CN218299756U - Silicon chip degumming frame and silicon chip degumming machine - Google Patents
Silicon chip degumming frame and silicon chip degumming machine Download PDFInfo
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Abstract
本申请公开了一种硅片脱胶架以及硅片脱胶机,涉及硅片加工技术领域。本申请实施例中,硅片脱胶架包括:架体,以及至少一个挡杆组件;架体包括:相对设置的一对端板,以及连接于两个端板之间的至少一个底杆和两个侧杆,端板、底杆和侧杆围合成用于容纳硅片的容置空间;其中,两个侧杆相对设置于端板的两侧;挡杆组件设置于容置空间内且沿所述侧杆的长度方向延伸,挡杆组件可拆卸连接于两个端板,并将容置空间分隔成至少两个容置槽。本申请实施例中,硅片脱胶架可以按需承载不同尺寸的硅片进行脱胶,结构简单、兼容性好、重复利用率高。
The application discloses a silicon wafer degumming rack and a silicon wafer degumming machine, which relate to the technical field of silicon wafer processing. In the embodiment of the present application, the silicon wafer degumming frame includes: a frame body, and at least one blocking rod assembly; A side bar, the end plate, the bottom bar and the side bar enclose an accommodating space for accommodating silicon wafers; wherein, two side bars are arranged oppositely on both sides of the end plate; the blocking bar assembly is arranged in the accommodating space and along the The length direction of the side bar extends, and the blocking bar assembly is detachably connected to the two end plates, and divides the accommodating space into at least two accommodating slots. In the embodiment of the present application, the silicon wafer degumming rack can carry silicon wafers of different sizes for degumming as required, and has a simple structure, good compatibility, and high reuse rate.
Description
技术领域technical field
本申请属于太阳能光伏技术领域,具体涉及一种硅片脱胶架及硅片脱胶机。The application belongs to the field of solar photovoltaic technology, and in particular relates to a silicon wafer degumming frame and a silicon wafer degumming machine.
背景技术Background technique
随着光伏技术的发展,太阳能作为绿色、环保、可再生能源受到了大范围推广。太阳能光伏半片技术由于具有高的光电转换效率、成本低廉等优势,被广泛推广。With the development of photovoltaic technology, solar energy has been widely promoted as a green, environmentally friendly and renewable energy. Solar photovoltaic half-chip technology has been widely promoted due to its advantages of high photoelectric conversion efficiency and low cost.
现有技术中,通常是将硅棒切片后的硅片直接制备成整片光伏电池后,再采用激光对整片光伏电池进行切割,从而得到半片光伏电池。然而,直接切割整片电池片制备小尺寸电池片的方式,很容易在断面处形成热损伤和机械损伤,这些损伤会在电池的切割断面处引入缺陷态,这些缺陷态会引起少子复合,导致小尺寸电池片转换效率的降低,而且在电池端切割分片可能会产生破片和隐裂等问题。为了避免上述问题,目前,通过首先切割出半片或者1/N片小尺寸硅片后,再将半片或1/N片小尺寸硅片制备成对应的半片电池或1/N片小尺寸电池,逐渐成为制备半片或1/N片小尺寸电池的方向。In the prior art, usually, the silicon wafer after slicing the silicon rod is directly prepared into a whole piece of photovoltaic cell, and then the whole piece of photovoltaic cell is cut with a laser, so as to obtain a half piece of photovoltaic cell. However, the way of directly cutting the whole cell to prepare small-sized cells is easy to form thermal and mechanical damage at the section, and these damages will introduce defect states at the cut section of the battery, and these defect states will cause minority carrier recombination, resulting in The conversion efficiency of small-sized cells is reduced, and cutting and splitting at the cell end may cause problems such as fragments and cracks. In order to avoid the above problems, at present, after cutting half or 1/N small-sized silicon wafers, the half or 1/N small-sized silicon wafers are prepared into corresponding half-cut batteries or 1/N small-sized batteries. It has gradually become the direction of preparing half-sheet or 1/N-sheet small-sized batteries.
然而,现有硅片脱胶架大部分是根据整片硅片的形状尺寸设计的,这就导致现有的硅片脱胶架无法兼具承载半片或1/N片小尺寸硅片,需要重新根据硅片尺寸加工硅片脱胶架,会造成生产成本的浪费。However, most of the existing silicon wafer degumming racks are designed according to the shape and size of the entire silicon wafer, which leads to the fact that the existing silicon wafer degumming racks cannot carry half or 1/N small-sized silicon wafers at the same time. Wafer size processing silicon wafer degumming frame will cause waste of production cost.
实用新型内容Utility model content
本申请实施例的目的是提供一种硅片脱胶机及硅片脱胶机,能够解决传统硅片脱胶架无法兼具承载半片或1/N片小尺寸硅片的问题。The purpose of the embodiments of the present application is to provide a silicon wafer degumming machine and a silicon wafer degumming machine, which can solve the problem that the traditional silicon wafer degumming rack cannot carry half or 1/N small-sized silicon wafers.
第一方面,本申请实施例提供了一种硅片脱胶架,所述硅片脱胶架包括:架体,以及至少一个挡杆组件;In the first aspect, the embodiment of the present application provides a silicon wafer degumming rack, the silicon wafer degumming rack includes: a rack body, and at least one blocking rod assembly;
所述架体包括:相对设置的一对端板,以及连接于两个所述端板之间的至少一个底杆和两个侧杆,所述端板、所述底杆和所述侧杆围合成容置空间;其中,两个所述侧杆相对设置于所述端板的两侧;The frame body includes: a pair of opposite end plates, and at least one bottom bar and two side bars connected between the two end plates, the end plates, the bottom bar and the side bars Enclosing an accommodating space; wherein, the two side bars are relatively arranged on both sides of the end plate;
所述挡杆组件设置于所述容置空间内且沿所述侧杆的长度方向延伸,所述挡杆组件可拆卸连接于两个所述端板,并将所述容置空间分隔成至少两个容置槽。The blocking rod assembly is arranged in the accommodation space and extends along the length direction of the side bar, the blocking rod assembly is detachably connected to the two end plates, and divides the accommodation space into at least Two storage slots.
可选的,所述挡杆组件包括:相平行的底板和分隔杆,所述底板和所述分隔杆分别与两个所述端板可拆卸连接;Optionally, the blocking rod assembly includes: a parallel bottom plate and a separation rod, the bottom plate and the separation rod are respectively detachably connected to the two end plates;
其中,所述底板靠近所述底杆设置;Wherein, the bottom plate is arranged close to the bottom bar;
所述分隔杆设置于所述底板远离所述底杆的一侧。The separating rod is arranged on the side of the bottom plate away from the bottom rod.
可选的,所述分隔杆的数量为一个;Optionally, the number of the separating rod is one;
沿垂直于所述底板的方向,所述分隔杆在所述底板上的投影位于所述底板的中心线上。Along the direction perpendicular to the bottom plate, the projection of the partition bar on the bottom plate is located on the center line of the bottom plate.
可选的,所述分隔杆的数量为多个,多个所述分隔杆沿平行于所述底板的方向分布。Optionally, there are multiple partition bars, and the plurality of partition bars are distributed along a direction parallel to the bottom plate.
可选的,所述挡杆组件还包括:缓冲套,所述缓冲套包覆于所述分隔杆上。Optionally, the blocking rod assembly further includes: a buffer sleeve, and the buffer sleeve is covered on the partition rod.
可选的,所述挡杆组件还包括:缓冲膜,所述缓冲膜覆盖于所述底板靠近所述分隔杆的侧面上。Optionally, the barrier bar assembly further includes: a buffer film, the buffer film covers the side of the bottom plate close to the partition bar.
可选的,所述底板包括:底板本体,以及连接于所述底板本体两端的两个连接板;Optionally, the bottom plate includes: a bottom plate body, and two connecting plates connected to two ends of the bottom plate body;
所述连接板与所述端板一一对应,且所述连接板可拆卸连接于所述端板;The connecting plates correspond to the end plates one by one, and the connecting plates are detachably connected to the end plates;
所述分隔杆的两端分别固定连接于与其相对的所述连接板。Two ends of the separating rod are respectively fixedly connected to the connecting plate opposite to it.
可选的,所述底板本体与所述连接板为一体成型结构。Optionally, the bottom plate body and the connecting plate are integrally formed.
可选的,在所述挡杆组件的数量为一个的情况下,一个所述挡杆组件设置于所述容置空间的中心;Optionally, when the number of the blocking rod assembly is one, one of the blocking rod assemblies is arranged in the center of the accommodating space;
在所述挡杆组件的数量为多个的情况下,多个所述挡杆组件在所述容置空间内相间隔分布,且相邻的两个所述挡杆组件之间形成一个所述容置槽。When the number of the stop rod assemblies is multiple, a plurality of the stop rod assemblies are distributed at intervals in the accommodating space, and one of the stop rod assemblies is formed between two adjacent stop rod assemblies. holding tank.
第二方面,本申请实施例还提供了一种硅片脱胶机,包括上述硅片脱胶架。In the second aspect, the embodiment of the present application further provides a silicon wafer degumming machine, including the above-mentioned silicon wafer degumming rack.
在本申请实施例中,由于挡杆组件设置于容置空间内且沿侧杆的长度延伸,挡杆组件可拆卸连接于两个端板,并将容置空间分隔成至少两个容置槽,因此,在实际应用中,可以通过在架体内设置一个或多个挡杆组件,从而分隔出两个或多个容置槽,每个容置槽内可以承载半片硅片或1/N片小尺寸硅片,或者,还可以将挡杆组件全部拆除后,在容置空间内承载整片硅片。本申请实施例中,硅片脱胶架可以按需承载不同尺寸的硅片进行脱胶,结构简单、兼容性好、重复利用率高,可以有效避免生产多种规格硅片脱胶架造成生产成本浪费的问题。In the embodiment of the present application, since the stop bar assembly is arranged in the accommodation space and extends along the length of the side bar, the stop bar assembly is detachably connected to the two end plates, and divides the accommodation space into at least two accommodation slots , therefore, in practical applications, two or more accommodating slots can be separated by setting one or more blocking rod assemblies in the frame, and each accommodating slot can carry half a silicon wafer or 1/N slice Small-sized silicon wafers, or, after all the blocking rod components are removed, the entire silicon wafer can be carried in the accommodation space. In the embodiment of this application, the silicon wafer degumming rack can carry silicon wafers of different sizes for degumming as required, and has a simple structure, good compatibility, and high reuse rate, which can effectively avoid the waste of production costs caused by the production of silicon wafer degumming racks of various specifications question.
附图说明Description of drawings
图1是本申请实施例所述硅片脱胶架的结构示意图之一;Fig. 1 is one of the structural representations of the silicon wafer degumming frame described in the embodiment of the present application;
图2是本申请实施例所述硅片脱胶架的结构示意图之二;Fig. 2 is the second structural diagram of the silicon wafer degumming rack described in the embodiment of the present application;
图3是本申请实施例所述硅片脱胶架的结构示意图之二;Fig. 3 is the second structural schematic diagram of the silicon wafer degumming rack described in the embodiment of the present application;
图4是本申请实施例所述挡杆组件的结构示意图之一;Fig. 4 is one of the structural schematic diagrams of the bar assembly described in the embodiment of the present application;
图5是本申请实施例所述挡杆组件的结构示意图之二;Fig. 5 is the second structural schematic diagram of the bar assembly described in the embodiment of the present application;
图6是本申请实施例所述挡杆组件的结构示意图之三;Fig. 6 is the third structural schematic diagram of the bar assembly described in the embodiment of the present application;
图7是本申请实施例所述挡杆组件的结构示意图之四。Fig. 7 is the fourth schematic structural view of the stop rod assembly according to the embodiment of the present application.
附图标记说明:Explanation of reference signs:
10:架体;20:挡杆组件;30:容置槽;11:端板;12:底杆;13:侧杆;21:底板;22:分隔杆;211:底板本体;212:连接板。10: Frame body; 20: Bar assembly; 30: Accommodating slot; 11: End plate; 12: Bottom bar; 13: Side bar; 21: Bottom plate; 22: Divider bar; 211: Bottom plate body; .
具体实施方式detailed description
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of this application.
本申请的说明书和权利要求书中的术语“第一”、“第二”等是用于区别类似的对象,而不用于描述特定的顺序或先后次序。应该理解这样使用的数据在适当情况下可以互换,以便本申请的实施例能够以除了在这里图示或描述的那些以外的顺序实施。此外,说明书以及权利要求中“和/或”表示所连接对象的至少其中之一,字符“/”,一般表示前后关联对象是一种“或”的关系。The terms "first", "second" and the like in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific sequence or sequence. It is to be understood that the data so used are interchangeable under appropriate circumstances such that the embodiments of the application can be practiced in sequences other than those illustrated or described herein. In addition, "and/or" in the specification and claims means at least one of the connected objects, and the character "/" generally means that the related objects are an "or" relationship.
下面结合附图,通过具体的实施例及其应用场景对本申请实施例提供的硅片脱胶架以及硅片脱胶机进行详细地说明。The silicon wafer degumming rack and the silicon wafer degumming machine provided in the embodiments of the present application will be described in detail below through specific embodiments and application scenarios with reference to the accompanying drawings.
参照图1至图3,示出了本申请实施例所述硅片脱胶架的结构示意图。Referring to FIG. 1 to FIG. 3 , there are shown schematic structural views of the silicon wafer degumming rack described in the embodiment of the present application.
本申请实施例中,硅片脱胶架具体可以包括:架体10,以及至少一个挡杆组件20;架体10包括:相对设置的一对端板11,以及连接于两个端板11之间的至少一个底杆12和两个侧杆13,端板11、底杆12和侧杆13围合成用于容纳硅片的容置空间;其中,两个侧杆13相对设置于端板11的两侧;挡杆组件20设置于容置空间内且沿侧杆13的长度方向延伸,挡杆组件20可拆卸连接于两个端板11,并将容置空间分隔成至少两个容置槽30。In the embodiment of the present application, the silicon wafer degumming frame may specifically include: a
在本申请实施例中,由于挡杆组件20设置于容置空间内且沿侧杆13的长度延伸,挡杆组件20可拆卸连接于两个端板11,并将容置空间分隔成至少两个容置槽30,因此,在实际应用中,可以通过在架体10内设置一个或多个挡杆组件20,从而分隔出两个或多个容置槽30,每个容置槽30内可以承载半片硅片或1/N片小尺寸硅片,或者,还可以将挡杆组件20全部拆除后,在容置空间内承载整片硅片。本申请实施例中,硅片脱胶架可以按需承载不同尺寸的硅片进行脱胶,结构简单、兼容性好、重复利用率高,可以有效避免生产多种规格硅片脱胶架造成生产成本浪费的问题。In the embodiment of the present application, since the
需要说明的是,多片硅片在容置槽30内设置时,是由一个端板11向另一个端板11方向侧放堆叠。硅片的堆叠方向与侧杆13的长度方向一致。It should be noted that when a plurality of silicon wafers are arranged in the
本申请实施例中的硅片脱胶架可以用于对切割好的整片或1/N片硅片进行脱胶;其中,通过设置一个或多个挡杆组件20,可以将容置空间分隔成至少两个容置槽30,从而每个容置槽30内可以放置一组小片硅片(1/2片硅片、1/3片硅片、1/4片硅片等)进行脱胶。在容置槽30的数量大于或等于2的情况下,相对于现有一个硅片脱胶架只能用于一组硅片进行脱胶的情况,本申请实施例中的硅片脱胶架可以同时对两组或多组小片硅片(1/2片硅片、1/3片硅片、1/4片硅片等)进行脱胶,从而可以有效提升小片硅片的脱胶效率。The silicon wafer degumming rack in the embodiment of the present application can be used for degumming the cut whole piece or 1/N silicon wafer; wherein, by setting one or more
参照图4至图7,示出了本申请实施例所述挡杆组件的结构示意图。Referring to FIG. 4 to FIG. 7 , there are shown schematic structural diagrams of the stop rod assembly according to the embodiment of the present application.
在本申请实施例中,挡杆组件20的数量可以为一个或多个。本申请实施例中以挡杆组件20的数量为三个为例进行图示说明。本申请实施例中,在挡杆组件20的数量为一个的情况下,一个挡杆组件20可以设置于容置空间的中心,挡杆组件20将容置空间分隔成两个相同尺寸的容置槽30;其中,每个容置槽30可以用于一组半片硅片的脱胶;硅片脱胶架即可同时对两组半片硅片进行脱胶,从而可以有效提升半片硅片的脱胶效率。需要说明的是,一个挡杆组件20也可以将容置空间分隔成两个尺寸不同的容置槽30,以使两个容置槽30内承载不同尺寸的1/N小片硅片。In the embodiment of the present application, there may be one or more
本申请实施例中,在挡杆组件20的数量为多个(大于或等于两个)的情况下,多个挡杆组件20在容置空间内相间隔分布,且相邻的两个挡杆组件20之间形成一个容置槽30,这样,多个挡杆组件20分隔的容置槽30的数量大于或等于三个。这样,硅片脱胶架即可同时对多组小尺寸硅片进行脱胶,从而可以有效提升小尺寸硅片的脱胶效率。需要说明的是,在挡杆组件20的数量为多个的情况下,多个挡杆组件20可以将容置空间分隔为多个相同尺寸的容置槽30或多个不同尺寸的容置槽30,从而可以选择尺寸规格与容置槽30相适配的硅片进行脱胶。本申请实施例中,硅片脱胶架可以适配多种尺寸的小尺寸硅片,适用范围更广、兼容性更强。In the embodiment of the present application, when the number of
本申请实施例中,分隔组件的数量+1=容置槽30的数量。In the embodiment of the present application, the number of partition components+1=the number of
在本申请实施例中,挡杆组件20可以通过卡接、螺钉等紧固件连接等多种方式可拆卸连接于端板11,本申请实施例在此不作限定。In the embodiment of the present application, the blocking
本申请实施例中,挡杆组件20具体可以包括:底板21和分隔杆22,底板21和分隔杆22分别与两个端板11可拆卸连接;其中,底板21靠近底杆12设置;分隔杆22设置于底板21远离底杆12的一侧。本申请实施例中,底板21用于承载硅片,分隔杆22用于将容置空间分隔成至少两个容置槽30,相邻的容置槽30通过分隔杆22隔开。在实际应用中,底板21和分隔杆22可以分别与端板11相连,或者分隔杆22与底板21连接成一个组件后,再与端板11相连。In the embodiment of the present application, the
可以理解的是,沿一个侧杆13至另一个侧杆13的方向,底板21的尺寸大于分隔杆22的尺寸。具体的,分隔杆22可以为圆杆、方杆等。It can be understood that, along the direction from one
本申请实施例中,分隔杆22的数量可以为一个或多个(大于或等于两个)。在分隔杆22的数量为一个时,沿垂直于底板21的方向,分隔杆22在底板21上的投影位于底板21的中心线上;在分隔杆22的数量为多个时,多个分隔杆22可以沿平行于底板21的方向分布,其中,相邻的两个分隔杆22之间的间隙可以相同,以形成多个尺寸相同的容置槽30,或者,相邻的两个分隔杆22之间的间隙可以不同,以形成多个尺寸不同的容置槽30。In the embodiment of the present application, the number of the separating
可选的,挡杆组件20还可以包括:缓冲套,缓冲套包覆于分隔杆22上。Optionally, the blocking
在实际应用中,缓冲套套设于分隔杆22上可以起到柔性缓冲的作用,进而可以起到保护硅片避免硅片在脱胶时与分隔杆22碰撞发送硅片破损的问题。In practical application, the buffer sleeve sleeved on the
可选的,挡杆组件20还可以包括:缓冲膜,缓冲膜覆盖于底板21靠近分隔杆22的侧面上。Optionally, the blocking
本申请实施例中,缓冲膜可以为硅胶、橡胶等软性材料,这样,硅片脱胶过程中掉落于底板21上时,就可以首先掉落于缓冲膜上,通过缓冲膜起到柔性缓冲的作用,从而避免硅片磕碰破损,有效减少脱胶过程中硅片的破损率。In the embodiment of the present application, the buffer film can be made of soft materials such as silica gel and rubber. In this way, when the silicon wafer falls on the
本申请实施例中,底板21具体可以包括:底板21本体,以及连接于底板21本体两端的两个连接板212;连接板212与端板11一一对应,且连接板212可拆卸连接于端板11;分隔杆22的两端分别固定连接于与其相对的连接板212。本申请实施例中,底板21与分隔杆22连接形成一个整体组件,从而可以使挡杆组件20可以更加方便快捷的连接于端板11。具体的,连接板212分别与端板11可拆卸连接的方式可以有多种,例如卡接、螺纹连接等。In the embodiment of the present application, the
本申请实施例中,底板21本体与连接板212为一体成型结构。具体的,本申请实施例中,底板21本体与连接板212可以通过钣金折弯形成U型结构,结构简单、加工成本低。In the embodiment of the present application, the main body of the
综上,本申请实施例所述的硅片脱胶架至少包括以下优点:To sum up, the silicon wafer degumming rack described in the embodiment of the present application at least includes the following advantages:
在本申请实施例中,由于挡杆组件设置于容置空间内且沿侧杆的长度延伸,挡杆组件可拆卸连接于两个端板,并将容置空间分隔成至少两个容置槽,因此,在实际应用中,可以通过在架体内设置一个或多个挡杆组件,从而分隔出两个或多个容置槽,每个容置槽内可以承载半片硅片或1/N片小尺寸硅片,或者,还可以将挡杆组件全部拆除后,在容置空间内承载整片硅片。本申请实施例中,硅片脱胶架可以按需承载不同尺寸的硅片进行脱胶,结构简单、兼容性好、重复利用率高,可以有效避免生产多种规格硅片脱胶架造成生产成本浪费的问题。In the embodiment of the present application, since the stop bar assembly is arranged in the accommodation space and extends along the length of the side bar, the stop bar assembly is detachably connected to the two end plates, and divides the accommodation space into at least two accommodation slots , therefore, in practical applications, two or more accommodating slots can be separated by setting one or more blocking rod assemblies in the frame, and each accommodating slot can carry half a silicon wafer or 1/N slice Small-sized silicon wafers, or, after all the blocking rod components are removed, the entire silicon wafer can be carried in the accommodation space. In the embodiment of this application, the silicon wafer degumming rack can carry silicon wafers of different sizes for degumming as required, and has a simple structure, good compatibility, and high reuse rate, which can effectively avoid the waste of production costs caused by the production of silicon wafer degumming racks of various specifications question.
本申请实施例还提供了一种硅片脱胶机,包括上述硅片脱胶架。The embodiment of the present application also provides a silicon wafer degumming machine, including the above-mentioned silicon wafer degumming rack.
需要说明的是,本申请实施例所述硅片脱胶架与前述实施例中的硅片脱胶架的结构以及工作原理均相同,在此不再赘述。It should be noted that the structure and working principle of the silicon wafer degumming rack described in the embodiment of the present application are the same as those of the silicon wafer degumming rack in the foregoing embodiments, and will not be repeated here.
在本申请实施例中,由于挡杆组件设置于容置空间内且沿侧杆的长度延伸,挡杆组件可拆卸连接于两个端板,并将容置空间分隔成至少两个容置槽,因此,在实际应用中,可以通过在架体内设置一个或多个挡杆组件,从而分隔出两个或多个容置槽,每个容置槽内可以承载半片硅片或1/N片小尺寸硅片,或者,还可以将挡杆组件全部拆除后,在容置空间内承载整片硅片。本申请实施例中,硅片脱胶架可以按需承载不同尺寸的硅片进行脱胶,结构简单、兼容性好、重复利用率高,可以有效避免生产多种规格硅片脱胶架造成生产成本浪费的问题。In the embodiment of the present application, since the stop bar assembly is arranged in the accommodation space and extends along the length of the side bar, the stop bar assembly is detachably connected to the two end plates, and divides the accommodation space into at least two accommodation slots , therefore, in practical applications, two or more accommodating slots can be separated by setting one or more blocking rod assemblies in the frame, and each accommodating slot can carry half a silicon wafer or 1/N slice Small-sized silicon wafers, or, after all the blocking rod components are removed, the entire silicon wafer can be carried in the accommodation space. In the embodiment of this application, the silicon wafer degumming rack can carry silicon wafers of different sizes for degumming as required, and has a simple structure, good compatibility, and high reuse rate, which can effectively avoid the waste of production costs caused by the production of silicon wafer degumming racks of various specifications question.
上面结合附图对本申请的实施例进行了描述,但是本申请并不局限于上述的具体实施方式,上述的具体实施方式仅仅是示意性的,而不是限制性的,本领域的普通技术人员在本申请的启示下,在不脱离本申请宗旨和权利要求所保护的范围情况下,还可做出很多形式,均属于本申请的保护之内。The embodiments of the present application have been described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementations. The above-mentioned specific implementations are only illustrative and not restrictive. Those of ordinary skill in the art will Under the inspiration of this application, without departing from the purpose of this application and the scope of protection of the claims, many forms can also be made, all of which belong to the protection of this application.
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