CN218743506U - Rotary cleaning machine for Micro-LED substrate - Google Patents

Abstract

The utility model discloses a rotatory cleaning machine of Micro-LED base plate, including casing, outer bucket, interior bucket, swing arm, roating seat and spray tube, outer bucket is fixed in the casing, and interior bucket and outer coaxial arranging of bucket, and outer bucket can be in outer vertical up-and-down motion in the bucket, and the roating seat rotates in interior bucket, and the swing arm is fixed in outer bucket one side, and the spray tube is fixed in the swing arm. When the base plate is cleaned, the shutter is lifted to close the feed inlet of the shell, so that cleaning is carried out in a closed cavity, the cleaning liquid is prevented from splashing, in addition, when cleaning is carried out, the inner barrel is lifted, and the liquid sprayed on the base plate can be reduced to splash out of the outer barrel.

Description

A spin cleaning machine for Micro-LED substrates

Technical field:

The utility model relates to a rotary cleaning machine for Micro-LED substrates.

Background technique:

Glass substrate cleaning is the most frequently used step in the Micro LED liquid crystal glass manufacturing process. Before each process step, the surface of the glass substrate must be cleaned to remove pollutants and avoid the formation of native oxide films. The existing Micro- There are three main cleaning methods for LED substrates. One is ultrasonic immersion cleaning, that is, immersing the substrate in cleaning liquid, and then cleaning the substrate with ultrasonic waves. One is rotary spray cleaning, that is, the substrate is placed on a support base, the support base rotates, and the substrate on the support base is cleaned by high-pressure spraying. Another type is conveying cleaning. The substrate is placed on the transmission roller. During the conveying process, the substrate is cleaned by spraying cleaning liquid under high pressure.

When using rotary spray cleaning, since the substrate is in a rotating state, the liquid medicine sprayed on the substrate will splash everywhere. In order to overcome this defect, the existing rotary spray cleaning machines generally directly cover the substrate with a protective cover. The use effect of this structure is very unsatisfactory, so the application provides a rotary cleaning machine with a new structure to solve the shortcomings of the prior art.

Invention content:

The utility model provides a rotary cleaning machine for Micro-LED substrates in order to solve the above-mentioned problems in the prior art.

The technical scheme adopted in the utility model has:

A rotary cleaning machine for Micro-LED substrates, including a casing, an outer barrel, an inner barrel, a swing arm, a rotating seat and a spray pipe, the outer barrel is fixed in the casing, the inner barrel and the outer barrel are coaxially arranged, and the outer barrel It can vertically move up and down in the outer barrel, the swivel seat rotates in the inner barrel, the swing arm is fixed on one side of the outer barrel, and the spray pipe is fixed on the swing arm.

Further, the outer barrel includes an outer barrel body, a retaining barrel, a suction hood and a motor seat, the outer barrel body and the retaining barrel are both round barrels with upper and lower openings, the retaining barrel is inserted into the outer barrel, and the shielding A cavity is formed between the barrel and the outer barrel body, the upper port wall of the retaining barrel is fixed to the upper port wall of the outer barrel body, the bottom end surface of the retaining barrel is higher than the bottom end surface of the outer barrel body, the motor seat is fixed on the lower end of the outer barrel body and The lower end of the outer barrel is closed, a suction groove is arranged on the outer wall of the outer barrel, the suction hood is fixed on the outer wall of the outer barrel, and the suction groove is placed in the suction hood, fixed on the motor base for driving A motor that rotates the swivel base.

Further, a scraper is fixed on the upper surface of the outer barrel, and the scraper is attached to the outer wall of the inner barrel.

Further, the inner barrel includes an inner barrel body, a cover and a retaining ring, the retaining cover is fixedly connected to the upper end surface of the inner barrel, and the retaining cover is connected with the cylinder shaft of a cylinder, the retaining ring is fixed on the retaining cover, and the retaining ring The inner diameter is smaller than the inner diameter of the cover.

Further, a limiting platform is provided in the inner cavity of the casing and on one side of the outer tub, and the inner tub moves down to make the blocking cover collide with the limiting platform.

Further, the rotating seat includes a shaft sleeve, a skeleton and a limiting seat, the skeleton is fixedly connected with the shaft sleeve, and eight limiting seats are evenly fixed on the upper end surface of the skeleton in groups of two.

Further, the limit seat includes a support base and a counterweight, the support base is provided with a right-angle support groove, and the counterweight is fixed on the outer wall of the support base.

Further, an introduction platform is provided on the top end surface of the counterweight, and the inner wall surface of the introduction platform is a slope structure inclined downward.

Further, the swing arm is set on a lifting and rotating transmission mechanism, the transmission mechanism includes a swing arm motor, a swing arm cylinder, a slide rail and a slide block, and the slide block is slidably connected to the slide rail, The swing arm motor is fixedly connected on the slide block, the motor shaft of the swing arm motor is fixedly connected with the swing arm, and the swing arm cylinder drives the slide block to slide on the slide rail.

Further, the casing is provided with a transparent observation window and a feeding port, and a liftable door is provided on one side of the feeding port.

The utility model has the following beneficial effects:

1) When the substrate is cleaned, the door is raised to close the feed port of the casing, so that the cleaning is carried out in a closed cavity to avoid splashing of the cleaning liquid. In addition, the inner barrel is raised during cleaning, which can reduce the spraying time. The liquid on the substrate splashes out of the outer barrel;

2) Install a suction hood on the outer barrel. During the high-pressure spray cleaning process, the cleaning liquid will produce pungent odors. By passing negative pressure in the suction hood, the odors during the cleaning process will be sucked away to reduce the odor in the workshop. In addition, a unique structure is formed between the inner and outer barrels and the retaining barrel in the outer barrel. After the suction hood is connected to the negative pressure, the liquid medicine in the spraying process will not be sucked away from the suction groove. The structure design is ingenious, compact and reasonable. Better results.

Description of drawings:

Figure 1 is a structural diagram of a spin washer.

Figure 2 is a structural diagram of a spin washer.

Figure 3 is a diagram of the internal structure of the spin washer.

Figure 4 is a sectional view of the interior of the spin washer.

Figure 5 is a structural diagram of the outer barrel.

Figure 6 is a structural diagram of the inner barrel.

Figure 7 is a structural diagram of the swivel seat.

Figure 8 is the structural diagram of the limit seat.

Figure 9 is the installation structure diagram of the swing arm.

Detailed ways:

Below in conjunction with accompanying drawing, the utility model is further described.

As shown in Figures 1 to 4, the utility model is a rotary cleaning machine for Micro-LED substrates, including a casing 41, an outer barrel 42, an inner barrel 43, a swing arm 44, a rotating seat 45 and a nozzle, and the outer barrel 42 is fixed on the machine. In the shell 41, the inner barrel 43 and the outer barrel 42 are coaxially arranged, and the outer barrel 42 can move vertically up and down in the outer barrel 42, the swivel seat 45 rotates in the inner barrel 43, the swing arm 44 is arranged on one side of the outer barrel 42, and the spray pipe Fixed on the swing arm 44.

The outer barrel 42 includes an outer barrel body 421, a retaining barrel 422, a suction cover 423, and a motor seat 424. The outer barrel body 421 and the retaining barrel 422 are all round barrels with upper and lower openings, and the retaining barrel 422 is plugged into the outer barrel body 421. , and a cavity is formed between the blocking barrel 422 and the outer barrel body 421, the upper port wall of the blocking barrel 422 is fixed to the upper port wall of the outer barrel body 421, and the bottom end surface of the blocking barrel 422 is higher than the bottom end surface of the outer barrel body 421, The motor seat 424 is fixed on the lower end of the outer barrel body 421 and the lower end of the outer barrel body 421 is closed, and the outer wall of the outer barrel body 421 is provided with a suction groove, and the suction cover 423 is fixed on the outer wall of the outer barrel body 421, and the air suction groove Placed in the suction hood 423.

As shown in Figure 5, the motor seat 424 includes a base plate 4241 and a mounting base 4242, the mounting base 4242 is fixedly connected to the base plate 4241, a motor mounting cavity 4243 is provided on the mounting base 4242, and the motor that drives the rotating base 45 to rotate is fixed in the motor mounting cavity 4243 Inside. The bottom plate 4241 is fixedly connected with the bottom surface of the outer barrel body 421 , and closes the opening of the bottom surface of the outer barrel body 421 , and a drain hole 4244 is provided on the bottom plate 4241 .

As shown in Figure 6, the inner barrel 43 includes an inner barrel body 431, a cover 432 and a retaining ring 433, the retaining ring 433 and the retaining cover 432 are fixed on the upper surface of the inner barrel body 431 in layers, and the retaining cover 432 is connected to the cylinder shaft of a cylinder . The cylinder drives the inner barrel 43 to move vertically up and down in the outer barrel 42 , and the retaining ring 433 is fixed on the retaining cover 432 , and the inner diameter of the retaining ring 433 is smaller than the inner diameter of the retaining cover 432 . In the inner cavity of the casing 41 and on one side of the outer barrel 42 is provided a limiting platform 410 , the limiting platform 410 limits the maximum displacement of the inner barrel 43 moving downward.

A scraper 46 is fixed on the upper end surface of the outer tub 42 , and the scraper 46 is attached to the outer wall of the inner tub 43 . When the inner barrel 43 moves vertically, the adhesion impurities on the outer wall surface of the inner barrel 43 are scraped off by the scraper 46 .

As shown in Figure 7, the swivel base 45 includes a shaft sleeve 451, a skeleton 452 and a limit seat 453, the skeleton 452 is a circular skeleton, the skeleton 452 is fixedly connected with the shaft sleeve 451, and eight limit seats 453 are fixed in pairs as a group. On the upper end face of the skeleton 452 . When the substrate is placed on the rotating seat 45 , each set of two limiting seats 453 is placed at each corner of the substrate.

As shown in Figure 8, the limit seat 453 includes a support base body 4531 and a counterweight 4532. The support base body 4531 is provided with a right-angle support groove, and the top surface of the support base body 4531 and the step surface of the right-angle support groove are provided with The first supporting pin 4533 arranged vertically and the counterweight 4532 are fixed on the outer wall of the supporting base 4531 .

In order to make the base plate fall into the limit seat 453 better, an introduction platform 4534 is provided on the top surface of the counterweight 4532, and the inner wall surface of the introduction platform 4534 is a slope structure inclined downward.

In order to better support the substrate, several second support pins 4535 are provided on the frame 452 .

Referring to Fig. 9, the swing arm 44 can rotate or lift above the inner bucket 43, which is realized by being arranged on a transmission mechanism that can lift and rotate. The transmission mechanism includes a swing arm motor 441, a swing arm cylinder 442, and slide rails. 443 and slide block 444, the slide block is slidably connected on the slide rail 443, the swing arm motor 441 is fixedly connected on the slide block, the motor shaft of the swing arm motor 441 is fixedly connected with the swing arm 44, and the swing arm cylinder 442 drives the slide block on the slide Slide on rail 443.

The casing 41 is provided with a transparent observation window 411 and a feed port 412 , and a liftable door 413 is provided on one side of the feed port 412 .

When the substrate needs to be cleaned, the gate 413 is lowered, and the manipulator carries the substrate through the feed port 412 and sends the substrate to the rotary seat 45. After the manipulator exits, the gate 413 is driven by the cylinder and raised to close the feed port 412, and then the inner barrel 43 Rising, the swivel seat 45 rotates, and the spray pipe ejects high-pressure cleaning liquid and nitrogen to clean the base on the swivel seat 45, and the swing arm 44 swings simultaneously during the cleaning process. The rise of the inner barrel 43 can reduce the liquid sprayed on the substrate from splashing out of the outer barrel 42, and the liquid inside the outer barrel 42 is drained through the drain hole 4244 on the bottom surface. During the spraying process, a negative pressure is connected to the suction hood 423 to remove the medicinal smell produced by the cleaning solution during the spraying cleaning process.

The above is only a preferred embodiment of the utility model, and it should be pointed out that for those of ordinary skill in the art, some improvements can be made without departing from the principle of the utility model, and these improvements should also be regarded as the present invention. Protection scope of utility model.

Claims (10)

1. The utility model provides a rotatory cleaning machine of Micro-LED base plate which characterized in that: the washing machine comprises a machine shell (41), an outer barrel (42), an inner barrel (43), a swing arm (44), a rotary seat (45) and a spray pipe, wherein the outer barrel (42) is fixed in the machine shell (41), the inner barrel (43) and the outer barrel (42) are coaxially arranged, the outer barrel (42) can vertically move up and down in the outer barrel (42), the rotary seat (45) rotates in the inner barrel (43), the swing arm (44) is fixed on one side of the outer barrel (42), and the spray pipe is fixed on the swing arm (44).

2. The rotary cleaning machine for Micro-LED substrates according to claim 1, characterized in that: outer bucket (42) are including outer staving (421), keep off bucket (422), cover (423) and motor cabinet (424) induced drafts, outer staving (421) and fender bucket (422) are the cask of equal open-ended from top to bottom, keep off bucket (422) and peg graft in outer staving (421), and keep off and form the cavity between bucket (422) and outer staving (421), the last port wall that keeps off bucket (422) is fixed with the last port wall of outer staving (421), the bottom end face that keeps off bucket (422) is higher than the bottom end face of outer staving (421), motor cabinet (424) are fixed in outer staving (421) lower extreme and seal the lower extreme of outer staving (421), be equipped with the groove of induced drafts on the outer wall of outer staving (421), cover (423) of induced drafts are fixed in outer staving (421), and the groove of induced drafts is arranged in cover (423), fixed being used for driving roating seat (45) pivoted motor on motor cabinet (424).

3. The rotary cleaning machine for Micro-LED substrates according to claim 1, characterized in that: a scraper (46) is fixed on the upper end face of the outer barrel (42), and the scraper (46) is attached to the outer wall of the inner barrel (43).

4. The rotary cleaning machine for Micro-LED substrates according to claim 1, characterized in that: the inner barrel (43) comprises an inner barrel body (431), a blocking cover (432) and a retaining ring (433), the blocking cover is fixedly connected to the upper end face of the inner barrel body (431) and is connected with a cylinder shaft of a cylinder, the retaining ring (433) is fixed on the blocking cover (432), and the inner diameter of the retaining ring (433) is smaller than that of the blocking cover (432).

5. The rotary cleaning machine for Micro-LED substrates according to claim 4, characterized in that: a limit table (410) is arranged in the inner cavity of the machine shell and positioned on one side of the outer barrel, and the inner barrel (43) moves downwards to enable the blocking cover (432) to abut against the limit table (410).

6. The rotary cleaning machine for Micro-LED substrates according to claim 1, characterized in that: the rotating seat (45) comprises a shaft sleeve (451), a framework (452) and a limiting seat (453), the framework (452) is fixedly connected with the shaft sleeve (451), and the eight limiting seats (453) are uniformly fixed on the upper end face of the framework (452) in a group in a pairwise mode.

7. The rotary cleaning machine for Micro-LED substrates of claim 6, wherein: spacing seat (453) are including supporting pedestal (4531) and balancing weight (4532), be equipped with the right angle support groove on supporting pedestal (4531), balancing weight (4532) are fixed on the outer wall of supporting pedestal (4531).

8. The rotary cleaning machine for Micro-LED substrates according to claim 7, wherein: and the top end surface of the balancing weight is provided with an introduction table, and the inner wall surface of the introduction table is of a downward inclined plane structure.

9. The rotary cleaning machine for Micro-LED substrates according to claim 1, characterized in that: the swing arm (44) is arranged on a transmission mechanism capable of lifting and rotating, the transmission mechanism comprises a swing arm motor (441), a swing arm cylinder (442), a sliding rail (443) and a sliding block (444), the sliding block is connected to the sliding rail (443) in a sliding mode, the swing arm motor (441) is fixedly connected to the sliding block, a motor shaft of the swing arm motor (441) is fixedly connected with the swing arm (44), and the swing arm cylinder (442) drives the sliding block to slide on the sliding rail (443).

10. The rotary cleaning machine for Micro-LED substrates according to claim 1, characterized in that: the casing (41) is provided with a transparent observation window (411) and a feed inlet (412), and one side of the feed inlet (412) is provided with a lifting stop door (413).

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