CN217104060U - Optical coating uniformity adjusting baffle - Google Patents
Optical coating uniformity adjusting baffle Download PDFInfo
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- CN217104060U CN217104060U CN202123441208.1U CN202123441208U CN217104060U CN 217104060 U CN217104060 U CN 217104060U CN 202123441208 U CN202123441208 U CN 202123441208U CN 217104060 U CN217104060 U CN 217104060U
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Abstract
The utility model discloses an optical coating uniformity adjusting baffle, which comprises a plurality of correcting baffles and a plurality of sub-baffles with the same structural shape; the sub-baffles are distributed at intervals in the circumferential direction; the correction baffle is positioned between the sub baffles; the angular width of the correction baffle is smaller than that of the sub-baffles; the sub-baffles are fixedly arranged, and the movable arrangement of the baffles is corrected. The utility model discloses at the coating film in-process, according to the material that the in-process used, on keeping the basis of dividing the baffle, carry out the interconversion through revising the baffle, guarantee that the rete thickness of various materials satisfies the homogeneity requirement to the uniformity of rete thickness is guaranteed to effective control the deviation of rete thickness on the same circumference.
Description
Technical Field
The utility model belongs to the technical field of the coating film baffle, concretely relates to optics coating film homogeneity adjustment baffle.
Background
Various optical thin film devices have become increasingly important in the optoelectronics industry, and digital photography, image display, fiber optic communication, laser technology, ultraviolet and infrared technology are all indiscernible from corresponding optical thin film devices. The vacuum coating process is a main technical approach for manufacturing optical films at present. Improving the uniformity of the film thickness of the film coating equipment in the production process of the film device is an important measure for ensuring the production efficiency and the product quality.
The method for improving the uniformity is to install a uniformity correction baffle. A correction baffle is arranged in a coating machine for production aiming at different coating materials. When different materials are made, different baffle plates are switched alternately, the radial thickness distribution of the film layer in the coating fixture is improved, as shown in figure 3, the coated workpiece fixture rotates for a circle, and each point on the fixture rotates for a circle along the circumference where the point is located. In the process, the thickness of a film layer deposited on a plated workpiece without evaporation materials is not increased when the film layer passes through the whole baffle plate. Without the shield of the baffle, the evaporated material is deposited on the workpiece and the film thickness increases.
The method is effective under the condition of not high requirement on the error of the film thickness, but is not good when the requirement on the error of the film thickness is strict.
In fact, even if the film forming rate is stable, the film forming rate is not the same at every point of the circumference when the workpiece rotates circularly, the workpiece cannot rotate for an integral number of circles within the plating time of each film, and when the number of circles is limited, the film thickness on the same circle has deviation, which affects the uniformity of the film thickness. The workpiece holder is rotated fast enough to rotate enough turns during the coating cycle to reduce the error caused by rotating a non-integer number of turns, but too fast rotation is not desirable for large devices. Reducing the evaporation rate is also a solution to reduce such errors, but this increases the coating production time and reduces the production efficiency.
The principle of evaporation coating is as follows:
the physical process of evaporation comprises the following steps: evaporating or sublimating the deposition material into gaseous particles → rapidly conveying the gaseous particles from the evaporation source to the surface of the substrate → adhering the gaseous particles to the surface of the substrate for nucleation and growth to form a solid film → reconstructing atoms of the film or generating chemical bonding;
putting the substrate into a vacuum chamber, heating the film material by methods of resistance, electron beams, laser and the like, evaporating or sublimating the film material, and gasifying the film material into particles (atoms, molecules or atomic groups) with certain energy (0.1-0.3 eV). The gaseous particles are conveyed to the substrate in a linear motion without collision basically, one part of the particles reaching the surface of the substrate is reflected, the other part of the particles is adsorbed on the substrate and subjected to surface diffusion, two-dimensional collision is generated between deposited atoms, clusters are formed, and some particles may be evaporated after staying on the surface for a short time. The particle clusters continuously collide with the diffusion particles, or adsorb single particles, or emit single particles. The process is repeated, when the number of the aggregated particles exceeds a certain critical value, the aggregated particles become stable nuclei, the aggregated particles continue to adsorb and diffuse the particles to grow gradually, and finally, the adjacent stable nuclei are contacted and combined to form a continuous film.
SUMMERY OF THE UTILITY MODEL
To the problem that the above-mentioned background art provided, the utility model aims at: aims to provide an optical coating uniformity adjusting baffle.
In order to realize the technical purpose, the utility model discloses a technical scheme as follows:
an optical coating uniformity adjusting baffle comprises a plurality of correction baffles and a plurality of sub-baffles with the same structural shape;
the sub baffles are distributed at intervals in the circumferential direction;
the correcting baffle is positioned between the sub baffles;
the angular width of the correction baffle is smaller than that of the sub-baffles;
the sub-baffle is fixedly arranged, and the correction baffle is movably arranged.
Further defined, the sub baffles are uniformly distributed in the circumferential direction.
Further defined, the sub baffles are non-uniformly distributed in the circumferential direction.
The utility model also provides a method for adjusting the coating uniformity by using the optical coating uniformity adjusting baffle, which comprises the following steps,
s1, selecting a coating material with the best coating uniformity as an optimal coating material from the coating materials required to be used;
s2, fixedly mounting the sub-baffles corresponding to the optimal coating materials at intervals of fixed or indefinite circumferential angles in the circumferential direction;
s3, when a coating material with poor coating uniformity is used for optical coating, a movably arranged correction baffle is added between the baffle plates, so that the blocking area of the evaporation particles is increased;
and S4, when a coating material with poorer coating uniformity is used for optical coating, additionally adding a correction baffle between the separating baffles, thereby increasing the blocking area of the evaporated particles again.
The utility model has the advantages that:
1. in the coating process, the baffles are corrected to switch each other on the basis of keeping the baffles according to the materials used in the process, so that the film thicknesses of various materials meet the requirement of uniformity, the deviation of the film thicknesses on the same circumference is effectively controlled, and the consistency of the film thicknesses is ensured.
Drawings
The present invention can be further illustrated by the non-limiting examples given in the accompanying drawings;
FIG. 1 is a schematic structural view of a sub-baffle and a correction baffle in an embodiment of an optical coating uniformity adjusting baffle of the present invention;
FIG. 2 is a schematic structural view of an embodiment of an optical coating uniformity adjusting baffle according to the present invention, in which only a splitter plate is used;
FIG. 3 is a schematic structural diagram of a conventional uniformity correction method;
the main element symbols are as follows:
a sub baffle 1 and a correction baffle 2.
Detailed Description
In order to make the present invention better understood by those skilled in the art, the technical solutions of the present invention are further described below with reference to the accompanying drawings and examples.
As shown in fig. 1-3, the baffle for adjusting uniformity of optical coating of the present invention comprises a plurality of correction baffles 2 and a plurality of sub-baffles 1 with the same structure and shape;
the sub-baffles 1 are distributed at intervals in the circumferential direction;
the correction baffle 2 is positioned between the sub-baffles 1;
the angular width of the correction baffle 2 is smaller than that of the sub-baffles 1;
the sub-baffle 1 is fixedly arranged, and the correction baffle 2 is movably arranged.
Preferably, the partial baffles 1 are uniformly distributed in the circumferential direction.
Preferably, the partial baffles 1 are non-uniformly distributed in the circumferential direction.
In this embodiment:
the improvement of the coating uniformity of the utility model is verified through two installation modes, the first installation mode is a distributed installation mode provided by the utility model, as follows, a plurality of baffles 1 with the same structural shape are uniformly distributed under the clamp and shield the clamp to a certain extent; the second installation mode is a traditional mode, namely a whole baffle is fixedly installed, in the figure 3, A is the whole baffle, B is a clamp, C is a vacuum coating machine, and D is a vacuum chamber;
the specific comparison process is as follows,
taking a plane fixture as an example,
establishing two plane systems, wherein one coordinate system is fixed with a coating machine box body, the other coordinate system is fixed with a clamp turntable, the planes of the two systems are overlapped and are vertical to a clamp rotating shaft, a point is positioned on the rotating shaft, the x axis and the y axis of the two coordinate systems are overlapped when a certain layer of film is evaporated, for a certain point K on the clamp, the angular width of a baffle plate corresponding to the circumference of the point is 2phi, the initial position of the point K is (r, -phi) in the fixed coordinate system, when the coating process is finished, the position of the point K in the fixed coordinate system is (r, phi), and the rotating angle of the clamp in the coating process is:
2npKi+2phi
n is an integer, and the resulting film thickness is the same for all points at an angle of 2npKi, but the film thickness is not increased for K points at an angle of 2phi, in which case the film thickness is less for K points than for other points,
the difference in thickness is:
Δd＝R*2*phi/Ω，
wherein R is a film forming rate, Ω is a jig rotation angular velocity,
if the width of the baffle is divided into a plurality of parts, such as m parts, that is, a first installation mode is adopted, and a plurality of baffle plates 1 with the same structural shape are uniformly distributed under the clamp, the film thickness error caused by non-integer circumferential corners is considered as follows according to the extreme condition:
the error is reduced.
The utility model also provides a method for adjusting the coating uniformity of the optical coating uniformity adjusting baffle, which comprises the following steps,
s1, selecting a coating material with the best coating uniformity as an optimal coating material from the coating materials required to be used;
s2, fixedly mounting the sub baffles 1 corresponding to the optimal coating materials at intervals of fixed or irregular circumferential angles in the circumferential direction;
s3, when a coating material with poor coating uniformity is used for optical coating, a movably arranged correction baffle 2 is added between the baffle plates 1, so that the blocking area of evaporated particles is increased;
s4, when optical coating is carried out by using a coating material with poorer coating uniformity, a correction baffle 2 is additionally added between the separating baffles 1, so that the blocking area of the evaporated particles is increased again.
In the embodiment, one of the coating materials to be used is selected as the optimal coating material, the sub-baffles 1 corresponding to the optimal coating material have the smallest angular width, the sub-baffles 1 are uniformly and symmetrically arranged on the circumference, and the shapes of the sub-baffles 1 are optimized through experiments, so that the uniformity meets the requirement to be met;
for the coating material with poor coating uniformity, the uniformity is poorer than the uniformity of the optimal coating material when the sub-baffle 1 is not provided, under the condition of meeting the coating uniformity, the angular width corresponding to the baffle is wider than the baffle of the optimal coating material, therefore, the shielding width is increased through the correcting baffle 2, when the uniformity correction of the poor coating material is carried out, the sub-baffle 1 of the optimal coating material is kept, a movable correcting baffle 2 is additionally arranged, the initial angular width of the correcting baffle 2 is equal to the difference between the angular width corresponding to the baffle of the poor coating material and the angular width of the optimal coating material, the position of the correcting baffle is positioned in a certain space of the optimal coating material corresponding to the sub-baffle 1, the installation position of the correcting baffle 2 is selected according to specific conditions, then the shape of the correcting baffle 2 is optimized according to the experimental result, and the uniformity of the poor coating material meets the specified requirements.
When a coating material with poorer coating uniformity is used for optical coating, the finished sub-baffles 1 and the finished correction baffles 2 are reserved, and the correction baffles 2 are additionally added between the sub-baffles 1, so that the principle is the same as that of the optical coating material, and the process is analogized in the future, and is not repeated.
Therefore, in the coating process, the correction baffle 2 is switched with each other on the basis of keeping the sub-baffle 1 according to the used materials, so that the film thicknesses of various materials meet the requirement of uniformity, and the deviation of the film thicknesses on the same circumference is effectively controlled.
The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (3)
1. The utility model provides an optical coating homogeneity adjustment baffle which characterized in that: comprises a plurality of correction baffles (2) and a plurality of sub baffles (1) with the same structural shape;
the sub-baffles (1) are distributed at intervals in the circumferential direction;
the correcting baffle plates (2) are positioned between the sub baffle plates (1);
the angular width of the correction baffle (2) is smaller than that of the sub-baffles (1);
the sub-baffle (1) is fixedly arranged, and the correction baffle (2) is movably arranged.
2. The optical coating uniformity adjusting baffle according to claim 1, wherein: the sub-baffles (1) are uniformly distributed in the circumferential direction.
3. The optical coating uniformity adjusting baffle plate of claim 1, wherein: the sub baffles (1) are non-uniformly distributed in the circumferential direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123441208.1U CN217104060U (en) | 2021-12-31 | 2021-12-31 | Optical coating uniformity adjusting baffle |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123441208.1U CN217104060U (en) | 2021-12-31 | 2021-12-31 | Optical coating uniformity adjusting baffle |
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| Publication Number | Publication Date |
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| CN217104060U true CN217104060U (en) | 2022-08-02 |
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| CN202123441208.1U Active CN217104060U (en) | 2021-12-31 | 2021-12-31 | Optical coating uniformity adjusting baffle |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114481036A (en) * | 2022-01-19 | 2022-05-13 | 安徽光智科技有限公司 | Crucible baffle for coating film |
-
2021
- 2021-12-31 CN CN202123441208.1U patent/CN217104060U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114481036A (en) * | 2022-01-19 | 2022-05-13 | 安徽光智科技有限公司 | Crucible baffle for coating film |
| CN114481036B (en) * | 2022-01-19 | 2023-12-05 | 安徽光智科技有限公司 | Crucible baffle for coating film |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230809 Address after: Unit 102, Building 1, No. 9 Hualing Street, Suzhou Industrial Park, Suzhou Area, China (Jiangsu) Pilot Free Trade Zone, Suzhou City, Jiangsu Province, 215000 Patentee after: Suzhou Linghui Photoelectric Technology Co.,Ltd. Address before: Building 6, 1566 Xinyang Road, Fengxian District, Shanghai, 201413 Patentee before: SHANGHAI NEW INDUSTRIES OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right |