CN219005833U - Carrier plate repairing jig - Google Patents
Carrier plate repairing jig Download PDFInfo
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- CN219005833U CN219005833U CN202320015661.6U CN202320015661U CN219005833U CN 219005833 U CN219005833 U CN 219005833U CN 202320015661 U CN202320015661 U CN 202320015661U CN 219005833 U CN219005833 U CN 219005833U
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- jig
- carrier plate
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Abstract
The utility model relates to a carrier disc repairing jig, and belongs to the technical field of semiconductors. The carrier plate repairing jig comprises a jig body, wherein the jig body is provided with a first through hole and a second through hole which are communicated in the thickness direction, the first through hole and the second through hole are arranged in concentric circles, the first through hole is used for placing a carrier plate, and the second through hole is used for exposing a back metal film area of the carrier plate. The utility model solves the problem of lower repairing efficiency of the carrier disc in the prior art.
Description
Technical Field
The utility model relates to the technical field of semiconductors, in particular to a carrier disc repairing jig.
Background
In the semiconductor field, a quartz carrier is one of the most commonly used wafer carriers of an ICP dry etching machine, the material of the quartz carrier is quartz, and the front surface is carved with wafer grooves with different numbers, and the ESC electrostatic adsorption carrier (He gas is introduced to cool the carrier) is required to be coated with metal on the back surface of the carrier during the dry method, so that the electrostatic adsorption purpose is achieved. When the machine detector judges the position and state of the carrying disc, the edge of the carrying disc is required to have a light transmission position of 5mm to 10mm, so that the back surface of the carrying disc is plated with metal generally without whole surface plating, and a corresponding light transmission distance is reserved. After the carrier disc is used for a long time, the metal on the back surface can be worn and fall off, so that electrostatic adsorption and sensor detection can be affected, and therefore, the re-coating film needs to be repaired and re-coated. However, the existing professional repairing coating equipment has a complex structure, a longer repairing process and high manufacturing cost, so that the repairing efficiency of the carrying disc is lower and the cost is higher.
Therefore, how to improve the repair efficiency of the carrier tray is a problem to be solved.
Disclosure of Invention
In view of the above-mentioned prior art's not enough, the purpose of this application is to provide a carrier plate repair tool, aims at solving the lower problem of carrier plate repair efficiency among the prior art.
The utility model provides a year dish repair tool, includes the tool body, and the tool body has first through-hole and the second through-hole that link up along thickness direction, and first through-hole and the concentric circle setting of second through-hole, wherein, first through-hole is used for placing the year dish, and the second through-hole is used for exposing the back metal film region of year dish.
Above-mentioned through set up on the tool body along thickness direction link up and first through-hole and the second through-hole that the concentric circles set up for first through-hole can place the carrier plate, and the second through-hole can expose the back metal film region of carrier plate, will place the carrier plate and repair the carrier plate that the tool is installed and can carry out back coating film to the carrier plate wherein on metal evaporation equipment, simple structure, convenient to use has improved the maintenance efficiency of carrier plate greatly, has solved the lower problem of carrier plate maintenance efficiency among the prior art.
Optionally, the shape of the first through hole is adapted to the shape of the carrier disc. Through the arrangement, the carrying disc can be just placed in the first through hole, the hole wall of the first through hole is limited to the carrying disc, the carrying disc is prevented from moving in the first through hole, the back metal film area of the carrying disc is prevented from moving along with the carrying disc, the accuracy of repairing the coating film is further guaranteed, and the repairing efficiency of the carrying disc is also guaranteed.
Optionally, the inner diameter of the second through hole is smaller than the inner diameter of the first through hole. Through the arrangement, the annular step surface is formed at the joint of the first through hole and the second through hole, so that the carrying disc is placed on the step surface, and the carrying disc is ensured to be firmly placed in the first through hole.
Optionally, the carrier disc repairing fixture further comprises a sealing ring, and the sealing ring is arranged at the bottom periphery of the first through hole. Through setting up the sealing washer for the carrier plate can have good leakproofness in step face department, and metal gets into first through-hole from the step face when avoiding the coating film, causes the pollution to other positions of first through-hole and carrier plate.
Optionally, the inner diameter of the second through hole is adapted to the diameter of the backside metal film region of the carrier platter. Through the arrangement, the back metal film area of the carrying disc is just exposed outside, the metal evaporation equipment can directly perform film coating from the second through hole to obtain the back metal film of the carrying disc, meanwhile, the light transmission position of the edge of the carrying disc can be reserved without special shielding, and the repairing efficiency of the carrying disc is greatly improved.
Optionally, the first through hole has an inner diameter of 330mm to 370mm; and/or the thickness of the first through hole is 1mm to 3mm; and/or the second through hole has an inner diameter of 320mm to 360mm; and/or the outer diameter of the jig body is 350mm to 390mm; and/or the thickness of the jig body is 3mm to 5mm. Through the arrangement, the carrier plate repairing jig has proper size, so that the carrier plate is better matched and the manufacturing cost is reduced as much as possible.
Optionally, the carrier disc repairing jig further comprises a limiting piece, wherein the limiting piece is arranged at the edge of the jig body and used for limiting and stopping the carrier disc in the first through hole. Through setting up the locating part, can improve the steadiness that the carrying tray placed in first through-hole, and avoid carrying the tray to drop in the motion process such as upset and cause the damage from first through-hole.
Optionally, the locating part is a plurality of, and a plurality of locating parts set up along the circumference interval of tool body. Through above-mentioned setting for the carrier plate obtains better limit stop in circumference, further improves the steadiness of placing in first through-hole.
Optionally, the limiting piece is rotatably arranged, at least one part of the limiting piece rotates to the opening of the first through hole so as to limit the stop carrier disc. The limiting part in the above form is simple in structure, convenient to use and good in limiting stop effect.
Optionally, the limiting piece is a spring piece, one end of the spring piece is arranged at the edge of the jig body, and the other end of the spring piece stretches into the opening of the first through hole. The limiting part in the above form is simple in structure, convenient to use and good in limiting stop effect.
Drawings
FIG. 1 is a schematic view of a tray repair tool according to an embodiment of the utility model without a tray;
FIG. 2 is a schematic view of a tray placement structure of a tray repair tool according to an embodiment of the utility model;
FIG. 3 is a cross-sectional view of a carrier platter repair tool according to one embodiment of the utility model;
fig. 4 is a schematic view illustrating another angle of the carrier tray repairing tool according to an embodiment of the utility model.
Reference numerals illustrate:
10-a jig body; 11-a first through hole; 12-a second through hole; 20-carrying a disc; 30-sealing rings; 40-limiting piece.
Detailed Description
In order to facilitate an understanding of the present application, a more complete description of the present application will now be provided with reference to the relevant figures. Preferred embodiments of the present application are shown in the accompanying drawings. This application may, however, be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
As described in the background section, the prior art has a problem of low efficiency of carrier disc repair.
Based on this, the present application intends to provide a solution to the above technical problem, the details of which will be explained in the following embodiments. As shown in fig. 1 to 4, the repairing jig for the carrier tray 20 includes a jig body 10, wherein the jig body 10 has a first through hole 11 and a second through hole 12 penetrating in a thickness direction, the first through hole 11 and the second through hole 12 are concentrically arranged, the first through hole 11 is used for placing the carrier tray 20, and the second through hole 12 is used for exposing a rear metal film region of the carrier tray 20.
Above-mentioned through set up on tool body 10 along thickness direction link up and the first through-hole 11 and the second through-hole 12 that the concentric circles set up for first through-hole 11 can place the carrier plate 20, and the second through-hole 12 can expose the back metal film region of carrier plate 20, install the carrier plate 20 restoration tool of placing the carrier plate 20 on metal evaporation equipment and can carry out the back coating film to the carrier plate 20 wherein, simple structure, convenient to use has improved the restoration efficiency of carrier plate 20 greatly.
In this embodiment, the jig body 10 is ring-shaped. The carrier plate 20 is circular and correspondingly, the area of the back metal film of the carrier plate is also circular.
In the present embodiment, the shape of the first through hole 11 is adapted to the shape of the carrier tray 20. Through the arrangement, the carrying disc 20 can be just placed in the first through hole 11, the hole wall of the first through hole 11 limits the carrying disc 20, the carrying disc 20 is prevented from moving in the first through hole 11, the back metal film area of the carrying disc 20 is prevented from moving along with the carrying disc, the accuracy of repairing the coating is further guaranteed, and the repairing efficiency of the carrying disc 20 is also guaranteed.
In the present embodiment, the inner diameter of the second through hole 12 is smaller than the inner diameter of the first through hole 11. Through the arrangement, the annular step surface is formed at the joint of the first through hole 11 and the second through hole 12, so that the carrier plate 20 is placed on the step surface, and the carrier plate 20 is ensured to be firmly placed in the first through hole 11.
As shown in fig. 3, the repairing tool for the carrier plate 20 further includes a sealing ring 30. The sealing ring 30 is disposed at the bottom periphery of the first through hole 11. By arranging the sealing ring 30, the carrier plate 20 can have good sealing performance at the step surface, so that metal is prevented from entering the first through hole 11 from the step surface during film plating, and pollution is caused to the first through hole 11 and other parts of the carrier plate 20.
Further, the width of the sealing ring 30 is matched with the width of the step surface, so that the first through hole 11 and the second through hole 12 can be avoided, the coating film cannot be hindered, the step surface can be completely sealed, and the sealing effect is ensured.
In this embodiment, the inner diameter of the second through hole 12 is adapted to the diameter of the back metal film region of the carrier plate 20. Through the arrangement, the back metal film area of the carrying disc 20 is just exposed outside, the metal evaporation equipment directly performs film plating from the second through hole 12 to obtain the back metal film of the carrying disc 20, meanwhile, the light transmission position of the edge of the carrying disc 20 can be reserved without special shielding, and the repairing efficiency of the carrying disc 20 is greatly improved. It can be understood that the light-transmitting position of the edge of the carrier plate 20 is annular, and the width of the step surface is the width of the light-transmitting position, so that the difference between the inner diameter of the first through hole 11 and the inner diameter of the second through hole is the width of the light-transmitting position. In the present embodiment, the difference between the inner diameter of the first through hole 11 and the inner diameter of the second through hole is 10mm to 20mm, thereby satisfying the width requirement of the light transmitting position.
In the present embodiment, the inner diameter of the first through hole 11 is 330mm to 370mm. The thickness of the first through hole 11 is 1mm to 3mm. The second through hole 12 has an inner diameter of 320mm to 360mm. The outer diameter of the jig body 10 is 350mm to 390mm. The thickness of the jig body 10 is 3mm to 5mm. By the above arrangement, the carrier tray repairing jig is made to have a proper size, thereby better fitting the carrier tray 20 and reducing manufacturing costs as much as possible. Of course, the carrier tray repairing tool can be of other sizes, and can be selected according to actual requirements.
As shown in fig. 1 to 4, the repairing tool for the carrier plate 20 further includes a limiting member 40. The limiting piece 40 is disposed at the edge of the jig body 10 and is used for limiting and stopping the carrier plate 20 in the first through hole 11. By arranging the limiting piece 40, the stability of the carrier plate 20 in the first through hole 11 can be improved, and damage caused by falling off of the carrier plate 20 from the first through hole 11 in the process of turning and other movements is avoided.
In the present embodiment, the number of the limiting members 40 is plural, and the plurality of limiting members 40 are disposed at intervals along the circumferential direction of the jig body 10. Through the above arrangement, the carrier plate 20 is better limited and stopped in the circumferential direction, and the stability of the carrier plate placed in the first through hole 11 is further improved.
In this embodiment, the limiting member 40 is rotatably disposed, and at least a portion of the limiting member 40 rotates to the opening of the first through hole 11 to limit the stop tray 20. The limiting member 40 of the above-described form is simple in structure, convenient to use and has a good limiting stopper function. Specifically, the limiting member 40 has an opening, and correspondingly, the edge of the jig body 10 also has a mounting hole, and the screw sequentially passes through the opening and the mounting hole, so that the limiting member 40 is mounted on the jig body 10, and the limiting member 40 can rotate around the screw in the horizontal direction.
In an alternative embodiment, the limiting member 40 includes a bracket fixedly provided at the edge of the jig body 10 and a limiting bar rotatably connected to the bracket by a screw. When the limit bar keeps a horizontal state, the limit bar is positioned at a position avoiding the carrier plate 20, and when the limit bar rotates to a vertical state, one end of the limit bar is abutted with the upper surface of the carrier plate 20, so that the carrier plate 20 is limited and stopped. It should be noted that the above-described type of stopper 40 is not required to be provided in a plurality of pieces, but to be provided in two opposing pieces, so that a sufficient space is provided for loading and unloading the carrier tray 20.
In an alternative embodiment, the limiting member 40 is a spring, one end of the spring is disposed at the edge of the jig body 10, and the other end of the spring extends into the opening of the first through hole 11. Specifically, the normal state of the spring plate is a limit stop state, when the carrier plate 20 needs to be placed in the first through hole 11, the spring plate needs to be lifted upwards to avoid the opening of the first through hole 11, and then the carrier plate 20 is placed in the first through hole 11. The limiting member 40 of the above-described form is simple in structure, convenient to use and has a good limiting stopper function.
The specific use process of the carrier disc repairing jig in this embodiment is as follows:
the back surface old metal film of the carrier plate 20 is first removed using an ITO etching liquid, and then the carrier plate 20 is cleaned using ultrapure water. The carrier plate 20 is placed in the first through hole 11 of the jig body 10 and is limited and stopped by the limiting piece 40. The assembled carrier plate repairing fixture is installed on a plating pot of a metal evaporator, the fixture is used for fixing and stabilizing, the second through holes 12 face to an evaporation port, and then Ti or Ni evaporation procedures are set for directly plating films from 50nm to 100nm. And after the evaporation is finished, the carrier plate 20 is cleaned in a pot, and finally, an ICP test (electrostatic adsorption effect and sensor detection test) is carried out on the carrier plate by a machine, and the whole evaporation process is finished after the test is qualified.
It is to be understood that the utility model is not limited in its application to the examples described above, but is capable of modification and variation in light of the above teachings by those skilled in the art, and that all such modifications and variations are intended to be included within the scope of the appended claims.
Claims (10)
1. The utility model provides a year dish repair tool, its characterized in that, includes the tool body, the tool body has first through-hole and the second through-hole that link up along thickness direction, first through-hole with the concentric circles setting of second through-hole, wherein, first through-hole is used for placing the year dish, the second through-hole is used for exposing the back metal film region of year dish.
2. The carrier platter repairing jig according to claim 1, wherein the shape of the first through hole is adapted to the shape of the carrier platter.
3. The carrier platter repair jig of claim 1 wherein an inner diameter of the second through hole is smaller than an inner diameter of the first through hole.
4. The carrier platter repair jig of claim 3 further comprising a sealing ring disposed at a bottom periphery of said first through hole.
5. The carrier platter repair jig of claim 1 wherein an inner diameter of the second through hole is adapted to a diameter of a backside metal film region of the carrier platter.
6. The carrier tray repairing tool according to claim 1, wherein,
the first through hole has an inner diameter of 330mm to 370mm; and/or
The thickness of the first through hole is 1mm to 3mm; and/or
The inner diameter of the second through hole is 320mm to 360mm; and/or
The outer diameter of the jig body is 350mm to 390mm; and/or
The thickness of tool body is 3mm to 5mm.
7. The carrier platter reclamation jig of any one of claims 1 to 6, further comprising a stopper disposed at an edge of the jig body for limiting the carrier platter within the first through hole.
8. The carrier platter repairing jig according to claim 7, wherein the plurality of limiting members are arranged at intervals along the circumferential direction of the jig body.
9. The carrier plate repairing jig according to claim 7, wherein the stopper is rotatably provided, and at least a portion of the stopper is rotated to an opening of the first through hole to stop the carrier plate.
10. The carrier plate repairing jig according to claim 7, wherein the limiting member is a spring plate, one end of the spring plate is arranged at the edge of the jig body, and the other end of the spring plate extends into the opening of the first through hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320015661.6U CN219005833U (en) | 2023-01-04 | 2023-01-04 | Carrier plate repairing jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320015661.6U CN219005833U (en) | 2023-01-04 | 2023-01-04 | Carrier plate repairing jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219005833U true CN219005833U (en) | 2023-05-12 |
Family
ID=86252202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320015661.6U Active CN219005833U (en) | 2023-01-04 | 2023-01-04 | Carrier plate repairing jig |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219005833U (en) |
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2023
- 2023-01-04 CN CN202320015661.6U patent/CN219005833U/en active Active
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