CN218110307U - A kind of processing equipment for semiconductor - Google Patents

Abstract

The utility model discloses a processing equipment for semiconductor, comprises a workbench, the lower extreme of workstation is provided with dust removal mechanism, fixture includes the spacing groove of fixed connection in workstation upper end rear side, the interior middle part of spacing groove is provided with the two-way screw rod, the right side of two-way screw rod runs through the right side middle part of spacing groove and fixedly connected with changes the handle, the equal threaded connection in middle part both ends periphery of changing the handle has the stopper, the front end of stopper all is connected with the grip block through the gag lever post. A processing equipment for semiconductor, through setting up fixture in the upper end of workstation, realized can carrying out centre gripping effectively to the semiconductor material of equidimension not, set up dust removal mechanism through the lower extreme at the workstation, realized that the automatic dust that will grind the polishing and produce is collected, avoid needing artifical later stage to clear up the upper end of workstation, saved the cost of labor.

Description

A kind of processing equipment for semiconductor

technical field

The utility model relates to the technical field of semiconductor processing, in particular to a processing equipment for semiconductors.

Background technique

A semiconductor refers to a material whose conductivity is between a conductor and an insulator at room temperature. A semiconductor refers to a material with controllable conductivity ranging from an insulator to a conductor. Semiconductors are used in integrated circuits, consumer electronics, communication systems, and photovoltaics. Power generation, lighting, high-power power conversion and other fields have applications. During the processing of semiconductors, semiconductor materials need to be ground and polished. However, the existing semiconductor grinding and polishing machines are found to have the following two shortcomings during use. One is that semiconductor materials can only be placed in the corresponding grinding discs for grinding. The grinding and polishing machine cannot grind and polish semiconductor materials of different sizes. Second, during the grinding process, the grinding dust on the workbench cannot be cleaned in time, making Grinding and polishing dust remains on the workbench and needs to be cleaned manually.

Utility model content

The main purpose of the utility model is to provide a semiconductor processing equipment, which can effectively solve the problems in the background technology.

In order to achieve the above object, the technical scheme that the utility model takes is:

A processing equipment for semiconductors, comprising a workbench, a dust removal mechanism is arranged at the lower end of the workbench, a clamping mechanism is arranged at the rear of the upper end of the workbench, and a gantry frame is arranged at the middle of the upper end of the workbench, The lower end of the gantry is fixedly connected with a driving mechanism, the driving end of the lower end of the driving mechanism is fixedly connected with a hydraulic rod, the lower driving end of the hydraulic rod is fixedly connected with a grinding machine, and the clamping mechanism includes a working The limit groove on the rear side of the upper end of the table, the inner middle of the limit groove is provided with a two-way screw, the two ends of the two-way screw are connected to the middle of the two sides of the limit groove by rotation, the right side of the two-way screw The middle part on the right side of the limiting groove is fixedly connected with a turning handle, the outer circumference of both ends of the middle part of the turning handle is screwed with limiting blocks, and the front ends of the limiting blocks are connected with clamping blocks through limiting rods.

Preferably, the outer circumference of the limiting block is slidably connected to both sides of the inner peripheral middle of the limiting groove, and the lower end of the clamping block is slidably connected to both sides of the upper middle of the workbench.

Preferably, the drive mechanism includes an inner top drive slot fixedly connected to the gantry, a threaded rod is provided in the inner middle of the drive slot, and both ends of the threaded rod are rotatably connected to the drive slot through a second limit bearing In the middle of the two inner sides of the threaded rod, the outer periphery of the middle part of the threaded rod is screwed with a driving block, and the right end of the threaded rod is fixedly connected to the left end of the driving end of the motor.

Preferably, the left end of the motor is fixedly connected to the upper right end of the gantry frame, and the outer periphery of the driving block is slidably connected to the inside of the driving groove.

Preferably, the dust removal mechanism includes an ash storage bin fixedly connected to the lower end of the workbench, an ash storage drawer is slidably connected to the inner and lower parts of the ash storage bin, and a vacuum cleaner is provided at the middle part of the inner upper end of the ash storage bin. The front end of the dust inlet is fixedly connected with a dust suction pipe. The front end of the dust suction pipe runs through the upper middle of the front side of the dust storage bin and communicates with the inside of the dust collection tank. The lower end of the dust collection tank is fixedly connected to the workbench. upper front side.

Preferably, the lower end of the ash storage bin is fixedly connected to the upper end of the base, and universal wheels are fixedly installed at four corners of the lower end of the base.

Compared with the prior art, the utility model has the following beneficial effects:

1. Place the semiconductor material in the middle of the upper end of the workbench, turn the handle, drive the two-way screw to rotate, drive the limit block inside the limit groove to approach each other, and then drive the clamping block to approach each other through the limit rod, and carry out the semiconductor material Clamping, by setting a clamping mechanism at the upper end of the workbench, it is possible to effectively clamp semiconductor materials of different sizes.

2. Start the vacuum cleaner inside the ash storage bin, suck the dust into the ash storage drawer in the ash storage bin through the dust suction pipe and dust collection tank for storage, and set the dust removal mechanism at the lower end of the workbench to realize automatic grinding and polishing. Collect the dust, avoid the need to manually clean the upper end of the workbench, and save labor costs.

Description of drawings

Fig. 1 is a schematic diagram of a three-dimensional structure of a semiconductor processing equipment of the present invention;

Fig. 2 is a partial sectional view of the back structure of a clamping mechanism for semiconductor processing equipment of the present invention;

Fig. 3 is a schematic diagram of a side-sectional three-dimensional structure of a dust removal mechanism used in semiconductor processing equipment of the present invention;

Fig. 4 is a schematic perspective view of a driving mechanism of a semiconductor processing equipment according to the present invention.

In the figure: 1, workbench; 2, dust removal mechanism; 201, ash storage bin; 202, ash storage drawer; 203, vacuum cleaner; 204, dust suction pipe; 205, dust collecting tank; Position slot; 302, the second limit bearing; 303, two-way screw; 304, turn handle; 305, limit block; 306, clamping block; 4, gantry; 5, drive mechanism; 501, drive slot; 502, 503, threaded rod; 504, driving block; 505, electric motor; 6, hydraulic rod; 7, grinder; 8, base; 9, universal wheel.

detailed description

In order to make the technical means, creative features, goals and effects achieved by the utility model easy to understand, the utility model will be further elaborated below in conjunction with specific embodiments.

As shown in Figures 1-4, a semiconductor processing equipment includes a workbench 1, a dust removal mechanism 2 is arranged at the lower end of the workbench 1, and a clamping mechanism 3 is arranged at the rear of the upper end of the workbench 1, and the workbench 1 A gantry 4 is arranged in the middle of the upper end of the gantry 4, the lower end of the gantry 4 is fixedly connected with a driving mechanism 5, the driving end of the lower end of the driving mechanism 5 is fixedly connected with a hydraulic rod 6, and the lower driving end of the hydraulic rod 6 is fixedly connected with a grinding machine 7. The holding mechanism 3 includes a limit groove 301 fixedly connected to the rear side of the upper end of the workbench 1. The inner middle of the limit groove 301 is provided with a two-way screw 303, and the two ends of the two-way screw 303 are connected in the limit groove 301 through 302 rotation. In the middle part of both sides, the right side of the two-way screw rod 303 runs through the right side middle part of the limit groove 301 and is fixedly connected with a turning handle 304, and the outer circumferences of both ends of the middle part of the turning handle 304 are threaded with a limit block 305, and the front ends of the limit block 305 are A clamping block 306 is connected through a limit rod.

In this embodiment, the outer circumference of the limiting block 305 is slidably connected to both sides of the inner peripheral middle of the limiting groove 301, the lower end of the clamping block 306 is slidably connected to both sides of the upper middle of the workbench 1, and the driving mechanism 5 includes a fixed Connected to the inner top driving groove 501 of the gantry frame 4, the inner middle part of the driving groove 501 is provided with a threaded rod 503, and the two ends of the threaded rod 503 are connected to the middle parts of the inner two sides of the driving groove 501 through the second limit bearing 502 for rotation, The outer circumference of the middle part of the threaded rod 503 is threadedly connected with a drive block 504, the right end of the threaded rod 503 is fixedly connected to the left end driving end of the motor 505, the left end of the motor 505 is fixedly connected to the right upper end of the gantry 4, and the outer periphery of the drive block 504 is slidably connected Inside the drive slot 501 .

Specifically, the semiconductor material is placed in the middle of the upper end of the workbench 1, the turning handle 304 is turned to drive the two-way screw 303 to rotate, and the limit block 305 inside the limit groove 301 is driven to approach each other, and then the clamping block 306 is driven by the limit rod. Close to each other, the semiconductor material is clamped. By setting the clamping mechanism 3 on the upper end of the workbench 1, semiconductor materials of different sizes can be effectively clamped, the grinding machine 7 is started, and the hydraulic rod 6 is started. The semiconductor material is ground and polished, and the motor 505 is started to drive the threaded rod 503 to rotate, and then the driving block 504 is driven to slide inside the driving groove 501, and then the hydraulic rod 6 and the grinding machine 7 are driven to move, and different positions of the semiconductor material are ground and polished .

In this embodiment, the dust removal mechanism 2 includes an ash storage bin 201 fixedly connected to the lower end of the workbench 1. The ash storage drawer 202 is slidably connected to the inner and lower parts of the ash storage bin 201, and a dust collector 203 is provided in the middle of the inner upper end of the ash storage bin 201. The front end dust inlet of the vacuum cleaner 203 is fixedly connected with a dust suction pipe 204, and the front end of the dust suction pipe 204 runs through the upper middle part of the front side of the dust storage bin 201 and communicates with the inside of the dust collection tank 205, and the lower end of the dust collection tank 205 is fixedly connected to the On the front side of the upper end of the workbench 1, the lower end of the ash storage bin 201 is fixedly connected to the upper end of the base 8, and the four corners of the lower end of the base 8 are fixedly equipped with universal wheels 9.

Specifically, start the vacuum cleaner 203 inside the ash storage bin 201, suck the dust into the ash storage drawer 202 in the ash storage bin 201 through the dust suction pipe 204 and the dust collection tank 205 for storage, and set the dust removal mechanism at the lower end of the workbench 1 2. Automatically collect the dust generated by grinding and polishing, avoiding the need to manually clean the upper end of the workbench 1 later, and saving labor costs.

working principle:

First, place the semiconductor material on the upper middle of the workbench 1, turn the handle 304, drive the two-way screw 303 to rotate, drive the limit block 305 inside the limit groove 301 to approach each other, and then drive the clamping block 306 to move towards each other through the limit rod. Approaching to clamp the semiconductor material, by setting the clamping mechanism 3 on the upper end of the workbench 1, it is possible to effectively clamp semiconductor materials of different sizes, start the grinder 7, and start the hydraulic rod 6, and the semi-conductor The material is ground and polished, and the motor 505 is started to drive the threaded rod 503 to rotate, and then drive the drive block 504 to slide inside the drive groove 501, and then drive the hydraulic rod 6 and the grinder 7 to move, and grind and polish different positions of the semiconductor material. And start the vacuum cleaner 203 inside the ash storage bin 201 at the same time, and the dust is sucked into the ash storage drawer 202 in the ash storage bin 201 by the dust suction pipe 204 and the dust collection tank 205 for storage. , to realize the automatic collection of dust generated by grinding and polishing, avoiding the need to manually clean the upper end of the workbench 1 later, and saving labor costs.

The basic principles and main features of the present utility model and the advantages of the present utility model have been shown and described above. Those skilled in the art should understand that the utility model is not limited by the above-mentioned embodiments. The above-mentioned embodiments and descriptions only illustrate the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model The new model also has various changes and improvements, and these changes and improvements all fall within the scope of the claimed utility model. The scope of protection required by the utility model is defined by the appended claims and their equivalents.

Claims (6)

1. A processing apparatus for semiconductors, comprising a work table (1), characterized in that: the lower extreme of workstation (1) is provided with dust removal mechanism (2), the upper end rear side of workstation (1) is provided with fixture (3), the upper end middle part of workstation (1) is provided with portal frame (4), the lower extreme fixedly connected with actuating mechanism (5) of portal frame (4), the lower extreme drive end fixedly connected with hydraulic stem (6) of actuating mechanism (5), the lower extreme drive end fixedly connected with of hydraulic stem (6) grinds machine (7), fixture (3) are including fixed connection spacing groove (301) at workstation (1) upper end rear side, the interior middle part of spacing groove (301) is provided with two-way screw rod (303), the both ends of two-way screw rod (303) all rotate through (302) and connect in the interior both sides middle part of spacing groove (301), the right side of two-way screw rod (303) runs through the right side middle part and fixedly connected with commentaries on classics handle (304) of spacing groove (301), the equal threaded connection in both ends periphery of commentaries on classics handle (304) has stopper (305), the front end of stopper (305) all is connected with clamping block (306) through the spacing rod.

2. The processing apparatus for semiconductors according to claim 1, wherein: the equal sliding connection in the inner periphery middle part both sides in spacing groove (301) of periphery of stopper (305), the equal sliding connection in the upper end middle part both sides of workstation (1) of lower extreme of grip block (306).

3. A processing apparatus for semiconductors as recited in claim 1, wherein: actuating mechanism (5) are including fixed connection at the interior top drive groove (501) of portal frame (4), the interior middle part in drive groove (501) is provided with threaded rod (503), the both ends of threaded rod (503) are all rotated through second limit bearing (502) and are connected in the interior both sides middle part in drive groove (501), the middle part periphery threaded connection of threaded rod (503) has drive block (504), the right-hand member fixed connection of threaded rod (503) is at the left end drive end of motor (505).

4. A processing apparatus for semiconductors as recited in claim 3, wherein: the left end of the motor (505) is fixedly connected to the upper end of the right side of the portal frame (4), and the periphery of the driving block (504) is connected to the inside of the driving groove (501) in a sliding mode.

5. A processing apparatus for semiconductors as recited in claim 1, wherein: dust removal mechanism (2) are including dust storage bin (201) of fixed connection at workstation (1) lower extreme, the interior lower part sliding connection in dust storage bin (201) has dust storage drawer (202), the interior upper end middle part in dust storage bin (201) is provided with dust catcher (203), dust inlet fixedly connected with dust absorption pipe (204) are advanced to the front end of dust catcher (203), the front end of dust absorption pipe (204) run through the front side upper end middle part in dust storage bin (201) and with the inside intercommunication of dust collecting tank (205), the lower extreme fixed connection of dust collecting tank (205) is in the upper end front side of workstation (1).

6. A processing apparatus for semiconductors as recited in claim 5, wherein: the lower extreme fixed connection in the upper end of base (8) in ash storage storehouse (201), the equal fixed mounting in lower extreme four corners of base (8) has universal wheel (9).

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