CN219508015U

CN219508015U - Gas transmission device

Info

Publication number: CN219508015U
Application number: CN202320490609.6U
Authority: CN
Inventors: 华宇; 赵兴; 祝家伟
Original assignee: Shanghai Huali Integrated Circuit Manufacturing Co Ltd
Current assignee: Shanghai Huali Integrated Circuit Manufacturing Co Ltd
Priority date: 2023-03-14
Filing date: 2023-03-14
Publication date: 2023-08-11
Anticipated expiration: 2033-03-14

Abstract

The utility model provides a gas transmission device, which comprises a total gas pipeline, wherein a total gas pipeline valve and a first gas flux detection module are arranged on the total gas pipeline, and the total gas pipeline is used for introducing carrier gas and steam; one end of each gas distribution pipeline is communicated with the total gas pipeline, the other end of each gas distribution pipeline is provided with a spray header, and each gas distribution pipeline is provided with a second gas flux detection module and a gas distribution pipeline valve; and the control circuit is used for receiving the electric signals of the first gas flux detection module and each second gas flux detection module, and closing each gas distribution pipeline valve if the gas flux difference between the gas distribution pipelines is larger than a preset value. According to the utility model, the gas flux detection modules are added on the gas pipelines of the branch pipes, so that the gas flux adjustment of each pipeline can be more efficient; the occurrence of excessive difference of gas flux on each pipeline can stop the current process, thereby avoiding the scrapping of products.

Description

Gas transmission device

Technical Field

The utility model relates to the technical field of semiconductors, in particular to a gas transmission device.

Background

At present, ALD (atomic layer deposition) equipment pushes saturated vapor pressure of liquid (2 Nte) to flow into a cavity for reaction through a pipeline and a spray header by using a planting gas (AR), but four spray headers exist in the equipment cavity, the uniformity of a film is different due to the difference of gas flux of the four spray headers, the opening degree of each of the gas distribution pipeline valves 1-4 needs to be tried to be adjusted to ensure the uniformity of the gas flux, a long time is needed, and meanwhile, the complete uniformity of the flux is very difficult to ensure.

In order to solve the above problems, a new gas transmission device needs to be provided.

Disclosure of Invention

In view of the above-mentioned drawbacks of the prior art, the present utility model is directed to a gas delivery device, which is used for solving the problems that in the prior art, a plurality of showerheads exist in a device cavity, a uniformity of a film is caused by a difference of gas fluxes of the plurality of showerheads, an attempt is required to adjust openings of different gas distribution pipeline valves to ensure uniformity of the gas fluxes, a long time is required, and complete uniformity of the fluxes is difficult to ensure.

To achieve the above and other related objects, the present utility model provides a gas transfer device comprising:

the system comprises a total gas pipeline, a first gas flux detection module and a second gas flux detection module, wherein the total gas pipeline is provided with a total gas pipeline valve and the first gas flux detection module and is used for introducing carrier gas and steam;

one end of each gas distribution pipeline is communicated with the total gas pipeline, a spray header is arranged at the other end of each gas distribution pipeline, and a second gas flux detection module and a gas distribution pipeline valve are arranged on each gas distribution pipeline;

and the control circuit is used for receiving the electric signals of the first gas flux detection module and each second gas flux detection module, and closing each gas distribution pipeline valve if the gas flux difference between the gas distribution pipelines is larger than a preset value.

Preferably, the carrier gas is argon.

Preferably, the steam is saturated steam for chemical reactions.

Preferably, the number of the gas dividing pipelines is four.

Preferably, a heating plate is further arranged on the spray header.

Preferably, the gas delivery device is used for an atomic layer deposition machine.

Preferably, the total gas pipeline valve and the gas dividing pipeline valve are both electric control valves.

Preferably, the first and second gas flux detection modules are pressure sensors.

As described above, the gas transmission device of the present utility model has the following advantageous effects:

according to the utility model, the gas flux detection modules are added on the gas pipelines of the branch pipes, so that the gas flux adjustment of each pipeline can be more efficient; the occurrence of overlarge gas flux difference on each pipeline can realize automatic clamping control and suspend the current process, thereby avoiding the scrapping of products.

Drawings

Fig. 1 is a schematic diagram of a gas transmission device according to the present utility model.

Detailed Description

Other advantages and effects of the present utility model will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present utility model with reference to specific examples. The utility model may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present utility model.

Referring to fig. 1, the present utility model provides a gas transmission device, which includes:

a total gas pipeline 101, a total gas pipeline valve 104 and a first gas flux detection module 103 are arranged on the total gas pipeline 101, and the total gas pipeline 101 is used for introducing carrier gas and steam;

in an alternative embodiment, the carrier gas is argon. It should be noted that other gases known to those skilled in the art may be used as the carrier gas.

In an alternative embodiment, the steam is saturated steam for chemical reactions. The steam which has not undergone heat treatment is called saturated steam, which is steam at a temperature of 100 degrees under one atmosphere, and the temperature cannot be raised any more, and is steam in a saturated state. Saturated vapors are caused by thermal motion phenomena between gas molecules. The liquid in the saturated state is called saturated liquid, and its vapor is called dry saturated vapor (also called saturated vapor). It is a colorless, odorless, non-flammable gas.

One end of each sub-gas pipeline 102 is communicated with the total gas pipeline 101, a spray header 107 is arranged at the other end of each sub-gas pipeline 102, and a second gas flux detection module 106 and a sub-gas pipeline valve 105 are arranged on each sub-gas pipeline 102;

in an alternative embodiment, the number of gas distribution lines 102 is four. It should be noted that, in practical applications, the number of the gas dividing lines 102 may be more or less, which is not specifically limited herein.

In an alternative embodiment, a heating plate 108 is also provided on the showerhead 107 for reheating saturated steam.

In an alternative embodiment, both the total gas line valve 104 and the split gas line valve 105 are electrically controlled valves. The electrically operated valve is a hydraulically operated valve with solenoid valve as pilot valve. The automatic control device is commonly used for automatic control in water supply and drainage and industrial systems, the control reaction is accurate and rapid, and the pipeline system is opened and closed by remote control according to an electric signal, so that remote operation is realized. Can replace gate valves and butterfly valves for large-scale electric operating systems. The valve closing speed is adjustable, and the valve is closed smoothly without pressure fluctuation.

In an alternative embodiment, the first and second gas flux detection modules are pressure sensors, and the magnitude of the gas flux can be obtained by measuring the pressure.

The control circuit is used for receiving the electric signals of the first gas flux detection module 103 and each second gas flux detection module 106, and if the gas flux difference between the gas distribution pipelines 102 is larger than a preset value, each gas distribution pipeline valve 105 is closed. When the pressure difference on each pipeline is overlarge (namely, the difference exists in the characteristic gas flux), the automatic clamping control is realized, the current process is stopped, and therefore, the rejection of products is avoided.

In an alternative embodiment, the gas delivery device is used in an atomic layer deposition tool. It should be noted that the present utility model can be applied to other machines known to those skilled in the art.

It should be noted that, the illustrations provided in the present embodiment merely illustrate the basic concept of the present utility model by way of illustration, and only the components related to the present utility model are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complex.

In summary, the gas flux detection module is added on the gas pipeline of the branch pipe, so that the gas flux adjustment of each pipeline is more efficient; the occurrence of overlarge gas flux difference on each pipeline can realize automatic clamping control and suspend the current process, thereby avoiding the scrapping of products. Therefore, the utility model effectively overcomes various defects in the prior art and has high industrial utilization value.

The above embodiments are merely illustrative of the principles of the present utility model and its effectiveness, and are not intended to limit the utility model. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the utility model. Accordingly, it is intended that all equivalent modifications and variations of the utility model be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.

Claims

1. A gas delivery device, comprising:

2. The gas delivery device of claim 1, wherein: the carrier gas is argon.

3. The gas delivery device of claim 1, wherein: the steam is saturated steam for chemical reactions.

4. The gas delivery device of claim 1, wherein: the number of the gas dividing pipelines is four.

5. The gas delivery device of claim 1, wherein: and a heating plate is further arranged on the spray header.

6. The gas delivery device of claim 1, wherein: the gas transmission device is used for an atomic layer deposition machine.

7. The gas delivery device of claim 1, wherein: the total gas pipeline valve and the gas dividing pipeline valve are electric control valves.

8. The gas delivery device of claim 1, wherein: the first gas flux detection module and the second gas flux detection module are pressure sensors.