CN219170367U - A CNC ultra-precision grinding machine with multi-directional processing function - Google Patents

Abstract

The utility model discloses a numerical control ultra-precision grinding machine with multidirectional processing function, which relates to the technical field of numerical control ultra-precision grinding machines, a screw rod I is screwed in a chute I by utilizing a bearing, the rotating seat is screwed on the first screw rod, the first motor is fixedly arranged in the first chute, the output end of the first motor is fixedly connected with the end part of the first screw rod, and the first motor is connected with an external power supply; the fixed mount is fixedly arranged on the rotating seat, the left side wall and the right side wall of the fixed mount are both provided with a second sliding groove, a second screw rod is screwed in the second sliding groove by utilizing a bearing, two fixed blocks are respectively arranged in the second sliding groove in a sliding manner, and the left fixed block is screwed on the second screw rod; the ends of the two rotating shafts are screwed on the fixed block by using bearings, the rotating frame is fixedly arranged between the two rotating shafts, and the electric spindle is fixedly arranged on the rotating frame; the adjusting mechanism is arranged on the left fixed block, and the motorized spindle can be adjusted in a multidirectional manner through the device, so that the processing quality of the silicon wafer is ensured.

Description

A CNC ultra-precision grinding machine with multi-directional processing function

technical field

The utility model relates to the technical field of numerical control ultra-precision grinding machines, in particular to a numerical control ultra-precision grinding machine with multi-directional processing functions.

Background technique

In the existing CNC ultra-precision grinding machine, when processing silicon wafers, the direction of machining and grinding of the electric spindle is fixed. Since the size of the silicon wafer requires high precision, the electric spindle that needs to be processed is processed in multiple directions, so that the quality requirements of the silicon wafer can be guaranteed. Therefore, there is an urgent need for a numerically controlled ultra-precision grinding machine with multi-directional processing functions to solve the above problems.

Utility model content

The purpose of the utility model is to provide a numerically controlled ultra-precision grinding machine with multi-directional processing function aiming at the defects and deficiencies of the prior art, and its technical features can solve the above-mentioned problems.

In order to achieve the above purpose, the utility model adopts the following technical solutions: it includes a worktable and a rotating seat; a chute is provided on the workbench; the rotating seat is slidably arranged on the chute;

It also contains:

Screw mandrel 1, described screw mandrel 1 is screwed in the chute 1 by bearing, the rotating seat thread is screwed on the screw mandrel 1, the motor 1 is fixedly arranged in the chute 1, and the output end of the motor 1 is connected with the screw mandrel 1. One end is fixedly connected, and motor one is connected to an external power supply;

The fixed frame, the fixed frame is fixedly arranged on the rotating seat, the left and right side walls of the fixed frame are provided with the second chute, the screw rod two is screwed in the second chute by the bearing, and the two fixed blocks are respectively slidably set Inside the chute 2, and the fixed block on the left is threaded on the screw rod 2;

There are two rotating shafts, the ends of the two rotating shafts are screwed to the fixed block by bearings, the turret is fixedly arranged between the two rotating shafts, and the electric spindle is fixedly arranged on the turret;

An adjustment mechanism, the adjustment mechanism is arranged on the fixed block on the left side.

Preferably, the adjustment mechanism includes:

gear, the gear is fixedly sleeved on the left rotating shaft, the rack is slidably arranged on the fixed block on the left, and the gear and the rack are meshed and arranged;

A positioning plate, the positioning plate is fixedly arranged on the fixed block on the left side;

The runner, the runner is connected to the positioning plate by the rotating shaft, and the runner is located under the turret, the second motor is fixed on the positioning plate, the output end of the second motor is fixedly connected to the runner, and the second motor is connected to the external power connection;

A movable rod, the movable rod is fixedly arranged on the bottom end of the rack, and the bottom end of the movable rod is provided with a movable groove, the movable block slides and is set in the movable groove, and the right-angle rod is fixedly arranged on the bottom end of the movable block, The cross bar of right-angle bar utilizes bearing to be screwed on the running wheel.

Preferably, a limiting slot is provided on the fixed block on the left side, and the rack is clamped in the limiting slot.

Preferably, a spring is arranged in the movable groove, and the two ends of the spring are respectively fixedly connected with the movable rod and the movable block.

Preferably, a chute three is provided on the left and right sides of the turret, the screw rod three is screwed into the left chute three by means of a bearing, and the left rotating shaft is screwed on the screw rod three .

Compared with the prior art, the beneficial effect of the utility model is: a kind of numerical control ultra-precision grinding machine with multi-directional processing function described in the utility model can adjust the electric spindle in multiple directions through the device, so as to ensure the smoothness of the silicon wafer. Processing quality.

Description of drawings

Fig. 1 is the structural representation of the utility model.

Fig. 2 is a structural schematic diagram of the turret and the adjustment mechanism in the utility model.

Fig. 3 is a structural schematic diagram of the adjustment mechanism in the utility model.

Fig. 4 is a structural schematic view of the runner wheel and the movable rod in the utility model.

Explanation of reference signs:

Workbench 1, rotating seat 2, chute 1, screw rod 1, motor 1 5, fixed frame 6, chute 2 7, screw rod 2 8, rotating shaft 9, turret 10, electric spindle 11, adjustment mechanism 12. Gear 13, rack 14, positioning plate 15, runner 16, motor 2 17, movable rod 18, movable groove 19, movable block 20, limit groove 21, spring 22, chute 3 23, screw rod 3 24 , fixed block 25.

Detailed ways

Below in conjunction with accompanying drawing, the utility model is further described.

As shown in Fig. 1--Fig. 4, present embodiment adopts following technical scheme: it comprises workbench 1 and swivel seat 2; Offer chute-3 on workbench 1, the silicon wafer that needs processing can be placed on by operator On the workbench 1; the rotating seat 2 is slidably arranged on the chute-3, and the rotating seat 2 can be driven by an external driving device to make the rotating seat 2 rotate, so that it is convenient for the operator to adjust the direction of the device;

It also contains:

Screw mandrel-4, described screw mandrel-4 utilizes bearing to be screwed in the chute-3, and rotating seat 2 thread is screwed on the screw mandrel-4, and motor-5 is fixedly arranged in the chute-3, and motor The output end of a 5 is fixedly connected to the end of the screw 4, and the motor 5 is connected to an external power supply. The operator can turn on the motor 5, so that the motor 5 drives the screw 4 to rotate, so that the rotating base 2 Move on the workbench 1, so that it is convenient for the operator to adjust the position of the device;

Fixed mount 6, described fixed mount 6 is fixedly arranged on the rotating seat 2, is provided with chute 2 7 on the left and right side walls of the fixed mount 6, and screw mandrel 2 8 utilizes bearing to be screwed in the chute 2 7, Two fixed blocks 25 are slidably arranged in the chute two 7 respectively, and the fixed block 25 on the left side is screwed on the screw mandrel two 8, and when the rotating base 2 rotates, thereby driving the fixed frame 6 to rotate, it is convenient for the operator to turn the The fixed frame 6 is adjusted to different orientations;

There are two rotating shafts 9, the ends of the two rotating shafts 9 are screwed on the fixed block 25 by means of bearings, the turret 10 is fixedly arranged between the two rotating shafts 9, and the electric spindle 11 is fixed Set on the turret 10, the operator can turn the rotating shaft 9 so that the rotating shaft 9 drives the turret 10 to rotate, so that the electric spindle 11 can be fixed at different angles, so that it is convenient for the operator to fix the electric spindle 11 according to actual requirements to different directions;

An adjustment mechanism 12, the adjustment mechanism 12 is arranged on the fixed block 25 on the left side, the electric spindle 11 can be fixed in different directions through the adjustment mechanism 12, so as to achieve the effect of multi-directional processing;

Adjusting mechanism 12 is made of gear 13, locating plate 15, runner 16 and movable bar 18, and gear 13 is fixedly sleeved on the rotating shaft 9 on the left side, and rack 14 is slidably arranged on the fixed block 25 on the left side, and gear 13 Engaged with the rack 14, the positioning plate 15 is fixedly arranged on the fixed block 25 on the left side, the runner 16 is screwed on the positioning plate 15 by means of a rotating shaft, and the runner 16 is located under the turret 10, and the second motor 17 is fixed Set on the positioning plate 15, the output end of the second motor 17 is fixedly connected to the runner 16, the second motor 17 is connected to the external power supply, the movable rod 18 is fixedly arranged on the bottom end of the rack 14, and the bottom end of the movable rod 18 is opened There is a movable groove 19, and the movable block 20 is slidingly set in the movable groove 19, and the right-angle rod is fixedly arranged at the bottom of the movable block 20. During the angle of 11, motor 2 17 can be opened, and runner 16 is rotated, and runner 16 drives right-angle bar to move, and the top of right-angle bar drives movable block 20 to slide in movable groove 19, thereby makes movable bar 18 drive rack 14 moves up and down, so that the gear 13 rotates through the movement of the rack 14, so that the rotating shaft 9 drives the turret 10 to rotate, so that the turret 10 drives the electric spindle 11 to rotate, and when the rack 14 rises, the turret 10 drives The electric spindle 11 is tilted to the rear side, otherwise it is tilted to the front side. The fixed block 25 is provided with a limiting groove 21, and the rack 14 is stuck in the limiting groove 21. Through the limiting groove 21, the rack 14 can be limited. On the movable block 20, prevent the tooth bar 14 from shifting when moving, and the movable groove 19 is provided with a spring 22, and the two ends of the spring 22 are fixedly connected with the movable bar 18 and the movable block 20 respectively, and by the elastic force of the spring 22, the When the movable block 20 slides in the movable groove 19, the movable block 20 can slide smoothly;

Both left and right sides of the turret 10 are provided with chute 3 23, the screw mandrel 3 24 is screwed in the chute 23 on the left side by bearing, and the rotation shaft 9 on the left side is screwed on the screw mandrel 3 24 , the operator can rotate the screw mandrel 3 24, and the screw mandrel 3 24 moves on the rotating shaft 9 on the left side, so that the turret 10 moves along the direction of the chute 3 23, which is convenient for the operator to adjust the turret 10 on the fixed frame 6 location within.

When using the utility model, the operator can first turn on the motor one 5, which can make the screw mandrel one 4 rotate so that the rotating base 2 can move on the workbench 1, so that the rotating base 2 can be moved to a suitable position, and then the operator will The rotating base 2 can rotate the rotating base 2 through an external driving device, so that the fixed mount 6 rotates to a suitable position, and then the motor 2 17 can be turned on, so that the runner 16 rotates, so that the runner 16 drives the right-angle rod to move, so that the right-angle rod The top drives the movable block 20 to slide in the movable groove 19, so that the movable rod 18 drives the rack 14 to move up and down, so that the gear 13 is rotated by the movement of the rack 14, so that the rotating shaft 9 drives the turret 10 to rotate, thereby making the rotation The frame 10 drives the electric spindle 11 to rotate, thereby turning the electric spindle 11 to a suitable angle. Finally, the operator can rotate the rotating base 2 through an external drive device, so that the fixed frame 6 drives the electric spindle 11 to rotate to a suitable position, thereby It is convenient for the electric spindle 11 to process silicon wafers.

After adopting the above structure, the beneficial effects of this embodiment are as follows:

1. Set the fixed frame 6, the fixed frame 6 can be rotated to different positions through the rotating seat 2, and then the inclination angle of the electric spindle 11 can be adjusted through the adjustment mechanism 12, so as to achieve the function of multi-directional processing;

2. The adjusting mechanism 12 is set, and the operator can turn on the motor 2 17 to make the runner 16 rotate, so that the movable rod 18 drives the rack 14 to move, so that the turret 10 drives the electric spindle 11 to rotate to a suitable angle.

The above is only used to illustrate the technical solution of the utility model without limitation, other modifications or equivalent replacements made by those skilled in the art to the technical solution of the utility model, as long as they do not depart from the spirit and scope of the technical solution of the utility model , should be covered in the scope of the claims of the present utility model.

Claims (5)

1. A CNC ultra-precision grinding machine with multi-directional processing function, which includes a worktable (1) and a rotating seat (2); the worktable (1) is provided with a chute (3); the rotating seat (2) slides Set on the chute one (3); It is characterized in that it also contains: Screw mandrel one (4), described screw mandrel one (4) utilizes the bearing to be screwed in the chute one (3), the rotating seat (2) thread is screwed on the screw mandrel one (4), and the motor one (5 ) is fixedly arranged in the chute one (3), and the output end of the motor one (5) is fixedly connected to the end of the screw rod one (4), and the motor one (5) is connected to an external power supply; The fixed frame (6), the fixed frame (6) is fixedly arranged on the rotating seat (2), the left and right side walls of the fixed frame (6) are provided with chute two (7), the screw rod two (8) ) is screwed into the chute 2 (7) by using the bearing, and the two fixed blocks (25) are respectively slid and set in the chute 2 (7), and the fixed block (25) on the left side is screwed into the screw rod 2 ( 8) on; Rotating shaft (9), there are two rotating shafts (9), the ends of the two rotating shafts (9) are screwed on the fixed block (25) using bearings, and the turret (10) is fixedly arranged on two Between the rotating shafts (9), the electric spindle (11) is fixedly arranged on the turret (10); An adjustment mechanism (12), the adjustment mechanism (12) is arranged on the left fixed block (25). 2. A CNC ultra-precision grinding machine with multi-directional processing function according to claim 1, characterized in that: the adjustment mechanism (12) includes: Gear (13), the gear (13) is fixedly sleeved on the left rotating shaft (9), the rack (14) is slidably arranged on the left fixed block (25), the gear (13) and the teeth Bar (14) meshing setting; A positioning plate (15), the positioning plate (15) is fixedly arranged on the left fixed block (25); The runner (16), the rotating shaft of the runner (16) is rotated on the positioning plate (15), and the runner (16) is located under the turret (10), and the second motor (17) is fixed on the positioning plate (15), the output end of the second motor (17) is fixedly connected to the runner (16), and the second motor (17) is connected to the external power supply; The movable rod (18), the movable rod (18) is fixedly arranged on the bottom end of the rack (14), and the bottom end of the movable rod (18) is provided with a movable groove (19), and the movable block (20) slides Card is located in movable groove (19), and right angle bar is fixedly arranged on the bottom of movable block (20), and the cross bar of right angle bar utilizes bearing to be screwed on the running wheel (16). 3. A CNC ultra-precision grinding machine with multi-directional processing function according to claim 2, characterized in that: the fixed block (25) on the left side is provided with a limit slot (21), and the rack (14) is clamped in the limit slot (21). 4. A CNC ultra-precision grinding machine with multi-directional processing function according to claim 2, characterized in that: said movable groove (19) is provided with a spring (22), and the two ends of the spring (22) are respectively Fixedly connected with movable bar (18) and movable block (20). 5. A CNC ultra-precision grinding machine with multi-directional processing function according to claim 1, characterized in that: the left and right sides of the turret (10) are provided with chute three (23), the wire Rod three (24) utilizes bearing to be screwed in the chute three (23) on the left side, and the rotating shaft (9) screw thread on the left side is screwed on the screw mandrel three (24).

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