CN217120916U - Sheet joint detection device and intelligent sorting system - Google Patents

Abstract

The utility model provides a sheet joint detection device and an intelligent sorting system, which belong to the field of silicon wafer detection, and comprise a detection flow line with adjustable space, a guide mechanism positioned at the front end of the detection flow line and a plurality of detection modules arranged along the detection flow line; the detection streamline is formed by sequentially arranging a plurality of streamline units with adjustable intervals, and the plurality of detection modules comprise a left edge collapsing module, a right edge collapsing module, a front edge collapsing module, a rear edge collapsing module, a chamfer angle collapsing module, a thickness detection module, a lower dirt detection module, an upper dirt detection module, a resistivity test module, an invisible crack module, a lower collapse module and an upper collapse module; the device of this application has integrateed multiple detection module, provides panel and leads in advance with specification adjustable streamline conveyor unit at the detection module to a plurality of streamline arrangements, and the application scope has been widened to the sheet of adaptable multiple specification, and the multiple detection module of modularization arrangement has reduced the cost, has improved efficiency, is convenient for relate to fields such as silicon chip, PCB of sheet product and popularize and apply.

Description

Sheet joint detection device and intelligent sorting system

Technical Field

The utility model belongs to the silicon chip detects and selects separately the field relates to continuous feeding technique, specifically discloses a detection device and intelligent sorting system are united to sheet.

Background

Silicon wafers are widely used as important industrial raw materials, and the quality of the silicon wafers needs to be strictly controlled before the silicon wafers are produced and shipped so as to ensure the quality of products such as solar cells, circuit boards and the like manufactured by the silicon wafers. The silicon wafer sorting machine is an automatic detection and sorting device integrating automation, measurement and visual flaw detection, is applied to the production flow of solar silicon wafers, and can measure and detect items such as thickness, TTV, line mark, resistivity, size, dirt, edge breakage, hidden crack and the like of original solar silicon wafers after being sliced and cleaned like a blanking sorting device and an intelligent silicon wafer sorting machine disclosed in the patent of my application (publication number CN112605010A), automatically sort the silicon wafers into different boxes according to quality grade requirements according to a sorting menu, fully meet the quality control requirements of silicon wafer use manufacturers, and is an indispensable link in production.

At present, in the detection process of a silicon wafer, the silicon wafer which just enters a main flow line needs to be straightened or guided, and then the silicon wafer is transmitted backwards through the main flow line for detection, and after the silicon wafer is straightened by adopting a guide wheel mechanism, the silicon wafer is conveyed backwards through a flow line unit. However, the distance between the current streamline units is not adjustable, and the sheets such as silicon wafers with different specifications cannot be flexibly adjusted, so that the application range of the sheet is limited, and the adjustment cost is increased.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model aims to provide a sheet joint detection device and intelligent sorting system, which can solve the problems.

The utility model provides a be suitable for detection device is united to sheet of many specifications, includes that the interval is adjustable detects the streamline, is located to detect the leading of streamline front end and just constructs and follow a plurality of detection modules that detect the streamline and set up. Detect the streamline and arrange in proper order by a plurality of interval adjustable streamline units and constitute, it is a plurality of it collapses the module, thickness detection module, dirty detection module down, goes up dirty detection module, resistivity test module, hidden module of splitting, the lower part that collapses the module and go up to collapse in the module or whole to detect the module including controlling collapsing the limit module, front and back and the chamfer.

Furthermore, each streamline unit comprises two streamline supports, a belt wheel set, a transmission belt, an interval adjusting set and a streamline motor set which are oppositely arranged; the bottoms of the two streamline supports which are oppositely arranged are connected to the distance adjusting group, the transmission belt is supported on the streamline supports through a belt pulley group, and the streamline motor group is in transmission connection with the belt pulley group so as to drive the belt to transmit; the interval adjustment group realizes the interval adjustment of two streamline supports which are oppositely arranged through manual or automatic adjustment, and the transmission of sheets with different specifications is realized.

Furthermore, the guide mechanism comprises guide units which are arranged in a bilateral symmetry manner, an adjusting unit which drives the two guide units to move in an opposite direction or in a reverse direction, and a guide bottom plate; the guide units on any side comprise guide wheel frames, guide wheel groups, guide belts and guide motors, the guide wheel groups, the guide belts and the guide motors are arranged at the top of the guide wheel frames, the guide belts are arranged along the conveying direction of the sheets, and the feeding upstream is arranged in an open manner, so that the distance between the front sections of the guide belts of the two guide units is gradually reduced along the conveying direction of the sheets; the adjusting unit comprises an adjusting driver and an adjusting transmission assembly, and the adjusting transmission assembly is connected with the bottoms of the two pilot units, so that the distance between the two pilot units and the whole unit is controlled through the adjusting driver.

Further, the left and right edge-collapsing module comprises left and right edge-collapsing detection units arranged on the left and right edge-collapsing rail seats, and the left and right edge-collapsing detection units are adjusted by the left and right edge-collapsing rail seats to adapt to the detection of sheets of different specifications.

Further, the front, rear and chamfer collapse module comprises a front and rear camera frame, a front and rear light source frame, a front and rear collapse light source, a chamfer collapse light source and a front and rear chamfer collapse camera; the front camera frame and the rear camera frame are arranged in parallel at intervals, the two lamp strips of the front and rear light sources are arranged between the front and rear camera frames and the front and rear light source frames in an opposite and obliquely upward light emitting manner, and the two chamfered light sources are arranged on the front and rear camera frames and the front and rear light source frames in an adjustable position and angle; the two front and rear chamfering camera bodies are arranged on the front and rear camera frame through the camera adaptor in adjustable positions and angles and used for collecting images of sheets conveyed below.

Furthermore, the thickness detection module comprises a thickness detection substrate, thickness detection units and thickness detection calibration units, wherein the number of the thickness detection calibration units is equal to that of the thickness detection units; a thickness detection streamline port is formed in the middle of the thickness detection substrate corresponding to the streamline unit, so that sheet conveying is facilitated; each thickness detection unit comprises two laser modules which are oppositely arranged above and below the thickness detection flow line port; each thickness detection calibration unit comprises a calibration sheet and a calibration driving module which are used for confirming and driving the calibration position.

Further, the lower dirt detection module is used for detecting the dirt condition of the lower surface of the sheet and comprises a lower dirt camera assembly, a lower dirt camera adjusting assembly, a lower dirt upright post, a lower dirt light source fixing piece and a lower dirt shading metal plate; the lower dirty camera assembly realizes the adjustment of the transverse and longitudinal spatial positions and angles through the lower dirty camera adjusting assembly; the middle part of the lower dirty light source arranged above the lower dirty camera component is provided with a lower dirty image acquisition window which is communicated up and down, so that image acquisition is facilitated.

Further, the upper dirty detection module is used for detecting the dirty condition of the upper surface of the sheet and comprises an upper dirty camera assembly, an upper dirty camera adjustment assembly, an upper dirty vertical frame, an upper dirty light source fixing piece and an upper dirty light shading plate; the upper dirty camera assembly is arranged on the upper part of the upper dirty vertical frame, and the horizontal and longitudinal spatial position and angle adjustment is realized through the upper dirty camera adjusting assembly; the upper dirty light source is arranged on an upper dirty vertical frame below the upper dirty camera component through an upper dirty light source fixing part, and upper dirty light shielding plates are arranged on two sides of the upper dirty light source; an upper dirty image acquisition window which is communicated up and down is arranged in the middle of the upper dirty light source, so that image acquisition can be conveniently carried out on the sheet material which is transmitted below the upper dirty light source.

Furthermore, the resistivity testing module comprises a resistivity testing support, a resistivity detection unit, a PN type detection unit, a temperature detection unit and a material sensing unit; the resistivity testing support comprises a resistance frame upright post, a resistance frame upper mounting plate and a resistance frame lower mounting plate which are arranged on the resistance frame upright post in an up-down mode, and two measuring heads of the resistivity testing support are oppositely arranged on the resistance frame upper mounting plate and the resistance frame lower mounting plate; the PN type detection unit and the temperature detection unit are arranged on the resistor frame mounting plate; the material sensing units are oppositely arranged on the resistor frame mounting plate and the resistor frame lower mounting plate and used for sensing whether the sheet material is in place or not.

Furthermore, the hidden crack module comprises a hidden crack bracket, a hidden crack camera adjusting seat, a hidden crack camera adapter plate, a hidden crack camera adjusting piece, a hidden crack camera, a hidden crack light source frame and a hidden crack window plate; the two concealed split cameras are symmetrically and adjustably mounted at two ends of the upper part of the concealed split support through a group of concealed split camera adapter plates, concealed split camera adjusting pieces and concealed split camera adjusting seats respectively; the hidden-splitting light source is supported by the hidden-splitting light source frame and arranged below the middle of the two hidden-splitting cameras, the hidden-splitting window plate is arranged above the hidden-splitting light source, and the light path of the hidden-splitting cameras acquires images of sheets transmitted below through the hidden-splitting window arranged in the middle of the hidden-splitting window plate.

The utility model also provides an intelligent sorting system, which comprises a blanking sorting device, a detection device and a feeding device, wherein the detection device adopts the sheet combined detection device suitable for multiple specifications; and a material type detection device and a fragment removing device are arranged between the feeding equipment and the detection equipment and are used for detecting the type of the silicon wafer and whether the silicon wafer is broken or not, and removing the broken silicon wafer to prevent the broken silicon wafer from flowing into the detection equipment.

Compared with the prior art, the beneficial effects of the utility model reside in that: the device of this application has integrateed multiple detection module, provides panel and leads in advance with specification adjustable streamline conveyor unit at the detection module to a plurality of streamline arrangements, and the application scope has been widened to the sheet of adaptable multiple specification, and the multiple detection module of modularization arrangement has reduced the cost, has improved efficiency, is convenient for relate to fields such as silicon chip, PCB of sheet product and popularize and apply.

Drawings

FIG. 1 is a schematic structural diagram of a sheet joint detection device;

2-4 are schematic views of different angles and examples of a streamline unit;

FIG. 5 is a schematic view of a pilot mechanism;

FIGS. 6 and 7 are schematic views of a left and right edge collapsing module;

FIGS. 8 and 9 are schematic views of a front-back and chamfer break module;

FIGS. 10-12 are schematic views of a thickness detection module;

FIGS. 13 and 14 are schematic views of the lower contamination detection module;

FIG. 15 is a schematic view of the upper contamination detection module;

FIG. 16 is a schematic diagram of a resistivity test module;

FIG. 17 is a schematic view of a subfissure module;

fig. 18 is a schematic diagram of an intelligent sorting system.

In the figure:

1100. a streamline unit; 1101. a drive belt; 1102. a streamline side plate; 1103. a side plate frame; 1104. a streamline end wheel; 1105. a streamline idler wheel set; 1106. a streamline driving wheel; 1107. a slide rail set; 1108. a limit stop block; 1109. a streamline motor; 1110. a coupling; 1111. a drive shaft; 1112. a bearing support; 1113. a material sensing sensor;

100. a guide mechanism; 110. a pilot unit; 111. a guide wheel frame; 112. a guide wheel group; 113. a guide belt; 114. a guide motor; 120. an adjustment unit; 121. adjusting the driver; 122. a timing belt assembly; 123. a slide rail assembly; 130. a guide bottom plate;

200. a left and right edge-collapsing module; 201. a left and right sliding bottom plate; 202. a left and right collapsing camera moving plate; 203. a left and right light source angle block; 204. a left-right camera adjusting plate; 205. the left and right camera is upwards pulled; 206. a left-right collapsed camera base; 207. left and right collapsing cameras; 208. a left and right light source adjusting bottom plate; 209. a left and right light source adapter plate; 210. a left and right light source seat; 211. left and right avalanche light sources; 221. right and left collapsing column seats; 222. left and right guide rail bottom plates; 223. the left and right slide rails; 224. the left and right tipping bases pull blocks; 225. the left and right tipping bases are horizontally adjusted;

300. front and back and chamfer collapse modules; 301. a front and a rear camera frames; 302. front and rear light source frames; 303. front and back collapse light sources; 304. chamfering the collapse light source; 305. front and back chamfer lens collapse cameras; 306. a camera adapter;

400. a thickness detection module; 401. a thickness detection substrate; 402. a thickness detection unit; 403. a thickness detection calibration unit; 404. a thickness flow line port; 405. a laser module; 406. calibrating the sheet; 407. calibrating the driving module; 408. laser mounting plate; 409. a thickness detection and adjustment block;

500. a lower contamination detection module; 501. a lower dirty camera assembly; 502. a lower dirty camera adjustment assembly; 503. a lower dirty upright post; 504. a lower dirty light source; 505. a lower dirty light source fixture; 506. a lower dirty shading metal plate; 507. a lower dirty image acquisition window;

600. an upper contamination detection module; 601. an upper dirty camera assembly; 602. an upper dirty camera adjustment assembly; 603. an upper dirty vertical frame; 604. an upper dirty light source; 605. an upper dirty light source fixing part; 606. an upper dirty shading plate; 607. a dirty image acquisition window;

700. a resistivity test module; 701. a resistivity test support; 7011. a resistor frame upright post; 7012. a resistance frame is provided with a panel; 7013. a lower mounting plate of the resistor frame; 702. a resistivity detection unit; 703. a PN type detection unit; 704. a temperature detection unit; 705. a material sensing unit;

800. a subfissure module; 801. a subfissure stent; 802. a concealed camera adjusting seat; 803. a concealed split camera adapter plate; 804. a hidden split camera adjustment; 805. a subfissure camera; 806. a subfissure light source; 807. a subfissure light source rack; 808. a hidden crack window panel; 8081. a subfissure window; 809. an auxiliary laser;

10000. blanking and sorting equipment;

20000. a detection device;

30000. feeding equipment;

40000. a material type detection device;

50000. piece removing devices.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be understood that "system", "device", "mechanism", "unit" and/or "module" as used in this specification is a method for distinguishing different components, elements, parts or assemblies at different levels. However, other words may be substituted by other expressions if they accomplish the same purpose.

Sheet joint detection device

A combined sheet inspection device for multiple formats, see fig. 1, the device comprising: the interval adjustable detects the streamline, is located the leading mechanism 100 that detects the streamline front end and follows a plurality of detection module that detect the streamline and set up.

Arrangement relation: the detection streamline is arranged in proper order by a plurality of interval adjustable streamline units 1100 and is constituteed, and is a plurality of detect the module including controlling the module 200 that bursts at the limit, around and the chamfer bursts at module 300, thickness detection module 400, dirty detection module 500 down, go up dirty detection module 600, resistivity test module 700, hidden module 800 that splits, the module that bursts at the lower surface and go up some or all in the module that bursts at the upper surface.

Referring to fig. 2 to 4, each of the streamline units 1100 includes two streamline supports, a pulley set, a driving belt 1101, a pitch adjustment set, and a streamline motor set, which are oppositely disposed; the bottoms of two streamline supports which are oppositely arranged are connected to the distance adjusting group, the transmission belt 1101 is supported on the streamline supports through a belt pulley group, and a streamline motor group is in transmission connection with the belt pulley group so as to drive the belt to transmit; the interval adjustment group realizes the interval adjustment of two streamline supports which are oppositely arranged through manual or automatic adjustment, and the transmission of sheets with different specifications is realized.

Further, a material induction sensor 1113 is also arranged on the streamline support.

Wherein, the streamline support includes the sideboard 1102 of streamline and L shape and puts up 1103, and every streamline sideboard 1102 is supported by at least one L shape sideboard 1103, and when being a plurality of sideboard boards 1103, offers the transmission through-hole on the sideboard of main drive for the support that runs through of the drive shaft of streamline motor group.

The belt pulley set comprises a streamline end wheel 1104, a streamline idler wheel set 1105 and a streamline driving wheel 1106, wherein the streamline end wheel 1104 is respectively arranged at two ends of the streamline side plate 1102, the streamline idler wheel set 1105 comprises a plurality of idler wheels, and the streamline idler wheel set 1105 and the streamline driving wheel 1106 are arranged in a W shape, so that the driving belt 1101 cannot sleeve the driving shaft 1111 of the streamline motor set, and the driving belt 1101 is convenient to rapidly replace;

wherein, interval adjustment group includes slide rail group 1107 and/or lead screw group, still includes limit stop 1108, and limit stop 1108 can guarantee to reach the plane degree between the streamline of adjustment when adjusting the position. For the case of manual adjustment, an adjusting hand wheel can also be included; for automatic adjustment, an adjusting motor and the like are also arranged.

The streamline motor set comprises a streamline motor 1109, a coupler 1110, a driving shaft 1111 and a bearing support 1112, wherein the driving shaft 1111 is connected with the streamline driving wheel 1106, so that the driving belt 1101 is driven to rotate to transmit materials.

Referring to fig. 5, the pilot mechanism 100 includes pilot units 110 symmetrically disposed left and right, an adjusting unit 120 driving the two pilot units 110 to move toward or away from each other, and a pilot base plate 130.

The guide unit 110 on any side comprises a guide wheel frame 111, a guide wheel set 112, a guide belt 113 and a guide motor 114, wherein the guide wheel set 112, the guide belt 113 and the guide motor 114 are installed at the top position of the guide wheel frame 111, the guide belt 113 is arranged along the conveying direction of the sheet, and the feeding upstream is arranged in an open manner, so that the distance between the front sections of the guide belts 113 of the two guide units 110 is gradually reduced along the conveying direction of the sheet.

The adjusting unit 120 includes an adjusting driver 121 and an adjusting transmission assembly connected to the bottom of the two pilot units 110, so that the distance between the two pilot units and the whole unit is controlled by the adjusting driver 121.

The adjustment driver 121 may be a hand wheel, an electric motor in an automatic manner, an air cylinder, or the like. The adjusting transmission assembly can adopt the matching of a synchronous belt assembly 122 and a sliding rail assembly 123, and also can adopt the combination of a screw rod and a sliding rail slider.

Referring to fig. 6 and 7, the left and right edge-collapsing module 200 includes two left and right edge-collapsing detection units disposed on left and right rail-collapsing seats, and the distance between the two left and right edge-collapsing detection units is adjusted by the left and right rail-collapsing seats so as to be suitable for detecting sheets of different specifications.

Specifically, the left and right edge breakage detection unit includes a left and right edge breakage camera module and a left and right edge breakage light source module, which are disposed on the left and right slide base plate 201.

The left and right lens-flipping camera assembly comprises a left and right lens-flipping camera moving plate 202, a left and right lens-flipping light source angle block 203, a left and right lens-flipping camera adjusting plate 204, a left and right lens-flipping camera up-drawing plate 205, a left and right lens-flipping camera seat 206, and a left and right lens-flipping camera 207. The left and right lens-equipped slide cameras 207 are arranged on the left and right slide bases 201 in a position and angle-adjustable manner.

The left and right light source assemblies comprise a left and right light source adjusting base plate 208, a left and right light source adapter plate 209, a left and right light source seat 210 and a left and right light source 211. The left and right light sources 211 are point light sources, and are mounted on the left and right sliding base plate 201 through a left and right light source adjusting base plate 208, a left and right light source adapter plate 209, and a left and right light source base 210, and are arranged to intersect with the light path of the left and right cameras 207 in the same plane.

The left and right slide-collapsing rail seats comprise two left and right slide-collapsing column seats 221, a left and right guide rail bottom plate 222, two left and right slide-collapsing guide rails 223, a left and right slide-collapsing base pull block 224 and a left and right slide-collapsing base horizontal adjusting block 225. The two left and right sliding bottom plates 201 slide on the left and right guide rail bottom plates 222 through the two left and right collapsing guide rails 223, so that the distance between the two left and right collapsing detection units is adjusted, and the positioning is realized through the left and right collapsing base pulling blocks 224 and the left and right collapsing base horizontal adjusting blocks 225.

Referring to fig. 8 and 9, the front-rear and chamfer collapse module 300 includes a front-rear camera frame 301, a front-rear light source frame 302, a front-rear collapse light source 303, a chamfer collapse light source 304, and a front-rear chamfer collapse camera 305; the front and rear camera frames 301 and the front and rear light source frames 302 are arranged in parallel at intervals, two light bars of the front and rear light sources 303 are arranged between the front and rear camera frames 301 and the front and rear light source frames 302 in a manner of being opposite and emitting light upwards in an inclined manner, and the two chamfered light sources 304 are arranged on the front and rear camera frames 301 and the front and rear light source frames 302 in a position and angle adjustable manner; the two front and rear chamfering camera 305 are arranged on the front and rear camera frame 301 through the camera adaptor 306 with adjustable positions and angles, and are used for collecting images of sheets conveyed below.

The chamfered edge light sources 304 are arranged above the front and rear edge light sources 303, and the two chamfered edge light sources 304 are arranged in a left-right opposite manner.

The camera adapter 306 is formed by partially or completely combining a camera base, a camera adapter plate, a camera adjusting plate, a sliding groove plate, a sliding block, a sliding module, an angle module and the like, and an angle scale is arranged at the forwardmost adapter.

Referring to fig. 10-12, the thickness detection module 400 includes a thickness detection substrate 401, thickness detection units 402, and thickness detection calibration units 403 equal in number to the thickness detection units 402; a thickness detection streamline port 404 is formed in the middle of the thickness detection substrate 401 corresponding to the streamline unit 1100, so that sheet conveying is facilitated; each thickness detection unit 402 comprises two laser modules 405 which are oppositely arranged above and below the thickness detection flow line port 404; each thickness calibration unit 403 includes a calibration sheet 406 and a calibration driving module 407 for confirming and driving the calibration position.

The calibration sheet 406 is used for positioning the origin position during detection on the silicon wafer, and the calibration sheet 406 is located between the laser modules 405 which are arranged oppositely up and down. The calibration driving module 407 is used for being in transmission connection with the calibration sheet 406 and can drive the calibration sheet 406 to move, so that the calibration sheet 406 can move from an initial position to a calibration position. In this way, independent calibration of each thickness detection unit 402 can be completed.

A plurality of sets of thickness inspection units 402, in one example, three sets, two sets for one side and one set for one side, are provided on both sides of the thickness inspection substrate 401. After detection, taking the average value of the three points as the thickness value of the final sheet.

In one example, the laser module 405 is mounted to the thickness test substrate 401 by a laser mounting plate 408. A plurality of thickness detection adjusting blocks 409 are further disposed on the thickness detection substrate 401 for adjusting and positioning the required components on the substrate 401.

Bottom plate and strengthening rib piece are fixed through thickness to examine the bottom of base plate 401 at thickness, improve overall stability. Of course, the thickness detection bottom plate can be not used, and can be directly arranged on a machine table large plate.

Referring to fig. 13 and 14, the lower contamination detection module 500 is used for detecting the contamination of the lower surface of the sheet, and includes a lower contamination camera assembly 501, a lower contamination camera adjustment assembly 502, a lower contamination upright 503, a lower contamination light source 504, a lower contamination light source fixing member 505, and a lower contamination light shielding metal plate 506; the lower dirty camera assembly 501 achieves lateral and longitudinal spatial position and angle adjustment through the lower dirty camera adjustment assembly 502; a lower dirty image acquisition window 507 which is vertically communicated is arranged in the middle of the lower dirty light source 504 above the lower dirty camera component 501, so that image acquisition is facilitated.

Referring to fig. 15, the smudge detecting module 600 is used for detecting the smudge condition on the upper surface of the sheet, and includes an upper smudge camera assembly 601, an upper smudge camera adjusting assembly 602, an upper smudge stand 603, an upper smudge light source 604, an upper smudge light source fixing member 605 and an upper smudge light shielding plate 606; the upper dirty camera assembly 601 is mounted on the upper portion of the upper dirty vertical frame 603, and the horizontal and vertical spatial position and angle adjustment is realized through the upper dirty camera adjusting assembly 602; an upper dirty light source 604 is arranged on an upper dirty vertical frame 603 below the upper dirty camera component 601 through an upper dirty light source fixing part 605, and upper dirty light shielding plates 606 are arranged on two sides of the upper dirty light source 604; an upper dirty image acquisition window 607 which is through up and down is arranged in the middle of the upper dirty light source 604, so that images of the sheet material which is transmitted below the upper dirty light source 604 can be acquired conveniently.

In one example, the lower contamination detection module 500 and the upper contamination detection module 600 are used to detect contamination on the upper and lower surfaces of the silicon wafer to determine whether the silicon wafer meets the corresponding cleanliness standard. The lower dirty light source 504 and the upper dirty light source 604 each include a light emitting element and a lamp housing. Light emitting elements, such as light emitting diodes, LED light banks, etc., are located within the lamp housing. Therefore, inside the lampshade, light rays emitted by the light-emitting element are in a large-angle diffuse reflection state, and the diffusely reflected radiation further reaches the camera and the surface of the silicon wafer through a gap of the lampshade, namely the lower dirty image acquisition window 507/the upper dirty image acquisition window 607, so that the contrast of a sheet material, namely a silicon wafer crystal structure, can be reduced, and the silicon wafer can be uniformly illuminated in the width direction.

Referring to fig. 16, the resistivity test module 700 includes a resistivity test bracket 701, a resistivity detection unit 702, a PN type detection unit 703, a temperature detection unit 704, and a material sensing unit 705; the resistivity testing support 701 comprises a resistance frame upright column 7011, a resistance frame mounting plate 7012 and a resistance frame lower mounting plate 7013 which are arranged vertically on the resistance frame upright column 7011, and two measuring heads of the resistivity testing support 701 are oppositely arranged on the resistance frame mounting plate 7012 and the resistance frame lower mounting plate 7013; the PN type detection unit 703 and the temperature detection unit 704 are arranged on the resistor frame mounting plate 7012; the material sensing unit 705 is oppositely arranged on the upper resistor rack mounting plate 7012 and the lower resistor rack mounting plate 7013 and is used for sensing whether the sheet is in place or not.

Referring to fig. 17, the hidden crack module 800 includes a hidden crack bracket 801, a hidden crack camera adjusting seat 802, a hidden crack camera adapter plate 803, a hidden crack camera adjusting piece 804, a hidden crack camera 805, a hidden crack light source 806, a hidden crack light source holder 807, and a hidden crack window plate 808; the two hidden split cameras 805 are symmetrically and adjustably mounted at two ends of the upper part of the hidden split bracket 801 through a group of hidden split camera adapter plates 803, hidden split camera adjusting pieces 804 and hidden split camera adjusting seats 802 respectively; the hidden crack light source 806 is supported by a hidden crack light source frame 807 and is arranged below the middle of the two hidden crack cameras 805, the hidden crack window plate 808 is arranged above the hidden crack light source 806, and the light path of the hidden crack cameras 805 collects images of sheets transmitted below through the hidden crack window 8081 arranged in the middle of the hidden crack window plate 808.

An auxiliary laser 809 is further disposed at the hidden split camera adapter plate 803 or the hidden split camera adjuster 804, and is used for positioning during adjustment or detection.

An angle scale and an invisible split pointer are further arranged on the invisible split camera adapter plate 803 and are used for adjusting the angle of the image acquisition light path.

Intelligent sorting system

Referring to fig. 18, the intelligent sorting system includes a discharging sorting apparatus 10000, a detecting apparatus 20000, and a feeding apparatus 30000. The detection device 20000 adopts the aforementioned sheet combined detection device suitable for multiple specifications.

Further, a material type detection device 40000 and a fragment removing device 50000 are arranged between the feeding device 30000 and the detection device 20000 and used for detecting the type of the silicon wafer and whether the silicon wafer is broken or not, removing the broken silicon wafer and preventing the broken silicon wafer from flowing into the detection device 20000.

The blanking sorting equipment 10000 of the system adopts a non-contact adsorption type slicing device, so that the sorting flow sheet efficiency is improved; the detection equipment 20000 integrates multiple detections, including but not limited to measurement and detection of items such as thickness, TTV, line marks, resistivity, size, dirt, edge breakage, subfissure and the like, and can increase and decrease detection items in a modularized manner according to actual needs; the fragments are removed in advance through the fragment removing device 50000, so that the overall capacity of the system is improved.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims (12)

1. A sheet joint detection device suitable for multiple specifications is characterized in that: the device comprises a detection flow line with adjustable space, a pilot mechanism (100) positioned at the front end of the detection flow line and a plurality of detection modules arranged along the detection flow line;

the detection streamline is arranged in proper order by a plurality of interval adjustable streamline units (1100) and constitutes, and is a plurality of it collapses module (200), front and back and chamfer including controlling to detect the module and collapses module (300), thickness and detect module (400), dirty detection module (500) down, go up dirty detection module (600), resistivity test module (700), hidden module (800) of splitting, the lower part that collapses the module and go up to collapse the module partially or whole.

2. The sheet joint detection apparatus according to claim 1, characterized in that: each streamline unit (1100) comprises two streamline supports, a pulley set, a transmission belt (1101), an interval adjusting set and a streamline motor set which are oppositely arranged; the bottoms of two streamline supports which are oppositely arranged are connected to the distance adjusting group, the transmission belt (1101) is supported on the streamline supports through a belt pulley group, and a streamline motor group is in transmission connection with the belt pulley group so as to drive the belt to transmit; the interval adjustment group realizes the interval adjustment of two streamline supports which are oppositely arranged through manual or automatic adjustment, and the transmission of sheets with different specifications is realized.

3. The sheet joint detection apparatus according to claim 2, wherein: and a material induction sensor (1113) is also arranged on the streamline support.

4. The sheet joint detection apparatus according to claim 1, characterized in that: the guide mechanism (100) comprises guide units (110) which are arranged in a bilateral symmetry mode, an adjusting unit (120) which drives the two guide units (110) to move towards or away from each other and a guide bottom plate (130);

the guide units (110) on any side comprise guide wheel frames (111), guide wheel sets (112), guide belts (113) and guide motors (114), the guide wheel sets (112), the guide belts (113) and the guide motors (114) are installed at the top of the guide wheel frames (111), the guide belts (113) are arranged along the conveying direction of the sheets, and the upstream of feeding is arranged in an open manner, so that the distance between the front sections of the guide belts (113) of the two guide units (110) is gradually reduced along the conveying direction of the sheets;

the adjusting unit (120) comprises an adjusting driver (121) and an adjusting transmission assembly, wherein the adjusting transmission assembly is connected with the bottoms of the two pilot units (110), so that the distance between the two pilot units and the whole unit is controlled through the adjusting driver (121).

5. The joint detection device of claim 1, wherein: the left and right edge-collapsing module (200) comprises left and right edge-collapsing detection units arranged on left and right edge-collapsing rail seats, and the left and right edge-collapsing detection units are adjusted by the left and right edge-collapsing rail seats to adapt to the detection of sheets of different specifications.

6. The joint detection device of claim 1, wherein: the front, back and chamfer collapse module (300) comprises a front and back camera frame (301), a front and back light source frame (302), a front and back collapse light source (303), a chamfer collapse light source (304) and a front and back chamfer collapse camera (305); the front camera frame and the rear camera frame (301) and the front light source frame and the rear light source frame (302) are arranged in parallel at intervals, two lamp strips of the front and rear light sources (303) are arranged between the front and rear camera frames (301) and the front and rear light source frames (302) and emit light obliquely upwards, and the two chamfered light sources (304) are arranged on the front and rear camera frames (301) and the front and rear light source frames (302) in an adjustable position and angle; the two front and rear chamfering camera collapse machines (305) are arranged on the front and rear camera frame (301) through camera adapters (306) in positions and angles adjustable and used for collecting images of sheets conveyed below.

7. The joint detection device of claim 1, wherein: the thickness detection module (400) comprises a thickness detection substrate (401), thickness detection units (402) and thickness detection calibration units (403) with the same number as the thickness detection units (402); a thickness flow detection line port (404) is formed in the middle of the thickness detection substrate (401) corresponding to the flow line unit (1100), so that sheet conveying is facilitated; each thickness detection unit (402) comprises two laser modules (405) which are oppositely arranged above and below the thickness detection flow line port (404); each thickness calibration unit (403) comprises a calibration sheet (406) and a calibration driving module (407) for confirming and driving the calibration position.

8. The joint detection device of claim 1, wherein: the lower dirt detection module (500) is used for detecting the dirt condition of the lower surface of the sheet and comprises a lower dirt camera component (501), a lower dirt camera adjusting component (502), a lower dirt upright post (503), a lower dirt light source (504), a lower dirt light source fixing component (505) and a lower dirt shading metal plate (506); the lower dirty camera assembly (501) realizes the spatial position and angle adjustment in the transverse direction and the longitudinal direction through the lower dirty camera adjusting assembly (502); the middle part of a lower dirty light source (504) arranged above the lower dirty camera component (501) is provided with a lower dirty image acquisition window (507) which is communicated up and down, so that image acquisition is facilitated.

9. The joint detection device of claim 1, wherein: the upper dirty detection module (600) is used for detecting the dirty condition of the upper surface of the sheet and comprises an upper dirty camera component (601), an upper dirty camera adjusting component (602), an upper dirty vertical frame (603), an upper dirty light source (604), an upper dirty light source fixing component (605) and an upper dirty light shielding plate (606); the upper dirty camera assembly (601) is mounted at the upper part of the upper dirty vertical frame (603), and the horizontal and longitudinal spatial position and angle adjustment is realized through the upper dirty camera adjusting assembly (602); an upper dirty light source (604) is arranged on an upper dirty vertical frame (603) below the upper dirty camera component (601) through an upper dirty light source fixing piece (605), and upper dirty light shielding plates (606) are arranged on two sides of the upper dirty light source (604); an upper dirty image acquisition window (607) which is communicated up and down is arranged in the middle of the upper dirty light source (604), so that images of the sheet material which is conveyed below the upper dirty light source (604) can be acquired conveniently.

10. The joint detection device of claim 1, wherein: the resistivity testing module (700) comprises a resistivity testing support (701), a resistivity detection unit (702), a PN type detection unit (703), a temperature detection unit (704) and a material sensing unit (705); the resistivity testing support (701) comprises a resistance frame upright post (7011), a resistance frame mounting plate (7012) and a resistance frame lower mounting plate (7013), wherein the resistance frame mounting plate (7012) and the resistance frame lower mounting plate (7013) are arranged on the resistance frame upright post (7011) in an up-down mode, and two measuring heads of the resistivity testing support (701) are oppositely arranged on the resistance frame mounting plate (7012) and the resistance frame lower mounting plate (7013); the PN type detection unit (703) and the temperature detection unit (704) are arranged on the resistor frame mounting plate (7012); the material sensing unit (705) is oppositely arranged on the resistor frame mounting plate (7012) and the resistor frame lower mounting plate (7013) and used for sensing whether the sheet is in place or not.

11. The joint detection device of claim 1, wherein: the hidden crack module (800) comprises a hidden crack bracket (801), a hidden crack camera adjusting seat (802), a hidden crack camera adapter plate (803), a hidden crack camera adjusting piece (804), a hidden crack camera (805), a hidden crack light source (806), a hidden crack light source frame (807) and a hidden crack view window plate (808); the two hidden split cameras (805) are symmetrically and adjustably mounted at two ends of the upper part of the hidden split support (801) through a group of hidden split camera adapter plates (803), hidden split camera adjusting pieces (804) and hidden split camera adjusting seats (802) respectively; the hidden crack light source (806) is supported by a hidden crack light source frame (807) and is arranged below the middle of the two hidden crack cameras (805), the hidden crack window plate (808) is arranged above the hidden crack light source (806), and the light path of the hidden crack cameras (805) collects images of sheets transmitted below through a hidden crack window (8081) formed in the middle of the hidden crack window plate (808).

12. An intelligent sorting system, characterized in that: the sorting system comprises a blanking sorting device (10000), a detection device (20000) and a feeding device (30000), wherein the detection device (20000) adopts the combined detection device for the sheets with multiple specifications, which is disclosed by any one of claims 1-11; and a material type detection device (40000) and a fragment removing device (50000) are arranged between the feeding equipment (30000) and the detection equipment (20000) and are used for detecting the type of the silicon wafer and whether the silicon wafer is broken or not, removing the broken silicon wafer and preventing the broken silicon wafer from flowing into the detection equipment (20000).

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