CN217847894U - Non-contact force-control transfer structure - Google Patents
Non-contact force-control transfer structure Download PDFInfo
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- CN217847894U CN217847894U CN202222138780.9U CN202222138780U CN217847894U CN 217847894 U CN217847894 U CN 217847894U CN 202222138780 U CN202222138780 U CN 202222138780U CN 217847894 U CN217847894 U CN 217847894U
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- magnetic
- rotary column
- magnetic head
- suction nozzle
- nozzle rod
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- 238000005086 pumping Methods 0.000 claims abstract description 10
- 230000008878 coupling Effects 0.000 claims abstract description 6
- 238000010168 coupling process Methods 0.000 claims abstract description 6
- 238000005859 coupling reaction Methods 0.000 claims abstract description 6
- 238000003754 machining Methods 0.000 claims abstract description 4
- 238000001179 sorption measurement Methods 0.000 claims description 25
- 230000006698 induction Effects 0.000 claims description 9
- 238000010030 laminating Methods 0.000 claims 2
- 238000007789 sealing Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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Abstract
The utility model discloses a non-contact force-controlled transfer structure, which comprises a bracket, a magnetic head and a magnetic rotary column; the magnetic head is rotationally connected to the driving end of the support and provided with a motor; the magnetic rotary column is slidably inserted into the picking end of the bracket, the magnetic force of the magnetic rotary column corresponds to the magnetic head, and the sucking end of the magnetic rotary column is connected with vacuum pumping equipment; the support moves to a workpiece position, the suction end of the magnetic rotary column adsorbs the workpiece through vacuum pumping equipment, the motor drives the magnetic head to rotate, the magnetic rotary column acts on the magnetic rotary column through non-contact force coupling to enable the magnetic rotary column to rotate, and the magnetic rotary column drives the workpiece to rotate to adjust the workpiece to a proper machining angle; the magnetic head is coupled with the magnetic attraction rotary column through magnetic force, so that the magnetic attraction rotary column rotates, non-contact angle control is realized, and force control precision errors caused by friction force are eliminated.
Description
Technical Field
The utility model relates to a semiconductor chip pastes dress equipment technical field, especially relates to a structure is transferred in non-contact power accuse.
Background
The assembly of semiconductor chips in production usually uses mounting equipment, and most production schemes in the industry realize the mounting process by a fixed coherent rail, wherein the chip is picked up from a feeding end by a practical picking and transferring equipment and is delivered to the rail for mounting. Wherein pick up the chip after need carry out angular adjustment to the chip, generally adjust through structures such as belt drive, connecting rod at present to the elastic mechanism carries out the pressure control of suction nozzle paster, and frictional force is great between this mode mechanism, can produce great error to the power control precision.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: in order to overcome the not enough that exists among the prior art, the utility model provides a structure is transferred in non-contact power accuse can effectively improve the power accuse precision to chip angular adjustment.
The technical scheme is as follows: in order to achieve the above object, the utility model discloses a non-contact force-controlled transfer structure, which comprises a bracket, a magnetic head and a magnetic attraction rotary column; the magnetic head is rotationally connected to the driving end of the support and is provided with a motor; the magnetic rotary column is slidably inserted into the picking end of the bracket, the magnetic force of the magnetic rotary column corresponds to the magnetic head, and the sucking end of the magnetic rotary column is connected with vacuum pumping equipment; the support moves to the position of a workpiece, the suction end of the magnetic attraction rotary column adsorbs the workpiece through vacuum pumping equipment, the motor drives the magnetic head to rotate, the magnetic attraction rotary column acts on the magnetic attraction rotary column through non-contact force coupling to enable the magnetic attraction rotary column to rotate, and the magnetic attraction rotary column drives the workpiece to rotate to adjust the workpiece to a proper machining angle.
Furthermore, the magnetic rotary column comprises a suction nozzle rod, a suction nozzle rod magnetic head and a limiting ring; the suction nozzle rod is inserted into the rotary hole of the support, an adsorption channel is formed in the suction nozzle rod, one end of the adsorption channel is connected to the suction nozzle, and the other end of the adsorption channel is connected to the vacuum pumping equipment; the limiting ring is sleeved on the suction nozzle rod, and the diameter size of the outer ring of the limiting ring is larger than the inner diameter size of the rotary hole; the suction nozzle rod magnetic head is sleeved on the suction nozzle rod and is located above the limiting ring, and the magnetic force of the suction nozzle rod magnetic head corresponds to the magnetic head.
Further, the circumferential side of the rotary hole is annularly provided with a vacuum adsorption groove, the vacuum adsorption groove corresponds to the lower surface of the limiting ring, the vacuum adsorption groove is connected to a vacuum induction port of the support, and the vacuum induction port is connected with a vacuum induction device.
Furthermore, the vacuum adsorption groove is provided with a sealing rubber ring on the periphery, the sealing rubber ring is attached to the limiting ring, and the limiting ring is a smooth plane with the surface attached to the sealing rubber ring.
Furthermore, the magnetic head of the suction nozzle rod is in interference fit with the suction nozzle rod, and the contact surface of the magnetic head of the suction nozzle rod and the suction nozzle rod is a frosted surface.
Furthermore, the drive end of the support is provided with a hanging plate, the magnetic head is rotatably hung on the hanging plate, and the motor is connected with the magnetic head in a driving mode.
Has the advantages that: the utility model discloses a structure is transferred in non-contact power accuse can effectively improve the power accuse precision to chip angular adjustment, including but not limited to following technological effect:
1) The magnetic head is coupled with the magnetic attraction rotary column through magnetic force, so that the magnetic attraction rotary column rotates, non-contact angle control is realized, and force control precision errors caused by friction force are eliminated;
2) The friction force or the holding force between the magnetic head of the suction nozzle rod and the suction nozzle rod is increased, so that the error between the magnetic force applied to the magnetic head of the suction nozzle rod and the torque of the suction nozzle rod is reduced, and the force control precision is further improved.
Drawings
FIG. 1 is a structural diagram of the present invention;
figure 2 is the structure drawing of disassembling of the utility model.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
As shown in the attached figures 1-2: a non-contact force-controlled transfer structure comprises a bracket 1, a magnetic head 2 and a magnetic rotary column 3; the magnetic head 2 is rotationally connected to the driving end of the bracket 1, and the magnetic head 2 is provided with a motor 21; the magnetic rotary column 3 is inserted into the picking end of the bracket 1 in a sliding manner, the magnetic force of the magnetic rotary column 3 corresponds to the magnetic head 2, and the sucking end of the magnetic rotary column 3 is connected with a vacuumizing device; the support 1 moves to a workpiece position, a suction end of the magnetic rotary column 3 adsorbs the workpiece through vacuum pumping equipment, the motor 21 drives the magnetic head 2 to rotate, the magnetic rotary column 3 is acted on through non-contact force coupling to enable the magnetic rotary column 3 to rotate, and the magnetic rotary column 3 drives the workpiece to rotate to adjust the workpiece to a proper machining angle; the motor 21 rotates the magnetic head 2, and the magnetic head 2 is coupled with the magnetic attraction rotary column 3 through magnetic force, wherein parallel coupling and angular coupling are included, so that the magnetic attraction rotary column 3 rotates to realize non-contact angle control.
The magnetic suction rotary column 3 comprises a suction nozzle rod 31, a suction nozzle 32, a suction nozzle rod magnetic head 33 and a limiting ring 34; the nozzle rod 31 is inserted into the rotary hole 11 of the bracket 1, an adsorption channel 311 is formed in the nozzle rod 31, one end of the adsorption channel 311 is connected to the nozzle 32, and the other end of the adsorption channel 311 is connected to a vacuum pumping device; the limiting ring 34 is sleeved on the suction nozzle rod 31, and the diameter of the outer ring of the limiting ring 34 is larger than the inner diameter of the rotary hole 11; the nozzle rod magnetic head 33 is sleeved on the nozzle rod 31 and is positioned above the limit ring 34, and the magnetic force of the nozzle rod magnetic head 33 corresponds to the magnetic head 2; the suction nozzle 32 is used for adsorbing a workpiece, the magnetic force of the suction nozzle rod magnetic head 33 and the magnetic head 2 acts to rotate and drive the suction nozzle rod 31 to rotate, and further the angle of the workpiece is adjusted, and the limiting ring 34 can support the suction nozzle rod 31 and enable the suction nozzle rod 31 and the rotary hole 11 to be fixed in horizontal height so as not to fall off.
A vacuum adsorption groove 111 is circumferentially formed on the peripheral side of the rotary hole 11, the vacuum adsorption groove 111 corresponds to the lower surface of the limiting ring 34, the vacuum adsorption groove 111 is connected to a vacuum induction port 12 of the bracket 1, and the vacuum induction port 12 is connected with a vacuum induction device; when the workpiece is not picked up, the limit ring 34 is buckled on the vacuum adsorption groove 111, the vacuum adsorption groove 111 is in a negative pressure state through a vacuum induction device, when the suction nozzle 32 moves downwards to contact and adsorb the workpiece, the suction nozzle rod 31 is subjected to an upward force and jacked up due to the reaction force of the workpiece, the limit ring 34 leaves the vacuum adsorption groove 111, the air pressure in the vacuum adsorption groove 111 changes at the moment, the vacuum induction device records the air pressure change and judges that the workpiece is picked up completely, and then the system control support 1 moves to transfer the workpiece.
The periphery of the vacuum adsorption groove 111 is provided with a sealing rubber ring, the sealing rubber ring is attached to correspond to the limiting ring 34, and the surface of the limiting ring 34 attached to the sealing rubber ring is a smooth plane.
The suction nozzle rod magnetic head 33 is in interference fit with the suction nozzle rod 31, and the contact surface of the suction nozzle rod magnetic head 33 and the suction nozzle rod 31 is a frosted surface; the friction force or the holding force between the nozzle rod magnetic head 33 and the nozzle rod 31 is increased, so that the error between the magnetic force applied to the nozzle rod magnetic head 33 and the torque of the nozzle rod 31 is reduced, and the force control precision is further improved.
The drive end of support 1 is equipped with link plate 13, magnetic head 2 is rotatory to be hung and is established in link plate 13, motor 21 drive is connected in magnetic head 2.
The above description is only a preferred embodiment of the present invention, and it should be noted that: for those skilled in the art, without departing from the principle of the present invention, several improvements and modifications can be made, and these improvements and modifications should also be considered as the protection scope of the present invention.
Claims (6)
1. A non-contact force-controlled transfer structure is characterized in that: comprises a bracket (1), a magnetic head (2) and a magnetic attraction rotary column (3); the magnetic head (2) is rotatably connected to the driving end of the bracket (1), and the magnetic head (2) is provided with a motor (21); the magnetic attraction rotary column (3) is slidably inserted into the picking end of the support (1), the magnetic force of the magnetic attraction rotary column (3) corresponds to the magnetic head (2), and the sucking end of the magnetic attraction rotary column (3) is connected with vacuum pumping equipment; the magnetic attraction rotary column is characterized in that the support (1) is moved to a workpiece position, the suction end of the magnetic attraction rotary column (3) adsorbs a workpiece through vacuum pumping equipment, the motor (21) drives the magnetic head (2) to rotate, the magnetic attraction rotary column (3) acts on through non-contact force coupling to enable the magnetic attraction rotary column to rotate, and the magnetic attraction rotary column (3) drives the workpiece to rotate to adjust the workpiece to a proper machining angle.
2. A non-contact force-controlled transfer structure as in claim 1, wherein: the magnetic suction rotary column (3) comprises a suction nozzle rod (31), a suction nozzle (32), a suction nozzle rod magnetic head (33) and a limiting ring (34); the suction nozzle rod (31) is inserted into the rotary hole (11) of the support (1), an adsorption channel (311) is formed in the suction nozzle rod (31), one end of the adsorption channel (311) is connected to the suction nozzle (32), and the other end of the adsorption channel (311) is connected to vacuum-pumping equipment; the limiting ring (34) is sleeved on the suction nozzle rod (31), and the diameter size of the outer ring of the limiting ring (34) is larger than the inner diameter size of the rotary hole (11); the suction nozzle rod magnetic head (33) is sleeved on the suction nozzle rod (31) and is positioned above the limiting ring (34), and the magnetic force of the suction nozzle rod magnetic head (33) corresponds to the magnetic head (2).
3. The non-contact force controlled transfer structure of claim 2, wherein: revolve hole (11) week side hoop and seted up vacuum adsorption groove (111), vacuum adsorption groove (111) are corresponding to spacing ring (34) lower surface, vacuum adsorption groove (111) are connected in vacuum response mouth (12) of support (1), vacuum response mouth (12) are connected with vacuum induction equipment.
4. A non-contact force controlled transfer structure as in claim 3, wherein: the vacuum adsorption groove (111) week side is equipped with sealed rubber ring, the laminating of sealed rubber ring is corresponding to spacing ring (34), the face of spacing ring (34) and the laminating of sealed rubber ring is smooth plane.
5. A non-contact force-controlled transfer structure as in claim 2, wherein: the suction nozzle rod magnetic head (33) and the suction nozzle rod (31) are in interference fit, and the contact surface of the suction nozzle rod magnetic head (33) and the suction nozzle rod (31) is a frosted surface.
6. A non-contact force-controlled transfer structure as in claim 1, wherein: the drive end of support (1) is equipped with link plate (13), magnetic head (2) are rotatory to be hung and are located link plate (13), motor (21) drive is connected in magnetic head (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222138780.9U CN217847894U (en) | 2022-08-15 | 2022-08-15 | Non-contact force-control transfer structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222138780.9U CN217847894U (en) | 2022-08-15 | 2022-08-15 | Non-contact force-control transfer structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217847894U true CN217847894U (en) | 2022-11-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222138780.9U Active CN217847894U (en) | 2022-08-15 | 2022-08-15 | Non-contact force-control transfer structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217847894U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115339905A (en) * | 2022-08-15 | 2022-11-15 | 恩纳基智能科技无锡有限公司 | Pickup device and wafer pickup mechanism |
-
2022
- 2022-08-15 CN CN202222138780.9U patent/CN217847894U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115339905A (en) * | 2022-08-15 | 2022-11-15 | 恩纳基智能科技无锡有限公司 | Pickup device and wafer pickup mechanism |
| CN115339905B (en) * | 2022-08-15 | 2025-03-28 | 恩纳基智能装备(无锡)股份有限公司 | Pick-up device and wafer picking mechanism |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 214000 1-8-101, 1-8-201, Zone C, jinshanbei science and Technology Industrial Park, Wuxi City, Jiangsu Province Patentee after: Ennaji Intelligent Equipment (Wuxi) Co.,Ltd. Country or region after: China Address before: 214000 1-8-101, 1-8-201, Zone C, jinshanbei science and Technology Industrial Park, Wuxi City, Jiangsu Province Patentee before: ENERGY INTELLIGENT TECHNOLOGY WUXI CO.,LTD. Country or region before: China |
|
| CP03 | Change of name, title or address |