CN218841977U - Device for improving TTV of glass carrier plate - Google Patents

Abstract

The utility model relates to a glass support plate production technical field specifically is an improve device of glass support plate TTV, and the device includes the equipment platform, and the equipment bench array is provided with rotatable holder for fixed and rotation glass support plate, the array is equipped with the shower nozzle that is used for blowout etching liquid medicine on the holder, and the holder setting is on the rectangle frame, and the below of rectangle frame is equipped with filters the piece, filters piece and equipment platform rotation and is connected, is used for filtering the liquid medicine after the etching. The utility model discloses the device eliminates the TTV operation to the glass support plate, utilizes adjustable holder, carries out the centre gripping to the glass support plate, rotates the holder and drives the glass support plate simultaneously and rotate, sprays the etching liquid medicine, etches the glass support plate, eliminates surperficial TTV phenomenon, adjusts the wheel of polishing simultaneously, polishes the polishing to the glass support plate and handles, through polishing and etching the glass support plate, obtains surperficial smooth glass support plate, and impurity in the etching waste liquid is fought by the toper and is filtered the collection back, retrieves the etching liquid medicine.

Description

A device for improving the TTV of a glass carrier

technical field

The utility model relates to the technical field of glass carrier plate production, in particular to a device for improving the TTV of a glass carrier plate.

Background technique

TTV (totalthicknessvariation) is the total thickness variation of the semiconductor. TTV defects are caused by various problems caused by the jitter of the cutting line, and also appear in the glass carrier cutting process.

In the prior art, a utility model creation with the application number CN202210327145.7 is disclosed, and the name is: a cutting device for ultra-thin glass, which discloses that a wire cutting machine is used to cut the glass with multiple wires once to obtain multiple pieces of ultra-thin glass. The operation of thin glass improves the quality of ultra-thin glass edges, reduces the amount of edge chipping, and the rate of fragmentation.

However, in the prior art, such as the wire cutting operation mentioned in the application number CN202210327145.7, multiple wires are cut at the same time, and the jumping of the wire wheel causes the cutting line to vibrate, causing the TTV phenomenon on the cutting surface of the glass, and the operation of removing the TTV phenomenon is not disclosed , In the prior art, there is a lack of an effective elimination operation for TTV, and the surface flatness of the prepared glass carrier plate is poor.

Utility model content

The purpose of the utility model is to provide a device for improving the TTV of a glass carrier to solve the problems in the prior art.

The purpose of this utility model can be realized through the following technical solutions:

A device for improving the TTV of a glass carrier plate, the device includes an equipment table, the array of the equipment table is provided with rotatable clamping parts for fixing and rotating the glass carrier plate, and the array of the clamping parts is provided with The spray nozzle for etching liquid.

The clamping part is arranged on the rectangular frame, and a filter part is arranged under the rectangular frame, and the filter part is connected with the equipment table in rotation, and is used for filtering the chemical liquid after etching.

Further, the equipment table is provided with a fixed cover, one side of the fixed cover is rotated with a screw, one side of the fixed cover is fixed with a guide rod, the fixed cover is fixed with a guide sleeve, and the lower part of the guide sleeve is provided with a The panel is rotated on the fixed cover and is provided with a gear for controlling the opening and closing of the panel.

Further, the equipment platform is provided with a waste water tank, and the waste water tank is provided with a rectangular groove for installing a rectangular frame. A movable groove plate is fixed in the rectangular groove, and a first rack is symmetrically arranged in the groove shape plate. .

An incomplete gear is provided for rotation in the rectangular slot, and a support post is fixed on the incomplete gear, and a round groove is provided on the support post, and a second threaded hole is provided on the support post.

The incomplete gear is matched with the first rack.

Further, symmetrically distributed straight rods are fixed on the panel, a second rack is fixed on one side of the straight rod, the straight rod is slidably connected to the guide sleeve, and the second rack cooperates with the gear.

Further, a moving piece is installed on the equipment table, and the moving piece is respectively connected with a guide rod and a lead screw, a rotating block is fixed on the moving piece, and a movable grinding wheel is fixedly installed on one side of the rotating block for grinding TTV treatment on the surface of the glass carrier.

Further, the rectangular frame is provided with through holes in an array, and the bolts pass through the through holes to connect with the rectangular slots. The rectangular frame is fixed with a first support plate and two second support plates, and the first support plate rotates with The installation rod is used for installing the clamping part. A guide hole is arranged in the installation rod, and two guide bars are fixedly arranged in the guide hole.

The guide hole is connected with a through hole, one side of the guide hole is connected with a fixed hole, a moving plate is slid on the second supporting plate, the installation rod is also arranged on the moving plate, and a driving rod is fixed on the moving plate .

Further, a synchronous wheel is fixed on the installation rod, a synchronous belt is installed on the synchronous wheel, a movable push rod is fastened on the rectangular frame, straight grooves are symmetrically arranged on the push rod, and telescopic rings are arranged on the rectangular frame. The telescopic rod is covered with a spring, and one end of the telescopic rod rotates and is provided with a tension roller.

The drive rod fits into the straight groove.

Further, the clamping piece includes a connecting rod, one end of the connecting rod is fixed with a limiting block, and the other end is fixed with a first tapered block, the limiting block is provided with symmetrically distributed guide grooves, and the connecting rod is arranged in an array There is a fourth threaded hole, a fifth threaded hole is arranged on the first tapered block, and a connecting groove is arranged in the fifth threaded hole.

The first tapered block is provided with a second tapered block, the second tapered block is provided with a sixth threaded hole, and one end of the second tapered block is provided with a connecting block.

Further, the connecting rod cooperates with the through hole, the limit block cooperates with the guide hole, the guide groove cooperates with the guide bar, the bolt passes through the fixing hole and cooperates with the fourth threaded hole, the connecting block cooperates with the connecting groove, and the bolt passes through the fourth threaded hole. The six threaded holes are connected with the fifth threaded hole.

Further, the filter element includes a conical bucket for filtering the etching liquid, the conical bucket is provided with an installation groove, a snap ring is arranged in the installation groove, a backing plate is provided on the installation groove, and a screw rod is arranged on the backing plate .

The clasp is arranged between the backing plate and the circular groove, and is used for fixing the tapered bucket through the threaded rod passing through the mounting groove and matching with the second threaded hole.

The beneficial effects of the utility model:

1. The device of this utility model performs the TTV elimination operation on the glass carrier plate, uses the adjustable clamping part to clamp the glass carrier plate, and rotates the clamping part to drive the glass carrier plate to rotate at the same time, sprays the etching liquid, and The glass carrier is etched to eliminate the TTV phenomenon on the surface, and the grinding wheel is adjusted at the same time to polish the glass carrier;

2. The device of this utility model obtains a glass carrier with a smooth surface by grinding and etching the glass carrier. The operation is simple, and the glass carrier is conveniently clamped and fixed. After the impurities in the etching waste liquid are filtered and collected by the conical bucket, Etching liquid can be recycled.

Description of drawings

Below in conjunction with accompanying drawing, the utility model is further described.

Fig. 1 is the structural representation of the utility model equipment platform;

Fig. 2 is a structural schematic diagram of the utility model equipment platform;

Fig. 3 is the schematic diagram of enlarged structure at A place in Fig. 2 of the utility model;

Fig. 4 is a schematic diagram of the panel structure of the utility model;

Fig. 5 is a structural schematic diagram of the utility model moving part;

Fig. 6 is a structural schematic diagram of a rectangular frame of the present invention;

Fig. 7 is a schematic diagram of a cross-sectional structure of a rectangular frame of the present invention;

Fig. 8 is a schematic diagram of the explosion structure of the clamping part of the present invention;

Fig. 9 is a schematic diagram of enlarged structure at B in Fig. 8 of the utility model;

Fig. 10 is a structural schematic diagram of the filter element of the present invention.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. example. Based on the embodiments of the present utility model, all other embodiments obtained by persons of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.

A device for improving the TTV of a glass substrate, as shown in Figure 1, the device includes an equipment table 1, a panel 2 is arranged on the equipment table 1, a moving part 3 is installed on the equipment table 1, and a rectangular frame is fixed on the equipment table 1 4. The rectangular frame 4 is equipped with clamping parts 5 distributed in an array, and the filter part 6 is arranged under the rectangular frame 4, and the filter part 6 is connected with the equipment table 1 in rotation.

As shown in Fig. 2 and Fig. 3, a fixed cover 11 is fixedly provided on the equipment table 1, and a mounting shell 12 is fixedly provided on one side of the fixed cover 11, and a lead screw 121 is arranged for rotation in the mounting shell 12, and a fixed mounting shell 12 is installed in the mounting shell 12. There is a guide rod 122 , and a first motor 120 is fixed on one side of the installation shell 12 . The output end of the first motor 120 is tightly connected to the lead screw 121 to drive the lead screw 121 to rotate. The moving part 3 is installed in the installation shell 12 .

The fixed cover 11 is fixed with a push rod 13, and one end of the push rod 13 is connected with a mounting frame 131, and the mounting frame 131 is rotated to be provided with an array-distributed nozzle 132, which sprays mist-like etching liquid, and the temperature of the etching liquid At 20-40°C, the spraying speed of the etching solution is 1-20um/min, and the angle of the nozzle 132 can be adjusted so that the spraying angle of the nozzle 132 is 90-120°C. The substrate is etched.

The fixed cover 11 is fixed with symmetrically distributed uprights 14, the uprights 14 are located on the side of the fixed cover 11 away from the installation shell 12, the uprights 14 are fixed with a guide sleeve 141, and the uprights 14 are fastened with a fixed frame 142, the fixed frame 142 is provided with a gear 143, and one side of the fixed frame 142 is fastened with a second motor 140, and the output end of the second motor 140 is tightly connected with the gear 143 to control the rotation of the gear 143.

The equipment table 1 is provided with a waste water tank 15, and the waste water tank 15 is provided with a rectangular groove 151 for installing the rectangular frame 4. The first threaded holes 152 distributed in an array are arranged in the rectangular groove 151, and an array is fixed in the rectangular groove 151. Distributed limit rods 16, the limit rod 16 is fixed with a support rod 161, the first hydraulic rod 17 is fixed in the rectangular groove 151, the output end of the first hydraulic rod 17 is connected with a grooved plate 171, and the grooved plate 171 is fixed with symmetrically distributed first racks 172 .

In the rectangular groove 151, an incomplete gear 18 is provided for rotation. The incomplete gear 18 is located between the two first racks 172 and meshes with the first racks 172. The incomplete gear 18 is fixed with a support column 181. The gear 18 rotates under the driving of the first rack 172 , so that the support column 181 is rotated. The support column 181 is provided with a circular groove 182 for installing the filter element 6 . The support column 181 is provided with a second threaded hole 19 .

As shown in Figure 4, the panel 2 is fixedly provided with symmetrically distributed straight rods 21, one side of the straight rod 21 is fixedly provided with a second rack 22, the straight rod 21 is slidably connected with the guide sleeve 141, and the second rack 22 is connected with the guide sleeve 141. The gear 143 is meshed, and the gear 143 is rotated to operate the straight rod 21 to move up and down, and the control panel 2 to open and close.

As shown in Figure 5, one end of the moving part 3 is provided with a third threaded hole 31 and a round hole 32, the round hole 32 cooperates with the guide rod 122, the third threaded hole 31 cooperates with the leading screw 121, and the moving part 3 is fixedly provided with The third motor 30, the output end of the third motor 30 is fixedly connected with the rotating block 33, the second hydraulic rod 34 is fixedly arranged on the rotating block 33, the output end of the second hydraulic rod 34 is fixedly provided with the fourth motor 36, the fourth The output end of the motor 36 is fixedly connected with a grinding wheel 35 for further grinding the surface of the glass carrier to remove the TTV phenomenon on the surface.

As shown in Figures 6 and 7, the rectangular frame 4 is provided with through holes 41 distributed in an array, the bolts pass through the through holes 41 and are connected to the first threaded holes 152, and the rectangular frame 4 is fixedly provided with a first support plate 44, the second One side of a support plate 44 is provided with the second support plate 42 of symmetrical distribution, and the second support plate 42 is fastened with the rectangular frame 4 and is connected, and the rotation on the first support plate 44 is provided with mounting bar 43, and the first support plate 44 One side is fixed with a fifth motor 430 , and the output end of the fifth motor 430 is tightly connected with the installation rod 43 .

The support rod 161 is used to fix the first support plate 44 or the second support plate 42. The installation rod 43 is provided with a guide hole 432. The guide hole 432 is fixed with a symmetrically distributed guide bar 433. The installation rod 43 is provided with a through hole. 431 , the through hole 431 communicates with the guide hole 432 , one side of the installation rod 43 is provided with a fixing hole 434 , the fixation hole 434 communicates with the guide hole 432 , and the clamping member 5 is arranged on the installation rod 43 .

The second supporting plate 42 is provided with a chute 421, and the slide groove 421 is provided with a moving plate 422. The moving plate 422 is also rotatably equipped with a mounting rod 43. The moving plate 422 is fixedly provided with a driving rod 423, and A synchronous wheel 48 is fixedly provided, and a synchronous belt 49 is installed on the synchronous wheel 48, which is used to connect the three synchronous wheels 48, so that the three mounting rods 43 rotate synchronously, and drive the clamping part 5 on the mounting rod 43 to rotate.

The third hydraulic rod 450 is fastened on the rectangular frame 4, and the output end of the third hydraulic rod 450 is fixedly provided with a push rod 45. The push rod 45 is provided with symmetrically distributed straight grooves 451, and the driving rod 423 slides with the straight groove 451. connection, the rectangular frame 4 is fixedly provided with a telescopic rod 46, the telescopic rod 46 is fixedly provided with a spring 461, one end of the telescopic rod 46 is fixedly provided with a bottom plate 462, and the bottom plate 462 is tightly connected with one end of the spring 461, and the spring 461 is applied to the bottom plate 462 is directed towards the force of the first support plate 44, and the bottom plate 462 is rotated to be provided with a tension roller 47, which is attached to one side of the synchronous belt 49 to tension the synchronous belt 49.

As shown in Figures 8 and 9, the clamping member 5 includes a connecting rod 51, which is slidably connected to the through hole 431, and one end of the connecting rod 51 is fixedly provided with a limiting block 53, and the other end is fixedly provided with a first tapered block 55, the limit block 53 is slidingly connected with the guide hole 432, the limit block 53 is provided with symmetrically distributed guide grooves 54, the guide groove 54 is slidably matched with the guide bar 433, and the connecting rod 51 is provided with fourth threaded holes distributed in an array 52 , the bolt passes through the fixing hole 434 and is connected and fixed with a fourth threaded hole 52 .

The first tapered block 55 is provided with a fifth threaded hole 56, the fifth threaded hole 56 is provided with a connecting groove 57, the first tapered block 55 is provided with a second tapered block 58, and the second tapered block 58 is inverted Installed on the first tapered block 55, the second tapered block 58 is provided with a sixth threaded hole 50, one end of the second tapered block 58 is provided with a connecting block 59, the sixth threaded hole 50 runs through the connecting block 59, and The connecting block 59 is connected with the connecting groove 57, the sixth threaded hole 50 communicates with the fifth threaded hole 56, and the bolt passes through the sixth threaded hole 50 and is connected with the fifth threaded hole 56, and the first tapered block 55 and the second tapered Block 58 fixes.

As shown in Figure 10, filter element 6 comprises conical bucket 61, and conical bucket 61 is an inverted filter bucket, collects and filters the etching liquid etched on the glass carrier plate, and filters the etching liquid, and the inverted setting is for collecting and filtering out Impurities, the tapered bucket 61 is provided with a mounting groove 62, the mounting groove 62 is provided with a snap ring 63, and the mounting groove 62 is provided with a backing plate 64.

The backing plate 64 is provided with a screw 65, the backing plate 64 is engaged with the upper end surface of the snap ring 63, and the lower end surface of the snap ring 63 is engaged with the circular groove 182, and the screw 65 passes through the installation groove 62 and the second threaded hole 19 Cooperate, the conical bucket 61 is connected and fixed with the support column 181 , so that the conical bucket 61 rotates with the support column 181 .

In this embodiment, the working principle of a device for improving the TTV of a glass substrate is as follows:

According to the thickness of the glass carrier plate to be detected, adjust the gap between the second tapered block 58 and the first tapered block 55, lock through the bolt, and then adjust the clamping part 5 to slide on the mounting rod 43, adjust the clamping part 5, so that one side of the clamped glass carrier plate fits the grinding wheel 35.

When in use, move the panel 2 upwards, open the feeding end, use the mechanical arm to absorb the glass carrier and move it into the equipment table 1, move the glass carrier smoothly to the clamping part 5 on the first support plate 44, and then move The clamping part 5 on the second support plate 42 makes it close to the glass carrier plate, fix the glass carrier plate, the mechanical arm breaks away from the adsorption and fixation of the glass carrier plate, then closes the mobile panel 2, and adjusts the nozzle 132 to face the glass carrier plate , spray etching the glass carrier.

The clamping member 5 rotates synchronously to drive the clamped glass carrier to rotate, to realize uniform etching and polishing operations, and to effectively eliminate the TTV phenomenon on the surface of the glass carrier.

To eliminate the TTV operation, the second hydraulic rod 34 can be rotated while spraying and etching, driving the grinding wheel 35 to move, and the output end of the second hydraulic rod 34 moves telescopically, controlling the movement of the grinding wheel 35, so that the grinding wheel 35 is on the glass carrier plate The surface is moved and the surface of the glass carrier is fully polished.

The etched liquid drops onto the conical bucket 61 from the glass carrier plate, the first hydraulic rod 17 controls the reciprocating translation of the groove plate 171, and the reciprocating rotation of the incomplete gear 18 makes the reciprocating rotation of the conical bucket 61, drying the cone The etching liquid on the shaped bucket 61 prevents the liquid from remaining on the tapered bucket 61.

In the description of this specification, descriptions referring to the terms "one embodiment", "example", "specific example" and the like mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in the description of the present invention. In at least one embodiment or example. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The basic principles, main features and advantages of the present utility model have been shown and described above. Those skilled in the art should understand that the utility model is not limited by the above-mentioned embodiments. The above-mentioned embodiments and descriptions only illustrate the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model The new model also has various changes and improvements, and these changes and improvements all fall within the scope of the claimed utility model.

Claims (10)

1. A device for improving the TTV of a glass carrier plate comprises an equipment table (1), and is characterized in that rotatable clamping pieces (5) are arranged on the equipment table (1) in an array mode and used for fixing and rotating the glass carrier plate, and spray heads (132) used for spraying etching liquid medicine are arranged on the clamping pieces (5) in an array mode;

holder (5) set up on rectangle frame (4), and the below of rectangle frame (4) is equipped with and filters piece (6), filters piece (6) and rotates with equipment platform (1) to be connected for liquid medicine after the etching filters.

2. A device for improving a glass carrier TTV according to claim 1, characterized in that the equipment table (1) is provided with a fixing cover (11), one side of the fixing cover (11) is rotatably provided with a lead screw (121), one side of the fixing cover (11) is fixedly provided with a guide rod (122), the fixing cover (11) is fixedly provided with a guide sleeve (141), a panel (2) is arranged below the guide sleeve (141), and the fixing cover (11) is rotatably provided with a gear (143) for controlling the panel (2) to open and close.

3. A device for improving a glass-carrier TTV according to claim 2, characterized in that the equipment table (1) is provided with a waste water trough (15), the waste water trough (15) is provided with a rectangular trough (151) for mounting the rectangular frame (4), a movable slotted plate (171) is fixedly arranged in the rectangular trough (151), and first racks (172) are symmetrically arranged in the slotted plate (171);

an incomplete gear (18) is rotatably arranged in the rectangular groove (151), a supporting column (181) is fixedly arranged on the incomplete gear (18), a circular groove (182) is arranged on the supporting column (181), and a second threaded hole (19) is arranged on the supporting column (181);

the partial gear (18) is engaged with the first rack (172).

4. A device for improving a glass carrier TTV according to claim 2, characterized in that the panel (2) is fixed with a symmetrically distributed straight bar (21), one side of the straight bar (21) is fixed with a second rack (22), the straight bar (21) is slidably connected with the guide sleeve (141), and the second rack (22) is engaged with the gear (143).

5. A device for improving the TTV of a glass support plate according to claim 2, wherein the equipment table (1) is provided with a moving member (3), the moving member (3) is connected with the guide rod (122) and the lead screw (121), the moving member (3) is fixedly provided with a rotating block (33), and one side of the rotating block (33) is fixedly provided with a movable grinding wheel (35) for processing the TTV on the surface of the glass support plate.

6. A device for improving the TTV of a glass carrier according to claim 3, wherein the rectangular frame (4) is provided with through holes (41) in an array manner, the bolts pass through the through holes (41) to connect with the rectangular slots (151), the rectangular frame (4) is fixedly provided with a first support plate (44) and two second support plates (42), the first support plate (44) is rotatably provided with a mounting rod (43) for mounting the clamping member (5), the mounting rod (43) is provided with a guide hole (432), and the guide hole (432) is fixedly provided with two guide strips (433);

the guide hole (432) is provided with a through hole (431) in a communicating mode, one side of the guide hole (432) is provided with a fixed hole (434) in a communicating mode, the second supporting plate (42) is provided with a moving plate (422) in a sliding mode, the mounting rod (43) is also arranged on the moving plate (422), and the moving plate (422) is fixedly provided with a driving rod (423).

7. The device for improving the TTV of a glass carrier according to claim 6, wherein a synchronizing wheel (48) is fixedly arranged on the mounting rod (43), a synchronizing belt (49) is arranged on the synchronizing wheel (48), a movable push rod (45) is fixedly arranged on the rectangular frame (4), straight grooves (451) are symmetrically arranged on the push rod (45), a telescopic rod (46) is arranged on the rectangular frame (4), a spring (461) is sleeved on the telescopic rod (46), and a tensioning roller (47) is rotatably arranged at one end of the telescopic rod (46);

the drive rod (423) is engaged with the straight groove (451).

8. The device for improving the TTV of a glass carrier according to claim 7, wherein the clamping member (5) comprises a connecting rod (51), one end of the connecting rod (51) is fixedly provided with a limiting block (53), the other end of the connecting rod is fixedly provided with a first conical block (55), the limiting block (53) is provided with symmetrically distributed guide grooves (54), the connecting rod (51) is provided with a fourth threaded hole (52) in an array, the first conical block (55) is provided with a fifth threaded hole (56), and the fifth threaded hole (56) is provided with a connecting groove (57);

and a second tapered block (58) is arranged on the first tapered block (55), a sixth threaded hole (50) is formed in the second tapered block (58), and a connecting block (59) is arranged at one end of the second tapered block (58).

9. A device for improving the TTV of a glass carrier plate according to claim 8, wherein the connecting rod (51) is fitted in the through hole (431), the stopper (53) is fitted in the guiding hole (432), the guiding groove (54) is fitted in the guiding bar (433), the bolt is fitted in the fourth threaded hole (52) through the fixing hole (434), the connecting block (59) is fitted in the connecting groove (57), and the bolt is connected in the fifth threaded hole (56) through the sixth threaded hole (50).

10. A device for improving a glass carrier TTV according to claim 3, wherein the filter element (6) comprises a conical funnel (61) for filtering the etching solution, the conical funnel (61) is provided with a mounting groove (62), a snap ring (63) is arranged in the mounting groove (62), the mounting groove (62) is provided with a backing plate (64), and the backing plate (64) is provided with a screw (65);

the clamping ring (63) is clamped between the backing plate (64) and the circular groove (182), penetrates through the mounting groove (62) through the screw (65) to be matched with the second threaded hole (19), and is used for fixing the conical hopper (61).

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