CN217955838U - Automatic lifting and rotating device for wafer processing - Google Patents

Abstract

The utility model discloses an automatic lifting and rotating device for wafer processing, which comprises a base, a feeding mechanism, a fixing mechanism, a lifting and rotating mechanism, a processing mechanism and a transfer mechanism. There is a loading platform, and a turntable is arranged in the through hole in the middle of the loading platform; the fixing mechanism includes a first air cylinder installed in a ring on the turntable, and the piston rod of the first air cylinder is equipped with an L-shaped clamping block. A buffer pad is installed in the L-shaped clamp block. The structure design of the utility model is scientific and reasonable, and the fixing mechanism is composed of the rotating disk, the first cylinder, the L-shaped clamping block and other structures used in conjunction with it, and can quickly clamp and fix the workpiece transferred to the loading table through the conveyor belt under its cooperation. , the height of the workpiece can be automatically adjusted, and at the same time, the rotation angle of the fixing mechanism can be adjusted according to the demand during the processing, so as to meet different processing requirements.

Description

An automatic lifting and rotating device for wafer processing

technical field

The utility model relates to the technical field of wafer processing equipment, in particular to an automatic lifting and rotating device for wafer processing.

Background technique

Wafer refers to the silicon wafer used to make silicon semiconductor circuits. After the silicon crystal rod is ground, polished and sliced, it forms a silicon wafer, that is, a wafer. At present, the wafer processing alignment devices on the market have the following problems in the application process: the traditional wafer processing alignment devices are mostly adjusted by the staff when they are used, and the operation is time-consuming and laborious. The lifting and rotation adjustment of the workpiece The process is relatively complicated, and when the workpiece is rotating, due to the lack of an angle comparison mechanism, the staff cannot accurately adjust the rotation angle, so it has certain disadvantages. For this reason, we propose an automatic lifting and rotating device for wafer processing.

Utility model content

The purpose of this utility model is to provide an automatic lifting and rotating device for wafer processing, so as to solve the problems raised in the above-mentioned background technology.

In order to achieve the above purpose, the utility model provides the following technical solutions: an automatic lifting and rotating device for wafer processing, including a base, a feeding mechanism, a fixing mechanism, a lifting and rotating mechanism, a processing mechanism and a transfer mechanism, the A loading platform is arranged in the groove on the top of the base, and a turntable is arranged in the through hole in the middle of the loading platform;

The fixing mechanism includes a first cylinder installed in a ring on the turntable, the piston rod of the first cylinder is equipped with an L-shaped clamp block, and a buffer pad is installed in the L-shaped clamp block;

The lifting and rotating mechanism includes a second cylinder installed at the bottom of the turntable, the bottom of the second cylinder is connected with a rotating motor, and the bottom of the rotating motor is connected with a third cylinder installed at the bottom of the base through a positioning frame.

Preferably, the feeding mechanism includes a conveyor belt installed in the protective cover, and an inclined material guide plate is provided at the tail end of the conveyor belt.

Preferably, a suction cup is provided in the middle of the turntable.

Preferably, the processing mechanism includes a support frame installed on the top of the base, a moving rod is slidably installed inside the slide rail on the side of the support frame, and a processing part is installed at the bottom of the moving rod through an adapter plate, and the moving rod The upper side is connected with the fourth cylinder.

Preferably, the transfer mechanism includes a fifth air cylinder installed in the support frame, the end of the fifth air cylinder is connected to the housing, and a fixed clamp block and a movable clamp block are installed on the side of the housing, and the movable clamp block passes through The sliding block is connected with the sixth cylinder installed in the housing.

Preferably, the upper side of the loading table is annularly distributed with scale marks along the center of the circle.

Compared with the prior art, the beneficial effects of the utility model are:

1. This kind of automatic lifting and rotating device for wafer processing has a simple and reasonable structural design. The fixed mechanism is composed of a turntable, the first cylinder, and an L-shaped clamping block for use in conjunction with it. With its cooperation, it can quickly move through The conveyor belt is transferred to the workpiece on the loading table for clamping and fixing, and due to the symmetrical arrangement of multiple L-shaped clamping blocks, the wafer workpiece can be clamped and fixed at the center of the turntable evenly and effectively, and the workpiece can be clamped under the action of the suction cup Stable adsorption is fixed on the top of the turntable, which further improves the stability of the processing process;

2. By setting the second cylinder, the rotating motor and the third cylinder together, the height of the workpiece can be automatically adjusted, and at the same time, the rotation angle of the fixing mechanism can be adjusted according to the demand during the processing, so as to meet different processing requirements;

3. By setting the fifth cylinder, housing, fixed clamping block, moving clamping block, sliding block and sixth cylinder and other structures to cooperate with each other, the wafer mechanism can be clamped by the transfer mechanism composed of the above-mentioned mechanisms after the wafer processing is completed. Support and automatic transfer ensures the smoothness of the processing process and further improves the processing efficiency.

Description of drawings

Fig. 1 is the structural representation of the utility model;

Fig. 2 is a schematic diagram of the top structure of the utility model turntable;

Fig. 3 is the structural schematic diagram of L-shaped clamping block of the utility model;

Fig. 4 is a structural schematic diagram of the transfer mechanism of the present invention.

In the figure: 1 base, 11 support column, 12 protective cover, 13 conveyor belt, 14 material guide plate, 15 material loading platform, 16 turntable, 17 suction cup, 18 first cylinder, 19L type clamp block, 2 buffer pad, 21 first Two cylinders, 22 rotating motors, 23 third cylinders, 24 positioning frames, 25 support frames, 26 slide rails, 27 moving rods, 28 adapter plates, 29 processed parts, 3 fourth cylinders, 31 fifth cylinders, 32 shells , 33 fixed clips, 34 movable clips, 35 sliding blocks, 36 sixth cylinders, 4 scale marks.

detailed description

The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. example. Based on the embodiments of the present utility model, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.

Example:

Please refer to Figures 1-4. The utility model provides a technical solution: an automatic lifting and rotating device for wafer processing, including a base 1, a feeding mechanism, a fixing mechanism, a lifting and rotating mechanism, a processing mechanism and a transfer mechanism. Mechanism, the groove on the top of the base 1 is provided with a loading table 15, the middle of the loading table 15 is provided with a turntable 16 in the through hole, the middle of the turntable 16 is provided with a suction cup 17, and the suction cup 17 is an electric suction cup. Controlled by an electric control switch, the upper side of the loading table 15 is distributed with a scale line 4 along the center of the circle. By setting the ring scale line distributed inwardly on the loading table 15, when the angle of the turntable 16 is adjusted by the rotating motor 22 , the staff can easily understand the rotation angle of the turntable 16;

The conveying mechanism includes a conveyor belt 13 installed in the protective cover 12, and the tail end of the conveyor belt 13 is provided with an inclined material guide plate 14, and the workpieces transported to the tail through the conveyor belt 13 automatically fall to the carrier through the slope of the material guide plate 14. On the turntable 16 in the middle part of the table 15.

Described fixing mechanism comprises the first air cylinder 18 that is annularly installed on the turntable 16, and the piston rod of described first air cylinder 18 is equipped with L-shaped clamp block 19, and buffer pad 2 is installed in described L-shaped clamp block 19, buffers Pad 2 can be made of rubber or silica gel to enhance friction and synchronous buffer protection;

After the workpiece moves onto the turntable 16 through the material guide plate 14, the bottom of the workpiece contacts the bottom plate of the L-shaped clamp block 19. At this time, the first cylinder 18 is started synchronously, and the piston rod of the first cylinder 18 stretches out and pushes the L-shaped clamp. The block 19 is automatically approached, so that the workpiece is fixed by the side plates of a plurality of L-shaped clamp blocks 19, and the fixing mechanism is formed by setting the rotating disk 16, the first cylinder 18, the L-shaped clamp block 19 and other structures that are used in conjunction with it. Quickly clamp and fix the workpiece transferred to the loading table 15 through the conveyor belt 13, and due to the symmetrical arrangement of multiple L-shaped clamping blocks 19, the wafer workpiece can be clamped and fixed at the center of the turntable 16 evenly and effectively, and at the same time Under the action of the suction cup 17, the workpiece can be stably adsorbed and fixed on the top of the turntable 16, which further improves the stability of the processing process.

The lifting and rotating mechanism includes a second cylinder 21 installed at the bottom of the turntable 16, the bottom of the second cylinder 21 is connected with a rotating motor 22, and the bottom of the rotating motor 22 is connected with a second cylinder mounted on the bottom of the base 1 through a positioning frame 24. Three cylinders 23, when it is necessary to adjust the height of the turntable 16, the user starts the second cylinder 21, the piston rod of the second cylinder 21 drives the turntable 16 connected to it to move up and down, and then the second cylinder 21 can be adjusted by the rotating motor 22. and the turntable 16 to adjust the angle, at this time, if the height of the rotating motor 22 needs to be adjusted, it can be adjusted through the third cylinder 23, and the second cylinder 21, the rotating motor 22 and the third cylinder 23 can be used together to automatically adjust the height of the rotating motor 22. The height of the workpiece can be adjusted, and at the same time, the rotation angle of the fixing mechanism can be adjusted according to the requirements during the processing, so as to meet different processing requirements.

The processing mechanism includes a support frame 25 installed on the top of the base 1, a moving rod 27 is slidably installed inside the slide rail 26 on the side of the support frame 25, and a processing part 29 is installed on the bottom of the moving rod 27 through an adapter plate 28 , the workpiece 29 can be a grinding mechanism with a driving mechanism, the upper side of the moving rod 27 is connected to the fourth cylinder 3, and the fourth cylinder 3 is used to adjust the lateral position of the workpiece 29 during operation so as to effectively process the workpiece .

The transfer mechanism includes a fifth cylinder 31 installed in the support frame 25, the end of the fifth cylinder 31 is connected to a housing 32, and the side of the housing 32 is equipped with a fixed clamp block 33 and a movable clamp block 34. The movable clamping block 34 is connected with the sixth cylinder 36 installed in the casing 32 through the sliding block 35. After the processing is completed, the first cylinder 18 drives the L-shaped clamping block 19 to reset, and then the staff removes the workpiece and puts it into the fixed clamp. In the block 33 and the movable clamp block 34, the sixth cylinder 36 is started, and the sixth cylinder 36 drives the movable clamp block 34 to move in a direction close to the fixed clamp block 33 through the sliding block 35, so that the fixed clamp block 33 and the movable clamp block 34 will The workpiece is clamped, and then the casing 32 and the workpiece are laterally adjusted by the fifth cylinder 31, and the fifth cylinder 31, the casing 32, the fixed clamp block 33, the movable clamp block 34, the sliding block 35 and the sixth cylinder 36 are set. When the structure is used together, the wafer mechanism can be clamped and automatically transferred by the transfer mechanism composed of the above-mentioned mechanisms after the wafer processing is completed, which ensures the smoothness of the processing process and further improves the processing efficiency.

This kind of automatic lifting and rotating device for wafer processing, in specific use, firstly, the workpiece transported to the tail through the conveyor belt 13 automatically falls to the turntable 16 in the middle of the loading table 15 through the inclined surface of the material guide plate 14, and the workpiece The bottom is in contact with the bottom plate of the L-shaped clamp block 19. At this time, the first cylinder 18 is started synchronously. The plate fixes the workpiece. When the height of the turntable 16 needs to be adjusted, the user starts the second cylinder 21, and the piston rod of the second cylinder 21 drives the turntable 16 connected to it to move up and down, and then the second cylinder can be adjusted by the rotating motor 22. 21 and the turntable 16 to adjust the angle, and then adjust the lateral position of the workpiece 29 back and forth through the fourth cylinder 3 so as to effectively process the workpiece. The workpiece is removed and put into the fixed clamp block 33 and the movable clamp block 34, and the sixth cylinder 36 is started, and the sixth cylinder 36 drives the movable clamp block 34 to move towards the direction close to the fixed clamp block 33 through the sliding block 35, thereby passing through the fixed clamp block 33 and the movable clamping block 34 clamp the workpiece, and then the housing 32 and the workpiece are laterally adjusted through the fifth cylinder 31 to move the workpiece to a suitable position.

Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes and modifications can be made to these embodiments without departing from the principle and spirit of the present invention , replacements and modifications, the scope of the present utility model is defined by the appended claims and their equivalents.

Claims (6)

1. An automatic lifting and rotating device for wafer processing, comprising a base (1), a feeding mechanism, a fixing mechanism, a lifting and rotating mechanism, a processing mechanism and a transfer mechanism, characterized in that: A loading platform (15) is arranged in the groove on the top of the base (1), and a turntable (16) is arranged in a through hole in the middle of the loading platform (15); Described fixing mechanism comprises the first air cylinder (18) that is installed on the rotating disk (16) in the form of ring, and the piston rod of described first air cylinder (18) is equipped with L-shaped clamp block (19), and described L-shaped clamp block ( 19) A buffer pad (2) is installed inside; The lifting and rotating mechanism includes a second cylinder (21) installed at the bottom of the turntable (16), the bottom of the second cylinder (21) is connected with a rotating motor (22), and the bottom of the rotating motor (22) is connected with a positioning The frame (24) is installed on the third cylinder (23) at the base (1) bottom. 2. An automatic lifting and rotating device for wafer processing according to claim 1, characterized in that: the feeding mechanism includes a conveyor belt (13) installed in the protective cover (12), and the conveyor belt (13) The tail end is provided with an inclined material guide plate (14). 3. An automatic lifting and rotating device for wafer processing according to claim 1, characterized in that: a suction cup (17) is provided in the middle of the turntable (16). 4. An automatic lifting and rotating device for wafer processing according to claim 1, characterized in that: the processing mechanism includes a support frame (25) installed on the top of the base (1), and the support The slide rail (26) on the side of the frame (25) is slidingly installed with a moving bar (27), and the bottom of the moving bar (27) is equipped with a processing part (29) through an adapter plate (28), and the moving bar (27) ) The upper side is connected to the fourth cylinder (3). 5. An automatic lifting and rotating device for wafer processing according to claim 1, characterized in that: the transfer mechanism includes a fifth cylinder (31) installed in the support frame (25), the The end of the fifth cylinder (31) is connected to the housing (32), and the side of the housing (32) is equipped with a fixed clamp (33) and a movable clamp (34), and the movable clamp (34) passes through the sliding block (35) is connected with the sixth air cylinder (36) installed in the housing (32). 6. An automatic lifting and rotating device for wafer processing according to claim 1, characterized in that: the upper side of the loading table (15) is annularly distributed with scale marks (4) along the center of the circle.

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