CN219541074U - Chip surface dust collector - Google Patents

Chip surface dust collector Download PDF

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Publication number
CN219541074U
CN219541074U CN202223395947.6U CN202223395947U CN219541074U CN 219541074 U CN219541074 U CN 219541074U CN 202223395947 U CN202223395947 U CN 202223395947U CN 219541074 U CN219541074 U CN 219541074U
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motor
fixedly equipped
outer edge
dust removal
chip surface
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王平
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Shanghai Aoshan Electronic Technology Co ltd
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Shanghai Aoshan Electronic Technology Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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Abstract

本实用新型涉及芯片除尘技术领域,且公开了一种芯片表面除尘装置,包括底座,所述底座的外壁固定装配有电机,所述电机的输出轴的外沿固定装配有螺纹杆,所述螺纹杆的外沿螺纹连接有滑块,所述滑块的顶部固定装配有放置板,通过电机的工作,带动螺纹杆进行转动,通过螺纹杆的外沿螺纹连接的滑块,使得滑块受力进行移动,通过滑块的顶部固定装配的放置板,使得放置板进行移动,当放置板移动至安装板的底部时,通过第二马达进行工作,带动丝杆进行转动,通过丝杆的外沿螺纹连接的清理装置,使得清理装置进行横向的移动,通过第三马达的工作,带动毛刷进行转动,达到了对芯片进行往复的清扫,提高了除尘的效果。

The utility model relates to the technical field of chip dust removal, and discloses a chip surface dust removal device, comprising a base, the outer wall of the base is fixedly equipped with a motor, the outer edge of the output shaft of the motor is fixedly equipped with a threaded rod, and the thread The outer edge of the rod is threaded with a slider, and the top of the slider is fixedly equipped with a placement plate. Through the work of the motor, the threaded rod is driven to rotate, and the slider connected by the outer edge of the threaded rod makes the slider be stressed. To move, fix the assembled placing plate through the top of the slider, so that the placing plate moves. When the placing plate moves to the bottom of the mounting plate, the second motor will work to drive the screw to rotate, and the outer edge of the screw will The screw-connected cleaning device enables the cleaning device to move laterally, and the brush is driven to rotate through the operation of the third motor, thereby achieving reciprocating cleaning of the chip and improving the effect of dust removal.

Description

一种芯片表面除尘装置A chip surface dust removal device

技术领域technical field

本实用新型涉及芯片除尘技术领域,具体为一种芯片表面除尘装置。The utility model relates to the technical field of chip dust removal, in particular to a chip surface dust removal device.

背景技术Background technique

芯片,又称集成电路,或称微电路、微芯片、晶片/芯片在电子学中是一种将电路小型化的方式,并时常制造在半导体晶圆表面上。Chips, also known as integrated circuits, or microcircuits, microchips, wafers/chips in electronics are a way of miniaturizing circuits and are often fabricated on the surface of a semiconductor wafer.

现有的芯片表面除尘装置可参考授权公告号为CN217369559U的中国实用新型专利,其公开了一种用于半导体芯片封装的表面除尘装置,“包括固定板,所述固定板表面的两侧分别设置有固定架和安装架,所述固定板顶部的两侧固定安装有电动滑轨,所述电动滑轨通过内置的滑块设置有移动板,所述安装架表面的两侧设置有升降装置,所述升降装置的顶部设置有活动板,所述活动板的顶部设置有电机,所述电机通过输出端的转动轴设置有软毛刷盘,所述安装架的顶部开设有固定槽,所述固定架的顶部固定安装有吸尘口,所述固定板底部的中间固定安装有废料箱,所述废料箱表面的两侧固定安装有吸尘管,且吸尘管的一端与吸尘口固定连接,所述废料箱底部的中间固定安装有吸料机。该用于半导体芯片封装的表面除尘装置,可以首先将芯片放在移动板上,然后启动电动滑轨来带动移动板进行移动,使得移动板移动至安装架的下方,然后启动升降装置使得软毛刷盘与芯片表面接触,之后再通过电机带动软毛刷盘进行转动,对芯片表面的灰尘进行清理,之后再将移动板移动至固定架下方,并启动吸料机将灰尘吸进废料箱中,从而保证对芯片表面的灰尘清理得更加彻底。”The existing chip surface dust removal device can refer to the Chinese utility model patent whose authorized announcement number is CN217369559U, which discloses a surface dust removal device for semiconductor chip packaging, "comprising a fixed plate, and the two sides of the fixed plate surface are respectively arranged There are a fixed frame and a mounting frame, and electric slide rails are fixedly installed on both sides of the top of the fixed plate, and the electric slide rail is provided with a moving plate through a built-in slider, and a lifting device is provided on both sides of the surface of the mounting frame, The top of the lifting device is provided with a movable plate, the top of the movable plate is provided with a motor, and the motor is provided with a soft-bristled brush plate through the rotating shaft of the output end, and the top of the mounting frame is provided with a fixing groove, and the fixing groove The top of the frame is fixedly equipped with a suction port, the middle of the bottom of the fixed plate is fixedly equipped with a waste box, the two sides of the surface of the waste box are fixedly installed with a vacuum tube, and one end of the vacuum tube is fixedly connected to the vacuum port , the middle of the bottom of the waste bin is fixedly equipped with a suction machine. This surface dust removal device for semiconductor chip packaging can first place the chip on the mobile plate, and then start the electric slide rail to drive the mobile plate to move, so that the mobile The plate moves to the bottom of the mounting frame, and then the lifting device is started to make the soft-bristled brush disc contact with the surface of the chip, and then the motor drives the soft-bristled brush plate to rotate to clean the dust on the chip surface, and then move the mobile plate to the fixed Under the shelf, and start the suction machine to suck the dust into the waste box, so as to ensure that the dust on the surface of the chip is cleaned more thoroughly."

上述设备在使用时,采用的是通过电动滑轨将芯片送至安装架的下,通过毛刷进行除尘,达到除尘的木地板,但上述装置的清理装置无法进行横向的移动,导致对芯片的清理效果较差,进而降低了该装置的实用性,且上述装置清理后的芯片送至吸料机的范围对灰尘进行吸收,需要移动一端的距离,导致对灰尘的收集效果较差,降低了对灰尘的收集效率。When the above-mentioned equipment is in use, the chip is sent to the bottom of the mounting frame through the electric slide rail, and the dust is removed by the brush to reach the wooden floor for dust removal. However, the cleaning device of the above-mentioned device cannot move laterally, resulting in damage to the chip. The cleaning effect is poor, which reduces the practicability of the device, and the cleaned chips of the above device are sent to the range of the suction machine to absorb the dust, and one end needs to be moved, resulting in poor dust collection effect and reduced The collection efficiency of dust.

实用新型内容Utility model content

针对现有技术的不足,本实用新型提供了一种芯片表面除尘装置,具备通过清理装置可以进行横向的移动对芯片进行来回往复的清扫的优点,具备能够更好地对灰尘进行收集的优点,解决了上述背景技术中所提出的问题。Aiming at the deficiencies of the prior art, the utility model provides a chip surface dust removal device, which has the advantage of being able to move the cleaning device laterally to clean the chip back and forth, and has the advantage of being able to better collect dust. The problems raised in the background art above are solved.

本实用新型提供如下技术方案:一种芯片表面除尘装置,包括底座,所述底座的外壁固定装配有电机,所述电机的输出轴的外沿固定装配有螺纹杆,所述螺纹杆的外沿螺纹连接有滑块,所述滑块的顶部固定装配有放置板,所述底座的顶部固定装配有支撑柱,所述支撑柱的顶部滑动连接有齿板,所述支撑柱的外壁固定装配有第一马达,所述第一马达的输出轴的外沿固定套接有齿轮,所述支撑柱的顶部固定装配有安装板,所述安装板的外壁固定装配有第二马达,所述第二马达的输出轴的外沿固定装配有丝杆,所述丝杆的外沿螺纹连接有清理装置,所述安装板的顶部固定装配有收集装置。The utility model provides the following technical solutions: a chip surface dust removal device, including a base, the outer wall of the base is fixedly equipped with a motor, the outer edge of the output shaft of the motor is fixedly equipped with a threaded rod, and the outer edge of the threaded rod A slider is threadedly connected, the top of the slider is fixedly equipped with a placement plate, the top of the base is fixedly equipped with a support column, the top of the support column is slidably connected with a tooth plate, and the outer wall of the support column is fixedly equipped with The first motor, the outer edge of the output shaft of the first motor is fixedly sleeved with a gear, the top of the support column is fixedly equipped with a mounting plate, the outer wall of the mounting plate is fixedly equipped with a second motor, and the second The outer edge of the output shaft of the motor is fixedly equipped with a screw rod, the outer edge of the screw rod is threadedly connected with a cleaning device, and the top of the mounting plate is fixedly equipped with a collecting device.

作为本实用新型的一种优选技术方案,所述清理装置,包括移动块,所述移动块的底部固定装配有挡板,所述挡板的内壁固定装配有第三马达,所述第三马达输出轴的底部固定装配有毛刷。As a preferred technical solution of the present utility model, the cleaning device includes a moving block, the bottom of the moving block is fixedly equipped with a baffle, and the inner wall of the baffle is fixedly equipped with a third motor, and the third motor The bottom of the output shaft is fixedly equipped with a brush.

作为本实用新型的一种优选技术方案,所述收集装置,包括收集箱,所述收集箱的内腔固定装配有吸尘机,所述吸尘机的两侧外壁皆设有吸尘管。As a preferred technical solution of the present utility model, the collection device includes a collection box, the inner cavity of the collection box is fixedly equipped with a vacuum cleaner, and the outer walls of both sides of the vacuum cleaner are provided with suction pipes.

作为本实用新型的一种优选技术方案,所述吸尘管远离吸尘机的一端与挡板进行固定连接,所述吸尘管的数量为两个。As a preferred technical solution of the present invention, the end of the dust suction pipe away from the vacuum cleaner is fixedly connected to the baffle, and the number of the dust suction pipes is two.

作为本实用新型的一种优选技术方案,所述齿轮的轮齿与齿板相啮合,所述支撑柱的外壁开设有方槽,且方槽的形状与齿轮的形状相适配。As a preferred technical solution of the present invention, the teeth of the gear mesh with the tooth plate, and the outer wall of the support column is provided with a square groove, and the shape of the square groove matches the shape of the gear.

作为本实用新型的一种优选技术方案,所述底座的顶部开设有滑槽,且滑槽的形状与滑块的形状相适配。As a preferred technical solution of the present invention, a chute is provided on the top of the base, and the shape of the chute matches the shape of the slider.

与现有技术对比,本实用新型具备以下有益效果:Compared with the prior art, the utility model has the following beneficial effects:

1、该芯片表面除尘装置,通过电机的工作,带动螺纹杆进行转动,通过螺纹杆的外沿螺纹连接的滑块,使得滑块受力进行移动,通过滑块的顶部固定装配的放置板,使得放置板进行移动,当放置板移动至安装板的底部时,通过第二马达进行工作,带动丝杆进行转动,通过丝杆的外沿螺纹连接的清理装置,使得清理装置进行横向的移动,通过第三马达的工作,带动毛刷进行转动,达到了对芯片进行往复的清扫,提高了除尘的效果。1. The dust removal device on the surface of the chip drives the threaded rod to rotate through the work of the motor, and the slider connected by the outer thread of the threaded rod makes the slider move under force, and the placement plate fixed and assembled on the top of the slider Make the placement plate move, when the placement plate moves to the bottom of the installation plate, the second motor works to drive the screw to rotate, and the cleaning device connected to the outer thread of the screw rod makes the cleaning device move laterally, Through the work of the third motor, the brush is driven to rotate, so as to achieve reciprocating cleaning of the chip and improve the effect of dust removal.

2、该芯片表面除尘装置,通过设有的挡板,使得能够对灰尘进行阻挡,通过吸尘机的工作,使得能够产生吸力,通过吸尘机的外壁固定装配的吸尘管,使得通过吸尘管对挡板内部的灰尘进行吸收,通过设有的收集箱,使得能够对灰尘进行收集,减少灰尘的逸散,提高了对灰尘的收集吸收的效率。2. The dust removal device on the surface of the chip can block the dust through the provided baffle, and can generate suction through the operation of the vacuum cleaner. The dust pipe absorbs the dust inside the baffle, and through the provided collection box, the dust can be collected, the escape of dust is reduced, and the efficiency of dust collection and absorption is improved.

附图说明Description of drawings

图1为本实用新型立体结构示意图;Fig. 1 is a schematic diagram of the three-dimensional structure of the utility model;

图2为本实用新型侧剖结构示意图;Fig. 2 is a schematic diagram of a side section structure of the utility model;

图3为本实用新型侧视结构示意图;Fig. 3 is the utility model side view structure diagram;

图4为本实用新型正剖结构示意图;Fig. 4 is a schematic diagram of the front section structure of the utility model;

图5为本实用新型图4中A处结构示意图。Fig. 5 is a schematic diagram of the structure at A in Fig. 4 of the present utility model.

图中:1、底座;2、电机;3、螺纹杆;4、滑块;5、放置板;6、支撑柱;7、齿板;8、第一马达;9、齿轮;10、安装板;11、第二马达;12、丝杆;13、清理装置;130、移动块;131、挡板;132、第三马达;133、毛刷;14、收集装置;140、收集箱;141、吸尘机;142、吸尘管。In the figure: 1. Base; 2. Motor; 3. Threaded rod; 4. Slider; 5. Placement plate; 6. Support column; 7. Tooth plate; 8. First motor; 9. Gear; ; 11, the second motor; 12, screw mandrel; 13, cleaning device; 130, moving block; 131, baffle plate; 132, the third motor; 133, hair brush; 14, collection device; 140, collection box; 141, Vacuum cleaner; 142. Dust suction pipe.

具体实施方式Detailed ways

下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本实用新型一部分实施例,而不是全部的实施例。基于本实用新型中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本实用新型保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. example. Based on the embodiments of the present utility model, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.

请参阅图1-5,一种芯片表面除尘装置,包括底座1,底座1的外壁固定装配有电机2,电机2的输出轴的外沿固定装配有螺纹杆3,螺纹杆3的外沿螺纹连接有滑块4,滑块4的顶部固定装配有放置板5,底座1的顶部固定装配有支撑柱6,支撑柱6的顶部滑动连接有齿板7,支撑柱6的外壁固定装配有第一马达8,第一马达8的输出轴的外沿固定套接有齿轮9,支撑柱6的顶部固定装配有安装板10,安装板10的外壁固定装配有第二马达11,第二马达11的输出轴的外沿固定装配有丝杆12,丝杆12的外沿螺纹连接有清理装置13,安装板10的顶部固定装配有收集装置14,通过设有的放置板5,使得能够对芯片记性安放,使得便于会面的清扫工作。Please refer to Figure 1-5, a chip surface dust removal device, including a base 1, the outer wall of the base 1 is fixedly equipped with a motor 2, the outer edge of the output shaft of the motor 2 is fixedly equipped with a threaded rod 3, and the outer edge of the threaded rod 3 is threaded A slide block 4 is connected, the top of the slide block 4 is fixedly equipped with a placement plate 5, the top of the base 1 is fixedly equipped with a support column 6, the top of the support column 6 is slidably connected with a tooth plate 7, and the outer wall of the support column 6 is fixedly equipped with a second A motor 8, the outer edge of the output shaft of the first motor 8 is fixedly sleeved with a gear 9, the top of the support column 6 is fixedly equipped with a mounting plate 10, and the outer wall of the mounting plate 10 is fixedly equipped with a second motor 11, the second motor 11 The outer edge of the output shaft is fixedly equipped with a screw mandrel 12, the outer edge of the screw mandrel 12 is threadedly connected with a cleaning device 13, and the top of the mounting plate 10 is fixedly equipped with a collecting device 14, through the placement plate 5 provided, it is possible to clean the chip Memory placement makes it easy to clean up the meeting.

其中,清理装置13,包括移动块130,移动块130的底部固定装配有挡板131,挡板131的内壁固定装配有第三马达132,第三马达132输出轴的底部固定装配有毛刷133,通过上述结构,使得能够对芯片进行更加细致的清扫,提高对芯片的除尘效果。Wherein, the cleaning device 13 includes a moving block 130, the bottom of the moving block 130 is fixedly equipped with a baffle plate 131, the inner wall of the baffle plate 131 is fixedly equipped with a third motor 132, and the bottom of the output shaft of the third motor 132 is fixedly equipped with a brush 133 , through the above-mentioned structure, it is possible to clean the chip more meticulously and improve the effect of dust removal on the chip.

其中,收集装置14,包括收集箱140,收集箱140的内腔固定装配有吸尘机141,吸尘机141的外壁设有吸尘管142,通过上述结构,使得能够对灰尘进行收集,减少灰尘逸散到空气中对人员的身体健康造成危害,提高了该装置的安全性。Wherein, collecting device 14 comprises collecting box 140, and the inner cavity of collecting box 140 is fixedly equipped with vacuum cleaner 141, and the outer wall of vacuum cleaner 141 is provided with dust suction tube 142, through above-mentioned structure, dust can be collected, reduces The dust escaping into the air will cause harm to the health of personnel, which improves the safety of the device.

其中,吸尘管142远离吸尘机141的一端与挡板131进行固定连接,吸尘管142的数量为两个,通过上述结构,使得能够提高对灰尘的吸收效率,提高了工作效率。Wherein, the end of the dust suction pipe 142 away from the dust collector 141 is fixedly connected with the baffle plate 131, and the number of the dust suction pipe 142 is two. Through the above structure, the dust absorption efficiency can be improved, and the work efficiency can be improved.

其中,齿轮9的轮齿与齿板7相啮合,支撑柱6的外壁开设有方槽,且方槽的形状与齿轮9的形状相适配,通过上述结构,使得能够为齿板7的升降进行动力传输,提高了该装置的实用性。Wherein, the gear teeth of the gear 9 are meshed with the tooth plate 7, and the outer wall of the support column 6 is provided with a square groove, and the shape of the square groove is adapted to the shape of the gear 9. Through the above structure, the lifting of the tooth plate 7 can be achieved. Power transmission is carried out, which improves the practicability of the device.

其中,底座1的顶部开设有滑槽,且滑槽的形状与滑块4的形状相适配,通过上述结构,使得减少滑块4移动过程中的摩擦阻力,减少摩擦损耗。Wherein, a chute is provided on the top of the base 1, and the shape of the chute is adapted to the shape of the slider 4. Through the above structure, the frictional resistance and friction loss during the movement of the slider 4 are reduced.

工作原理,通过电机2的工作,带动螺纹杆3进行转动,通过螺纹杆3的外沿螺纹连接的滑块4,使得滑块4受力进行移动,通过滑块4的顶部固定装配的放置板5,使得放置板5进行移动,当放置板5移动至安装板10的底部时,通过第一马达8的工作,带动齿轮9进行转动,通过齿轮9的轮齿与齿板7相啮合,使得齿板7受力进行升降,通过第二马达11进行工作,带动丝杆12进行转动,通过丝杆12的外沿螺纹连接的清理装置13,使得清理装置13进行横向的移动,通过第三马达132的工作,带动毛刷133进行转动,达到了对芯片进行往复的清扫,通过设有的挡板131,使得能够对灰尘进行阻挡,通过吸尘机141的工作,使得能够产生吸力,通过吸尘机141的外壁固定装配的吸尘管142,使得通过吸尘管142对挡板131内部的灰尘进行吸收,通过设有的收集箱140,使得能够对灰尘进行收集。Working principle, through the work of the motor 2, the threaded rod 3 is driven to rotate, and the slider 4 connected by the outer thread of the threaded rod 3 makes the slider 4 move under force, and the placement plate fixed and assembled by the top of the slider 4 5. Make the placement plate 5 move. When the placement plate 5 moves to the bottom of the installation plate 10, the gear 9 is driven to rotate through the work of the first motor 8, and the teeth of the gear 9 mesh with the tooth plate 7, so that The tooth plate 7 is forced to lift, and the second motor 11 is used to drive the screw rod 12 to rotate. The cleaning device 13 connected to the outer thread of the screw rod 12 makes the cleaning device 13 move laterally. The work of 132 drives the hairbrush 133 to rotate to achieve reciprocating cleaning of the chip. The baffle 131 provided can block the dust, and the work of the vacuum cleaner 141 can generate suction. The dust suction pipe 142 fixedly assembled on the outer wall of the dust machine 141 makes it possible to absorb the dust inside the baffle plate 131 through the dust suction pipe 142 and collect the dust through the provided collection box 140 .

尽管已经示出和描述了本实用新型的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本实用新型的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本实用新型的范围由所附权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes and modifications can be made to these embodiments without departing from the principle and spirit of the present invention , replacements and modifications, the scope of the present utility model is defined by the appended claims and their equivalents.

Claims (6)

1.一种芯片表面除尘装置,包括底座(1),其特征在于:所述底座(1)的外壁固定装配有电机(2),所述电机(2)的输出轴的外沿固定装配有螺纹杆(3),所述螺纹杆(3)的外沿螺纹连接有滑块(4),所述滑块(4)的顶部固定装配有放置板(5),所述底座(1)的顶部固定装配有支撑柱(6),所述支撑柱(6)的顶部滑动连接有齿板(7),所述支撑柱(6)的外壁固定装配有第一马达(8),所述第一马达(8)的输出轴的外沿固定套接有齿轮(9),所述支撑柱(6)的顶部固定装配有安装板(10),所述安装板(10)的外壁固定装配有第二马达(11),所述第二马达(11)的输出轴的外沿固定装配有丝杆(12),所述丝杆(12)的外沿螺纹连接有清理装置(13),所述安装板(10)的顶部固定装配有收集装置(14)。1. A chip surface dust removal device, comprising a base (1), is characterized in that: the outer wall of the base (1) is fixedly equipped with a motor (2), and the outer edge of the output shaft of the described motor (2) is fixedly equipped with A threaded rod (3), the outer edge of the threaded rod (3) is threadedly connected with a slide block (4), the top of the slide block (4) is fixedly equipped with a placement plate (5), and the base (1) The top is fixedly equipped with a support column (6), the top of the support column (6) is slidably connected with a tooth plate (7), and the outer wall of the support column (6) is fixedly equipped with a first motor (8). The outer edge of the output shaft of a motor (8) is fixedly sleeved with a gear (9), the top of the support column (6) is fixedly equipped with a mounting plate (10), and the outer wall of the mounting plate (10) is fixedly equipped with The second motor (11), the outer edge of the output shaft of the second motor (11) is fixedly equipped with a screw mandrel (12), and the outer edge of the screw mandrel (12) is threaded with a cleaning device (13), so The top of the mounting plate (10) is fixedly equipped with a collecting device (14). 2.根据权利要求1所述的一种芯片表面除尘装置,其特征在于:所述清理装置(13),包括移动块(130),所述移动块(130)的底部固定装配有挡板(131),所述挡板(131)的内壁固定装配有第三马达(132),所述第三马达(132)输出轴的底部固定装配有毛刷(133)。2. A chip surface dedusting device according to claim 1, characterized in that: the cleaning device (13) includes a moving block (130), and the bottom of the moving block (130) is fixedly equipped with a baffle ( 131), the inner wall of the baffle (131) is fixedly equipped with a third motor (132), and the bottom of the output shaft of the third motor (132) is fixedly equipped with a brush (133). 3.根据权利要求1所述的一种芯片表面除尘装置,其特征在于:所述收集装置(14),包括收集箱(140),所述收集箱(140)的内腔固定装配有吸尘机(141),所述吸尘机(141)的两侧外壁皆设有吸尘管(142)。3. A chip surface dust removal device according to claim 1, characterized in that: the collection device (14) comprises a collection box (140), and the inner cavity of the collection box (140) is fixedly equipped with a dust collector machine (141), the outer walls of both sides of the vacuum cleaner (141) are all provided with dust suction pipes (142). 4.根据权利要求3所述的一种芯片表面除尘装置,其特征在于:所述吸尘管(142)远离吸尘机(141)的一端与挡板(131)进行固定连接,所述吸尘管(142)的数量为两个。4. A chip surface dust removal device according to claim 3, characterized in that: the end of the dust suction pipe (142) away from the dust collector (141) is fixedly connected to the baffle (131), and the suction pipe (142) The quantity of dust pipe (142) is two. 5.根据权利要求1所述的一种芯片表面除尘装置,其特征在于:所述齿轮(9)的轮齿与齿板(7)相啮合,所述支撑柱(6)的外壁开设有方槽,且方槽的形状与齿轮(9)的形状相适配。5. A chip surface dust removal device according to claim 1, characterized in that: the gear teeth of the gear (9) mesh with the tooth plate (7), and the outer wall of the support column (6) is provided with a square groove, and the shape of the square groove is adapted to the shape of the gear (9). 6.根据权利要求1所述的一种芯片表面除尘装置,其特征在于:所述底座(1)的顶部开设有滑槽,且滑槽的形状与滑块(4)的形状相适配。6. A chip surface dust removal device according to claim 1, characterized in that: a chute is provided on the top of the base (1), and the shape of the chute matches the shape of the slider (4).
CN202223395947.6U 2022-12-16 2022-12-16 Chip surface dust collector Expired - Fee Related CN219541074U (en)

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CN202223395947.6U CN219541074U (en) 2022-12-16 2022-12-16 Chip surface dust collector

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