CN217466966U - Substrate tilting and lifting mechanism - Google Patents
Substrate tilting and lifting mechanism Download PDFInfo
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- CN217466966U CN217466966U CN202221072155.2U CN202221072155U CN217466966U CN 217466966 U CN217466966 U CN 217466966U CN 202221072155 U CN202221072155 U CN 202221072155U CN 217466966 U CN217466966 U CN 217466966U
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Abstract
The utility model provides a substrate tilting and lifting mechanism, which is arranged below a scanner and used for lifting the scanner, comprising a carrier main body with a cavity, a pivoting component and a driving mechanism, wherein the carrier main body comprises a hinged shaft and a carrier top plate hinged with the hinged shaft, the pivoting component comprises a pivoting shaft and a pivoting plate pivoted with the pivoting shaft, the cavity contains a sliding rail arranged along a first direction and a sliding block movably connected with the sliding rail, the sliding block is connected with a lead screw arranged along the first direction in a sliding way, the driving mechanism drives the lead screw to move along the first direction so as to push the sliding block to move along the first direction, the sliding block moves along the first direction to push the pivoting plate to rotate around the pivoting shaft, the top plate of the carrying platform is pushed to rotate around the hinge shaft so that the top plate of the carrying platform forms a certain angle with the horizontal line to lift the scanner, thereby meeting the requirement that the atomic force microscope scans the surface and the side surface of the sample with different depths.
Description
Technical Field
The utility model relates to a material surface measuration technical field, more specifically relates to a base plate slope lifting mechanism.
Background
An atomic force microscope is an analytical instrument that can be used to study the surface structure of solid materials, including insulators. The atomic force microscope is connected with a probe through a cantilever, the probe scans the surface of a sample, and can execute sample scanning work and provide a three-dimensional surface map of the sample without special treatment on the sample, but a scanner used by the existing atomic force microscope is a flat-plate scanner made of piezoelectric ceramics, is mainly used for scanning and imaging the surface of the sample in the horizontal direction and the vertical direction, cannot scan the surface and the side surface of the sample in the inclined direction, and therefore cannot measure the surface and the side surface of the sample with a certain depth.
There is an atomic force microscope carrier of fixed inclination of utensil that installs additional on the scanner among the prior art, and this atomic force microscope carrier can realize the scanner and to the scanning of sample surface and side surface in the incline direction, but this atomic force microscope carrier's inclination is fixed, and the scanner can't measure other sample side surfaces that are greater than the sample depth on this incline carrier, and the probe that the scanner is used for scanning the sample also very easily collides with sample or microscope carrier simultaneously and leads to the probe to damage.
In view of the above, there is a need to improve the substrate tilting and lifting mechanism for atomic force microscope in the prior art to solve the above problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to disclose a base plate slope lifting mechanism for solve among the prior art atomic force microscope and can not change the defect of the angle of carrying out the slope scanning to sample surface and side surface, in order to satisfy the demand that atomic force microscope carries out the scanning to sample surface and the side surface that has the different degree of depth.
In order to achieve the above object, the utility model provides a base plate slope lifting mechanism settles and is used for the lifting scanner in the scanner below, include:
the device comprises a carrier main body with a chamber, a pivoting component arranged in the chamber and a driving mechanism;
the stage main body includes: the hinged shaft is hinged with the carrier top plate;
the pivot assembly includes: a pivot shaft, a pivot plate pivoted with the pivot shaft;
the cavity is used for accommodating a sliding rail which is arranged along a first direction and is abutted against the pivot plate, and a sliding block which is movably connected with the sliding rail, the sliding block is connected with a screw rod which is arranged along the first direction in a sliding mode, the driving mechanism drives the screw rod to move along the first direction so as to push the sliding block to move along the first direction, the sliding block moves along the first direction to push the pivot plate to rotate around the pivot shaft so as to push the carrier top plate to rotate around the hinge shaft, and the carrier top plate and a horizontal line form a certain angle so as to lift the scanner.
As a further improvement of the present invention, the slide rail includes: the sliding mechanism comprises a tail end limiting seat and a head end limiting seat for limiting the sliding block to move along a first direction, and a sliding section for connecting the head end limiting seat and the tail end limiting seat, wherein the tail end limiting seat is abutted against the pivoting plate.
As a further improvement, the upper surface of the sliding section is kept away from the extending edge along the second direction opposite direction to form the extending edge for clamping the sliding block.
As a further improvement of the utility model, the slider forms the passageway identical with the sliding section profile.
As a further improvement of the present invention, the lower surface of the carrier top plate is configured to limit the pivot plate to push against the first position-limiting member of the carrier top plate.
As a further improvement of the present invention, the carrier top plate includes: the free end of the top plate and the hinged end connected with the hinged shaft;
the hinged end is provided with a measuring scale for measuring the inclination angle.
As a further improvement of the present invention, the carrier main body further includes: a horizontally disposed bottom wall;
the chamber accommodates a first elastic piece elastically connecting the free end of the top plate and the bottom wall.
As a further improvement of the present invention, the chamber is provided with a second locating part connected to the free end of the top plate and the bottom wall, and the second locating part limits the lifting of the top plate of the carrier.
As a further improvement of the present invention, the pivot assembly further comprises: and the pivoting plate is hinged with the pivoting seat through the pivoting shaft.
As a further improvement, the second elastic piece of cavity holding elastic connection slide rail and slider, the second elastic piece restriction slider moves along first direction.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses in, actuating mechanism orders about the lead screw and follows the first direction motion with the top push slider, the passageway of slider and the sliding section swing joint of slide rail, the slider is done the first direction motion along the slide rail and is pushed away pivot board and rotate around the pivotal axis, pivot board top push away the microscope roof and rotate around the articulated shaft and make microscope roof and water flat line be predetermined angle, thereby through microscope roof lifting scanner to this angle, thereby the slope of the sample that the drive scanner bore, and the aforesaid process of angle accessible of microscope roof lifting scanner is adjusted, consequently, atomic force microscope has been solved and the defect that can not change the angle that carries out the slope scanning to sample surface and side surface, thereby atomic force microscope has been satisfied and has been carried out the demand of scanning to the sample surface and the side surface that have the different degree of depth.
Drawings
Fig. 1 is a top perspective view of a substrate tilting and lifting mechanism according to the present invention;
FIG. 2 is a side perspective view of the carrier top plate not rotated;
FIG. 3 is a side perspective view of the top plate of the stage during rotation;
FIG. 4 is a partial side perspective view of a carrier top plate during rotation, wherein the solid portion is a schematic view of the slider not pushing the pivot plate and the pivot plate not pushing the carrier top plate to rotate, and the dashed portion is a schematic view of the slider pushing the pivot plate in a first direction and the pivot plate pushing the carrier top plate to rotate about a pivot axis;
FIG. 5 is a partial cross-sectional view taken along A-A, with the lead screw omitted from FIG. 5;
FIG. 6 is a cross-sectional view of the slider taken along A-A.
Detailed Description
The present invention will be described in detail with reference to the embodiments shown in the drawings, but it should be understood that these embodiments are not intended to limit the present invention, and that the functional equivalents, methods, or structural equivalents thereof, or substitutions thereof by those skilled in the art are all within the scope of the present invention.
It should be understood that in the present application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be considered as limiting the present disclosure.
The term "first direction" refers to the directions indicated by the arrows B1 and B2 in fig. three, and the arrow B1 and the arrow B2 are coaxially arranged, and the term "second direction" refers to the direction indicated by the arrow D in fig. 1.
Referring to fig. 1 to 6, this embodiment discloses a specific embodiment of a substrate tilting and lifting mechanism according to the present invention.
The substrate tilting and lifting mechanism disclosed in this embodiment assists the afm to scan the surface and the side surface of the sample with different depths, and for other substrate tilting and lifting mechanisms with fixed tilting angles, the driving mechanism of the substrate tilting and lifting mechanism drives the screw rod 26 to move along the first direction to push the slider 25, the channel 253 of the slider 25 is movably connected with the sliding section 273 of the slide rail 27, the slider 25 moves along the slide rail 27 along the first direction to push the pivot plate 211 to rotate around the pivot shaft 212, so as to drive the pivot plate 211 to push the carrier top plate 11 to rotate around the hinge shaft 112, so that the carrier top plate and the horizontal line E form a preset angle α, thereby lifting the scanners (not shown) such as the flatbed scanner to the preset angle α, further driving the samples carried by the scanners and the like to tilt to the preset angle α, and the tilting angle α of the samples (i.e. the carrier top plate lifting scanners to the preset angle α) can be adjusted through the above process, and the adjustment amplitude is not limited, so that the requirement of the atomic force microscope for scanning the sample surface and the side surface (such as the microscopic surface of a groove, a boss, a ridge and the like and the side surface of the wafer surface) with different depths is met. The substrate tilting and lifting mechanism disclosed in the present application, and the specific implementation manner of the substrate tilting and lifting mechanism to assist the afm to scan the surface and the side surface of the sample with different depths, are explained in detail below.
As shown in fig. 1 and 2, in the present embodiment, the substrate tilting and lifting mechanism includes a stage main body 1 having a chamber 10, the stage main body 1 is formed by enclosing a horizontally arranged bottom wall 13, a vertically arranged side wall 12, and a stage top plate 11 hinged to the side wall 12, the stage top plate 11 is hinged to the side wall 12 through a hinge shaft 112, the chamber 10 is formed inside the stage main body 1, a pivot assembly 21 is arranged inside the chamber 10, and a driving mechanism (not shown). The pivot assembly 21 includes a pivot shaft 212, and a pivot plate 211 pivotally connected to the pivot shaft 212. The chamber 10 further accommodates a slide rail 27 disposed along the directions indicated by the arrows B1 and B2 and abutting against the pivot plate 211, and a slider 25 movably connected to the slide rail 27, wherein the slider 25 is slidably connected to a screw rod 26 disposed along the directions indicated by the arrows B1 and B2. The driving mechanism (not shown) includes a stepping motor 221 and a pulse power supply (not shown), the pulse power supply (not shown) provides pulse current to the stepping motor 221 to control the rotation angle and the rotation number of the stepping motor 221, the screw rod 26 can be regarded as being composed of a threaded section (not shown) and a first smooth section (not shown) and a second smooth section (not shown), the slide block 25 forms a blind hole 251 shown in fig. 5 for accommodating the first smooth section (not shown) of the screw rod 26, the stepping motor 221 is screwed with the threaded section (not shown) of the screw rod 26 through a gear 222, the stepping motor 221 is driven to rotate by the pulse frequency and the pulse number input by the pulse power supply (not shown) so as to drive the screw rod 26 to move spirally, at this time, the driving mechanism (not shown) drives the screw rod 26 to push the slide block 25 in the direction shown by an arrow B1, the first smooth section (not shown) of the screw rod 26 is placed in the blind hole 152 shown in fig. 5, and rotates the pushing slide block 25, the slide block 25 thus moves in the direction indicated by arrow B1 to push the pivoting plate 211 to rotate around the pivoting shaft 212, so as to push the stage top plate 11 to rotate around the hinge shaft 112, thereby lifting a scanner (not shown) such as a flat-bed scanner, the atomic force microscope scans the surface and the side surface of the sample through a probe (not shown), the sample to be scanned is carried by a turntable (not shown) carried by the scanner (not shown) such as the flat-bed scanner, the turntable (not shown) sucks the sample through a vacuum sucking device (not shown) to ensure that the sample does not deviate or slide off during scanning, the scanner (not shown) such as the flat-bed scanner for carrying the sample can only move horizontally, the probe (not shown) can only have the surface and the side surface of the sample with a proper depth, and other surfaces of the sample with a proper depth and the side surfaces can not be scanned by the probe (not shown), even the probe (not shown) may be damaged due to collision with the probe (not shown), and the substrate tilt and lift mechanism is used to carry a scanner (not shown) such as a flat-bed scanner, and the scanner (not shown) such as the flat-bed scanner is tilted to a predetermined angle α by the stage top plate 11 that forms a predetermined angle α with the horizontal line E shown in fig. 4, so as to tilt the sample, and at this time, the probe (not shown) can scan the surface and the side surface of the sample with a depth, so as to meet the requirement of the atomic force microscope for scanning the surface and the side surface of the sample with different depths.
Further, corresponding control software (not shown) can be connected to the stepping motor 221, for example, 30 ° is input to the control software (not shown), the control software (not shown) automatically converts the control software into a corresponding pulse number and pulse frequency, and the pulse number and pulse frequency are input to the stepping motor 221, at this time, the stepping motor 221 drives the lead screw 26 to push the slider 25 in the direction shown by the arrow B1 through the gear 222, the slider 25 moves in the direction shown by the arrow B1 to push the pivot plate 211 to rotate around the pivot shaft 212 to push the carrier top plate 11 to rotate around the hinge shaft 112 by 30 °, so as to drive a scanner (not shown) such as a flat-plate scanner to lift, at this time, the sample tilts by 30 ° with the turntable (not shown), thereby meeting the requirement of the atomic force microscope for scanning the surfaces and side surfaces with different depths.
Referring to fig. 2, 5 and 6, in the present embodiment, the slide rail 27 can be regarded as a tail end limiting seat 271 and a head end limiting seat 272 for limiting the movement of the slide 25 along the first direction, and a sliding section 273 connecting the head end limiting seat 271 and the tail end limiting seat 272, and the tail end limiting seat 271 abuts against the pivot plate 211. The upper surface (not labeled) of the sliding segment 273 is extended away from the extending edge 2731 of the slider 25 in the direction of arrow D in fig. 1, and the slider 25 forms a channel 253 that matches the contour of the sliding segment 273. The chamber 10 houses a second elastic element 28 elastically connecting the sliding track 27 and the slider 25, the second elastic element 28 limiting the movement of the slider 25 in the direction indicated by the arrow B2, the slider 25 forming an arc 252 against the pivoting plate 211. The slide block 25 is movably connected with the sliding section 273 through the channel 253, when a driving mechanism (not shown) drives the screw rod 26 to push the slide block 25 along the direction shown by the arrow B1, the first smooth section (not shown) of the screw rod 26 is rotatably placed in the blind hole 251 to push the slide block 25, the slide block 25 can move along the sliding section 273 along the direction shown by the arrow B1 to push the pivot plate 211, at this time, the second elastic member 28 is in a compressed state, the slide block 25 pushes the pivot plate 211 to rotate around the pivot shaft 212 through the arc-shaped surface 252, so that the top plate 11 of the pushing platform deck rotates around the hinge shaft 112, and then the scanners (not shown) such as flat-plate scanners are lifted to a preset angle α, and the effect that the turntable (not shown) drives the sample to incline to the preset angle α is achieved. Preferably, in this embodiment, a hollow slide rail cavity 274 may be formed in the sliding section 273 to reduce friction between the sliding section 273 and the channel 253, so as to facilitate the movement of the slider 25 along the sliding section 273 in the direction indicated by the arrow B1 to push the pivoting plate 211, thereby increasing the sensitivity of the substrate tilting and lifting mechanism, and further satisfying the requirement of the atomic force microscope for scanning the surface and the side surface of the sample with different depths.
As shown in fig. 2, in the present embodiment, the pivot assembly 21 further includes: the pivoting base 213 is fixedly connected with the bottom wall 13, the pivoting plate 211 is pivotally connected with the pivoting base 213 through the pivoting shaft 212, and by adjusting the height of the pivoting base 213, the position where the free end (not shown) of the pivoting plate abuts against the stage top plate 11 in the direction indicated by the arrow B1 can be controlled, and by changing the abutting position, when the slider 25 abuts against the pivoting plate 211 to rotate around the pivoting shaft 212 in the direction indicated by the arrow B1, the pivoting plate 211 rotates by the same angle to abut against the stage top plate 11, the stage top plate 11 rotates by different angles around the pivoting shaft 112, and at this time, the stage top plate 11 lifts a scanner (not shown) such as a flat-plate scanner to a preset angle α, so as to drive the sample to be inclined to different angles α, thereby meeting the requirement of the atomic force microscope for scanning the surfaces and side surfaces with different depths.
As shown in fig. 2 and 3, the lower surface of the stage top plate 11 is provided with a first limiting member 111 for limiting the pivot plate 211 from pushing the stage top plate 11. The stage top plate 112 further comprises a top plate free end 113 and a hinge end 114 connected to the hinge shaft 112, the hinge end 114 is provided with a measuring ruler 14 for measuring a precise angle α of the stage top plate 11 for lifting a scanner (not shown), such as a flatbed scanner (i.e. an inclination angle α of a sample held by the scanner), the chamber 10 accommodates a first elastic member 24 for elastically connecting the top plate free end 113 and the bottom wall 13, and a second stopper 23 for telescopically connecting the top plate free end 113 and the bottom wall 13. A driving mechanism (not shown) drives the screw rod 26 to push the sliding block 25 to move in the direction indicated by the arrow B1 to push the pivot plate 211, the pivot plate 211 rotates to push the stage top plate 11 around the pivot shaft 212, and the position of the first limiting member 111 on the lower surface (not shown) of the stage top plate 11 is changed, so that the pivot plate 211 is controlled to push the stage top plate 11 to lift the scanner (not shown) such as a flatbed scanner around the hinge shaft 112 within the range of the preset angle α, and at the same time, the first elastic member 24 applies a force in the direction indicated by the arrow C to the stage top plate 11 when the stage top plate 11 starts to rotate around the hinge shaft 112 to enable the stage top plate 11 to rotate smoothly, so as to reduce the vibration generated when the stage top plate 11 rotates, thereby maintaining the stability of the scanner (not shown) such as a flatbed scanner supported by the stage top plate 11, and further ensuring the stability of the turntable (not shown) supporting the sample. Meanwhile, two second limiting members 23 which can be retracted and extended can be further disposed in the chamber 10, and the second limiting members 23 are connected to the free end 113 and the bottom wall 13 of the top plate, so that the critical value of the extension length of the second limiting members 23 can limit the critical value of the rotation angle α of the top plate 11 of the carrier (i.e., the inclination angle α of the sample supported by the scanner) around the hinge shaft 112, thereby achieving the stability and safety of the substrate tilting and lifting mechanism, and meeting the requirement of the atomic force microscope for scanning the surface and the side surface of the sample with different depths.
Referring to fig. 3 and 4, in this embodiment, for example, a driving mechanism (not shown) drives the lead screw 26 to push the slider 25 in the direction indicated by arrow B1, so as to drive the slider 25 to move from the initial position 25a to the position indicated by arrow B1, while the second elastic member 28 is in a compressed state, and simultaneously the slider 25 pushes the pivot plate 211 to rotate around the pivot shaft 212, the pivot plate 211 rotates around the pivot shaft 212 from the initial position to the position indicated by 211B in the direction indicated by arrow F and pushes the stage top plate 11, the stage top plate 11 rotates around the hinge shaft 112 from the initial position 11a to the position indicated by arrow H, while the first elastic member 24 is in an expanded state, and the second limiting member 23 extends, and the rotation angle α of the stage top plate 11 at this time can be known by the measuring tape 14, and can be adjusted as required by the foregoing process to meet the requirements of the afm scanning of sample surfaces and side surfaces with different depths. When the second limiting member 23 reaches the threshold of extending or the movement of the pivoting plate 211 is limited by the first limiting member 111, the top plate 11 of the stage reaches the maximum value of the rotation angle α. When the work of the atomic force microscope for scanning the sample is finished, at this time, the stepping motor 222 drives the screw rod 26 to perform a spiral motion in the direction indicated by the arrow B2 to be away from the slider 25, and at the same time, the first elastic member 23 applies a force in the direction indicated by the arrow C to the stage top plate 11 to urge the stage top plate 11 to rotate back to the initial position 11a, the stage top plate 11 urges the pivot plate 211 to rotate back to the position of 211a in the direction indicated by the arrow F, and at the same time, the second elastic member 28 in a compressed state applies a force in the direction indicated by the arrow B2 to the slider 25 to urge the slider 25 to return to the initial position 25a along the slide rail 27, so that the resetting of a scanner (not shown) such as a flat-plate scanner is completed, and a preparation is made for the next time of scanning of the sample surface and the side surface by the atomic force microscope, thereby satisfying the requirement of the atomic force microscope for scanning the sample surfaces and the side surfaces with different depths.
The above list of details is only for the practical implementation of the present invention, and they are not intended to limit the scope of the present invention, and all equivalent implementations or modifications that do not depart from the technical spirit of the present invention should be included in the scope of the present invention.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. A substrate tilting and lifting mechanism is disposed under a scanner for lifting the scanner,
it is characterized by comprising:
the device comprises a carrier main body with a cavity, a pivoting component arranged in the cavity and a driving mechanism;
the stage main body includes: the hinged shaft is hinged with the carrier top plate;
the pivot assembly includes: a pivot shaft, a pivot plate pivoted with the pivot shaft;
the cavity is used for accommodating a sliding rail which is arranged along a first direction and is abutted against the pivot plate, and a sliding block which is movably connected with the sliding rail, the sliding block is connected with a screw rod which is arranged along the first direction in a sliding mode, the driving mechanism drives the screw rod to move along the first direction so as to push the sliding block to move along the first direction, the sliding block moves along the first direction to push the pivot plate to rotate around the pivot shaft so as to push the carrier top plate to rotate around the hinge shaft, and the carrier top plate and a horizontal line form a certain angle so as to lift the scanner.
2. The substrate tilt lift mechanism of claim 1, wherein the slide rail comprises: the sliding mechanism comprises a tail end limiting seat and a head end limiting seat for limiting the sliding block to move along a first direction, and a sliding section for connecting the head end limiting seat and the tail end limiting seat, wherein the tail end limiting seat is abutted against the pivoting plate.
3. The substrate tilting mechanism according to claim 2, wherein the upper surface of the sliding section is extended away from the upper surface of the sliding section in the second direction to form an extended edge for holding the slider.
4. The substrate tilt lift mechanism of claim 3, wherein the slider defines a channel contoured to the slider section.
5. The substrate tilt and lift mechanism of claim 4, wherein a lower surface of the carrier top plate is provided with a first stop for limiting the pushing of the carrier top plate by the pivot plate.
6. The substrate tilt lift mechanism of claim 5, wherein the stage top plate comprises: the free end of the top plate and the hinged end connected with the hinged shaft;
the hinged end is provided with a measuring scale for measuring the inclination angle.
7. The substrate tilt lift mechanism of claim 6, wherein the stage body further comprises: a horizontally disposed bottom wall;
the chamber accommodates a first elastic member elastically connecting the free end of the top plate and the bottom wall.
8. The substrate tilt lift mechanism of claim 7, wherein a second stop member connecting the free end and the bottom wall of the top plate is received in the chamber, the second stop member limiting the lift of the carrier top plate.
9. The substrate tilt lift mechanism of claim 7, wherein the pivot assembly further comprises: and the pivoting plate is hinged with the pivoting seat through the pivoting shaft.
10. The substrate tilt lift mechanism of claim 7, wherein the chamber houses a second resilient member that resiliently couples the slide rail and the slider, the second resilient member restricting movement of the slider in the first direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221072155.2U CN217466966U (en) | 2022-05-07 | 2022-05-07 | Substrate tilting and lifting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221072155.2U CN217466966U (en) | 2022-05-07 | 2022-05-07 | Substrate tilting and lifting mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217466966U true CN217466966U (en) | 2022-09-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221072155.2U Active CN217466966U (en) | 2022-05-07 | 2022-05-07 | Substrate tilting and lifting mechanism |
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| Country | Link |
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| CN (1) | CN217466966U (en) |
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- 2022-05-07 CN CN202221072155.2U patent/CN217466966U/en active Active
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