CN218924035U - Material filtering and filling device - Google Patents

Abstract

The utility model provides a material filtering and filling device, which relates to the field of photoresist processing equipment and comprises a reaction kettle, wherein a processing box is arranged on one side of the reaction kettle, a liquid pump, a metal ion filter, a particle filter and a mounting plate are arranged in the processing box, the reaction kettle is connected with the liquid pump, the liquid pump is connected with a conveying pipe, a conveying valve is arranged on the conveying pipe, the conveying pipe is connected with the metal ion filter, the metal ion filter is connected with a first-stage three-way pipe, and first valves are arranged on output pipelines of the first-stage three-way pipe; compared with the prior art, the device can carry out targeted filtration on impurities contained in different photoresist products, and when metal ions or particulate matters do not need to be circularly filtered, one of the metal ion filters or the particulate filters can be in a closed state, so that the consumption of energy sources is reduced, and the device has good effect on the circular filtration and filling of the photoresist.

Description

Material filtering and filling device

Technical Field

The utility model relates to the field of photoresist processing equipment, in particular to a material filtering and filling device.

Background

In the photoresist production process, cyclic filtration is an essential step, and is an essential way for removing particulate matters and metal ion impurities, and the filling process is extremely easy to be influenced by external environment, so that a large amount of particulate matters or metal ion impurities are introduced. For research and development and small-scale test, because the product quantity is less, the large-scale circulating filtration and filling equipment commonly used in the industry cannot be used, and meanwhile, in order to ensure the product quality, most of the cases can require manufacturers to build large-area ten-level or even hundred-level research and development workshops, and the engineering cost and the operation cost are high.

The utility model discloses a CN210495947U, proposes a circulation filter device for photoresist production, and this structure includes first holding vessel, filter and second holding vessel, be connected with the filter through the pipeline between first holding vessel and the second holding vessel, the filter includes first filter, second filter and third filter and connects in series in proper order, and the filter is through multiunit series connection hierarchical filtration, forms fine filtration according to the grading of filter membrane filtration diameter, improves filtration efficiency; the filter membrane is made of polytetrafluoroethylene, so that the requirements of photoresist on the filter material are met, and the filter liquid is not polluted; the feed pump increases the filtration rate and the delivery of the filtrate by pressurizing the filtrate; however, since the impurities contained in different photoresists are different, the impurities in different photoresists cannot be filtered in a targeted manner by the scheme, so that all filters are always in a state of working simultaneously, and therefore the energy consumption is relatively high.

Disclosure of Invention

The utility model aims to solve the problems in the background art, and further provides a material filtering and filling device.

The technical scheme adopted for solving the technical problems is as follows:

the utility model provides a material filters filling device, including reation kettle, one side of reation kettle is provided with the processing case, be provided with the liquid pump in the processing case, metal ion filter, particulate filter and mounting panel, reation kettle is connected with the liquid pump, the liquid pump is connected with the conveyer pipe, be provided with the delivery valve on the conveyer pipe, the conveyer pipe is connected with metal ion filter, metal ion filter is connected with one-level three-way pipe, all be provided with first valve on the output tube of one-level three-way pipe, two output tube of one-level three-way pipe are connected with communicating pipe and runner pipe respectively, the intercommunication has the transfer pipe on the conveyer pipe, be provided with the transfer valve on the transfer pipe, the communicating pipe is connected with particulate filter, the particulate filter communicates the runner pipe, one end of runner pipe is connected with the second three-way pipe, all be provided with the second valve on the output tube of second three-way pipe, two output tube of second three-way pipe are connected with filling subassembly and reation the mounting panel respectively, the container has been placed on the mounting panel, container and filling subassembly cooperate.

Compared with the prior art, the device can carry out targeted filtration on impurities contained in different photoresist products, and when metal ions or particulate matters do not need to be circularly filtered, one of the metal ion filters or the particulate filters can be in a closed state, so that the consumption of energy sources is reduced, and the device has good effect on the circular filtration and filling of the photoresist.

Further, the filling assembly comprises a filling pipe and a filling head, wherein one output pipeline of the two-stage three-way pipe is connected with the filling pipe, the filling head is arranged on the filling pipe, and the filling head is positioned above the container.

In the scheme, the filling process of photoresist into the container is realized by matching the filling pipe with the filling head.

Further, an electronic scale is arranged on the mounting plate, and a container is arranged on the electronic scale.

In the scheme, the electronic scale is additionally arranged to realize equal-quality filling of the photoresist.

Further, an air filter is arranged on the processing box.

According to the scheme, the cleanliness of the air in the processing box in the filling process is guaranteed by additionally arranging the air filter, and the subsequent use of photoresist is prevented from being influenced by impurities in the air mixed into the container.

Further, the processing box is rotatably connected with a sealing door, and a transparent observation window is arranged on the sealing door.

In the scheme, the filling container is conveniently taken and replaced through the sealing door, and the observation window is convenient for checking whether a specific filling process is normally developed or not in time.

Compared with the prior art, the utility model has the beneficial effects that:

1. the device can efficiently realize the cyclic filtration and the filling flow of the photoresist, when impurity components contained in different photoresists are different, the opening and closing of a plurality of valves can be controlled, and then the impurities contained in different photoresist products are subjected to targeted filtration, and when the cyclic filtration of metal ions or particles is not needed, one of the metal ion filter or the particle filter can be in a closed state, so that the consumption of energy sources is reduced, and compared with the prior art, the energy consumption is reduced, and the device accords with the environment-friendly idea

2. The device can realize equal weighing of photoresist in the process of filling the container by additionally arranging the electronic scale, ensures that the quality of the photoresist in each subsequent container is consistent, and does not need subsequent weighing.

3. The device can ensure that the air in the processing box is clean in the photoresist filling process by additionally arranging the air filter, and avoid the time cost that other impurities in the air are mixed into the photoresist in the filling process and then the photoresist needs to be filtered again.

Drawings

FIG. 1 is a schematic diagram of the overall structure of the present utility model;

FIG. 2 is a schematic view of a seal door and view window installation;

reference numerals:

1. a reaction kettle; 2. a processing box; 201. sealing the door; 202. an observation window; 203. a delivery tube; 204. a delivery valve; 205. a transfer tube; 206. a transfer valve; 21. a liquid pump; 22. a metal ion filter; 23. a first-stage three-way pipe; 231. a first valve; 24. a communicating pipe; 25. a particulate filter; 26. a flow pipe; 27. a second-stage three-way pipe; 271. a second valve; 28. filling tubes; 29. a filling head; 31. a mounting plate; 32. an electronic scale; 33. a container; 4. an air filter.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model. The utility model will be further described with reference to the accompanying drawings and examples:

as shown in fig. 1 and 2, a material filtering and filling device comprises a reaction kettle 1, one side of the reaction kettle 1 is provided with a processing box 2, a sealing door 201 is rotatably connected to the processing box 2, a transparent observation window 202 is arranged on the sealing door 201, the filling condition of the processing box 2 can be concerned at any time through the observation window 202, a liquid pump 21, a metal ion filter 22, a particle filter 25 and a mounting plate 31 are arranged in the processing box 2, the reaction kettle 1 is connected with the liquid pump 21, the liquid pump 21 is connected with a conveying pipe 203, a conveying valve 204 is arranged on the conveying pipe 203, the conveying pipe 203 is connected with the metal ion filter 22, the metal ion filter 22 is connected with a first-stage three-way pipe 23, first valves 231 are arranged on the output pipelines of the first-stage three-way pipe 23, two output pipelines of the first-stage three-way pipe 23 are respectively connected with a communicating pipe 24 and a flow pipe 26, a transfer pipe 205 is communicated to the conveying pipe 203, the transfer pipe 205 is connected with the communicating pipe 24, the communicating pipe 24 is connected with the particle filter 25, one end of the flow 26 is connected with the second-stage three-way pipe 27, the second-way pipe 27 is connected with a second-stage three-way pipe 27, the second-stage three-way pipe 27 is provided with a second-stage three-way pipe 27, the second-way pipe 27 is provided with a third-stage three-way pipe 27, and the second-stage three-way pipe 27 is provided with a container 33, and is filled with a container 33, and is placed on the container, and is placed on a container, and is 33.

The working flow of the utility model is as follows:

firstly, the sealing door 201 is closed, then the liquid pump 21 starts to work to pump photoresist from the reaction kettle 1, and the photoresist passes through the filter under the action of the liquid pump 21 and is divided into the following three conditions:

1. when the photoresist contains both metal ions and particulate matters, at this time, the transfer valve 204 is opened, the transfer valve 206 is closed, the first valve 231 on the output pipeline of the first-stage three-way pipe 23 connected with the flow pipe 26 is closed, the first valve 231 on the output pipeline of the first-stage three-way pipe 23 connected with the communication pipe 24 is opened, and then the photoresist passes through the metal ion filter 22 and then passes through the particulate filter 25 to complete double filtration of the photoresist.

2. When the photoresist contains only metal ions and does not contain particulate matters, at this time, the conveying valve 204 is opened, the transfer valve 206 is closed, the first valve 231 on the output pipeline of the first-stage three-way pipe 23 communicated with the communicating pipe 26 is opened, the first valve 231 on the output pipeline of the first-stage three-way pipe 23 communicated with the communicating pipe 24 is closed, and then the photoresist only passes through the metal ion filter 22 to complete single filtration of the metal ions.

3. When the photoresist contains only particles and does not contain metal ions, at this time, the conveying valve 204 is closed, the transfer valve 206 is opened, the first valve 231 on the output pipeline of the first-stage three-way pipe 23 communicated with the communicating pipe 26 is closed, the first valve 231 on the output pipeline of the first-stage three-way pipe 23 communicated with the communicating pipe 24 is closed, and then the photoresist only passes through the particle filter 25 to complete the single filtration of the particles.

Under the above three conditions, after the filtration of the impurities in the photoresist is completed, the photoresist reaches the second-stage three-way pipe 27 along the flow pipe 26, at this time, the second valve 271 on the output pipeline of the second-stage three-way pipe 27 communicated with the reaction kettle 1 is opened, and the second valve 271 on the output pipeline of the second-stage three-way pipe 27 communicated with the filling pipe 28 is closed; the photoresist can be returned to the reaction kettle 1 again and then subjected to one or more rounds of circulating filtration, when impurities in the photoresist are completely removed through circulating filtration, at the moment, a second valve 271 on an output pipeline of the reaction kettle 1 communicated with the second three-way pipe 27 is closed, a second valve 271 on an output pipeline of the filling pipe 28 communicated with the second three-way pipe 27 is opened, and then the photoresist can flow through the filling pipe 28 and finally flow out from the filling head 29 to be injected into the container 33, so that the filling process of photoresist products is completed; when the container 33 is filled, the staff opens the sealing door 201 to take out the container 33 for replacement, and closes the sealing door 201 again after the replacement is finished to start a new round of circulating filtration filling flow; compared with the prior art, the impurity that this application can contain to different photoresist products carries out the targeted filtration, when need not carry out cyclic filtration to metal ion or particulate matter, metal ion filter 22 or particulate filter 25 one of them can be in the state of closing this moment, can reduce the consumption of the energy like this, can guarantee the filtration and the filling effect of photoresist again simultaneously.

In order to realize equal-quantity filling and weighing of the photoresist in the container 33, as shown in fig. 1 and 2, an electronic scale 32 is arranged on the mounting plate 31, the electronic scale 32, the liquid pump 21 and the second valve 271 are electrically connected with a controller, the controller is not shown in the figure, and the container 33 is arranged on the electronic scale 32; the photoresist mass in the container 33 is weighed in time through the electronic scale 32, when the filling mass of the photoresist reaches the mass value preset by the controller, the liquid pump 21 stops working at the moment, meanwhile, the second valve 271 on the output pipeline of the two-stage three-way pipe 27 communicated with the filling pipe 28 is closed, and at the moment, the equal mass filling flow of the photoresist in the containers 33 can be realized.

In order to ensure the cleanliness of the air in the processing box 2 in the photoresist filling process, the scheme is further refined, and as shown in fig. 1, an air filter 4 is arranged on the processing box 2; it should be noted that, the FFU air filter is adopted as the added air filter 4, when the filling of one container 33 is completed, the sealing door 201 is opened at first, and then the container 33 is sealed in the processing box 2, so that the subsequent container 33 is prevented from being directly exposed and placed in the air to introduce other new impurities, thereby affecting the use of the subsequent photoresist.

The foregoing has shown and described the basic principles, principal features and advantages of the utility model. It will be understood by those skilled in the art that the present utility model is not limited to the foregoing examples, and that the foregoing description and description are merely illustrative of the principles of this utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims (5)

1. The utility model provides a material filters filling device, a serial communication port, including reation kettle (1), one side of reation kettle (1) is provided with processing case (2), be provided with liquid pump (21) in processing case (2), metal ion filter (22), particulate filter (25) and mounting panel (31), reation kettle (1) is connected with liquid pump (21), liquid pump (21) are connected with conveyer pipe (203), be provided with delivery valve (204) on conveyer pipe (203), conveyer pipe (203) are connected with metal ion filter (22), metal ion filter (22) are connected with one-level three-way pipe (23), all be provided with first valve (231) on the output pipeline of one-level three-way pipe (23), two output pipeline of one-level three-way pipe (23) are connected with communicating pipe (24) and flow pipe (26) respectively, the last transfer pipe (205) that is connected with of conveyer pipe (203), be provided with transfer valve (206) on transfer pipe (205), transfer pipe (205) are connected with communicating pipe (24), communicating pipe (24) are connected with particulate filter (25), particulate filter (25) communicate flow pipe (26), one end of flow pipe (26) is connected with metal ion filter (22), one-level three-way pipe (27) is provided with two-level three-way pipe (27), two output pipelines of the second-level three-way pipe (27) are respectively connected with a filling assembly and a reaction kettle (1), a container (33) is placed on the mounting plate (31), and the container (33) is matched with the filling assembly.

2. A material filtering and filling device according to claim 1, characterized in that the filling assembly comprises a filling tube (28) and a filling head (29), wherein one of the output pipelines of the two-stage tee (27) is connected with the filling tube (28), the filling tube (28) is provided with the filling head (29), and the filling head (29) is arranged above the container (33).

3. A material filtering and filling device according to claim 1, characterized in that the mounting plate (31) is provided with an electronic scale (32), and the electronic scale (32) is provided with a container (33).

4. A material filtering and filling device according to claim 1, characterized in that the processing tank (2) is provided with an air filter (4).

5. A material filtering and filling device according to claim 1, characterized in that the processing box (2) is rotatably connected with a sealing door (201), and a transparent observation window (202) is arranged on the sealing door (201).

Images