CN218261989U - Anti-disproportionation device for preparing trichlorosilane - Google Patents
Anti-disproportionation device for preparing trichlorosilane Download PDFInfo
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- CN218261989U CN218261989U CN202222624111.2U CN202222624111U CN218261989U CN 218261989 U CN218261989 U CN 218261989U CN 202222624111 U CN202222624111 U CN 202222624111U CN 218261989 U CN218261989 U CN 218261989U
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- 238000007323 disproportionation reaction Methods 0.000 title claims abstract description 71
- 239000005052 trichlorosilane Substances 0.000 title claims abstract description 58
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 title claims abstract 16
- 238000000605 extraction Methods 0.000 claims abstract description 62
- 238000010992 reflux Methods 0.000 claims abstract description 61
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims abstract description 37
- 239000005049 silicon tetrachloride Substances 0.000 claims abstract description 37
- 238000009835 boiling Methods 0.000 claims abstract description 14
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims abstract 6
- 239000000872 buffer Substances 0.000 claims description 16
- 230000002441 reversible effect Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 abstract description 11
- 238000006243 chemical reaction Methods 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 8
- 239000002699 waste material Substances 0.000 abstract description 8
- 239000006227 byproduct Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000004064 recycling Methods 0.000 abstract 1
- PPDADIYYMSXQJK-UHFFFAOYSA-N trichlorosilicon Chemical compound Cl[Si](Cl)Cl PPDADIYYMSXQJK-UHFFFAOYSA-N 0.000 description 43
- 239000007789 gas Substances 0.000 description 25
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 22
- 238000011084 recovery Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- 238000000926 separation method Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000007853 buffer solution Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 238000002386 leaching Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The anti-disproportionation device for preparing trichlorosilane comprises a silicon tetrachloride pipeline, a dichlorosilane pipeline, a high-low boiling tank, a pressure device, a feeding preheater, an anti-disproportionation tower, a tower top gas phase pipeline, a reflux device, a side extraction pipeline, a side extraction circulating device, a kettle extraction device and an anti-disproportionation device, wherein by-product silicon tetrachloride and dichlorosilane are subjected to anti-disproportionation reaction by the anti-disproportionation device for preparing trichlorosilane to generate trichlorosilane, so that the yield of trichlorosilane in a production system is improved, the material consumption in the waste treatment process is reduced, the reaction conditions are mild and easy to realize, on one hand, the problem of enrichment of dichlorosilane is solved, the potential safety hazard of enrichment of dichlorosilane is reduced, on the other hand, the pollution problem of silicon tetrachloride and the waste of resources are solved, and the efficient recycling of by-products is realized.
Description
Technical Field
The utility model relates to a preparation polycrystalline silicon technical field especially relates to preparation trichlorosilane's anti-disproportionation device.
Background
During the process of preparing polysilicon, silicon tetrachloride and dichlorosilane by-products are generated. Silicon tetrachloride is easy to react with water to generate silicic acid and hydrogen chloride, and direct discharge causes great harm to human and environment, and also causes resource waste. Meanwhile, dichlorosilane is gradually enriched in the separation process, and is extremely dangerous for flammability and explosiveness, and the conventional process uses an alkali leaching method to treat the dichlorosilane as waste, so that the difficulty and the material consumption are increased. Thereby causing great waste of silicon tetrachloride and potential safety hazard of dichlorosilane.
Disclosure of Invention
In view of this, it is necessary to provide an anti-disproportionation device for preparing trichlorosilane, which reduces waste of silicon tetrachloride and reduces the potential safety hazard of dichlorosilane.
The anti-disproportionation device for preparing trichlorosilane comprises a silicon tetrachloride pipeline, a dichlorosilane pipeline, a high-low boiling tank, a pressure device, a feeding preheater, an anti-disproportionation tower, a tower top gas phase pipeline, a reflux device, a side extraction pipeline, a side extraction circulating device, a kettle extraction device and an anti-disproportionation device, wherein an outlet of the silicon tetrachloride pipeline and an outlet of the dichlorosilane pipeline are respectively connected with inlets of the high-low boiling tank, an outlet of the high-low boiling tank is connected with an inlet of the pressure device, an outlet of the pressure device is connected with an inlet of the feeding preheater, an outlet of the feeding preheater is connected with a side extraction inlet of the anti-disproportionation tower, the anti-disproportionation tower is provided with a tower top gas phase outlet, the tower top gas phase outlet is connected with an inlet of the tower top gas phase pipeline, an outlet of the tower top gas phase pipeline is connected with an inlet of the reflux device, an outlet of the reflux device is connected with an inlet of the anti-disproportionation tower, an outlet of the side extraction pipeline is connected with an inlet of the side extraction circulating device, an outlet of the anti-disproportionation tower is also provided with an outlet of the anti-disproportionation tower is connected with an inlet of the anti-disproportionation device.
Preferably, the pressure device comprises a feeding buffer tank and a feeding pump, an outlet of the high-low boiling tank is connected with an inlet of the feeding buffer tank, an outlet of the feeding buffer tank is connected with an inlet of the feeding pump, and an outlet of the feeding pump is connected with an inlet of the feeding preheater.
Preferably, the reflux device comprises a condenser, a reflux tank, a reflux pump, a reflux pipeline and a top extraction pipeline, wherein an outlet of the top gas phase pipeline is connected with an inlet of the condenser, an outlet of the condenser is connected with an inlet of the reflux tank, an outlet of the reflux tank is connected with an inlet of the reflux pump, the reflux pump is provided with a reflux outlet, the reflux outlet is connected with an inlet of the reflux pipeline, and an outlet of the reflux pipeline is connected with the inverse disproportionation tower;
the reflux pump is also provided with a top extraction outlet, the top extraction outlet is connected with an inlet of a top extraction pipeline, and an outlet of the top extraction pipeline is connected with an inlet of a reverse disproportionation removal device.
Preferably, the side is adopted circulating device and is still adopted cooler, side and adopt pump, crude trichlorosilane spherical tank, rectifier unit feeding pre-heater including the side, the export of pipeline is adopted with the access connection of side adoption cooler to the side, and the export of cooler is adopted with the access connection of side and pump to the side, and the side is adopted the pump and is equipped with first side and adopts the pump export, second side and adopts the pump export and the export of third side, and first side is adopted the pump export and is adopted the access connection of crude trichlorosilane spherical tank, and the export of second side is adopted the access connection of pump and feeding buffer tank, and the pump export is adopted with rectifier unit feeding pre-heater's access connection to third side.
Preferably, the kettle extraction device further comprises a kettle extraction pipeline and a kettle extraction pump, the kettle extraction outlet is connected with the inlet of the kettle extraction pipeline, the outlet of the kettle extraction pipeline is connected with the inlet of the kettle extraction pump, and the outlet of the kettle extraction pump is connected with the inlet of the feeding preheater.
Preferably, the anti-disproportionation device for preparing trichlorosilane further comprises a mixed gas pipeline, and an outlet of the mixed gas pipeline is connected with an inlet of the rectification system.
Preferably, the anti-disproportionation device for preparing trichlorosilane further comprises a silicon tetrachloride spherical tank, and an outlet of the silicon tetrachloride spherical tank is connected with an inlet of the high-low boiling tank.
Has the beneficial effects that: the utility model discloses a preparation trichlorosilane's anti-disproportionation device passes through anti-disproportionation reaction with accessory substance silicon tetrachloride and dichlorosilane and generates trichlorosilane, has improved trichlorosilane's yield, has reduced the material consumption among the refuse treatment process, and the mild easy realization of reaction condition, has solved dichlorosilane's enrichment problem on the one hand, has reduced the potential safety hazard of dichlorosilane enrichment, and on the other hand has solved silicon tetrachloride's the pollution problem and the waste of resource, has realized the high-efficient recycle of accessory substance.
Drawings
FIG. 1 is a process flow diagram of an anti-disproportionation device for preparing trichlorosilane according to the present invention;
in the figure: the device comprises a silicon tetrachloride pipeline 1, a dichlorosilane pipeline 2, a high-low boiling tank 3, a pressure device 4, a feeding preheater 5, an inverse disproportionation tower 6, a tower top gas phase pipeline 7, a reflux device 8, a side recovery pipeline 9, a side recovery circulating device 10, a kettle recovery device 11, an inverse disproportionation removal device 12, a feeding buffer tank 401, a feeding pump 402, a condenser 801, a reflux tank 802, a reflux pump 803, a reflux pipeline 804, a top recovery pipeline 805, a side recovery cooler 1001, a side recovery pump 1002, a crude trichlorosilane spherical tank 1003, a rectification device feeding preheater 1004, a kettle recovery pipeline 1101, a kettle recovery pump 1102, a mixed gas pipeline 13 and a silicon tetrachloride spherical tank 14.
Detailed Description
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Referring to fig. 1, a silicon tetrachloride pipeline 1, a dichlorosilane pipeline 2, a high-low boiling tank 3, a pressure device 4, a feed preheater 5, an anti-disproportionation tower 6, a tower top gas phase pipeline 7, a reflux device 8, a side extraction pipeline 9, a side extraction circulation device 10, a kettle extraction device 11, an anti-disproportionation removal device 12, a feed buffer tank 401, a feed pump 402, a condenser 801, a reflux tank 802, a reflux pump 803, a reflux pipeline 804, a top extraction pipeline 805, a side extraction cooler, a side extraction pump 1002, a crude trichlorosilane spherical tank 1003, a rectification device feed preheater 1004, a kettle extraction pipeline 1101, a kettle extraction pump 1102, a mixed gas pipeline 13 and a silicon tetrachloride spherical tank 14 are arranged, wherein an outlet of the silicon tetrachloride pipeline 1 and an outlet of the dichlorosilane pipeline 2 are respectively connected with an inlet of the high-low boiling tank 3, an outlet of the high-low boiling tank 3 is connected with an inlet of the pressure device 4, the outlet of the pressure device 4 is connected with the inlet of the feed preheater 5, the outlet of the feed preheater 5 is connected with the inlet of the inverse disproportionation tower 6, the inverse disproportionation tower 6 is provided with a tower top gas phase outlet, the tower top gas phase outlet is connected with the inlet of the tower top gas phase pipeline 7, the outlet of the tower top gas phase pipeline 7 is connected with the inlet of the reflux device 8, the outlet of the reflux device 8 is connected with the inverse disproportionation tower 6, the side outlet of the inverse disproportionation tower 6 is connected with the inlet of the side extraction pipeline 9, the outlet of the side extraction pipeline 9 is connected with the inlet of the side extraction circulation device 10, the inverse disproportionation tower 6 is further provided with a tower kettle outlet, the tower kettle outlet is connected with the inlet of the kettle extraction device 11, and the outlet of the kettle extraction device 11 is connected with the inlet of the inverse disproportionation device 12.
Through the anti-disproportionation device for preparing trichlorosilane, silicon tetrachloride and dichlorosilane are reacted to generate the target product trichlorosilane, the waste of silicon tetrachloride and the pollution to the environment are reduced, the potential safety hazard of dichlorosilane is reduced, and the yield of trichlorosilane is improved. After the separation of the anti-disproportionation tower 6, a small amount of trichlorosilane and dichlorosilane enter the reflux device 8 through the tower top gas phase pipeline 7, the temperature of the tower top gas phase material is reduced in the reflux device 8, gaseous silicon trichloride is changed into liquid and returns to the anti-disproportionation tower 6, and the reflux device 8 and the kettle collection device 11 enter the anti-disproportionation device 12, so that the high yield of trichlorosilane is realized.
Further, the pressure device 4 comprises a feed buffer tank 401 and a feed pump 402, wherein an outlet of the high-low boiling tank 3 is connected with an inlet of the feed buffer tank 401, an outlet of the feed buffer tank 401 is connected with an inlet of the feed pump 402, and an outlet of the feed pump 402 is connected with an inlet of the feed preheater 5.
Through the effect of feed buffer tank 401, the pressure fluctuation of balanced buffer system makes system work more steady, simultaneously feed pump 402 provides the power that gets into for the material the feed preheater.
Further, the reflux device comprises a condenser 801, a reflux tank 802, a reflux pump 803, a reflux pipeline 804 and a top extraction pipeline 805, an outlet of the tower top gas phase pipeline 7 is connected with an inlet of the condenser 801, an outlet of the condenser 801 is connected with an inlet of the reflux tank 802, an outlet of the reflux tank 802 is connected with an inlet of the reflux pump 803, the reflux pump 803 is provided with a reflux outlet, the reflux outlet is connected with an inlet of the reflux pipeline 804, and an outlet of the reflux pipeline 804 is connected with the reverse disproportionation tower 6;
the reflux pump 803 is further provided with a top extraction outlet, the top extraction outlet is connected with an inlet of the top extraction pipeline 805, and an outlet of the top extraction pipeline 805 is connected with an inlet of the anti-disproportionation device 12.
The gas phase material at the top of the anti-disproportionation tower 6 is mainly dichlorosilane mixed with a small amount of silicon tetrachloride and trichlorosilane, the trichlorosilane and silicon tetrachloride with higher volatility become liquid through the cooling effect of the condenser 801, and flow back to the anti-disproportionation tower 6 through the reflux pump 803 and the reflux pipeline 804, and meanwhile, the dichlorosilane enters the anti-disproportionation device 12 through the top extraction pipeline 805.
Further, circulating device 10 is adopted to side still includes that the side adopts cooler 1001, side and adopts pump 1002, crude trichlorosilane spherical tank 1003, rectifier unit feeding pre-heater 1004, the export of pipeline 9 is adopted to side with the access connection of cooler 1001 is adopted to the side, the export of cooler 1001 is adopted to side with the access connection of pump 1002 is adopted to the side, pump 1002 is adopted to side is equipped with first side and adopts pump export, second side and adopt pump export and third side, first side adopt pump export with the access connection of crude trichlorosilane spherical tank 1003, second side adopt pump export with the access connection of feeding buffer tank 401, third side adopt pump export with the access connection of rectifier unit feeding pre-heater 1004.
The process is in behind the reaction of anti-disproportionation tower 6, the trichlorosilane material that is thoughtlessly had a small amount of silicon tetrachloride and dichlorosilane gets into side-sampling cooler 1001 separates, and the trichlorosilane after the separation gets into crude trichlorosilane spherical tank 1003, silicon tetrachloride get into for preparing trichlorosilane provides the raw materials in the feeding buffer tank 401, impels the reaction to the direction removal that generates trichlorosilane simultaneously, and silicon dichloride, silicon tetrachloride and trichlorosilane get into rectifier unit feeding preheater 1004 purifies trichlorosilane through the rectifier unit.
In a preferred embodiment, the feeding preheater 1004 of the rectifying device is a heat pipe heat exchanger, which has a high heat exchange efficiency, and preferably heats up the mixture, and has a compact structure, and the resistance of the heat exchange fluid is low when the heat exchange fluid flows, so as to reduce the heat loss.
Further, the kettle extraction device further comprises a kettle extraction pipeline 1101 and a kettle extraction pump 1102, wherein the kettle extraction outlet is connected with an inlet of the kettle extraction pipeline, an outlet of the kettle extraction pipeline is connected with an inlet of the kettle extraction pump, and an outlet of the kettle extraction pump is connected with an inlet of the feed preheater.
The material in the kettle extraction pipeline 1101 is mainly silicon tetrachloride mixed with a small amount of trichlorosilane, the small amount of trichlorosilane returns to the anti-disproportionation tower 6 under the action of the feed preheater 5, and the silicon tetrachloride enters the anti-disproportionation device 12.
In another preferred embodiment, the reverse disproportionation tower 6 is a packed tower with small resistance, which is suitable for the process with large gas handling capacity and small liquid amount, the liquid flows from top to bottom along the surface of the packing, and the gas and the liquid flow in a counter-current or co-current manner, and the packed tower has small liquid storage amount, large production capacity, high separation efficiency, small pressure drop, small liquid holding capacity and large operation flexibility.
Further, the anti-disproportionation device for preparing trichlorosilane further comprises a mixed gas pipeline 13, and an outlet of the mixed gas pipeline 13 is connected with an inlet of the rectification system.
Dichlorosilane and silicon tetrachloride of the anti-disproportionation device for preparing trichlorosilane are not completely converted into trichlorosilane, mixed materials after the anti-disproportionation reaction are introduced into a rectification system through a mixed gas pipeline 13, the mixed materials are separated again, and meanwhile, trichlorosilane in the mixed materials is purified by utilizing different volatilities, so that the purity of trichlorosilane is improved.
Furthermore, the anti-disproportionation device for preparing trichlorosilane further comprises a silicon tetrachloride spherical tank 14, and an outlet of the silicon tetrachloride spherical tank 14 is connected with an inlet of the high-low boiling tank 3.
And (2) performing a reversible reaction in the reverse disproportionation tower 6 to generate trichlorosilane, wherein according to the equilibrium state of the reversible reaction, excessive silicon tetrachloride and dichlorosilane are ensured when the reaction is moved towards the direction of generating trichlorosilane, so that excessive silicon tetrachloride is added into the reverse disproportionation tower 6 through the silicon tetrachloride spherical tank 14 to promote the reversible reaction to move towards the direction of generating trichlorosilane, and the yield of trichlorosilane is improved.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made without departing from the spirit and scope of the invention.
Claims (7)
1. The anti-disproportionation device for preparing trichlorosilane is characterized in that: including silicon tetrachloride pipeline, dichlorosilane pipeline, the jar that boils height, pressure device, feeding pre-heater, anti-disproportionation tower, top of the tower gas phase pipeline, reflux unit, the pipeline is adopted to the side, circulating device is adopted to the side, the cauldron is adopted the device, go anti-disproportionation ware, the export of silicon tetrachloride pipeline and the export of dichlorosilane pipeline respectively with the access connection of the jar that boils height, the export of the jar that boils height and pressure device's access connection, pressure device's export and feeding pre-heater's access connection, the access connection is adopted with anti-disproportionation tower's side in the export of feeding pre-heater, anti-disproportionation tower is equipped with top of the tower gas phase export, top of the tower gas phase export and top of the tower gas phase pipeline's access connection, top of the tower gas phase pipeline's export and reflux unit's access connection, reflux unit's export and anti-disproportionation tower's side are adopted the export and the access connection of side pipeline, the export of side of adopting the pipeline and side are adopted circulating device's access connection, anti-disproportionation tower still is equipped with the cauldron export, the export of tower and the access connection of adopting the cauldron device.
2. The anti-disproportionation device for preparing trichlorosilane according to claim 1, wherein: the pressure device comprises a feeding buffer tank and a feeding pump, wherein the outlet of the high-low boiling tank is connected with the inlet of the feeding buffer tank, the outlet of the feeding buffer tank is connected with the inlet of the feeding pump, and the outlet of the feeding pump is connected with the inlet of the feeding preheater.
3. The anti-disproportionation device for preparing trichlorosilane according to claim 1, wherein: the reflux device comprises a condenser, a reflux tank, a reflux pump, a reflux pipeline and a top extraction pipeline, wherein the outlet of the top gas phase pipeline is connected with the inlet of the condenser, the outlet of the condenser is connected with the inlet of the reflux tank, the outlet of the reflux tank is connected with the inlet of the reflux pump, the reflux pump is provided with a reflux outlet, the reflux outlet is connected with the inlet of the reflux pipeline, and the outlet of the reflux pipeline is connected with the reverse disproportionation tower;
the reflux pump is also provided with a top extraction outlet which is connected with an inlet of a top extraction pipeline, and an outlet of the top extraction pipeline is connected with an inlet of the anti-disproportionation device.
4. The anti-disproportionation device for preparing trichlorosilane according to claim 1, wherein: the side is adopted circulating device and is still adopted cooler, side and adopt pump, crude trichlorosilane spherical tank, rectifier unit feeding pre-heater including the side, the export of pipeline is adopted with the side and is adopted the access connection of cooler to the side, and the export of cooler is adopted with the side to the side and the access connection of pump is adopted to the side, and the side is adopted the pump and is equipped with first side and adopts the pump export, second side and adopts the pump export and the third side and adopts the pump export, and first side is adopted the pump export and is adopted the access connection of crude trichlorosilane spherical tank, and second side is adopted the pump export and is fed the access connection of buffer tank, and the pump export is adopted to the third side and is fed the access connection of pre-heater with the rectifier unit.
5. The anti-disproportionation device for preparing trichlorosilane according to claim 1, wherein: the kettle extraction device further comprises a kettle extraction pipeline and a kettle extraction pump, the kettle extraction outlet is connected with the inlet of the kettle extraction pipeline, the outlet of the kettle extraction pipeline is connected with the inlet of the kettle extraction pump, and the outlet of the kettle extraction pump is connected with the inlet of the feeding preheater.
6. The anti-disproportionation device for preparing trichlorosilane according to claim 1, wherein: the anti-disproportionation device for preparing trichlorosilane further comprises a mixed gas pipeline, and an outlet of the mixed gas pipeline is connected with an inlet of the rectification system.
7. The anti-disproportionation device for preparing trichlorosilane according to claim 1, wherein: the anti-disproportionation device for preparing trichlorosilane also comprises a silicon tetrachloride spherical tank, and an outlet of the silicon tetrachloride spherical tank is connected with an inlet of the high-low boiling tank.
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| CN202222624111.2U CN218261989U (en) | 2022-09-30 | 2022-09-30 | Anti-disproportionation device for preparing trichlorosilane |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116459741A (en) * | 2023-05-10 | 2023-07-21 | 内蒙古兴洋科技股份有限公司 | Continuous discharging device and method for generating high-purity silicon tetrachloride through silane disproportionation tower |
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2022
- 2022-09-30 CN CN202222624111.2U patent/CN218261989U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116459741A (en) * | 2023-05-10 | 2023-07-21 | 内蒙古兴洋科技股份有限公司 | Continuous discharging device and method for generating high-purity silicon tetrachloride through silane disproportionation tower |
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