CN218289418U

CN218289418U - Device and equipment for turning over whole semiconductor product tray

Info

Publication number: CN218289418U
Application number: CN202221889537.4U
Authority: CN
Inventors: 肖治祥; 朱涛; 叶坤
Original assignee: Wuhan Jingce Electronic Group Co Ltd; Suzhou Hirose Opto Co Ltd
Current assignee: Wuhan Jingce Electronic Group Co Ltd; Suzhou Hirose Opto Co Ltd
Priority date: 2022-07-20
Filing date: 2022-07-20
Publication date: 2023-01-13
Anticipated expiration: 2032-07-20

Abstract

The utility model discloses a device for whole set turn-over of semiconductor product, clamping jaw and vibrator, the clamping jaw includes that two are the single claw of the "L" style of calligraphy for the mirror image each other, the spacing groove of the vertical face of perpendicular to is seted up to every single claw of clamping jaw on relative face, the width of spacing groove is not less than the thickness when two charging trays are pieced together, the vibrator is located in the motion range of clamping jaw, the vibrator is used for with high-frequency vibration direct conduction or via the indirect conduction of clamping jaw extremely the charging tray. And a device using the device for overturning the whole tray of the semiconductor products. The utility model discloses a with one kind can be with the whole quick turn-over of the semiconductor crystalline grain of whole dish, very big promotion turn-over efficiency, can get into the detection process fast after the turn-over, realize seamless linking.

Description

Device and equipment for turning over whole semiconductor product tray

Technical Field

The utility model relates to a device for turning over a whole semiconductor product tray, which is mainly applied to turning over semiconductor crystal grains before a detection process and belongs to the technical field of semiconductors; also relates to a device using the device for overturning the whole tray of semiconductor products.

Background

In the detection fields of semiconductors, display, new energy and the like, the quality of the detection method is directly related to the production efficiency, the quality and the market competitiveness of products. Taking the wafer production process as an example, the wafer inspection process is indispensable, and it often relates to the reliability and accuracy of the subsequent use of the wafer. After the wafer is cut into the crystal grains, the crystal grains are loaded in the grooves of the tray, and the tray is generally gripped by a manipulator and then conveyed to a detection station. When the automatic optical detection is carried out on the crystal grains, the specific surfaces of the crystal grains need to be detected. In the manufacturing process, the front and back sides of the die are often inspected separately, which requires the orientation of the die to be reversed.

In the existing method, a single crystal grain is sucked and turned over, and then detection is carried out. The method for absorbing and turning the orientation of a single crystal grain is obviously low in efficiency, and particularly when the crystal grains in the same orientation of a whole material tray need to be turned simultaneously in one detection work, the material turning efficiency is low one by one, and the detection efficiency is influenced.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned deficiencies of the prior art, the object of the present invention is to: the device for overturning the whole tray of semiconductor products is low in cost, high in overturning speed and high in reliability, can overturn the whole semiconductor crystal grains of the whole tray quickly, greatly improves overturning efficiency, can enter a detection process quickly after overturning, and achieves seamless connection.

In order to realize the purpose of the utility model, the utility model provides a following technical scheme:

the clamping jaw comprises two L-shaped single jaws which are mirror images, a limiting groove is formed in the opposite surface of each single jaw, the width of each limiting groove is not smaller than the thickness of two material plates when the two material plates are spliced, the vibrator is located in the motion range of the clamping jaw, and the vibrator is used for directly conducting high-frequency vibration or indirectly conducting high-frequency vibration to the material plates through the clamping jaws. The vertical clamping jaw has the beneficial effects that the clamping jaw can freely move on a vertical surface, so that the clamping jaw can at least move to a loading position, a blanking position, a turning position and a position contacted with the vibrator. When the crystal grains do not need to be turned over, the rotary driving source does not work; when crystal grains need to be turned over, firstly, two material trays are superposed at the material loading position, grid grooves on the material tray on the upper layer correspond to the crystal grains in the grid grooves of the material tray on the lower layer one by one, the clamping jaws clamp the two material trays, the limiting grooves enable the two material trays to be firmly attached together, the clamping jaws move to a space which is not interfered, namely, the turning position, the clamping jaws turn over, the material tray on the upper layer becomes the lower layer, the material tray on the lower layer becomes the upper layer, then the clamping jaws move to the vibrator, the material tray is enabled to be in contact with the vibrator, or the clamping jaws are enabled to be in contact with the vibrator, the vibrator directly or indirectly conducts high-frequency vibration to the material tray, the material tray which becomes the original lower layer on the upper layer is under the high-frequency vibration, and the crystal grains in the material tray can quickly fall into the grid grooves of the material tray which becomes the original upper layer on the lower layer. Then, the clamping jaws put the two material trays back to the blanking position, and after the material tray positioned on the upper layer is taken away, the crystal grains positioned in the material tray on the lower layer at the moment can be detected. The whole rapid turnover of all crystal grains is realized, the turnover efficiency is greatly improved, the detection procedure can be rapidly carried out after turnover, and seamless connection is realized. The two single claws improve the applicability, and the free end of the claw driving source only moves a small distance to realize the clamping and releasing of the material tray.

The single claw includes first claw arm and second claw arm, wherein one end setting of first claw arm is in on the driving source, first claw arm is parallel with vertical face, the second claw arm sets up the other one end of first claw arm, the second claw arm is perpendicular with vertical face, be provided with two at least bosss, two on the inside wall of second claw arm the boss is located respectively the both ends of charging tray, the spacing groove is seted up on the boss. The novel feeding tray has the advantages that the two bosses can reduce the contact area with the feeding tray, and reduce the possibility of abrasion and error. The limiting groove can enable the two material trays to be attached together when the material trays are turned over, or the material trays are not larger than the thickness of one crystal grain when the material trays are separated, so that the crystal grain is prevented from being separated from the two material trays.

And the vibrator is provided with a buffer component. The high-frequency vibration damping device has the beneficial effects that when high-frequency vibration is conducted, the clamping jaws or the material tray are in contact with the damping assembly and are not in direct contact with the vibrator, so that the clamping jaws or the material tray are prevented from being damaged by the high-frequency vibration during hard contact.

The vibrator is secured to a vibrating assembly, which is secured to a support. The vibrating assembly has the beneficial effects that the vibrating assembly can improve the vibrating effect of the vibrator.

Including two-dimensional motion module, rotary drive source and clamping jaw driving source, rotary drive source sets up the free end of two-dimensional motion module, the clamping jaw driving source sets up on rotary drive source's the rotation axis, the clamping jaw sets up the free end of clamping jaw driving source, the rotation axis of clamping jaw is perpendicular with vertical face, the clamping jaw driving source is used for the drive the clamping jaw is opened or is closed. The clamping jaw lifting mechanism has the beneficial effects that the two-dimensional motion module, the rotary driving source and the clamping jaw driving source respectively realize the motion and the rotary motion of the clamping jaw on the vertical surface and the opening and closing of the clamping jaw.

The two-dimensional motion module comprises a first line driving source, a first limiting track, a first mounting platform, a second line driving source, a second limiting track and a second mounting platform, wherein the first line driving source and the first limiting track are fastened together, the first limiting track is arranged along the direction of a first direction shaft, the first mounting platform is arranged on the first limiting track in a sliding mode and connected with the free end of the first line driving source, the second line driving source and the second limiting track are fixed on the first mounting platform, the second limiting track is arranged along the direction of a longitudinal shaft, and the second mounting platform is arranged on the second limiting track in a sliding mode and connected with the free end of the second line driving source. This has the advantage that it enables free movement in a vertical plane defined by the first direction axis and the longitudinal axis.

The first limiting track comprises a bearing and a linear guide rail which are fastened together, a screw rod is arranged in the bearing in a rotating mode, the screw rod and the linear guide rail are arranged along the direction of a first direction shaft, one end of the screw rod is connected to the free end of the first linear driving source, the first mounting platform is arranged on the linear guide rail in a sliding mode, a threaded hole is formed in the first mounting platform, and the screw rod is sleeved with the threaded hole. The beneficial effects are that, it realizes the linear motion of first mounting platform in first direction axle direction.

Including the response subassembly, the response subassembly is including setting up response piece on the second mounting platform is in with the setting a plurality of sensor on the spacing track of second, the lift route of response piece passes through the sensor is used for instructing second mounting platform's lift height.

The sensor is including having set gradually first sensor, second sensor and third sensor on the spacing track of second, first sensor is used for instructing maximum descending height, the third sensor is used for instructing maximum ascending height, the second sensor is used for instructing work height. The sensor has the advantages that when the sensing piece reaches the position of the first sensor, the sensing piece does not descend any more; when the sensing piece reaches the position of the third sensor, the sensing piece does not rise any more.

The equipment for overturning the whole tray of the semiconductor products comprises the device for overturning the whole tray of the semiconductor products. The automatic turnover device has the beneficial effects that the material disc is directly turned over, high-frequency vibration is used, the integral rapid turnover of all crystal grains is realized, the turnover efficiency is greatly improved, the detection procedure can be rapidly carried out after turnover, and seamless connection is realized.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses a set up two single claws, improved the suitability, the free end that makes the clamping jaw driving source only removes a less distance and realizes the centre gripping of charging tray promptly and releases.

2. The utility model discloses a set up the spacing groove, can make two charging trays firmly paste together, avoid the crystalline grain to deviate from between two charging trays.

3. The utility model discloses a set up the vibrator, can make the crystalline grain that is located the charging tray on upper strata fall into the charging tray of lower floor fast in, improve work efficiency.

4. The utility model discloses a direct upset charging tray to use high-frequency vibration, realized the whole quick turn-over of all crystalline grains, very big promotion turn-over efficiency, can get into the detection process fast behind the turn-over, realize seamless joint.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a full-tray turnover device for bulk products according to a first embodiment of the present invention;

fig. 2 is a schematic structural view of a clamping jaw in a first embodiment of the present invention.

Reference numerals are as follows: 10-a first line driving source, 11-a first limit rail, 12-a first mounting platform, 13-a second line driving source, 14-a second limit rail, 15-a bearing, 16-a screw rod, 17-a linear guide rail, 18-a second mounting platform, 20-a rotary driving source, 30-a clamping jaw driving source, 40-a clamping jaw, 41-a first claw arm, 42-a second claw arm, 43-a boss, 44-a limit groove, 50-a bracket, 51-a vibration component, 52-a vibrator, 53-a buffer component, 60-a material tray and 61-a grid groove.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely below, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

The first embodiment is as follows:

as shown in fig. 1 and 2, the present embodiment discloses a full-plate turn-over apparatus for bulk products, which includes a two-dimensional movement module, a rotation driving source 20, a jaw driving source 30, a jaw 40, and a vibrator 52. The rotation driving source 20 is provided at a free end of a two-dimensional motion module for driving the rotation driving source 20 to freely move on a vertical plane. The jaw driving source 30 is provided on a rotation shaft of the rotation driving source 20, and the rotation driving source 20 is configured to drive the jaw driving source 30 to be reversed. The jaws 40 are provided at the free ends of jaw drive sources 30, the axes of rotation of the jaws 40 being perpendicular to a vertical plane, the jaw drive sources 30 being used to drive the jaws 40 to open or close. Each single jaw of the clamping jaw 40 is provided with a limiting groove 44 perpendicular to the vertical surface on the opposite surface. The width of the limiting groove 44 is not less than the thickness of the two trays 60 when the two trays are spliced. The vibrator 52 is located within the range of motion of the jaws 40, and the vibrator 52 is used to conduct high frequency vibrations either directly or indirectly via the jaws 40 to the tray 60. In operation, the two-dimensional motion module can drive the clamping jaw 40 to move freely on a vertical surface, so that the clamping jaw 40 can move to at least a loading position, a blanking position, a turning position and a position contacting with the vibrator 52. When the crystal grains do not need to be turned over, the rotary driving source 30 does not work; when crystal grains need to be turned over, firstly, two material trays 60 are overlapped at the upper material position, the grid grooves 61 on the material tray 60 at the upper layer correspond to the crystal grains in the grid grooves 61 of the material tray 60 at the lower layer one by one, the clamping jaw driving source 30 drives the clamping jaws 40 to clamp the two material trays 60, the limiting grooves 44 enable the two material trays 60 to be firmly attached together, the two-dimensional motion module drives the clamping jaws 40 to move to a non-interference space, namely, an overturning position, the rotary driving source 30 drives the clamping jaws 40 to overturn, so that the material tray 60 at the upper layer is changed into the lower layer, the material tray 60 at the lower layer is changed into the upper layer, then the two-dimensional motion module drives the clamping jaws 40 to move to the position of the vibrator 52, and the material tray 60 is contacted with the vibrator 52, or the clamping jaws 40 are contacted with the vibrator 52, the vibrator 52 directly or indirectly transmits high-frequency vibration to the material tray 60, and the crystal grains in the material tray 60 at the original lower layer at the upper layer can quickly fall into the grid grooves 61 of the material tray 60 at the original upper layer which is changed into the lower layer under the high-frequency vibration. Subsequently, the two trays 60 are placed back to the blanking position by the clamping jaws 40, and after the tray 60 on the upper layer is taken away, the crystal grains in the tray 60 on the lower layer can be detected. The whole rapid turnover of all crystal grains is realized, the turnover efficiency is greatly improved, the detection procedure can be rapidly carried out after turnover, and seamless connection is realized.

Specifically, the two-dimensional motion module includes a first wire drive source 10, a first limit rail 11, a first mounting platform 12, a second wire drive source 13, a second limit rail 14, and a second mounting platform 18. The first line drive source 10 and the first curb rail 11 are secured together. The first stopper rail 11 is in a horizontal direction, i.e., an X-axis (i.e., a first direction axis) direction. The first mounting platform 12 is slidably disposed on the first limiting rail 11 and connected to the free end of the first wire driving source 10. The second wire drive source 13 and the second limit rail 14 are both fixed to the first mounting platform 12. The second curb rails 14 are oriented in a vertical direction, i.e., the Z-axis (i.e., longitudinal axis). The X-axis and Z-axis define a vertical plane. The second mounting platform 18 is slidably disposed on the second limit rail 14 and connected to the free end of the second wire drive source 13. Which allows free movement in a vertical plane defined by the X-axis and the Z-axis.

In a preferred embodiment of the present invention, the first limit rail 11 includes a bearing 15 and a linear guide 17 fastened together. A screw 16 is rotatably provided in the bearing 15. The screw 16 and the linear guide 17 are both along the X-axis direction. One end of the lead screw 16 is connected to the free end of the first wire drive source 10. The first mounting platform 12 is slidably disposed on the linear guide 17. The first mounting platform 12 is provided with a threaded hole. The threaded hole is sleeved on the screw rod 16. The first linear driving source 10 drives the screw rod 16 to rotate, and the screw rod 16 is matched with the threaded hole, so that the linear motion of the first mounting platform 12 in the X-axis direction is realized.

In a preferred embodiment of the present invention, the second limit rail 14 includes a bearing 15 and a linear guide 17 fastened together. A screw 16 is rotatably provided in the bearing 15. The screw 16 and the linear guide 17 are both along the Z-axis direction. One end of the screw 16 is connected to the free end of the second wire driving source 13. The second mounting platform 18 is slidably disposed on the linear guide 17. The second mounting platform 18 is provided with a threaded hole. The threaded hole is sleeved on the screw rod 16. The second wire driving source 13 drives the screw rod 16 to rotate, and the screw rod 16 is matched with the threaded hole, so that the linear motion of the second mounting platform 18 in the Z-axis direction is realized.

In addition, a sensing piece may be provided on the second mounting platform 18. A plurality of sensors are arranged on the second limiting rail 14 from bottom to top, and the lifting path of the induction sheet passes through the sensors and is used for indicating the lifting height of the second mounting platform 18.

Specifically, the sensors include a first sensor, a second sensor, and a third sensor arranged in sequence from bottom to top. The first sensor is used for indicating the maximum descending height, the third sensor is used for indicating the maximum ascending height, and the second sensor is used for indicating the working height. When the sensing piece reaches the position of the first sensor, the sensing piece does not descend any more; when the sensing piece reaches the position of the third sensor, the sensing piece does not rise any more.

The rotary drive source 20 is fastened to the second mounting platform 18. The rotation axis of the rotation drive source 20 is perpendicular to a vertical plane defined by the X axis and the Z axis.

In a preferred embodiment of the present invention, the rotary driving source 20 is a rotary cylinder or a motor mounted with a speed reducer.

The jaw drive source 30 is provided on the rotation shaft of the rotation drive source 20. The open-close plane of the free end of the jaw drive source 30 is parallel to the vertical plane.

In a preferred embodiment of the present invention, the jaw driving source 30 is a jaw cylinder.

The clamping jaw 40 comprises two L-shaped single jaws which are mirror images of each other. The single claw includes a first claw arm 41 and a second claw arm 42. One end of the first claw arm 41 is provided at the free end of the claw drive source 30. The first claw arm 41 is parallel to the vertical plane. The second claw arm 42 is provided at the other end of the first claw arm 41. The second claw arm 42 is perpendicular to the vertical plane. At least two bosses 43 are arranged on the inner side wall of the second claw arm 42. The two bosses 43 are respectively positioned at the two ends of the tray 60. The boss 43 is provided with a limit groove 44 perpendicular to the vertical surface direction. The width of the limiting groove 44 is larger than the thickness of the two trays 60. The first claw arm 41 can improve the applicability, and the free end of the claw driving source 30 only moves a small distance to clamp and release the tray 60. The two bosses 43 reduce the contact area with the tray 60 and reduce the possibility of wear and error. The limiting groove 44 can enable the two material trays 60 to be attached together during overturning, or the two material trays can be separated by not more than the thickness of one crystal grain, so that the crystal grain is prevented from being separated from the two material trays 60.

The vibrator 52 is provided with an air chamber and an eccentric wheel. The eccentric wheel is arranged in the air chamber. When the eccentric wheel rotates, the vibrator 52 can be driven to vibrate at high frequency.

In order to avoid damage to the chuck jaws 40 or the tray 60 caused by high frequency vibration during hard contact, a damping member 53 may be provided on the vibrator 52. When conducting high frequency vibrations, the holding jaws 40 or the tray 60 contact the damping assembly 53 and not the vibrator 52 directly. Preferably, the cushioning component 53 is plastic.

In order to enhance the vibration effect of the vibrator 52, the vibrator 52 may be fastened to the vibration assembly 51. The vibration assembly 51 is fastened to the bracket 50. The vibration unit 51 has a sheet shape, and can sufficiently release the vibration amplitude of the vibrator 52, thereby improving the working efficiency. Preferably, the vibration member 51 is a metal foil.

When the charging trays 60 are stacked, the top surfaces of two identical charging trays 60 can be mutually buckled together; or two charging trays 60 with grid grooves 61 on two surfaces can be provided, and the bottom surface of the charging tray 60 on the upper layer is buckled on the top surface of the charging tray 60 on the lower layer.

The embodiment provides a full-tray turnover device for semiconductor products, which is used for operating:

feeding:

the tray 60 filled with the crystal grains is placed at the loading position, the empty tray 60 is fastened on the tray 60 filled with the crystal grains, and the grid grooves 61 of the empty tray 60 are aligned with each crystal grain.

Turning:

the two-dimensional motion module moves the clamping jaws 40 to the position of two trays 60, and the limiting grooves 44 are aligned with the two trays 60. The clamping jaw driving source 30 drives the clamping jaws 40 to clamp two trays 60. The two-dimensional motion module moves the tray 60 to the flipped position. The rotary drive source 20 drives the trays 60 to rotate 180 degrees, so that the upper and lower positions of the two trays 60 are reversed. The two-dimensional driving module moves the two material trays 60 to the position of the vibrator 52, the clamping jaws 40 or the material trays 60 are in contact with the vibrator 52, the high-frequency vibration of the vibrator 52 is transmitted to the material trays 60, so that all the crystal grains still attached to the upper layer of the material trays 60 quickly fall into the empty material tray 60 at the lower layer, and the turnover of the crystal grains is completed.

Blanking:

the two-dimensional driving module moves the material tray 60 to a blanking position, and the material tray 60 on the upper layer is taken away, so that the detection procedure can be carried out.

Example two:

the embodiment discloses a device for detecting semiconductor products, which comprises the device for turning over the whole tray of the semiconductor products in the first embodiment.

Specifically, the first wire driving source 10, the first stopper rail 11, and the bracket 50 are fastened to a frame of the apparatus. A feeding platform and a discharging platform are arranged in the equipment. The device takes the tray 60 away from the feeding platform, completes the turnover in the equipment, and places the tray 60 on the discharging platform. An industrial personal computer is also arranged in the equipment. The first wire driving source 10, the second wire driving source 13, the rotary driving source 20 and the clamping jaw driving source 30 are all in signal connection with the numerically-controlled machine.

Specifically, the sensors include a first sensor, a second sensor, and a third sensor arranged in this order from the bottom up. The first sensor, the second sensor and the third sensor are all connected to the industrial personal computer through signals. The first sensor is used for indicating the maximum descending height, the third sensor is used for indicating the maximum ascending height, and the second sensor is used for indicating the working height. When the induction sheet reaches the position of the first sensor, the first sensor sends a signal to the industrial personal computer, the industrial personal computer controls the second line driving source 13 to stop, and the clamping jaw 40 stops descending; when the sensing piece reaches the position of the third sensor, the third sensor sends a signal to the industrial computer, the industrial computer controls the second wire driving source 13 to stop, and the clamping jaw 40 stops rising.

It is right above the utility model provides a device and equipment that is used for whole dish turn-over of semiconductor product has carried out detailed introduction, and it is right to have used specific individual example here the utility model discloses a structure and theory of operation have been expounded, and the description of above embodiment is only used for helping to understand the utility model discloses a method and core thought. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, the present invention can be further modified and modified, and such modifications and modifications also fall within the scope of the appended claims.

Claims

1. The device for turning over the whole tray of the semiconductor product is characterized by comprising clamping jaws (40) and a vibrator (52), wherein the clamping jaws (40) comprise two L-shaped single jaws which are mirror images of each other, a limiting groove (44) is formed in the opposite surface of each single jaw (40), the width of each limiting groove (44) is not smaller than the thickness of two trays (60) when the two trays are spliced, the vibrator (52) is located in the movement range of the clamping jaws (40), and the vibrator (52) is used for directly conducting vibration or indirectly conducting vibration to the trays (60) through the clamping jaws (40).

2. The apparatus for turning a whole tray of semiconductor products according to claim 1, wherein the single claw comprises a first claw arm (41) and a second claw arm (42), one end of the first claw arm (41) is disposed on the driving source, the first claw arm (41) is parallel to the vertical plane, the second claw arm (42) is disposed at the other end of the first claw arm (41), the second claw arm (42) is perpendicular to the vertical plane, at least two bosses (43) are disposed on the inner side wall of the second claw arm (42), the two bosses (43) are respectively disposed at two ends of the tray (60), and the limiting groove (44) is opened on the bosses (43).

3. The apparatus for full tray turn-over of semiconductor products as claimed in claim 1, wherein said vibrator (52) is provided with a damping member (53).

4. The apparatus for the full tray turn-over of semiconductor products as claimed in claim 1, wherein said vibrator (52) is fastened to a vibration assembly (51), said vibration assembly (51) being fastened to a support (50).

5. The apparatus for turn-over of whole tray of semiconductor products according to claim 1, further comprising a two-dimensional motion module, a rotation driving source (20) and a jaw driving source (30), wherein the rotation driving source (20) is disposed at a free end of the two-dimensional motion module, the jaw driving source (30) is disposed on a rotation axis of the rotation driving source (20), the jaw (40) is disposed at a free end of the jaw driving source (30), the rotation axis of the jaw (40) is perpendicular to a vertical plane, and the jaw driving source (30) is used for driving the jaw (40) to open or close.

6. The apparatus for turning a whole semiconductor product tray over as claimed in claim 5, wherein the two-dimensional movement module comprises a first wire driving source (10), a first limit rail (11), a first mounting platform (12), a second wire driving source (13), a second limit rail (14) and a second mounting platform (18), the first wire driving source (10) and the first limit rail (11) are fastened together, the first limit rail (11) is along a first axial direction, the first mounting platform (12) is slidably disposed on the first limit rail (11) and connected with a free end of the first wire driving source (10), the second wire driving source and the second limit rail are both fixed on the first mounting platform (12), the second limit rail (14) is along a longitudinal axial direction, and the second mounting platform (18) is slidably disposed on the second limit rail (14) and connected with a free end of the second wire driving source (13).

7. The apparatus for turning the whole tray of semiconductor products over according to claim 6, wherein the first position limiting rail (11) comprises a bearing (15) and a linear guide rail (17) fastened together, a screw rod (16) is rotatably disposed in the bearing (15), the screw rod (16) and the linear guide rail (17) are both axially arranged along a first direction, one end of the screw rod (16) is connected to the free end of the first wire drive source (10), the first mounting platform (12) is slidably disposed on the linear guide rail (17), and the first mounting platform (12) is sleeved on the screw rod (16).

8. The apparatus for turning over a complete tray of semiconductor products as claimed in claim 6, further comprising a sensing assembly, wherein the sensing assembly comprises a sensing piece disposed on the second mounting platform (18) and a plurality of sensors disposed on the second limit rail (14), wherein a lifting path of the sensing piece passes through the sensors for indicating a lifting height of the second mounting platform (18).

9. The apparatus for the complete turn-over of semiconductor products as claimed in claim 8, wherein said sensors comprise a first sensor, a second sensor and a third sensor sequentially arranged on said second limit track (14), said first sensor being adapted to indicate a maximum lowering height, said third sensor being adapted to indicate a maximum raising height, said second sensor being adapted to indicate a working height.

10. An apparatus for semiconductor product inspection, comprising a device for full tray flipping of semiconductor products according to any of claims 1-9.