CN217691098U - Novel combined graphite boat - Google Patents
Novel combined graphite boat Download PDFInfo
- Publication number
- CN217691098U CN217691098U CN202221295094.6U CN202221295094U CN217691098U CN 217691098 U CN217691098 U CN 217691098U CN 202221295094 U CN202221295094 U CN 202221295094U CN 217691098 U CN217691098 U CN 217691098U
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- CN
- China
- Prior art keywords
- boat
- piece
- ceramic
- plate
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 40
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 30
- 239000010439 graphite Substances 0.000 title claims abstract description 30
- 239000000919 ceramic Substances 0.000 claims abstract description 39
- 238000009434 installation Methods 0.000 claims abstract description 17
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 10
- 238000001125 extrusion Methods 0.000 claims description 16
- 230000001105 regulatory effect Effects 0.000 claims description 10
- 238000005452 bending Methods 0.000 abstract description 6
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract description 2
- 241000251468 Actinopterygii Species 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Sealing Devices (AREA)
Abstract
The utility model discloses a novel combination formula graphite boat relates to PECVD coating film technical field. Including the installation piece, the surface of installation piece is connected there is ceramic rod, and one side of installation piece is provided with ceramic gasket, and one side of ceramic gasket is provided with the carbon gasket, and one side of carbon gasket is provided with ceramic nut, and the surface of ceramic rod is connected with first boat piece, and one side of first boat piece is provided with the arc piece, and the surface of ceramic rod is connected with second boat piece, and one side of second boat piece has seted up the arc wall, and the surface of ceramic rod is connected with the backing plate. The utility model discloses in, through being connected of arc piece and arc wall, can be connected first boat piece and second boat piece, penetrate the inside of backing plate, first boat piece and second boat piece through ceramic rod to can be spacing to it, through the concatenation of first boat piece and second boat piece, can effectual solution boat piece because of the bending deformation that the overlength leads to, it also solves the long-size material shortage of boat piece in the market simultaneously.
Description
Technical Field
The utility model relates to a PECVD coating film technical field especially relates to a novel combination formula graphite boat.
Background
The graphite double boat is a carrier used for carrying out PECVD film coating on solar cells and consists of boat pieces, spacing blocks, clamping points, ceramic rods, graphite rods and other accessories.
The overlength of current graphite boat design to just also make the boat piece overlength of its assembly, its easy bending deformation of boat piece overlength, thereby arouse a series of problems such as silicon chip fish tail, graphite boat high frequency, when maintaining the graphite boat, also comparatively inconvenient.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the overlength of current graphite boat design to just also make the boat piece overlength of its assembly, its easy bending deformation of boat piece overlength, thereby arouse the silicon chip fish tail, a series of problems such as graphite boat high frequency, when maintaining the graphite boat simultaneously, also comparatively inconvenient shortcoming, and the novel combination formula graphite boat that provides.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a novel combination formula graphite boat, includes the installation piece, the surface of installation piece is connected there is ceramic rod, and one side of installation piece is provided with ceramic gasket, one side of ceramic gasket is provided with the carbon gasket, and one side of carbon gasket is provided with ceramic nut, ceramic rod's surface is connected with first boat piece, and one side of first boat piece is provided with the arc piece, ceramic rod's surface is connected with second boat piece, and one side of second boat piece has seted up the arc wall, ceramic rod's surface is connected with the backing plate.
As a further description of the above technical solution:
the arc-shaped block is connected with the inner part of the arc-shaped groove, and the backing plate is arranged on one side of the first boat sheet and one side of the second boat sheet.
As a further description of the above technical solution:
the surface of installation piece is connected with the mounting panel that the cross section is "U" style of calligraphy, and the inner wall both sides gomphosis respectively of mounting panel is connected with the spout, the inside sliding connection of spout has first slider, and one side of first slider connects the regulating plate, logical groove has been seted up respectively to the top both sides of regulating plate, and the inner wall that leads to the groove is connected with the installation pole, the surface of installation pole is connected with the L template, and the bottom of L template is connected with the spring, the surface of L template is connected with the stripper bar, and the top of stripper bar is connected with the stripper plate, the top both sides threaded connection respectively of regulating plate has the bolt, and the bottom of bolt is connected with the axis of rotation, the surperficial threaded connection of bolt has the sleeve pipe, and sheathed tube one side is connected with the second slider.
As a further description of the above technical solution:
the installation pole is connected for rotating between the inside that leads to the groove, be connected between the inside bottom of spring and mounting panel, for the activity cup joints between the top of extrusion stem and regulating plate.
As a further description of the above technical solution:
be connected between the inside bottom of axis of rotation and mounting panel, be sliding connection between the inside of second slider and spout.
To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:
1. the utility model discloses in, through being connected of arc piece and arc wall, can be connected first boat piece and second boat piece, penetrate the inside of backing plate, first boat piece and second boat piece through ceramic rod to can be spacing to it, through the concatenation of first boat piece and second boat piece, can effectual solution boat piece because of the bending deformation that the overlength leads to, it also solves the long-size material shortage of boat piece in the market simultaneously.
2. The utility model discloses in, through the top of placing the stripper plate with the graphite boat, can make the stripper plate extrude extrusion pole and L template to can make the L template rotate the surface of graphite boat and spacing to it through the installation pole, prevent when maintaining the graphite boat, it appears rocking, the influence is to its work efficiency who maintains.
Drawings
FIG. 1 is a schematic view of a novel combined graphite boat according to the present invention;
FIG. 2 is an enlarged schematic view of the structure at A in FIG. 1;
FIG. 3 is a schematic view of the surface structure of the first boat and the second boat of the present invention;
fig. 4 is a schematic structural view of a surface portion of the mounting plate of the present invention.
Illustration of the drawings:
1. mounting a sheet; 2. a ceramic rod; 3. a ceramic spacer; 4. a carbon gasket; 5. a ceramic nut; 6. a first boat sheet; 7. an arc-shaped block; 8. a second boat sheet; 9. an arc-shaped slot; 10. a base plate; 11. mounting a plate; 12. a chute; 13. a first slider; 14. an adjusting plate; 15. a through groove; 16. mounting a rod; 17. an L-shaped plate; 18. a spring; 19. an extrusion stem; 20. a pressing plate; 21. a bolt; 22. a rotating shaft; 23. a sleeve; 24. and a second slider.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
Referring to fig. 1-4, a novel combined graphite boat, including mounting plate 1, the surface of mounting plate 1 is connected there is ceramic rod 2, and one side of mounting plate 1 is provided with ceramic gasket 3, one side of ceramic gasket 3 is provided with carbon gasket 4, and one side of carbon gasket 4 is provided with ceramic nut 5, the surface of ceramic rod 2 is connected with first boat piece 6, and one side of first boat piece 6 is provided with arc 7, the surface of ceramic rod 2 is connected with second boat piece 8, and arc 9 has been seted up to one side of second boat piece 8, the surface of ceramic rod 2 is connected with backing plate 10, ceramic gasket 3, carbon gasket 4 and ceramic nut 5 set gradually at the lateral part of mounting plate 1, and it also sets up the surface at ceramic rod 2 simultaneously.
Further, be connected between the inside of arc piece 7 and arc wall 9, backing plate 10 sets up in one side of first boat piece 6 and second boat piece 8, through being connected of arc piece 7 and arc wall 9, can splice first boat piece 6 and second boat piece 8, can prevent that single boat piece overlength and lead to its bending deformation, and two ceramic rods 2 pass backing plate 10, first boat piece 6 and second boat piece 8 respectively, can carry on spacingly to it.
Further, the surface of the mounting piece 1 is connected with a mounting plate 11 with a U-shaped cross section, two sides of the inner wall of the mounting plate 11 are respectively connected with a sliding groove 12 in an embedded mode, the inner portion of the sliding groove 12 is connected with a first sliding block 13 in a sliding mode, one side of the first sliding block 13 is connected with a regulating plate 14, two sides of the top end of the regulating plate 14 are respectively provided with a through groove 15, the inner wall of the through groove 15 is connected with a mounting rod 16, the surface of the mounting rod 16 is connected with an L-shaped plate 17, the bottom end of the L-shaped plate 17 is connected with a spring 18, the surface of the L-shaped plate 17 is connected with an extrusion rod 19, the top end of the extrusion rod 19 is connected with an extrusion plate 20, two sides of the top end of the regulating plate 14 are respectively connected with a bolt 21 in a threaded mode, the bottom end of the bolt 21 is connected with a rotating shaft 22, the surface of the bolt 21 is connected with a sleeve 23 in a threaded mode, one side of the sleeve 23 is connected with a second sliding block 24, the extrusion plate 20 can extrude the extrusion plate 20 to extrude the extrusion rod 19, and the L-shaped plate 17 can rotate through the mounting rod 16.
Furthermore, the mounting rod 16 is rotatably connected with the inside of the through groove 15, the spring 18 is connected with the bottom end of the inside of the mounting plate 11, the extrusion rod 19 is movably sleeved with the top end of the adjusting plate 14, and the spring 18 has an upward thrust force, so that the L-shaped plate 17, the extrusion plate 20 and the like can be conveniently reset.
Further, the rotating shaft 22 is connected to the bottom end of the inner portion of the mounting plate 11, the second slider 24 is slidably connected to the inner portion of the sliding chute 12, and the bolt 21 and the sleeve 23 are used for supporting the adjusting plate 14.
The working principle is as follows: when the device is used, the arc block 7 is connected with the inside of the arc groove 9, the first boat sheet 6 and the second boat sheet 8 can be connected, the two ceramic rods 2 penetrate through the backing plate 10, the first boat sheet 6 and the second boat sheet 8 can be limited, the single boat sheet can be prevented from being overlong and causing bending deformation through connection of the first boat sheet 6 and the second boat sheet 8, when the graphite boat needs to be maintained, the top end of the extrusion plate 20 is placed on the extrusion plate 20, the extrusion plate 20 extrudes the extrusion rod 19 and the L-shaped plate 17, the L-shaped plate 17 can rotate through the installation rod 16, one end of the L-shaped plate 17 can be rotated to the surface of the graphite boat, the graphite boat can be limited through clamping of the L-shaped plates 17 on two sides, the graphite boat is prevented from shaking and the like when the graphite boat is maintained, and the progress of maintenance work of the graphite boat is influenced.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (5)
1. The utility model provides a novel combination formula graphite boat, includes mounting plate (1), its characterized in that: the surface of the mounting piece (1) is connected with a ceramic rod (2), one side of the mounting piece (1) is provided with a ceramic gasket (3), one side of the ceramic gasket (3) is provided with a carbon gasket (4), one side of the carbon gasket (4) is provided with a ceramic nut (5), the surface of the ceramic rod (2) is connected with a first boat sheet (6), one side of the first boat sheet (6) is provided with an arc-shaped block (7), the surface of the ceramic rod (2) is connected with a second boat sheet (8), one side of the second boat sheet (8) is provided with an arc-shaped groove (9), and the surface of the ceramic rod (2) is connected with a backing plate (10).
2. The novel combined graphite boat as claimed in claim 1, wherein: the arc-shaped block (7) is connected with the inner part of the arc-shaped groove (9), and the backing plate (10) is arranged on one side of the first boat sheet (6) and one side of the second boat sheet (8).
3. The novel combined graphite boat as claimed in claim 1, wherein: the surface of installation piece (1) is connected with mounting panel (11) that the cross section is "U" style of calligraphy, and the gomphosis respectively is connected with spout (12) in the inner wall both sides of mounting panel (11), the inside sliding connection of spout (12) has first slider (13), and one side of first slider (13) connects regulating plate (14), logical groove (15) have been seted up respectively to the top both sides of regulating plate (14), and the inner wall that leads to groove (15) is connected with installation pole (16), the surface of installation pole (16) is connected with L template (17), and the bottom of L template (17) is connected with spring (18), the surface of L template (17) is connected with squeeze rod (19), and the top of squeeze rod (19) is connected with squeeze plate (20), the top both sides of regulating plate (14) are threaded connection respectively has bolt (21), and the bottom of bolt (21) is connected with axis of rotation (22), the surface threaded connection of bolt (21) has sleeve pipe (23), and one side of sleeve pipe (23) is connected with second slider (24).
4. The novel combined graphite boat as claimed in claim 3, wherein: the installation rod (16) is connected with the inside of the through groove (15) in a rotating mode, the spring (18) is connected with the bottom end of the inside of the installation plate (11), and the extrusion rod (19) is movably sleeved with the top end of the adjusting plate (14).
5. The novel combined graphite boat as claimed in claim 3, wherein: the rotating shaft (22) is connected with the bottom end of the inner portion of the mounting plate (11), and the second sliding block (24) is in sliding connection with the inner portion of the sliding groove (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221295094.6U CN217691098U (en) | 2022-05-27 | 2022-05-27 | Novel combined graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221295094.6U CN217691098U (en) | 2022-05-27 | 2022-05-27 | Novel combined graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217691098U true CN217691098U (en) | 2022-10-28 |
Family
ID=83703717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221295094.6U Active CN217691098U (en) | 2022-05-27 | 2022-05-27 | Novel combined graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217691098U (en) |
-
2022
- 2022-05-27 CN CN202221295094.6U patent/CN217691098U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230531 Address after: 314117 East side of Building 2, No. 38 Yiqun Road, Yaozhuang Town, Jiashan County, Jiaxing City, Zhejiang Province Patentee after: Hongxun New Energy Material Technology (Zhejiang) Co.,Ltd. Address before: 314100 building 3, No. 38, Yiqun Road, Yaozhuang Town, Jiashan County, Jiaxing City, Zhejiang Province Patentee before: Hongjia new energy technology (Zhejiang) Co.,Ltd. |
|
| TR01 | Transfer of patent right |