the daughter board 6 can be easily configured to follow the clean storage equipment, and can also be easily reconfigured when the production workshop is rearranged.

In an optional implementation, as shown in Figures 6A-6B, the daughter board 6 is provided in a daughter board installation box. The daughter board installation box includes a first box body 81, and the first box body 81 is provided with a hole for exposing the a first opening of the sensor interface unit 22 , and a second opening for exposing the interface of the first communication unit 23 .

In an optional implementation, as shown in Figure 7, the motherboard 7 is provided in a motherboard installation box. The motherboard installation box includes a second box 91, and a hole is opened on the second box for exposing the second communication Third opening 92 of the interface of the unit 32 .

In the solution shown in FIG. 7 , the second box 91 includes a shell 911 with an open top and one side, and a cover 912 removably installed on the top of the shell 911 . The open side forms the aforementioned third opening 92 .

In an optional implementation, when the motherboard 7 and part of the daughter boards 6 are placed on the same clean storage device, part of the daughter boards 6 and the motherboard 7 can be placed in a common installation box to save installation time. space, at this time, the remaining daughter boards 6 are arranged in the daughter board installation box in one-to-one correspondence.

Optionally, the common installation box can adopt the motherboard installation box structure shown in Figure 7. As shown in Figure 8, a daughter board 6 and a motherboard 7 are simultaneously installed in the motherboard installation box as a common installation box. Specifically, the motherboard 7 may be provided with a plurality of via holes, and fasteners such as screws may be used to fix the daughter board 6 to the motherboard 7 through the via holes, and then install the two in a motherboard installation box.

Optionally, a second communication interface on the motherboard 7 can be directly connected to a communication interface on a daughter board 6 , and other communication interfaces on the motherboard 7 can be directly connected to the signal line terminals.

Although specific embodiments of the present invention have been described above, those skilled in the art will understand that these are only examples, and the protection scope of the present invention is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but these changes and modifications all fall within the protection scope of the present invention.

Claims (10)

1. A monitoring system for a clean storage environment, comprising:

at least one sensor module, each of the sensor modules being disposed one-to-one within each storage area and configured to perform a measurement operation associated with an environment of the storage area in which the sensor module is located;

the first control module is connected with the sensor modules in a one-to-one correspondence manner, and is configured to collect measurement results of the sensor modules connected with the first control module and analyze the measurement results to obtain environmental parameters; the method comprises the steps of,

and the second control module is connected with each first control module and is configured to acquire the environmental parameters obtained by analysis of each first control module and transmit the environmental parameters to an upper computer.

2. The system of claim 1, wherein the sensor module comprises at least one of a temperature sensor, a humidity sensor, a pressure sensor, and an air flow sensor, wherein the storage area is an interior housing space of a storage case, and wherein a probe of the sensor module is disposed within the interior housing space of the storage case.

3. The system of claim 1, further comprising the host computer, wherein the host computer is coupled to the second control module.

4. The system of claim 3, further comprising an alarm module coupled to the host computer or wherein the host computer has an alarm module.

5. The system for monitoring a clean storage environment of claim 1, wherein the first control module comprises:

a first micro control unit;

a sensor interface unit for enabling communication between the first micro control unit and the sensor module; the method comprises the steps of,

the first communication unit is used for realizing communication between the first micro control unit and the second control module;

the second control module includes:

a second micro control unit; the method comprises the steps of,

and the second communication unit is used for realizing communication between the second micro-control unit and the first control module and between the second micro-control unit and the upper computer.

6. The system of claim 5, wherein the sensor interface unit is an IIC communication interface and the first communication unit and the second communication unit are RS485 communication units.

7. The system of claim 5, wherein the second communication unit includes a plurality of reserved communication interfaces for interfacing with the first control module.

8. The system of claim 5, wherein each of the first control modules is disposed on a different daughter board, and the second control module is disposed on a motherboard.

9. The system of claim 8, wherein the daughter board is disposed within a daughter board mounting box, the daughter board mounting box including a first box body having a first opening formed therein for exposing the sensor interface unit and a second opening for exposing the interface of the first communication unit _；

The motherboard is arranged in a motherboard mounting box, the motherboard mounting box comprises a second box body, and a third opening for exposing an interface of the second communication unit is formed in the second box body.

10. The system of claim 8, wherein a portion of the daughter boards and the motherboard are disposed within a common mounting box and the remaining daughter boards are disposed within a daughter board mounting box in one-to-one correspondence.