CN217903677U

CN217903677U - Pseudo focus positioning device of excimer laser

Info

Publication number: CN217903677U
Application number: CN202222177300.XU
Authority: CN
Inventors: 苏国兵; 魏晓马
Original assignee: Beijing RSlaser Opto Electronics Technology Co Ltd
Current assignee: Beijing RSlaser Opto Electronics Technology Co Ltd
Priority date: 2022-08-18
Filing date: 2022-08-18
Publication date: 2022-11-25
Anticipated expiration: 2032-08-18

Abstract

The utility model discloses an excimer laser virtual focus positioner, the device includes: the laser device comprises an attenuation component, a focusing lens and a receiver in sequence along the transmission direction of laser emitted by an excimer laser, wherein the laser emitted by the excimer laser is respectively attenuated by the attenuation component and is captured by the receiver after being imaged by the focusing lens, and the receiver is close to or far away from the focusing lens along the direction of a laser optical axis so as to determine the virtual focus position of the excimer laser according to imaging parameters of the receiver. The utility model discloses a device can be fixed a position the virtual focus position of laser instrument accurately under the nitrogen gas environment.

Description

Pseudo focus positioning device of excimer laser

Technical Field

The utility model belongs to the technical field of optical device, especially, relate to an excimer laser virtual focus positioner.

Background

The beam of the excimer laser contains a certain divergence angle, and the internal optical path of the laser is very long, and if the laser beam is focused on an internal optical element, the optical energy density on the optical element can be high, and the optical element can be damaged. Therefore, in order to avoid the laser beam from being focused on the optical element, the virtual focus position of the laser needs to be accurately measured, so as to improve the protection of the optical element and prolong the service life of the optical element.

However, the main way to position the virtual focus of the excimer laser pulse beam is to adjust the position of the optical element by the subjective work experience of the debugger. The working experience of a debugger, the personal technical quality, the working environment at that time and the subjective judgment to finish the light path adjustment all become the working error-prone points of the accurate positioning of the virtual focus of the excimer laser. And under the interference of human factors, the virtual focus position of the laser beam needs to be repeatedly debugged, but the whole work needs to be carried out in a nitrogen sealing environment, and the work is complicated and the positioning is inaccurate. Therefore, in order to overcome the technical defects existing in the prior art, it is necessary to provide a laser virtual focus precise positioning device which has a simple and reasonable structure, can realize precise automatic adjustment and positioning, and is fast and convenient to operate.

SUMMERY OF THE UTILITY MODEL

For solving the technical problem who mentions in the background art, the utility model provides a pair of virtual focus positioner of excimer laser to solve the difficult problem of location in the virtual focus position of excimer laser among the prior art.

In order to achieve the above object, the utility model discloses a virtual focus positioner of excimer laser's concrete technical scheme as follows:

the utility model discloses an aspect provides an excimer laser virtual focus positioner, include: the laser device comprises an attenuation component, a focusing lens and a receiver in sequence along the transmission direction of laser emitted by an excimer laser, wherein the laser emitted by the excimer laser is respectively attenuated by the attenuation component and is captured by the receiver after being imaged by the focusing lens, and the receiver is close to or far away from the focusing lens along the direction of a laser optical axis so as to determine the virtual focus position of the excimer laser according to imaging parameters of the receiver.

Further, the attenuation component comprises a rotatable high-reflection mirror, and the attenuation change of the light penetrating through the high-reflection mirror is controlled by adjusting the angle of the high-reflection mirror.

Further, the attenuation component also comprises a rotating bracket, the high-reflection mirror is mounted on the rotating bracket, and the angle of the high-reflection mirror in the optical path is adjusted through the rotation of the rotating bracket.

Further, the attenuation component is sealed in a first box body, the focusing lens and the receiver are sealed in a second box body, and the first box body and the second box body are hermetically connected through a light guide pipe.

Furthermore, the device also comprises an upper computer, wherein the upper computer analyzes the energy of the light beam received by the receiver and respectively generates a rotation instruction of the attenuation component and a movement instruction of the receiver according to an analysis result.

Further, the device also comprises a rotary controller, wherein the rotary controller is arranged at the bottom of the first box body, and the rotary controller receives a rotary instruction of the upper computer and controls the attenuation assembly to rotate and adjust.

Further, the device still includes the motion control ware, the motion control ware sets up the bottom of second box, the motion control ware receives the movement instruction of host computer, control the receiver is close to or is kept away from along laser optical axis direction focusing lens.

Further, the receiver comprises a CCD camera and a moving platform, the CCD camera is movably arranged on the moving platform, and the moving controller controls the CCD camera to move on the moving platform according to the moving instruction.

Virtual focus positioner of excimer laser, through the removal determination light beam minimum position of control receiver, and then confirm the virtual focus position of laser, the removal of light beam minimum position accessible receiver carries out the accurate positioning, avoids the human factor, fixes a position more accurately.

Furthermore, the utility model discloses an excimer laser virtual focus positioner, through sealing the subassembly in the box of difference, reduced detection device's volume to having solved focusing lens, high anti-mirror and having necessarily kept testing problem in the nitrogen gas environment all the time, need not repeatedly uncap the adjustment light path, having practiced thrift the nitrogen gas resource, protected optical surfaces such as focusing lens, high anti-mirror, prevent to cause the damage of focusing lens and high anti-mirror because of air pollution.

Drawings

Fig. 1 is a schematic structural diagram of a virtual focus positioning device of an excimer laser according to an embodiment of the present invention;

fig. 2 is an external structural schematic view of the excimer laser virtual focus positioning device according to the embodiment of the present invention enclosed in a box;

fig. 3 is a detailed structural diagram of the excimer laser virtual focus positioning device sealed in the box according to the embodiment of the present invention;

fig. 4 is a schematic structural diagram of a first box according to an embodiment of the present invention;

fig. 5 is a schematic structural diagram of a second box according to an embodiment of the present invention;

fig. 6 is a flowchart of a method for positioning a virtual focus of an excimer laser according to an embodiment of the present invention.

Detailed Description

The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. Furthermore, the technical features mentioned in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

The utility model discloses excimer laser virtual focus positioner can adjust the beam energy that the receiver received through adjusting the decay subassembly to make this device can the multiple receiver of adaptation. In addition, the determination of the virtual focus position of the excimer laser is achieved by position adjustment between the focusing lens and the receiver.

The first embodiment is as follows:

fig. 1 schematically shows a schematic structural diagram of an excimer laser virtual focus positioning device. As shown in fig. 1, the excimer laser virtual focus positioning apparatus of this embodiment includes an attenuation module 10, a focusing lens 20 and a receiver 30 sequentially along a transmission direction of laser light emitted by the excimer laser, the laser light emitted by the excimer laser is respectively attenuated by the attenuation module 10 and imaged by the focusing lens 20 and then captured by the receiver, and the receiver is close to or far from the focusing lens along an optical axis direction of the laser light, so as to determine a virtual focus position of the excimer laser according to imaging parameters of the receiver.

Specifically, by adjusting the energy of the output laser of the molecular laser through the attenuation component 10, the output laser can be received by a receiver and then clearly imaged, and the receiver cannot be damaged due to the fact that the energy of the beam is too high.

In the embodiment, when the high-reflection mirror is over against the light beam, the reflectivity of the light beam is higher, so that the receiver can be effectively protected; after the high-reflection mirror deflects for a certain angle, the reflectivity of the light beam is lower, and the imaging of the receiver is clearer. By adjusting the angle of the high-reflection mirror, the receiver can be effectively protected while accurate measurement can be realized.

The laser passing through the attenuation component 10 is imaged by the focusing lens 20, and the receiver moves through the position, so that the minimum position of the imaged laser beam is measured, namely the minimum position of the beam is accurately positioned in the moving process, and the virtual focus position of the laser is determined.

In a further embodiment, since testing needs to be performed in a nitrogen environment, the attenuation module 10 is sealed in a first housing, and the focusing lens 20 and receiver 30 are enclosed in a second housing.

Fig. 2 is the outer structure schematic diagram of the excimer laser virtual focus positioner sealed in the box of the embodiment of the utility model, fig. 3 is the utility model discloses a detailed structure diagram of excimer laser virtual focus positioner sealed in the box, as shown in fig. 2 and 3, on first box 1, be provided with light inlet window piece 11 for the laser that the input excimer laser sent, and be provided with first nitrogen gas air inlet 12 and second nitrogen gas outlet 13 at the side of first box 1. On the second box 2, be provided with second nitrogen gas inlet 21 and second nitrogen gas outlet 22 to first box 1 and second box 2 pass through light pipe 3 intercommunication, and light pipe 3 both has been arranged in nitrogen gas intercommunication in first box 1 and the second box 2, is used for as the light passageway again, transmits the emergent light of first box 1 to second box 2. The measurement under the nitrogen atmosphere can be realized by sealing the respective components of the present embodiment with the first casing 1 and the second casing 2. Meanwhile, when each component is used for measuring different excimer lasers, the optical paths of the components are different, and the optical paths are longer, so that the two boxes are arranged, the size of the device can be reduced, and meanwhile, in the maintenance process, the two boxes are respectively maintained, and the waste of nitrogen can be avoided.

In another embodiment, as shown in fig. 1, the excimer laser virtual focus positioning apparatus further includes an upper computer 40, and the upper computer 40 analyzes the energy of the light beam received by the receiver 30 and generates a rotation instruction of the attenuation module and a movement instruction of the receiver according to the analysis result, so as to adjust the attenuation module 10 and the receiver 30.

The second embodiment:

on the basis of the first embodiment, the selection of the attenuation module, the focusing lens and the receiver and the position arrangement of each module are specifically described.

As shown in fig. 3-5, the attenuation module 10 includes a rotatable high-reflection mirror 41, and the variation of the attenuation of the light transmitted through the high-reflection mirror 41 is controlled by adjusting the angle of the high-reflection mirror 41.

Specifically, in the first casing 1, the high-reflection mirror 41 is fixed on the rotating bracket 42, and the rotating controller 52 is provided on the bottom 51 of the first casing 1, and the rotating controller 52 drives the rotating bracket to rotate to adjust the angle of the high-reflection mirror 41 in the optical path after receiving the rotating command from the upper computer 40.

The laser beam of excimer laser outgoing gets into first box 1 through light inlet window piece 11, in first box 1, drives the rotation of runing rest through rotation controller 52, adjusts the angle of high reflection mirror 41 to adjust the contained angle that laser beam incided high reflection mirror 41, the light beam has different transmittances in the angle of difference, realizes that the decay of laser energy changes and adjusts.

Further, the laser light emitted from the first housing 1 is incident on the second housing 2 through the light guide 3, and the laser light is incident on the focusing lens 20 in the second housing 2 to form an image. As shown in fig. 5, the focusing lens 20 is fixed to the bottom of the second casing 2 by a lens holder 61.

The receiver 30 may use a CCD camera, as shown in fig. 4, the receiver 30 specifically includes a CCD camera 7 and a moving platform 82, the CCD camera 7 is fixed on the moving platform 82 through a base 81, and the moving of the moving platform 82 is controlled by a moving controller 83 to adjust the distance between the CCD camera 7 and the focusing lens 20.

Specifically, the movement controller 83 is disposed at the bottom of the second box 2, and after receiving the movement instruction of the upper computer 40, the movement controller 83 controls the moving platform 81 to approach or separate from the focusing lens along the laser optical axis direction, thereby adjusting the distance between the focusing lens 20 and the CCD camera 7.

In this embodiment, the path for adjusting the attenuation change of the laser energy is implemented by adjusting the angle of the high-reflection mirror through the rotating bracket, so as to adjust the incident angle of the light beam incident on the high-reflection mirror, and to implement the control of the energy of the emergent light beam of the high-reflection mirror, so as to obtain an ideal light beam energy, and to meet the requirement of the receiver on the light beam energy. If the receiver uses a CCD camera, the beam energy can be adjusted to a beam power of 2W.

After the laser beam penetrates through the high-reflection mirror, the laser beam enters the second box body from the first box body through the light guide pipe, the laser beam irradiates the focusing lens, the position of the focusing lens is kept still, the laser beam is focused through the focusing lens and finally forms an image on the CCD camera, the CCD camera is fixed on the base, the minimum position of the laser beam is measured by controlling the position of the base on the movable platform, namely the minimum position of the laser beam is accurately positioned, and therefore the virtual focus position of the laser is determined.

Further, after receiving the light beam, the CCD camera in this embodiment feeds back the light beam parameters to the upper computer, and the upper computer analyzes the light beam incident energy value to obtain the rotation instruction of the high-reflection mirror and the movement instruction of the CCD camera, and transmits the rotation instruction to the rotation controller to adjust the angle of the high-reflection mirror. The moving instruction of the CCD camera is transmitted to the moving controller to adjust the position of the CCD camera.

In this embodiment, when the virtual focus position of the alignment molecule laser is located, the angle of the high-reflection mirror is adjusted according to the light beam received by the CCD camera, and when the position of the high-reflection mirror is stable, the position of the high-reflection mirror is locked, and the light beam is imaged on the CCD camera through the focusing lens. After the high reflecting mirror is locked, the upper computer sends a moving instruction to control the movement of the CCD camera, in the moving process of the CCD camera, the CCD camera feeds back the collected image to the upper computer, and the upper computer records the minimum position of the light beam in the moving process, so that the minimum position of the light beam is detected by moving the CCD camera. And after the minimum position of the light beam is reached, feeding back the distance moved by the CCD camera to the upper computer for calculating the focal length. After the light emitting working condition of the laser is changed, the divergence angle of the light beam can be changed to a certain degree, meanwhile, the position of the virtual focus can be changed, on the premise that the positions of the reflecting mirror and the focusing lens are not changed, the upper computer sends out repeated operation instructions, and the operation of the electric control translation table is controlled repeatedly to complete the measurement work of the whole working condition, so that the position of the virtual focus can be determined.

In this embodiment, the general measurement principle of the geometric optical virtual focus is to calculate the virtual focus position by measuring the minimum position of the laser beam after passing through the lens and according to the gaussian formula, wherein the calculation formula is as follows: gaussian formula:

wherein L is ^* Is the distance from the CCD to the optical center of the focusing lens, i.e. L ^* Is the image distance; l is the distance from the virtual focus position of the laser beam to be found to the optical center of the focusing lens; f ^* Is the focal length of the lens.

Therefore, the virtual focus position of the excimer laser can be calculated according to the light beam parameter received by the receiver and the moving position parameter of the receiver.

EXAMPLE III

In this embodiment, the excimer laser virtual focus positioning device of the above embodiment is used to position the virtual focus of the excimer laser, as shown in fig. 6, the specific use method includes:

s10, acquiring imaging parameters of laser emitted by the excimer laser and received by the receiver after passing through an attenuation component and a focusing lens in real time;

s20, judging whether the imaging parameters meet preset imaging conditions or not;

s30, recording the distance between the receiver and the focusing lens if the distance is the same as the distance between the receiver and the focusing lens, and determining the virtual focus position of the excimer laser according to the distance and the focal length of the focusing lens;

s40, otherwise, adjusting the distance between the receiver and the focusing lens, and returning to execute the step S10.

In a further embodiment, after step S10, the method further comprises:

s101, adjusting the angle of the attenuation component according to the energy of the light beam received by the receiver.

Excimer laser virtual focus positioner, whole use only need be built a light path, has optimized detection process flow, has improved efficiency of software testing.

Additionally, the utility model discloses an excimer laser virtual focus positioner confirms light beam minimum position through the removal of control receiver (CCD camera), and then confirms laser light beam virtual focus position, and the removal of light beam minimum position accessible receiver carries out the accurate positioning, avoids the human factor, and the location is more accurate.

Those skilled in the art will appreciate that although some embodiments herein include some features included in other embodiments, not others, combinations of features of different embodiments are meant to be within the scope of the invention and form different embodiments. For example, in the claims, any of the claimed embodiments may be used in any combination.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims

1. An excimer laser virtual focus positioning device, comprising: the laser device comprises an attenuation component, a focusing lens and a receiver in sequence along the transmission direction of laser emitted by an excimer laser, wherein the laser emitted by the excimer laser is respectively attenuated by the attenuation component and is captured by the receiver after being imaged by the focusing lens, and the receiver is close to or far away from the focusing lens along the direction of a laser optical axis so as to determine the virtual focus position of the excimer laser according to imaging parameters of the receiver.

2. The apparatus of claim 1, wherein the attenuation module comprises a rotatable high-reflection mirror, and the variation of the attenuation of the light transmitted through the high-reflection mirror is controlled by adjusting the angle of the high-reflection mirror.

3. The apparatus of claim 2, wherein the attenuation module further comprises a rotating support, the high-reflection mirror is mounted on the rotating support, and the angle of the high-reflection mirror in the optical path is adjusted by the rotation of the rotating support.

4. The apparatus of claim 1, wherein the attenuator is sealed in a first housing, the focusing lens and the receiver are sealed in a second housing, and the first housing and the second housing are hermetically connected by a light pipe.

5. The apparatus of claim 4, further comprising an upper computer for analyzing the energy of the light beam received by the receiver and generating a rotation command of the attenuation module and a movement command of the receiver according to the analysis result.

6. The virtual focus positioning device of the excimer laser as claimed in claim 5, further comprising a rotation controller, wherein the rotation controller is disposed at the bottom of the first box, and the rotation controller receives a rotation command from the upper computer and controls the attenuation module to perform rotation adjustment.

7. The virtual focus positioning device of the excimer laser as claimed in claim 5, further comprising a motion controller, wherein the motion controller is disposed at the bottom of the second box, and the motion controller receives a motion command from the upper computer and controls the receiver to approach or leave the focusing lens along the laser optical axis direction.

8. The apparatus as claimed in claim 7, wherein the receiver comprises a CCD camera and a moving platform, the CCD camera is movably disposed on the moving platform, and the moving controller controls the CCD camera to move on the moving platform according to the moving instruction.