CN217369522U - Silicon ingot pickling device for polycrystalline silicon purification treatment - Google Patents
Silicon ingot pickling device for polycrystalline silicon purification treatment Download PDFInfo
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Abstract
Description
技术领域technical field
本实用新型涉及多晶硅提纯处理相关技术领域,具体为一种多晶硅提纯处理用硅锭酸洗装置。The utility model relates to the technical field related to the purification and treatment of polycrystalline silicon, in particular to a silicon ingot pickling device for the purification and treatment of polycrystalline silicon.
背景技术Background technique
硅片是电子产品制造中重要的原材料,硅片由硅锭制成,而硅锭则由多晶硅铸造而成,为了提高硅片的质量需要对多晶硅进行清洗以提高纯度,清洗液为酸液,这一过程通过酸洗装置完成。Silicon wafers are an important raw material in the manufacture of electronic products. Silicon wafers are made of silicon ingots, and silicon ingots are cast from polysilicon. In order to improve the quality of silicon wafers, polysilicon needs to be cleaned to improve the purity. The cleaning solution is an acid solution. This process is done by pickling unit.
但是,一般的多晶硅提纯处理用硅锭酸洗装置,不便于对酸洗好的多晶硅进行卸料,而且不容易充分的让酸液对多晶硅进行酸洗,同时不方便对清洗框内的多晶硅进行沥水,因此,我们提出一种多晶硅提纯处理用硅锭酸洗装置,以便于解决上述中提出的问题。However, the common silicon ingot pickling device used for the purification of polysilicon is inconvenient for unloading the pickled polysilicon, and it is not easy to sufficiently pickle the polysilicon with the acid solution, and at the same time, it is inconvenient to clean the polysilicon in the cleaning frame. Therefore, we propose a silicon ingot pickling device for polycrystalline silicon purification treatment, so as to solve the problems raised above.
实用新型内容Utility model content
本实用新型的目的在于提供一种多晶硅提纯处理用硅锭酸洗装置,以解决上述背景技术中提出的大多数多晶硅提纯处理用硅锭酸洗装置,不便于对酸洗好的多晶硅进行卸料,而且不容易充分的让酸液对多晶硅进行酸洗,同时不方便对清洗框内的多晶硅进行沥水的问题。The purpose of this utility model is to provide a silicon ingot pickling device for polycrystalline silicon purification treatment, in order to solve most of the polycrystalline silicon purification treatment silicon ingot pickling devices proposed in the above-mentioned background technology, it is inconvenient to unload the pickled polycrystalline silicon , and it is not easy to sufficiently allow the acid solution to pickle the polysilicon, and at the same time, it is inconvenient to drain the polysilicon in the cleaning frame.
为实现上述目的,本实用新型提供如下技术方案:一种多晶硅提纯处理用硅锭酸洗装置,包括直接放置在地面上的底板,且底板的左上端固定连接有清洗箱,并且清洗箱的后端螺栓连接有液压伸缩杆;In order to achieve the above purpose, the utility model provides the following technical solutions: a silicon ingot pickling device for polysilicon purification treatment, comprising a bottom plate directly placed on the ground, and a cleaning box is fixedly connected to the upper left end of the bottom plate, and the rear of the cleaning box is The end bolts are connected with hydraulic telescopic rods;
还包括:Also includes:
支撑块,所述支撑块呈等角度的镶嵌连接在清洗箱的中下端内壁,且清洗箱的内部嵌套连接有清洗框,并且清洗框的底端呈多孔状结构;a support block, the support block is inlaid and connected to the inner walls of the middle and lower ends of the cleaning box at an equal angle, and a cleaning frame is nested and connected inside the cleaning box, and the bottom end of the cleaning frame is in a porous structure;
搅拌机构,所述搅拌机构设置在清洗箱的上侧,且搅拌机构包括连接板、连接轴、搅拌杆、搅拌叶和第一电机,其中连接板的后端安装在液压伸缩杆的输出端;a stirring mechanism, the stirring mechanism is arranged on the upper side of the cleaning box, and the stirring mechanism includes a connecting plate, a connecting shaft, a stirring rod, a stirring blade and a first motor, wherein the rear end of the connecting plate is installed on the output end of the hydraulic telescopic rod;
密封板,所述密封板固定连接在清洗框的右壁上,且密封板的横截面呈弧形结构,所述密封板的右端中心位置一体化连接有转轴;a sealing plate, the sealing plate is fixedly connected to the right wall of the cleaning frame, and the cross section of the sealing plate is in an arc structure, and the center position of the right end of the sealing plate is integrally connected with a rotating shaft;
下料机构,所述下料机构设置在清洗箱的右侧,且下料机构包括连接件、螺纹杆、第二电机和引导杆,同时转轴转动连接在连接件左端。The blanking mechanism is arranged on the right side of the cleaning box, and the blanking mechanism includes a connecting piece, a threaded rod, a second motor and a guide rod, and the rotating shaft is rotatably connected to the left end of the connecting piece.
优选的,所述连接板的前端转动连接有连接轴,且连接轴的顶端安装有第一电机,并且连接轴的底端呈等角度的固定连接有搅拌杆,其中搅拌杆的上下两端均呈等间距的一体化连接有搅拌叶。Preferably, a connecting shaft is rotatably connected to the front end of the connecting plate, a first motor is installed on the top end of the connecting shaft, and a stirring rod is fixedly connected to the bottom end of the connecting shaft at an equal angle, wherein the upper and lower ends of the stirring rod are Mixing blades are integrally connected at equal intervals.
优选的,所述搅拌杆旋转轨迹的直径小于清洗框的内端直径,且搅拌杆通过连接板与清洗箱构成升降结构,并且清洗框右侧设置的转轴的右端安装有第三电机;Preferably, the diameter of the rotation track of the stirring rod is smaller than the diameter of the inner end of the cleaning frame, and the stirring rod forms a lifting structure with the cleaning box through the connecting plate, and a third motor is installed on the right end of the rotating shaft provided on the right side of the cleaning frame;
其中,所述清洗框通过密封板以及转轴在连接件的左侧呈旋转结构,且连接件的上端中心位置螺纹连接有螺纹杆,并且螺纹杆的左端转动连接在清洗箱的右上端。The cleaning frame has a rotating structure on the left side of the connector through the sealing plate and the rotating shaft, and a threaded rod is threadedly connected to the center of the upper end of the connector, and the left end of the threaded rod is rotatably connected to the upper right end of the cleaning box.
优选的,所述螺纹杆的右端安装有第二电机,且引导杆关于螺纹杆的横向中轴线前后对称设置,所述引导杆的左端镶嵌连接在清洗箱的右上端;Preferably, a second motor is installed on the right end of the threaded rod, and the guide rod is symmetrically arranged in front and rear with respect to the transverse center axis of the threaded rod, and the left end of the guide rod is inlaid and connected to the upper right end of the cleaning box;
其中,所述引导杆的右端镶嵌连接在安装板的上端,且安装板固定连接在底板的右上端,同时清洗框通过连接件以及引导杆在螺纹杆上呈左右滑动运动。The right end of the guide rod is inlaid and connected to the upper end of the mounting plate, and the mounting plate is fixedly connected to the upper right end of the bottom plate, and the cleaning frame slides left and right on the threaded rod through the connecting piece and the guide rod.
与现有技术相比,本实用新型的有益效果是:该多晶硅提纯处理用硅锭酸洗装置,便于对酸洗好的多晶硅进行卸料,而且容易充分的让酸液对多晶硅进行酸洗,同时方便对清洗框内的多晶硅进行沥水;Compared with the prior art, the beneficial effect of the utility model is: the silicon ingot pickling device used for the purification of polysilicon is convenient for unloading the pickled polysilicon, and it is easy to sufficiently allow the acid solution to pickle the polysilicon, At the same time, it is convenient to drain the polysilicon in the cleaning frame;
1、设有下料机构,清洗框与螺纹杆的结构设计,使得螺纹杆转动时通过引导杆带动连接件向右端滑动,直至清洗框移出清洗箱的内部,清洗框与连接件的结构设计,使得转轴转动时让清洗框翻转,从而便于对酸洗好的多晶硅进行卸料;1. There is a feeding mechanism, the structural design of the cleaning frame and the threaded rod, so that when the threaded rod rotates, the guide rod drives the connecting piece to slide to the right end until the cleaning frame moves out of the cleaning box. The structural design of the cleaning frame and the connecting piece, When the rotating shaft rotates, the cleaning frame is turned over, so as to facilitate the unloading of the pickled polysilicon;
2、设有搅拌机构,搅拌杆与清洗箱的结构设计,使得液压伸缩杆工作时带动搅拌杆下降进入清洗框的内部,搅拌杆旋转轨迹的直径小于清洗框的内端直径,使得搅拌杆以及搅拌叶转动时对清洗框的内部进行搅拌,从而容易充分的让酸液对多晶硅进行酸洗;2. There is a stirring mechanism, and the structure design of the stirring rod and the cleaning box makes the hydraulic telescopic rod drive the stirring rod to descend into the interior of the cleaning frame. When the stirring blade rotates, the inside of the cleaning frame is stirred, so that it is easy to fully let the acid solution pickle the polysilicon;
3、设有支撑块和清洗框,支撑块呈等角度的镶嵌连接在清洗箱的中下端内壁,通过支撑块让清洗框的底端不与清洗箱的底端相接触,使得清洗箱内的液体排出时,让清洗框内部多余的液体通过其底端呈多孔状结构排出进行沥水。3. There is a support block and a cleaning frame. The support block is inlaid and connected to the inner wall of the middle and lower ends of the cleaning box at an equal angle. When the liquid is drained, let the excess liquid inside the cleaning frame drain through the porous structure at the bottom for draining.
附图说明Description of drawings
图1为本实用新型正视剖面结构示意图;Fig. 1 is the front view sectional structure schematic diagram of the utility model;
图2为本实用新型支撑块与清洗框连接右侧视剖面结构示意图;Figure 2 is a schematic cross-sectional view of the right side view of the connection between the support block and the cleaning frame of the present invention;
图3为本实用新型引导杆与连接件连接俯视剖面结构示意图;Fig. 3 is a top-view cross-sectional structural schematic diagram of the connection between the guide rod and the connecting piece of the present invention;
图4为本实用新型密封板与清洗框连接俯视剖面结构示意图。FIG. 4 is a top-view cross-sectional structural schematic diagram of the connection between the sealing plate and the cleaning frame of the present invention.
图中:1、底板;2、清洗箱;3、支撑块;4、清洗框;5、搅拌机构;501、连接板;502、连接轴;503、搅拌杆;504、搅拌叶;505、第一电机;6、液压伸缩杆;7、密封板;8、转轴;9、下料机构;901、连接件;902、螺纹杆;903、第二电机;904、引导杆;10、第三电机;11、安装板。In the figure: 1, the bottom plate; 2, the cleaning box; 3, the support block; 4, the cleaning frame; 5, the stirring mechanism; 501, the connecting plate; 502, the connecting shaft; 503, the stirring rod; 504, the stirring blade; 1. Motor; 6. Hydraulic telescopic rod; 7. Sealing plate; 8. Rotating shaft; 9. Feeding mechanism; 901, connecting piece; 902, threaded rod; 903, second motor; 904, guide rod; 10, third motor ; 11. Mounting plate.
具体实施方式Detailed ways
下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本实用新型一部分实施例,而不是全部的实施例,基于本实用新型中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本实用新型保护的范围。The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the implementations. For example, based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
请参阅图1-4,本实用新型提供一种技术方案:一种多晶硅提纯处理用硅锭酸洗装置,包括底板1、清洗箱2、支撑块3、清洗框4、搅拌机构5、液压伸缩杆6、密封板7、转轴8、下料机构9、第三电机10和安装板11,在使用该多晶硅提纯处理用硅锭酸洗装置时,结合图1、图2和图4,通过连接板501、连接轴502、搅拌杆503、搅拌叶504和第一电机505组成的结构对多晶硅以及酸液进行搅拌,由于搅拌杆503旋转轨迹的直径小于清洗框4的内端直径,搅拌杆503通过连接板501与清洗箱2构成升降结构,因此当清洗框4位于支撑块3的上端时,让横截面呈弧形结构的密封板7卡合连接在清洗箱2的右壁上,对清洗箱2的右壁进行密封;1-4, the present utility model provides a technical solution: a silicon ingot pickling device for polysilicon purification treatment, comprising a
将多晶硅以及酸液通过清洗箱2的上端加入到清洗框4的内部后,液压伸缩杆6工作时带动连接板501下降,直至搅拌杆503完全进入清洗框4的内部,第一电机505工作时带动连接轴502在连接板501的前端转动,连接轴502转动时带动呈等角度设置的搅拌杆503转动,搅拌杆503转动时带动呈等间距设置的搅拌叶504旋转,让搅拌杆503以及搅拌叶504对清洗框4内部的多晶硅进行搅拌,让酸液与多晶硅充分的接触,从而容易充分的让酸液对多晶硅进行酸洗;After the polysilicon and the acid solution are added to the interior of the
结合图1和图2,酸洗完成后通过液压伸缩杆6工作带动连接板501上升,直至搅拌杆503的下端远离清洗框4的内部,由于支撑块3呈等角度的镶嵌连接在清洗箱2的中下端内壁,清洗框4的底端呈多孔状结构,因此通过呈等角度设置的支撑块3让清洗框4的底端处于悬空状态,清洗箱2的底端固定连接有排液管,排液管上的控制阀开启时将清洗箱2内的液体排出,通过支撑块3以及清洗框4底端的多孔状结构让清洗框4内部多余的液体排出,从而方便对清洗框4内的多晶硅进行沥水;1 and 2, after the pickling is completed, the hydraulic
结合图1、图3和图4,通过连接件901、螺纹杆902、第二电机903和引导杆904组成的结构对清洗框4内的多晶硅进行卸料,由于清洗框4通过密封板7以及转轴8在连接件901的左侧呈旋转结构,引导杆904关于螺纹杆902的横向中轴线前后对称设置,清洗框4通过连接件901以及引导杆904在螺纹杆902上呈左右滑动运动,因此第二电机903工作时带动螺纹杆902转动;1, 3 and 4, the polysilicon in the
连接件901通过前后对称设置的引导杆904在螺纹杆902上向右端移动,直至清洗框4完全移出清洗箱2的内部,第三电机10工作时带动转轴8在连接件901上转动,转轴8转动时带动密封板7旋转,让清洗框4翻转将其内部酸洗后的多晶硅倒出,从而便于对酸洗好的多晶硅进行卸料,这就是该多晶硅提纯处理用硅锭酸洗装置的工作原理。The connecting
本实用新型使用到的标准零件均可以从市场上购买,异形件根据说明书的和附图的记载均可以进行订制,各个零件的具体连接方式均采用现有技术中成熟的螺栓、铆钉、焊接等常规手段,机械、零件和设备均采用现有技术中,常规的型号,加上电路连接采用现有技术中常规的连接方式,在此不再详述,本说明书中未作详细描述的内容属于本领域专业技术人员公知的现有技术。The standard parts used in the utility model can be purchased from the market, the special-shaped parts can be customized according to the description in the specification and the drawings, and the specific connection method of each part adopts the mature bolts, rivets and welding in the prior art. and other conventional means, the machinery, parts and equipment all adopt the conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here, and the content that is not described in detail in this specification. It belongs to the prior art known to those skilled in the art.
尽管参照前述实施例对本实用新型进行了详细的说明,对于本领域的技术人员来说,其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换,凡在本实用新型的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本实用新型的保护范围之内。Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, it is still possible to modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Within the spirit and principle of the present utility model, any modifications, equivalent replacements, improvements, etc. made shall be included within the protection scope of the present utility model.
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| CN117303372A (en) * | 2023-10-11 | 2023-12-29 | 曲靖阳光新能源股份有限公司 | Pickling equipment of polycrystalline silicon material |
| CN117303372B (en) * | 2023-10-11 | 2024-04-09 | 曲靖阳光新能源股份有限公司 | Pickling equipment of polycrystalline silicon material |
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Effective date of registration: 20250519 Address after: 441000 Baojiawan Community, Gucheng Economic Development Zone, Xiangyang City, Hubei Province (Residence Application) Patentee after: Geely Silicon Valley (Gucheng) Technology Co.,Ltd. Country or region after: China Address before: Public Service Center, Xiangcheng Town Industrial Park, Xiangyun County, Dali Bai Autonomous Prefecture, Yunnan Province, 672199 Patentee before: Dali Lixin silicon material Co.,Ltd. Country or region before: China |