CN217361531U

CN217361531U - Wafer end effector

Info

Publication number: CN217361531U
Application number: CN202220975100.6U
Authority: CN
Inventors: 陈曙光; 林坚; 王彭
Original assignee: Honghu Suzhou Semiconductor Technology Co ltd
Current assignee: Honghu Suzhou Semiconductor Technology Co ltd
Priority date: 2022-04-26
Filing date: 2022-04-26
Publication date: 2022-09-02
Anticipated expiration: 2032-04-26

Abstract

The utility model relates to a wafer end effector, including the motor drive base, first feeding mechanism and second feeding mechanism, the drive end at motor drive base top is connected the setting with the synchronous belt drive mount pad drive of top, the drive end along X axle positive direction one side loops through first multiaxis arm mechanism and first keysets on the synchronous belt drive mount pad and is connected the setting with first feeding mechanism drive, the drive end along X axle negative direction one side loops through second multiaxis arm mechanism and second keysets on the synchronous belt drive mount pad and is connected the setting with first feeding mechanism drive. The utility model relates to a wafer end effector, through the structural setting of motor drive base, hold-in range drive mount pad, multiaxis mechanical arm mechanism and feeding mechanism, can make things convenient for feeding mechanism to realize multiaxis motion for feeding mechanism's motion flexibility is stronger; the feeding mechanism is used for transferring the wafer, so that the stability of wafer transfer can be improved.

Description

Wafer end effector

Technical Field

The utility model relates to a wafer processing correlation technique field especially relates to a wafer end effector.

Background

A wafer is a very expensive product and must be protected from damage during the placement process. The wafer is generally transferred manually or in a transshipment mode through a carrier plate, the manual mode has low processing efficiency, and the carrier plate mode has poor stability in the transfer process of the wafer.

In view of the above-mentioned drawbacks, the present designer is actively making research and innovation to create a wafer end effector, which has industrial application value.

SUMMERY OF THE UTILITY MODEL

In order to solve the above technical problem, an object of the present invention is to provide a wafer end effector.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a wafer end effector comprises a motor driving base, a first feeding mechanism and a second feeding mechanism, wherein a driving end at the top of the motor driving base is in driving connection with a synchronous belt driving mounting seat above the motor driving base, a driving end on one side of the synchronous belt driving mounting seat along the positive direction of an X axis is in driving connection with the first feeding mechanism sequentially through a first multi-axis mechanical arm mechanism and a first adapter plate, and a driving end on one side of the synchronous belt driving mounting seat along the negative direction of the X axis is in driving connection with the first feeding mechanism sequentially through the second multi-axis mechanical arm mechanism and a second adapter plate; the first multi-axis mechanical arm mechanism sequentially comprises a first mechanical arm and a second mechanical arm from bottom to top, a driving end on one side of a synchronous belt driving mounting seat along the positive direction of an X axis is in driving connection with a first end of the first mechanical arm above the synchronous belt, a driving end on the second end of the first mechanical arm is in driving connection with a first end of the second mechanical arm above the synchronous belt driving mounting seat, a driving end on the second end of the second mechanical arm is in driving connection with a first end of a first transfer plate above the second mechanical arm, and a second end of the first transfer plate is connected with a first feeding mechanism; the second multi-axis mechanical arm mechanism sequentially comprises a third mechanical arm and a fourth mechanical arm from bottom to top, the synchronous belt drive mounting seat is connected with the first end of the third mechanical arm above along the drive end on one side of the X-axis negative direction in a drive mode, the drive end of the second end of the third mechanical arm is connected with the first end of the fourth mechanical arm above in a drive mode, the drive end of the second end of the fourth mechanical arm is connected with the first end of the second adapter plate above in a drive mode, and the second end of the second adapter plate is connected with the second feeding mechanism.

As a further improvement of the utility model, the first feeding mechanism is positioned above the second feeding mechanism.

As a further improvement, first feeding mechanism or second feeding mechanism include the drive shell and place the board, the drive shell is installed and is being placed one side of board along Y axle positive direction, intermediate position in the drive shell is provided with push cylinder, push cylinder passes through the cylinder connecting rod along the drive end of Y axle negative direction one side and is connected the setting with the slurcam drive, the slurcam is connected with the push rod along Y axle positive direction one side, the push rod stretches out outside the drive shell and is connected with the ejector pad along one side of Y axle positive direction, it is provided with the first wafer dog of a plurality of to place one side along Y axle negative direction on the board, it is provided with a plurality of second wafer dog to place one side along Y axle positive direction on the board.

As a further improvement, the driving housing on the first feeding mechanism is installed on the placing plate, and the driving housing on the second feeding mechanism is installed on the bottom of the placing plate.

Borrow by above-mentioned scheme, the utility model discloses at least, have following advantage:

the utility model relates to a wafer end effector, through the structure setting of motor drive base, hold-in range drive mount pad, multiaxis arm mechanism and feeding mechanism, can make things convenient for feeding mechanism to realize multiaxis motion for feeding mechanism's motion flexibility is stronger; the feeding mechanism is used for transferring the wafer, so that the stability of wafer transfer can be improved.

The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a schematic structural diagram of a wafer end effector according to the present invention;

FIG. 2 is a front view of FIG. 1;

FIG. 3 is a schematic structural view of the first feeding mechanism and the second feeding mechanism in FIG. 1 or FIG. 2;

fig. 4 is a schematic view of the internal structure of the first feeding mechanism in fig. 3.

In the drawings, the meanings of the reference numerals are as follows.

1 motor drive base 2 synchronous belt drive mounting seat

3 first arm 4 second arm

5 first transfer plate 6 third robot arm

7 fourth mechanical arm 8 first feeding mechanism

9 second adapter plate 10 second feeding mechanism

11 drive housing 12 push cylinder

13 cylinder connecting rod 14 pushing plate

15 first wafer stop 16 push rod

17 push block 18 placing plate

19 second wafer stop 20 wafer

Detailed Description

The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

In order to make the technical solution of the present invention better understood, the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.

Examples

As shown in figures 1 to 4 of the drawings,

a wafer end effector comprises a motor driving base 1, a first feeding mechanism 8 and a second feeding mechanism 10, wherein a driving end on the top of the motor driving base 1 is in driving connection with a synchronous belt driving mounting seat 2 above the motor driving base, a driving end on one side of the synchronous belt driving mounting seat 2 along the positive direction of an X axis is in driving connection with the first feeding mechanism 8 through a first multi-axis mechanical arm mechanism and a first adapter plate 5 in sequence, and a driving end on one side of the synchronous belt driving mounting seat 2 along the negative direction of the X axis is in driving connection with the first feeding mechanism 8 through the second multi-axis mechanical arm mechanism and a second adapter plate 9 in sequence; the first multi-axis mechanical arm mechanism sequentially comprises a first mechanical arm 3 and a second mechanical arm 4 from bottom to top, a driving end on one side of a synchronous belt driving mounting seat 2 along the positive direction of an X axis is in driving connection with a first end of the first mechanical arm 3 above, a driving end on a second end of the first mechanical arm 3 is in driving connection with a first end of the second mechanical arm 4 above, a driving end on a second end of the second mechanical arm 4 is in driving connection with a first end of a first transfer plate 5 above, and a second end of the first transfer plate 5 is connected with a first feeding mechanism 8; the second multi-axis mechanical arm mechanism sequentially comprises a third mechanical arm 6 and a fourth mechanical arm 7 from bottom to top, the synchronous belt drive mounting base 2 is connected with the first end of the third mechanical arm 6 above along the drive end on one side of the X-axis negative direction, the drive end of the second end of the third mechanical arm is connected with the first end of the fourth mechanical arm 7 above, the drive end of the second end of the fourth mechanical arm 7 is connected with the first end of the second adapter plate 9 above, and the second end of the second adapter plate 9 is connected with the second feeding mechanism 10.

Preferably, the first feeding mechanism 8 is located at a position above the second feeding mechanism 10.

Preferably, the first feeding mechanism 8 or the second feeding mechanism 10 includes a driving housing 11 and a placing plate 18, the driving housing 11 is installed on one side of the placing plate 18 along the Y-axis negative direction, a pushing cylinder 12 is disposed in the middle position of the driving housing 11, the pushing cylinder 12 is connected with a pushing plate 14 through a cylinder connecting rod 13 along the driving end on one side of the Y-axis positive direction, the pushing plate 14 is connected with a pushing rod 16 along one side of the Y-axis positive direction, the pushing rod 16 extends out of the driving housing 11 along one side of the Y-axis positive direction and is connected with a pushing block 17, one side of the placing plate 18 along the Y-axis negative direction is provided with a plurality of first wafer stoppers 15, and one side of the placing plate 18 along the Y-axis positive direction is provided with a plurality of second wafer stoppers 19.

Preferably, the first feeding mechanism 8 and the second feeding mechanism 10 have the same structure and composition except that the driving housing 11 of the first feeding mechanism 8 is mounted on the placing plate 18, and the driving housing 11 of the second feeding mechanism 10 is mounted at the bottom of the placing plate 18.

The utility model relates to a wafer end effector, can drive hold-in range drive mount pad 2 through motor drive base 1 and carry out the rotation operation, can carry out the rotation operation to the multiaxis arm mechanism of top both sides respectively through hold-in range drive mount pad 2, first arm 3 can drive 4 rotation operations of second arm, second arm 4 can drive 8 rotation operations of first feeding mechanism through first keysets 5, and simultaneously, third arm 6 can drive 7 rotation operations of fourth arm, fourth arm 7 can drive 10 rotation operations of second feeding mechanism through second keysets 9. The multi-axis driving mechanism is a conventional driving connection structure in the field.

Wafer 20 shifts to placing board 18 on, can carry out preliminary location processing through placing first wafer dog 15 and second wafer dog 19 on the board 18 to put in place the propelling movement 17 propelling movement through the effect of promoting cylinder 12, cylinder connecting rod 13, catch plate 14 and push rod 16, carry out centre gripping through the propelling movement 17 to wafer 20 and handle, can improve the stability that wafer 20 shifted.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly referring to the number of technical features being grined. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it should be noted that, unless otherwise explicitly stated or limited, the terms "mounted," "connected" and "connected" are to be construed broadly, and may be, for example, a fixed connection, a detachable connection, or an integral connection: either mechanically or electrically: the terms may be directly connected or indirectly connected through an intermediate member, or may be a communication between two elements.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims

1. A wafer end effector is characterized by comprising a motor driving base (1), a first feeding mechanism (8) and a second feeding mechanism (10), wherein a driving end at the top of the motor driving base (1) is in driving connection with a synchronous belt driving mounting seat (2) above the motor driving base, a driving end on one side of the synchronous belt driving mounting seat (2) along the positive direction of an X axis sequentially passes through a first multi-axis mechanical arm mechanism and a first adapter plate (5) to be in driving connection with the first feeding mechanism (8), and a driving end on one side of the synchronous belt driving mounting seat (2) along the negative direction of the X axis sequentially passes through a second mechanical arm multi-axis mechanism and a second adapter plate (9) to be in driving connection with the first feeding mechanism (8); the first multi-axis mechanical arm mechanism sequentially comprises a first mechanical arm (3) and a second mechanical arm (4) from bottom to top, a driving end on one side of the synchronous belt driving mounting seat (2) along the positive direction of an X axis is in driving connection with a first end of the first mechanical arm (3) above, a driving end of a second end of the first mechanical arm (3) is in driving connection with a first end of the second mechanical arm (4) above, a driving end of a second end of the second mechanical arm (4) is in driving connection with a first end of a first transfer plate (5) above, and a second end of the first transfer plate (5) is connected with a first feeding mechanism (8); the multi-axis mechanical arm mechanism of second includes third arm (6) and fourth arm (7) from up in proper order down, hold-in range drive mount pad (2) are gone up and are connected the setting along the drive end of X axle negative direction one side and the first end drive of the third arm (6) of top, the drive end of third arm (6) second end is connected the setting with the first end drive of the fourth arm (7) of top, the drive end of fourth arm (7) second end is connected the setting with the first end drive of the second keysets (9) of top, the second end of second keysets (9) is connected with second feeding mechanism (10).

2. A wafer end effector as claimed in claim 1, characterized in that the first feeding mechanism (8) is located above the second feeding mechanism (10).

3. A wafer end effector as claimed in claim 1, wherein the first feed mechanism (8) or the second feed mechanism (10) includes a drive housing (11) and a placement plate (18), the drive housing (11) is mounted on one side of the placement plate (18) in a negative direction of a Y-axis, a push cylinder (12) is provided in an intermediate position in the drive housing (11), a drive end of the push cylinder (12) in one side of the positive direction of the Y-axis is drivingly connected to a push plate (14) via a cylinder connecting rod (13), the push plate (14) is connected to a push rod (16) in one side of the positive direction of the Y-axis, the push rod (16) extends out of the drive housing (11) in one side of the positive direction of the Y-axis and is connected to a push block (17), a plurality of first wafer stoppers (15) are provided on one side of the placement plate (18) in the negative direction of the Y-axis, and a plurality of second wafer stoppers (19) are arranged on one side of the placing plate (18) along the positive direction of the Y axis.

4. A wafer end effector in accordance with claim 3, wherein the driving housing (11) of the first feeding mechanism (8) is mounted on a placing plate (18), and the driving housing (11) of the second feeding mechanism (10) is mounted on the bottom of the placing plate (18).