CN219553581U - Semiconductor wafer recognition and sorting equipment - Google Patents

Abstract

The utility model relates to the technical field of semiconductor wafers, in particular to semiconductor wafer identification and sorting equipment, which comprises a machine body, wherein a feeding frame for clamping grooves of wafers is arranged at the top of the machine body, a plurality of clamping groove frames are arranged at the top of the machine body, empty clamping grooves are formed in the inner walls of the clamping groove frames, and a sorting assembly for sorting the clamping grooves of the wafers is arranged at the top of the machine body. The utility model greatly saves the labor intensity of manpower, improves the measuring operation efficiency, and completes the original transportation and measurement.

Description

A semiconductor wafer identification and sorting equipment

technical field

The utility model relates to the technical field of semiconductor wafers, in particular to a semiconductor wafer identification and sorting device.

Background technique

Wafer refers to the silicon wafer used in the production of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer; it can be processed into various circuit element structures on the silicon wafer and become an IC with specific electrical functions. product.

According to the patent document with application number CN202122034600.8, an intelligent sorting device for semiconductor wafer detection is provided, which includes a bottom plate, a driving frame is fixedly connected to the right side of the top of the bottom plate, and the bottom of the inner cavity of the driving frame is fixed A first motor is connected, the output end of the first motor is fixedly connected with a vertical rod, the top of the left side of the vertical rod is fixedly connected with a horizontal plate, and the surface of the horizontal plate is fixedly connected with a second electric telescopic rod. The utility model uses the bottom plate, the first electric telescopic rod, the top plate, the transmission frame, the driving frame, the first motor, the vertical rod, the horizontal plate, the card frame, the limit rod, the second electric telescopic rod, the claws, the third electric motor The telescopic rod, the vertical plate, the transmission belt, the output roller and the second motor can make the device achieve the function of good use effect, which solves the problem that the sorting device for semiconductor wafer detection in the existing market does not have the function of good use effect and directly clamps the The phenomenon of fragmentation is easy to occur, which is not conducive to the problem of user's operation and use.

The intelligent sorting device for semiconductor wafer detection in the above patent solves the problem that the sorting device for semiconductor wafer detection in the existing market does not have the function of good use effect, and the phenomenon that it is easy to be broken when directly clamped is not conducive to use. The problem of operation and use by the operator. At present, the reordering operations based on the barcode information on the jam and the radium engraved code on the wafer are all done manually, which is time-consuming, labor-intensive, inefficient and error-prone.

Utility model content

The purpose of this utility model is to provide a semiconductor wafer identification and sorting device to solve the problems raised in the above-mentioned background technology.

In order to achieve the above object, the utility model provides the following technical solutions:

A device for identifying and sorting semiconductor wafers, including a body, the top of the body is provided with a loading rack for wafer slotting, and the top of the body is provided with a plurality of slotting racks, and the inner walls of the plurality of slotting racks are Empty card slots are provided, and a sorting component for sorting the wafer card slots is arranged on the top of the body.

As a preferred solution of the utility model, the sorting assembly includes a mounting frame arranged on the top of the body, the outer wall of the mounting frame is provided with a grabbing block, the top of the body is provided with a base, and the top of the base is provided with a cutting frame , the top of the body is provided with a blanking frame, and the top of the body is provided with a mechanical arm.

As a preferred solution of the utility model, both the loading rack and the unloading rack are connected to the top of the machine body through bolts.

As a preferred solution of the present invention, the plurality of draw-in slot frames are all connected to the top of the machine body through bolts, and the empty draw-in slots are all connected to the inner wall of the draw-in slot frame through buckles.

As a preferred solution of the present invention, the installation frame is connected to the top of the machine body through bolts, and the grasping block is slidably connected to the outer wall of the installation frame through slide rails.

As a preferred solution of the present invention, the base is connected to the top of the machine body through bolts, and the cutting frame is slidingly connected to the outer wall of the base through guide rails.

As a preferred solution of the utility model, a Beffe bin is arranged on the top of the body.

Compared with the prior art, the beneficial effect of the utility model is: for the problems raised in the background technology, the application adopts a sorting component to automatically reorder the barcode information on the jam and the radium engraved code on the wafer , which greatly saves labor intensity, improves the efficiency of measurement work, and completes the integration of original handling and measurement.

Description of drawings

Fig. 1 is a three-dimensional view of the overall structure of the utility model;

Fig. 2 is a front view of the utility model;

Fig. 3 is a side view of the utility model;

Fig. 4 is a top view of the utility model.

In the figure: 1. Machine body; 2. Feeding frame; 3. Card slot frame; 301. Empty card slot; 4. Installation frame; 401. Grab block; 5. Base; rack; 8. Mechanical arm; 9. Beffe warehouse.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all embodiments. Based on the present invention The embodiments in the utility model, and all other embodiments obtained by persons of ordinary skill in the art without creative efforts, all belong to the scope of protection of the utility model.

In order to facilitate the understanding of the utility model, the utility model will be described more fully below with reference to the relevant drawings. Several embodiments of the utility model are given. However, the invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

It should be noted that when an element is referred to as being “fixed on” another element, it may be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and similar expressions are used herein for purposes of illustration only.

Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of this invention. The terminology used in the description of the utility model herein is only for the purpose of describing specific embodiments, and is not intended to limit the utility model. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Please refer to Figures 1-4, the utility model provides a technical solution: a semiconductor wafer identification and sorting equipment, including a body 1, the top of the body 1 is provided with a loading rack 2 for wafer slotting, the The top of the body 1 is provided with a plurality of card slot frames 3 for installing empty card slots 301. The inner walls of the multiple card slot frames 3 are all provided with empty card slots 301, and the top of the body 1 is provided with a wafer card slot. The sort component for sorting.

At present, the reordering operations based on the barcode information on the jam and the radium engraved code on the wafer are all done manually, which is time-consuming, labor-intensive, inefficient and error-prone.

All electrical components in this embodiment are controlled by conventional controllers.

For the embodiment, please refer to Figures 1-4, the sorting assembly includes a mounting frame 4 arranged on the top of the machine body 1, and the outer wall of the mounting frame 4 is provided with a grabbing block 401 for grabbing and moving the wafer slot, The top of the body 1 is provided with a base 5, the top of the base 5 is provided with a cutting frame 6, the top of the body 1 is provided with a blanking frame 7, the top of the body 1 is provided with a mechanical arm 8, and the loading frame 2 and the blanking frame 7 are connected to the top of the body 1 by bolts, and the plurality of slot frames 3 are connected to the top of the body 1 by bolts, and the empty slots 301 are connected to the inner wall of the slot frame 3 by buckles. The mounting frame 4 is connected to the top of the body 1 through bolts, the grasping block 401 is slidably connected to the outer wall of the mounting frame 4 through slide rails, the base 5 is connected to the top of the body 1 through bolts, and the cutting frame 6 is connected to the top of the body 1 through guide rails. It is slidably connected with the outer wall of the base 5. When in use, the personnel first place the wafer jam on the loading rack 2, and then place an empty card slot 301 on the third position of the slot rack 3, and the grabbing block 401 cooperates with the installation frame 4 to transport the jammed material to the seeker. On the edge detector, the edge finder automatically detects the edge of the wafer in the card. After the edge detection is completed, the moving frame 6 transports the card to the second position of the card slot rack 3, and this position performs the barcode on the card. Scan the code, and at the same time, the camera at this position recognizes the engraved number on the wafer, and then the robotic arm 8 takes the wafer into the jam position sorted according to the barcode according to the engraved number. The jam on the top moves one grid position at the same time, and the empty card slot 301 that is full is placed on the unloading rack 7 and transported to the end of the equipment, and then waits for the employee to take it away, and so on and forth.

For an embodiment, please refer to FIG. 1 , a Beffe bin 9 is arranged on the top of the body 1 .

The working process of the utility model: when in use, the personnel first place the wafer jam on the loading rack 2, and then place an empty card slot 301 on the third position of the slot rack 3, and the grasping block 401 cooperates with the installation frame 4 to feed the material. The jam is transported to the edge finder, and the edge finder automatically finds the edge of the wafer in the card. After the edge finding is completed, the moving and cutting frame 6 transports the jam to the second position of the card slot rack 3. The barcode on the jam is scanned, and the camera at this position recognizes the engraved number on the wafer, and then the robotic arm 8 takes the wafer according to the engraved number and puts the wafer in the jam position sorted by the barcode. After it is full, move The cutting frame 6 moves the jams on the row by one position at the same time, and the empty card slot 301 that is full is put into the unloading rack 7 and transported to the end of the equipment, and then waits for the employee to take it away, and so on. The utility model greatly saves labor intensity, improves measurement operation efficiency, and integrates original handling and measurement.

Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes and modifications can be made to these embodiments without departing from the principle and spirit of the present invention , replacements and modifications, the scope of the present utility model is defined by the appended claims and their equivalents.

Claims (7)

1. A semiconductor wafer identification and sorting device, including a body (1), characterized in that: the top of the body (1) is provided with a loading rack (2) for wafer slotting, and the body (1) The top is provided with a plurality of card slot racks (3), and the inner walls of the plurality of card slot racks (3) are provided with empty card slots (301), and the top of the body (1) is provided with a device for sorting the wafer card slots Sort components. 2. A semiconductor wafer identification and sorting device according to claim 1, characterized in that: the sorting component includes a mounting frame (4) arranged on the top of the body (1), and the outer wall of the mounting frame (4) A grabbing block (401) is provided, a base (5) is provided on the top of the body (1), a cutting frame (6) is provided on the top of the base (5), and a blanking frame (6) is provided on the top of the body (1) frame (7), and a mechanical arm (8) is arranged on the top of the body (1). 3. A semiconductor wafer identification and sorting device according to claim 2, characterized in that: both the loading rack (2) and the unloading rack (7) are connected to the top of the machine body (1) by bolts. 4. A semiconductor wafer identification and sorting device according to claim 2, characterized in that: a plurality of the slot holders (3) are connected to the top of the body (1) by bolts, and the empty slots (301 ) are connected to the inner wall of the card slot frame (3) through buckles. 5. A semiconductor wafer identification and sorting device according to claim 2, characterized in that: the installation frame (4) is connected to the top of the body (1) through bolts, and the grabbing block (401) is connected through slide rails It is slidingly connected with the outer wall of the mounting frame (4). 6. A semiconductor wafer identification and sorting device according to claim 2, characterized in that: the base (5) is connected to the top of the body (1) through bolts, and the cutting frame (6) is connected to the base through guide rails (5) Outer wall sliding connection. 7. A semiconductor wafer identification and sorting device according to claim 1, characterized in that: a Beffe bin (9) is arranged on the top of the body (1).